JPH0815561A - Fiber array for optical waveguide - Google Patents

Fiber array for optical waveguide

Info

Publication number
JPH0815561A
JPH0815561A JP14948794A JP14948794A JPH0815561A JP H0815561 A JPH0815561 A JP H0815561A JP 14948794 A JP14948794 A JP 14948794A JP 14948794 A JP14948794 A JP 14948794A JP H0815561 A JPH0815561 A JP H0815561A
Authority
JP
Japan
Prior art keywords
optical waveguide
low melting
fiber array
fiber
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14948794A
Other languages
Japanese (ja)
Inventor
Michitaka Okuda
通孝 奥田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP14948794A priority Critical patent/JPH0815561A/en
Publication of JPH0815561A publication Critical patent/JPH0815561A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a fiber array for an optical waveguide used for realizing an optical waveguide type device which operates stably even in a severe environment and has excellent reliability. CONSTITUTION:This fiber array for the optical waveguide is formed by using fiber arrays to be used in the juncture of the optical waveguide device and low melting glass 4 in connecting and fixing these arrays. The respective optical fibers of coated fibers 3 of the fiber arrays are fixed by the low melting glass 4 into the array V-grooves 2 of a V-groove substrate 1. The thin film of the low melting glass is deposited by evaporation on the connecting surface to the optical waveguide element after polishment and the fiber arrays are fused by this thin film of the low melting glass at the time of connection to the optical waveguide.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光導波路型部品におけ
る光ファイバと光導波路との接続におけるファイバアレ
イに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fiber array for connecting an optical fiber and an optical waveguide in an optical waveguide type component.

【0002】[0002]

【従来技術】従来、光導波路型部品において、使用する
光ファイバアレイとその接続部は、UV、可視光型等の
有機系接着剤を使用して固定されている。しかしながら
それらを使用した場合、接着剤の経時変化により接続部
のズレによる特性の変動、ハガレによる長期信頼性の欠
如等の欠点があった。叉、振動、温湿度変化の激しい所
での使用に対しては接着剤の膨張収縮の他、上記理由に
より使用が困難な状況にあった。
2. Description of the Related Art Conventionally, in an optical waveguide type component, an optical fiber array to be used and its connecting portion are fixed by using an organic adhesive such as UV or visible light type. However, when they are used, there are drawbacks such as variation in characteristics due to displacement of the connection portion due to aging of the adhesive and lack of long-term reliability due to peeling. In addition, when it is used in a place where vibration and temperature / humidity change is severe, it is difficult to use due to the expansion and shrinkage of the adhesive and the above reasons.

【0003】更に、信頼性向上の為、両者をレーザ溶接
等により融着接続する方法も試みられているが、直接融
着の場合、光ファイバと光導波路の熱容量に大幅な差が
ある為、光ファイバのみが変形してしまい、高精度な位
置合わせが難しく、製作が困難であった。
Further, in order to improve reliability, a method of fusion-bonding the both by laser welding or the like has been attempted, but in the case of direct fusion, there is a large difference in heat capacity between the optical fiber and the optical waveguide. Only the optical fiber was deformed, and it was difficult to perform highly accurate alignment and manufacturing was difficult.

【0004】本発明は厳しい環境下においても安定に動
作する信頼性の優れた光導波路型デバイスを実現する光
導波路用ファイバアレイの提供を目的にする。
An object of the present invention is to provide a fiber array for an optical waveguide, which realizes an optical waveguide type device which operates stably even in a severe environment and has excellent reliability.

【0005】[0005]

【課題を解決する為の手段】上記課題を解決するために
本発明は、光導波路型部品の接続固定に低融点ガラスを
用いたもので、光導波路素子との接続面に向けてアレイ
状に形成された基板上の各溝に光ファイバがそれぞれ低
融点ガラスで固定されるとともに前記接続面に低融点ガ
ラスが蒸着されて成ることを特徴とする光導波路ファイ
バアレイ。
In order to solve the above-mentioned problems, the present invention uses a low melting point glass for connecting and fixing an optical waveguide type component, and forms an array shape toward a connection surface with an optical waveguide element. An optical waveguide fiber array, wherein an optical fiber is fixed to each groove on the formed substrate with a low melting point glass and a low melting point glass is vapor-deposited on the connection surface.

