JPH0745990A - Superconducting magnetic shield structure - Google Patents
Superconducting magnetic shield structureInfo
- Publication number
- JPH0745990A JPH0745990A JP5192394A JP19239493A JPH0745990A JP H0745990 A JPH0745990 A JP H0745990A JP 5192394 A JP5192394 A JP 5192394A JP 19239493 A JP19239493 A JP 19239493A JP H0745990 A JPH0745990 A JP H0745990A
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical
- magnetic shield
- shield structure
- superconducting
- superconductors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Containers, Films, And Cooling For Superconductive Devices (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、生体磁場計測や精密物
理計測等の微小磁場計測、半導体製造装置のＥＢ露光な
どの分野において、比較的大型の磁気シールド空間を作
るための超電導磁気シールド構造物に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a superconducting magnetic shield structure for making a relatively large magnetic shield space in the fields of minute magnetic field measurement such as biomagnetic field measurement and precision physical measurement, and EB exposure of semiconductor manufacturing equipment. Regarding things.
【０００２】[0002]
【従来の技術】超電導体を利用した磁気シールド構造
は、磁力線が超電導体の内部に入り込めないというマイ
スナー効果を利用した磁気シールド構造であり、例えば
マイスナー効果を有する材料を筒状構造物とし、これを
臨界温度以下に冷却して超電導状態に転移させ、筒状構
造物の内部空間を磁気シールドするものである。こうし
た筒状構造物は、人間が入れる程度の直径で所望の低磁
場空間を得るためには数ｍの長さが必要となるが、この
ような筒状構造物を一体のものとして製造する場合に、
長さ数ｍにわたる均熱炉が必要となり大型の筒状構造物
を均質に作製することは困難である。これを解決するた
めに、従来、特開平４−２６６０９４号公報において、
図６に示すように、径の異なる２つの筒状の超電導体
１、２の端部を相互に所定長さだけ重合させ、この重合
部の間に筒状の高透磁率体３を配置する方式を提案して
いる。この提案においては、必要な磁気シールド性能を
得るためには、超電導体１、２の重合部の長さをＬと
し、超電導体１の外面と超電導体２の内面との距離をＤ
とした場合、Ｌ≧５Ｄの条件を満たす必要があるとして
いる。2. Description of the Related Art A magnetic shield structure using a superconductor is a magnetic shield structure utilizing the Meissner effect that magnetic field lines cannot enter the inside of the superconductor. For example, a material having the Meissner effect is formed into a tubular structure, This is cooled to below the critical temperature and transformed into a superconducting state to magnetically shield the internal space of the cylindrical structure. Such a cylindrical structure requires a length of several meters in order to obtain a desired low magnetic field space with a diameter that can be inserted by a human, but when such a cylindrical structure is manufactured as an integral unit. To
A soaking furnace over a length of several meters is required, and it is difficult to uniformly manufacture a large tubular structure. In order to solve this, conventionally, in JP-A-4-266094,
As shown in FIG. 6, the end portions of two tubular superconductors 1 and 2 having different diameters are superposed on each other by a predetermined length, and the tubular high magnetic permeability body 3 is arranged between the superposed portions. Proposing a method. In this proposal, in order to obtain the required magnetic shield performance, the length of the superposed portions of the superconductors 1 and 2 is L, and the distance between the outer surface of the superconductor 1 and the inner surface of the superconductor 2 is D.
In that case, the condition of L ≧ 5D must be satisfied.
