JPH0750208B2 - Optical fiber array and method of manufacturing optical fiber array - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Outline] A method for manufacturing an optical fiber array, in which a plurality of parallel V grooves are formed on a substrate, and optical fiber strands are permanently fixed in the V grooves with high precision, A heating element made of a high-resistance substance is vapor-deposited on the V-groove with a low-melting metal adhered on the heating element, and the optical fiber element wire having the fusion-metal deposited on the outer circumference is aligned with the V-groove to form a holding plate made of glass or the like. With placing and pressing,
Since a low melting point metal can be melted and fused and fixed by applying a voltage to the heating element and heat generated from the heating element, long-term reliability can be maintained.

[Industrial application field]

The present invention relates to a method for manufacturing an optical fiber array in which an optical fiber element wire is permanently fixed to a V groove formed on a substrate by metal fusion.

In recent years, due to the remarkable progress of optical fibers, optical fiber arrays that have aligned them are used to improve the packaging density of optical components and to realize optical components such as optical switches and optical couplers in which multiple optical waveguides are formed. It is indispensable and demand is expected to increase further in the future. Also in the field of optical signal processing, there is a tendency to improve the processing capacity by performing parallel processing that makes use of the characteristics of light, so the emergence of optical fiber arrays used for these terminals that can maintain reliability over the long term. Is strongly requested.

[Conventional technology]

FIG. 2 is a diagram for explaining a conventional method of manufacturing an optical fiber array, in which FIG. 2 (a) is a front view, FIG. 2 (b) is a plan view, and FIG.
Is a perspective view.

In the figure, a plurality of parallel V-grooves 2 (two are shown in the drawing) are formed on a substrate 1 made of silicon (Si) or the like. Then, the coating of the end portion of the optical fiber core wire 4 to be aligned with the V groove 2 is peeled off by a predetermined dimension to expose the optical fiber element wire 5, and the exposed optical fiber element wire 5 is aligned with the V groove 2. After that, while the pressing plate 6 made of glass or the like is placed and pressed on the optical fiber element wire 5, the adhesive 3 made of synthetic resin or the like is poured between the substrate 1 and the pressing plate 6 to bond them. It is fixed.

[Problems to be solved by the invention]

In the above-mentioned conventional optical fiber array, since it takes a long time (generally 30 minutes to 1 hour) to solidify the adhesive, it is easy to cause a positional shift or a secular change due to temperature change, and long-term reliability can be maintained. There was a problem that it did not exist.

[Means for solving problems]

The present invention solves the above problems and provides an optical fiber array capable of maintaining long-term reliability by metal fusion bonding.

That is, a plurality of parallel V grooves are formed on the substrate. A heating element made of a high resistance material is vapor-deposited in the V groove, and a low melting point metal is attached to the heating element. The V-groove is provided with an optical fiber element wire having a fused metal vapor-deposited on its outer periphery aligned, and a holding plate is placed on the optical fiber element wire, and then a voltage is applied to the heating element to generate the heating element. This is solved by melting the low melting point metal by the heat generated from the fiber and fixing the optical fiber element wire to the V groove by fusion.

[Action]

In the method of manufacturing an optical fiber array according to the present invention, a heating element made of a high resistance material is vapor-deposited in a V groove formed on a substrate, and the V groove having a low melting point metal adhered to the heating element is fused to the outer periphery. After aligning the optical fiber element wires on which metal is vapor-deposited and placing a holding plate on the optical fiber element wires, a voltage is applied to the heating element, and the low melting point metal is generated by the heat generated from the heating element. Since it is melted and fixed by fusion, it is not affected by the ambient temperature and has little secular change, so good reliability can be maintained.

〔Example〕

FIG. 1 is a diagram for explaining an embodiment of the present invention, in which FIG. 1 (a) is a front view, FIG. 1 (b) is a perspective view of an essential part, and FIG. Are denoted by the same reference numerals.

In the figure, a plurality of (two in the drawing) V-grooves 2 are formed in parallel on a substrate 1 made of silicon (Si) or the like.
High resistance material such as nickel chrome (Ni-Cr) in the groove 2
A heating element 7 made of, for example, is evaporated, and a low melting point metal 8 made of solder or the like is attached to the surface of the heating element 7 by plating or the like. Then, the coating of the end portion of the optical fiber core wire 4 to be aligned with the V groove 2 is peeled off and removed by a predetermined size, and the fused metal 9 made of metal such as gold (Au) is formed on the exposed surface of the optical fiber element wire 5. Is formed by vapor deposition (when depositing the fusion metal 9, nickel chrome or the like is vapor-deposited on the base beforehand), and after aligning with the V-groove 2, the holding plate 6 made of glass or the like is attached to the optical fiber strand. When a voltage VE is applied to the heating element 7 vapor-deposited in the V-shaped groove 2 while being placed on the heating element 5 as shown in FIG. 1 (c), a current I flows through the heating element 7 to generate heat. The low melting point metal 8 adhered to the heating element 7 is melted by the heat and adheres to the fusion metal 9 of the optical fiber element wire 5. A fiber array can be realized.

In this embodiment, the heating element 7 is made of nickel chrome (Ni-
Not only nickel chrome explained using Cr) but also other high resistance substance may be used.

〔The invention's effect〕

As will be apparent from the above description, according to the present invention, since it is not affected by the ambient temperature and has little change over time, it is extremely effective in maintaining long-term reliability.

[Brief description of drawings]

FIG. 1 is a diagram for explaining one embodiment of the present invention, in which FIG. 1 (a) is a front view, FIG. 1 (b) is a perspective view of a main part, FIG. 3A and 3B are diagrams illustrating a method for manufacturing a fiber array, in which FIG. 1A is a front view, FIG.
Is a perspective view. In the figure, 1 is a substrate, 2 is a V groove, 3 is an adhesive, 4 is an optical fiber core wire, 5 is an optical fiber element wire, 6 is a holding plate, 7 is a heating element, 8 is a low melting point metal, and 9 is fusion bonding. Metal, respectively.

Claims (2)

[Claims] 1. An optical fiber array comprising a plurality of parallel V-grooves on a substrate, and optical fiber strands aligned in the V-grooves, wherein a heating element formed in the V-grooves and the V-grooves. An optical fiber array comprising: a low melting point metal attached inside the heating element, and an optical fiber element wire aligned on the V groove and having a fusion metal attached to the outer periphery. 2. A plurality of parallel V grooves are formed on a substrate, and the V grooves are formed.
In a method of manufacturing an optical fiber array in which optical fiber strands are aligned in a groove, a heating element made of a high resistance material is vapor-deposited in a V groove formed on the substrate, and a low melting point metal is deposited on the heating element. An optical fiber element wire having a fusible metal vapor-deposited on its outer periphery is aligned in the V groove, and a restraining plate is placed on the optical fiber element wire, and then a voltage is applied to the heating element to generate the heating element. A method for manufacturing an optical fiber array, characterized in that the low melting point metal is melted by the heat generated by, and the optical fiber element wire is fused and fixed to the V groove.