【0006】[0006]

【実施例】次に本発明による実施例を図に基づいて説明
する。図1は、本発明による光導波路用ファイバアレイ
の一実施例を示す斜視図で、4芯アレイタイプのものを
示している。V溝基板1にはアレイV溝2が形成され、
ファイバアレイ芯線3のアレイV溝2への固定は、低融
点ガラス4を使用して上部基板5と固定しており、後部
ファイバ保護被覆部は通常の接着剤6を使用している。
尚、ここでは4芯アレイとしているが、本発明はそれに
限定されることなく、任意のポートを有するアレイに適
用されるものである。ここで使用しているV溝基板材料
としては例えば石英ガラス等のようなガラス材料の場
合、固定用低融点ガラスと同質であれば整合性がよい
が、それに限定する必要性はなく、アルミナ、ジルコニ
ア等のセラミクス材料でもよい。低融点ガラス上部の基
板も同様である。
Embodiments Next, embodiments according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing an embodiment of an optical waveguide fiber array according to the present invention, showing a 4-core array type. An array V-groove 2 is formed on the V-groove substrate 1,
The fiber array core wire 3 is fixed to the array V groove 2 by using the low-melting glass 4 and the upper substrate 5, and the rear fiber protective coating portion is formed by using an ordinary adhesive 6.
Although a 4-core array is used here, the present invention is not limited to this and is applied to an array having arbitrary ports. As the V-groove substrate material used here, for example, in the case of a glass material such as quartz glass, if the quality is the same as that of the fixing low melting point glass, the compatibility is good, but there is no need to limit to it, alumina, A ceramic material such as zirconia may be used. The same applies to the substrate on the low melting point glass.

【0007】図2は、光導波路素子Aとの接続構造を示
した側面図で、光導波路用ファイバアレイ接続面側は研
磨後、低融点ガラス薄膜を蒸着し、基板7の上でその面
を光導波路素子Aの入出射面と合わせ局部加熱融着接続
したものである。その後、周囲を低融点ガラス8にて融
着固定、補強実装される。低融点ガラスは、通常、BO
2 、PBO等の成分からなり、軟化点が400゜C程度
のもので、通常の石英系ガラスに比較して低温で軟化、
溶着出来るもので、高温加熱による残留応力歪等が低減
出来るものである。
FIG. 2 is a side view showing a connection structure with the optical waveguide element A. The optical waveguide fiber array connection surface side is polished, and then a low-melting glass thin film is vapor-deposited. The optical waveguide element A is joined to the entrance / exit surface by local heating fusion bonding. After that, the periphery is fusion-fixed and reinforced by the low-melting glass 8. Low melting point glass is usually BO
2 , consisting of components such as PBO and having a softening point of about 400 ° C, which softens at a lower temperature than ordinary silica glass,
It can be welded and can reduce residual stress strain due to high temperature heating.

【0008】図3は、光光導波路用ファイバアレイの作
製工程を示したもので、先ず、(a)のようにV溝基板
1、ファイバアレイ芯線3、下面に低融点ガラス薄板を
付けた基板4’を準備し、アッセンブリする。V溝上の
ファイバアレイ芯線3の保護被覆は除去する。次に
(b)のように、低融点ガラス付け基板4’をアレイ芯
線3上に載せ、全体を例えばBNヒータ、Al2
3 (アルミナ)セラミクス等のような局部加熱源9で加
圧加熱する。その際、熱が保護被覆付きのアレイ芯線3
側に伝導しないように断熱板10で遮断する。軟化融着
後その部分をアニーリングをする。それから(c)のよ
うに保護被覆側を接着剤6にて固定する。最後に入出射
面側を光学研磨し、その後低融点ガラスをスパッタ装置
等で数μm厚程度蒸着して研磨蒸着面11とする。それ
により本発明によるファイバアレイが作製される。光導
波路接続の為にはその面を光導波路入出射端面に接続位
置合わせし、局部加熱固定すればよい。その後、更に低
融点ガラスを用いて周囲を補強固定することにより、厳
しい環境下における長期信頼性を有する光導波路を実現
する事が出来る。
FIG. 3 shows a manufacturing process of a fiber array for an optical optical waveguide. First, as shown in (a), a V-groove substrate 1, a fiber array core wire 3, and a substrate having a low melting point glass thin plate attached to the lower surface thereof. Prepare 4'and assemble. The protective coating of the fiber array core wire 3 on the V groove is removed. Next, as shown in (b), the low melting point glass-attached substrate 4 ′ is placed on the array core wire 3, and the whole is, for example, a BN heater and Al 2 O.
3 Pressurize and heat with a local heating source 9 such as (alumina) ceramics. At that time, heat is applied to the array core wire 3 with a protective coating.
The heat insulating plate 10 cuts off so as not to conduct to the side. After softening and fusing, the portion is annealed. Then, the protective coating side is fixed with the adhesive 6 as shown in FIG. Finally, the entrance / exit surface is optically polished, and then a low melting point glass is vapor-deposited to a thickness of several μm by a sputtering device or the like to form a polishing vapor deposition surface 11. Thereby, the fiber array according to the present invention is manufactured. In order to connect the optical waveguide, its surface may be aligned with the optical waveguide entrance / exit end face and locally heated and fixed. After that, by further reinforcing and fixing the periphery with a low melting point glass, it is possible to realize an optical waveguide having long-term reliability in a severe environment.