【０００３】[0003]
【発明が解決しようとする課題】ところで、図６におい
て、超電導体１、２を臨界温度以下に冷却するために、
超電導体１、２を筒状の断熱体３、４で囲んでクライオ
スタットＡ、Ｂを設ける必要がある。しかしながら、こ
の方式においては、クライオスタットＢは、クライオス
タットＡの荷重を受けるために、剛性の高い構造にしな
ければならず、その結果、超電導体１の外面と超電導体
２の内面との距離Ｄが大きくなり、その分、前記Ｌ≧５
Ｄの条件を満たすために超電導体１、２の重合部の長さ
Ｌが長くなり、冷却部及び断熱部の製造コスト並びに冷
却コストが増大するという問題を有している。また、距
離Ｄの制約のため、クライオスタットＡ、Ｂに挟まれた
高透磁率体３は、なるべく薄いことが望まれるが、軸方
向に垂直な磁場を遮蔽するために高透磁率体３を厚くま
たは多層構造にすることが制約されるという問題を有し
ている。さらに、距離Ｄを短くするために、高透磁率体
３をクライオスタット内に配置することも考えられる
が、低温による透磁率の低下が懸念される。また、高透
磁率体３の透磁率の低下を防ぐために高透磁率体３への
応力集中を避けなければならないため、クライオスタッ
トＡ、Ｂと高透磁率体の組み合わせ部分の構造につい
て、なるべくＬを短くするためにＬ≧５Ｄの条件下で様
々な検討をしなければならないという問題を有してい
る。By the way, in FIG. 6, in order to cool the superconductors 1 and 2 below the critical temperature,
It is necessary to surround the superconductors 1 and 2 with the cylindrical heat insulators 3 and 4 to provide the cryostats A and B. However, in this method, the cryostat B must have a structure with high rigidity in order to receive the load of the cryostat A, and as a result, the distance D between the outer surface of the superconductor 1 and the inner surface of the superconductor 2 is large. Therefore, L ≧ 5
In order to satisfy the condition of D, the length L of the superposed portions of the superconductors 1 and 2 becomes long, and there is a problem that the manufacturing cost of the cooling part and the heat insulating part and the cooling cost increase. Further, due to the restriction of the distance D, the high magnetic permeability body 3 sandwiched between the cryostats A and B is desired to be as thin as possible, but the high magnetic permeability body 3 is thickened to shield the magnetic field perpendicular to the axial direction. Alternatively, there is a problem that the formation of a multilayer structure is restricted. Further, in order to shorten the distance D, it is possible to arrange the high magnetic permeability body 3 in the cryostat, but there is a concern that the magnetic permeability may decrease due to low temperature. Further, in order to prevent a decrease in the magnetic permeability of the high magnetic permeability body 3, it is necessary to avoid stress concentration on the high magnetic permeability body 3. Therefore, regarding the structure of the combined portion of the cryostats A and B and the high magnetic permeability body, L should be set as much as possible. There is a problem that various examinations must be made under the condition of L ≧ 5D in order to shorten the length.
【０００４】本発明は上記問題を解決するものであっ
て、小型の加熱炉で製造することができる超電導磁気シ
ールド構造物であって、冷却部および断熱部の構造を簡
素化し一体型にすることが可能になるとともに、高透磁
率体を冷却部および断熱部と独立して自由に設計するこ
とができる超電導磁気シールド構造物を提供することを
目的とする。The present invention is to solve the above problems, and is a superconducting magnetic shield structure which can be manufactured in a small heating furnace, in which the structures of the cooling part and the heat insulating part are simplified and integrated. In addition to the above, it is an object of the present invention to provide a superconducting magnetic shield structure in which a high-permeability body can be freely designed independently of a cooling unit and a heat insulating unit.
【０００５】[0005]
【課題を解決するための手段】そのために、本発明の超
電導磁気シールド構造物は、超電導材料からなる２つの
筒状超電導体１１、１２の端部が互いに突き合され、こ
の突き合せ部の外側または内側の少なくとも一側に高透
磁率材料からなる筒状高透磁率体１３、１５が配設され
てなることを特徴とする。なお、前記筒状高透磁率体１
５は、多重中空筒状からなるようにしてもよい。ここで
上記構成に付加した番号は、本発明の理解を容易にする
ために図面と対比させるためのもので、これにより本発
明の構成が何ら限定されるものではない。Therefore, in the superconducting magnetic shield structure of the present invention, the ends of the two cylindrical superconductors 11 and 12 made of a superconducting material are butted against each other, and the outer side of the butted part. Alternatively, the cylindrical high magnetic permeability bodies 13 and 15 made of a high magnetic permeability material are arranged on at least one side inside. The cylindrical high magnetic permeability body 1
5 may have a multi-hollow cylindrical shape. The numbers added to the above configuration are for comparison with the drawings to facilitate understanding of the present invention, and the configuration of the present invention is not limited thereby.
【０００６】[0006]
【作用】本発明においては、例えば図１から図４に示す
ように、筒状超電導体１１、１２の突き合せ部から侵入
しようとする磁気に対して、軸方向からの外部磁気は筒
状超電導体１１、１２と筒状高透磁率体１３、１５によ
って遮蔽され、また軸に垂直方向の外部磁気は主として
筒状高透磁率体１３、１５によって遮蔽される。In the present invention, as shown in FIGS. 1 to 4, for example, as shown in FIGS. 1 to 4, the external magnetism from the axial direction is the tubular superconducting power, while the magnetism is trying to enter from the abutting portions of the tubular superconductors 11, 12. The bodies 11 and 12 and the tubular high-permeability bodies 13 and 15 are shielded, and the external magnetism in the direction perpendicular to the axis is mainly shielded by the tubular high-permeability bodies 13 and 15.
【０００７】[0007]
【実施例】以下、本発明の実施例を図面を参照しつつ説
明する。図１から図４は本発明の超電導磁気シールド構
造物の各実施例を示し、それぞれ図（Ａ）は垂直断面
図、図（Ｂ）は図（Ａ）のＢ−Ｂ線に沿って矢印方向に
見た断面図である。Embodiments of the present invention will be described below with reference to the drawings. 1 to 4 show each embodiment of the superconducting magnetic shield structure of the present invention. FIG. 1A is a vertical sectional view, and FIG. 1B is a direction of an arrow along line BB in FIG. 1A. FIG.
【０００８】図１の実施例においては、超電導材料から
なる同一径の筒状超電導体１１、１２の端部が互いに突
き合わされ、この突き合せ部の外周に間隔をおいて高透
磁率材料からなる筒状高透磁率体１３が配設されてい
る。超電導材料としては、極低温で超電導体となる周知
の材料が使用され、高透磁率材料としてはパーマロイ、
珪素鋼板など周知の材料が使用される。In the embodiment shown in FIG. 1, ends of cylindrical superconductors 11 and 12 made of a superconducting material and having the same diameter are butted against each other, and are made of a high magnetic permeability material with a space on the outer circumference of the butted portion. A cylindrical high magnetic permeability body 13 is arranged. As the superconducting material, a well-known material that becomes a superconductor at an extremely low temperature is used, and as a high magnetic permeability material, permalloy,
A known material such as a silicon steel plate is used.
【０００９】図２の実施例においては、筒状超電導体１
１、１２の突き合せ部の外周に間隔をおいて、高透磁率
材料からなる中空二重の筒状高透磁率体１５が配設され
ている。中空二重の筒状高透磁率体１５は、内筒１５
ａ、外筒１５ｂ、内筒１５ａと外筒１５ｂ間に固定され
るスペーサ部材１５ｃからなる。なお、二重筒に限定さ
れるものではなく、三重筒以上でもよい。In the embodiment of FIG. 2, the tubular superconductor 1
Hollow double cylindrical high-permeability bodies 15 made of a high-permeability material are arranged on the outer periphery of the abutting portions of 1 and 12 at intervals. The hollow double cylindrical high-permeability body 15 has an inner cylinder 15
a, an outer cylinder 15b, and a spacer member 15c fixed between the inner cylinder 15a and the outer cylinder 15b. The cylinder is not limited to the double cylinder, but may be a triple cylinder or more.