【0009】[0009]

【発明の効果】上記で説明したように本発明による光導
波路用ファイバアレイによれば、次のような優れた利点
がある。
As described above, the fiber array for an optical waveguide according to the present invention has the following excellent advantages.

【0010】ファイバアレイ芯線とV溝基板との固定
を低融点ガラスで行っているので環境変動、経時変化に
対して特性劣化が無い。
Since the fiber array core wire and the V-groove substrate are fixed by the low melting point glass, the characteristics are not deteriorated due to environmental changes and aging.

【0011】光導波路との接続を低融点ガラス薄膜の
融着により行う為、光導波路、基板にガラス系材料を使
用した場合、材料特性として整合性が良く、信頼性が高
い。
Since the connection with the optical waveguide is performed by fusing the low melting point glass thin film, when glass materials are used for the optical waveguide and the substrate, the material characteristics are well matched and highly reliable.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による光導波路用ファイバアレイの一実
施例を示す斜視図。
FIG. 1 is a perspective view showing an embodiment of a fiber array for an optical waveguide according to the present invention.

【図2】図1の光導波路用ファイバアレイと光導波路と
の接続構造の側面図。
FIG. 2 is a side view of a connection structure between the optical waveguide fiber array of FIG. 1 and the optical waveguide.

【図3】(a)(b)(c)は本発明の光導波路用ファ
イバアレイ製造工程図。
3 (a), (b) and (c) are process diagrams for manufacturing a fiber array for an optical waveguide of the present invention.

【符号の説明】[Explanation of symbols]

1:V溝基板 2:アレイV溝 3:ファイバ
アレイ芯線 4,8:低融点ガラス 5:上部基板 6:接
着剤 11:研磨蒸着面 A:光導波路素子
1: V-groove substrate 2: Array V-groove 3: Fiber array core wire 4, 8: Low melting point glass 5: Upper substrate 6: Adhesive 11: Polished vapor deposition surface A: Optical waveguide device

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】光導波路素子との接続面に向けてアレイ状
に形成された基板上の各溝に光ファイバがそれぞれ低融
点ガラスで固定されるとともに前記接続面に低融点ガラ
スが蒸着されて成ることを特徴とする光導波路用ファイ
バアレイ。
1. An optical fiber is fixed to each groove on a substrate formed in an array toward a connection surface with an optical waveguide device with a low melting glass, and a low melting glass is vapor-deposited on the connection surface. A fiber array for an optical waveguide characterized by being formed.
JP14948794A 1994-06-30 1994-06-30 Fiber array for optical waveguide Pending JPH0815561A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14948794A JPH0815561A (en) 1994-06-30 1994-06-30 Fiber array for optical waveguide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14948794A JPH0815561A (en) 1994-06-30 1994-06-30 Fiber array for optical waveguide

Publications (1)

Publication Number Publication Date
JPH0815561A true JPH0815561A (en) 1996-01-19

Family

ID=15476233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14948794A Pending JPH0815561A (en) 1994-06-30 1994-06-30 Fiber array for optical waveguide

Country Status (1)

Country Link
JP (1) JPH0815561A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002014260A (en) * 2000-04-25 2002-01-18 Oki Electric Ind Co Ltd Planar mounting optical module and transmission substrate using such module
JP2007310208A (en) * 2006-05-19 2007-11-29 Fujikura Ltd Optical fiber array and its manufacturing method
KR101540087B1 (en) * 2014-10-23 2015-07-30 (주) 한사 Polish rice by pounding machine

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002014260A (en) * 2000-04-25 2002-01-18 Oki Electric Ind Co Ltd Planar mounting optical module and transmission substrate using such module
JP2007310208A (en) * 2006-05-19 2007-11-29 Fujikura Ltd Optical fiber array and its manufacturing method
JP4649369B2 (en) * 2006-05-19 2011-03-09 株式会社フジクラ Manufacturing method of optical fiber array
KR101540087B1 (en) * 2014-10-23 2015-07-30 (주) 한사 Polish rice by pounding machine

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