【００１０】図３の実施例においては、筒状超電導体１
１、１２の突き合せ部の内側に間隔をおいて、図１と同
様の筒状高透磁率体１３を配設した例を示し、図４の実
施例においては、筒状超電導体１１、１２の突き合せ部
の内側に間隔をおいて、図２と同様の中空二重の筒状高
透磁率体１５を配設した例を示している。なお、本発明
は上記実施例に限定されるものではなく、図１の構成と
図３または図４の構成を組み合わせる方式や、或いは図
２の構成と図３または図４の構成を組み合わせる方式が
挙げられる。In the embodiment of FIG. 3, the cylindrical superconductor 1
An example is shown in which the cylindrical high-permeability bodies 13 similar to those in FIG. 1 are arranged inside the abutting portions of Nos. 1 and 12 at intervals, and in the embodiment of FIG. 4, the cylindrical superconductors 11 and 12 are shown. 2 shows an example in which hollow double cylindrical high magnetic permeability bodies 15 similar to those in FIG. The present invention is not limited to the above embodiment, and a method of combining the configuration of FIG. 1 and the configuration of FIG. 3 or 4 or a method of combining the configuration of FIG. 2 and the configuration of FIG. Can be mentioned.
【００１１】上記構成により、筒状超電導体１１、１２
の突き合せ部から侵入しようとする磁気に対して、軸方
向からの外部磁気は筒状超電導体１１、１２と筒状高透
磁率体１３、１５によって遮蔽され、また軸に垂直方向
の外部磁気は主として筒状高透磁率体１３、１５によっ
て遮蔽される。さらに、筒状高透磁率体１３、１５に従
来の高透磁率材料と、磁束の侵入に対して方向性を有す
る高透磁率材料を組み合わせることによって、軸方向か
ら筒状超電導体１１、１２の突き合せ部に侵入する外部
磁気を遮蔽することができる。With the above structure, the cylindrical superconductors 11 and 12 are
The external magnetism from the axial direction is shielded by the cylindrical superconductors 11 and 12 and the cylindrical high-permeability bodies 13 and 15 with respect to the magnetism that tries to enter from the butt portion of the magnet. Is mainly shielded by the cylindrical high magnetic permeability bodies 13 and 15. Furthermore, by combining the conventional high magnetic permeability material and the high magnetic permeability material having directivity with respect to the invasion of the magnetic flux in the cylindrical high magnetic permeability bodies 13 and 15, the cylindrical superconductors 11 and 12 can be formed in the axial direction. It is possible to shield external magnetism that enters the butt portion.
【００１２】図５は、図１の実施例にクライオスタット
を設けた断面図である。筒状超電導体１１、１２を１つ
のクライオスタット１６で覆うことができるため、冷却
部の構造を簡素化できる。FIG. 5 is a cross-sectional view of the embodiment of FIG. 1 provided with a cryostat. Since the tubular superconductors 11 and 12 can be covered with one cryostat 16, the structure of the cooling unit can be simplified.
【００１３】[0013]
【発明の効果】以上の説明から明らかなように本発明に
よれば、小型の加熱炉で製造することができる超電導磁
気シールド構造物であって、冷却部および断熱部の構造
を簡素化し一体型にすることが可能になるとともに、高
透磁率体を冷却部および断熱部と独立して自由に設計す
ることができる。As is apparent from the above description, according to the present invention, there is provided a superconducting magnetic shield structure which can be manufactured in a small heating furnace, in which the structure of the cooling part and the heat insulating part is simplified and integrated. In addition, the high-permeability body can be freely designed independently of the cooling unit and the heat insulating unit.
【図１】本発明の超電導磁気シールド構造物の１実施例
を示し、図（Ａ）は垂直断面図、図（Ｂ）は図（Ａ）の
Ｂ−Ｂ線に沿って矢印方向に見た断面図である。1A and 1B show an embodiment of a superconducting magnetic shield structure of the present invention, FIG. 1A is a vertical sectional view, and FIG. 1B is seen in a direction of an arrow along line BB in FIG. 1A. FIG.
【図２】本発明の超電導磁気シールド構造物の他の実施
例を示し、図（Ａ）は垂直断面図、図（Ｂ）は図（Ａ）
のＢ−Ｂ線に沿って矢印方向に見た断面図である。2A and 2B show another embodiment of the superconducting magnetic shield structure of the present invention, in which FIG. 2A is a vertical sectional view and FIG.
FIG. 4 is a sectional view taken along line BB in FIG.
【図３】本発明の超電導磁気シールド構造物の他の実施
例を示し、図（Ａ）は垂直断面図、図（Ｂ）は図（Ａ）
のＢ−Ｂ線に沿って矢印方向に見た断面図である。3A and 3B show another embodiment of the superconducting magnetic shield structure of the present invention, FIG. 3A is a vertical sectional view, and FIG.
FIG. 4 is a sectional view taken along line BB in FIG.
【図４】本発明の超電導磁気シールド構造物の他の実施
例を示し、図（Ａ）は垂直断面図、図（Ｂ）は図（Ａ）
のＢ−Ｂ線に沿って矢印方向に見た断面図である。FIG. 4 shows another embodiment of the superconducting magnetic shield structure of the present invention, where FIG. 4A is a vertical sectional view and FIG.
FIG. 4 is a sectional view taken along line BB in FIG.
【図５】図１の実施例にクライオスタットを設けた断面
図である。5 is a cross-sectional view of the embodiment of FIG. 1 provided with a cryostat.
【図６】従来の超電導磁気シールド構造物の例を示す断
面図である。FIG. 6 is a sectional view showing an example of a conventional superconducting magnetic shield structure.
１１、１２…筒状超電導体、１３…筒状高透磁率体 １５…中空二重の筒状高透磁率体、１６…クライオスタ
ット11, 12 ... Cylindrical superconductor, 13 ... Cylindrical high magnetic permeability body 15 ... Hollow double cylindrical high magnetic permeability body, 16 ... Cryostat
───────────────────────────────────────────────────── フロントページの続き (72)発明者 向山澄夫 東京都港区芝浦一丁目２番３号 清水建設 株式会社内 (72)発明者 澁谷紳一 東京都港区芝浦一丁目２番３号 清水建設 株式会社内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Sumio Mukaiyama, 1-3-2 Shibaura, Minato-ku, Tokyo Shimizu Construction Co., Ltd. (72) Shinichi Shibuya 1-3-2 Shibaura, Minato-ku, Tokyo Shimizu Construction Within the corporation
Claims (2)
端部が互いに突き合され、この突き合せ部の外側または
内側の少なくとも一側に高透磁率材料からなる筒状高透
磁率体が配設されてなることを特徴とする超電導磁気シ
ールド構造物。1. A tubular high-permeability body made of a high-permeability material is provided on at least one side outside or inside of the abutting portions, the ends of two tubular superconductors made of a superconducting material being butted against each other. A superconducting magnetic shield structure characterized by being arranged.
なることを特徴とする請求項１に記載の超電導磁気シー
ルド構造物。2. The superconducting magnetic shield structure according to claim 1, wherein the cylindrical high-permeability body has a multi-hollow cylindrical shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5192394A JPH0745990A (en) | 1993-08-03 | 1993-08-03 | Superconducting magnetic shield structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5192394A JPH0745990A (en) | 1993-08-03 | 1993-08-03 | Superconducting magnetic shield structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0745990A true JPH0745990A (en) | 1995-02-14 |
Family
ID=16290580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5192394A Pending JPH0745990A (en) | 1993-08-03 | 1993-08-03 | Superconducting magnetic shield structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0745990A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09190913A (en) * | 1996-01-10 | 1997-07-22 | Hitachi Medical Corp | Superconducting magnet device and magnetic resonance imaging apparatus using this device |
| DE102008062612B4 (en) | 2007-12-25 | 2018-10-25 | Hitachi High-Tech Science Corporation | X-ray analyzer |
-
1993
- 1993-08-03 JP JP5192394A patent/JPH0745990A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09190913A (en) * | 1996-01-10 | 1997-07-22 | Hitachi Medical Corp | Superconducting magnet device and magnetic resonance imaging apparatus using this device |
| DE102008062612B4 (en) | 2007-12-25 | 2018-10-25 | Hitachi High-Tech Science Corporation | X-ray analyzer |
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