JPH0744902A - Production of master disk for stamper - Google Patents

Abstract

PURPOSE:To prevent production of burrs by applying an uncured photosetting resin on the surface of an original die where a pattern is formed, curing the resin, adhering a reinforcing plate to the resin, peeling the original die from the resin adhered with the reinforcing plate. CONSTITUTION:An uncured photosetting resin 2 is applied on the original die 1 and irradiated with light such as UV rays to cure the resin 2 into a resin 10. The surface of the resin 10 has the replica transferred from the original plate 1. Then an adhesive 3 is applied on the resin and a substrate 4 for lining is laminated to adhere the resin 10 and the substrate 4. Then the die 1 is peeled from the substrate 4 so that the resin 10 is peeled from the die 1. Thereby, the resin 10 having the transferred rugged pattern on the surface fixed to the substrate 4 is obtd. as a master disk 13 for a stamper. Further, a Ni film is formed on the resin 10 and used as a conductive film for electrocasting of Ni. After the electrocasting of Ni film is polished, the Ni film is peeled off from the resin 10 to obtain a Ni stamper.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a stamper master used for manufacturing a substrate for an optical recording medium, and more particularly to a photocurable resin (hereinafter
Abbreviated as “2P”), and a method for producing a replica master for 2P stamper from an original mold.

[0002]

2. Description of the Related Art Conventionally, as a typical method of manufacturing a substrate for an optical recording medium, a stamper is prepared by an electroforming method, and the stamper is used to perform a compression method, a 2P molding method, an extrusion molding method and the like. I was making a board.

In the above stamper, a replica in which an original mold is transferred is first prepared, a stamper master is prepared using the replica, an electroformed film is formed on the replica, and the electroformed film is peeled from the replica. It can be manufactured by

As a method of making a replica from the original mold, an uncured 2P resin is dropped (hereinafter referred to as dispense) on the surface of the original mold, superposed on a glass or plastic substrate, and spread (hereinafter referred to as spread). A method is known in which the uncured 2P resin is cured after the curing (referred to) and the replica is transferred onto the substrate.

FIG. 3 shows a conventional method for producing a stamper master having a 2P resin replica formed thereon. In the figure, first, an original mold 1 having a concavo-convex pattern formed on the upper surface is fixed to a fixing plate 11, and a fixed amount of uncured 2P resin (photo polymer) 2 is dispensed on the original mold 1 (see FIG. 3 (a)). ). After that, the glass substrate 4
2P resin is spread over the entire surface between the original mold 1 and the glass substrate 4, and UV is applied from above the glass substrate 4.
The light 12 is irradiated to cure the 2P resin (see FIG. 3B). After that, the cured 2P resin 10 was peeled off from the original mold 1 together with the glass substrate 4 to prepare a stamper master 13 having a replica formed of 2P (see FIG. 3C).

In the above method, when the original mold 1 and the glass substrate 4 are superposed on each other or when uncured 2P resin is spread, air bubbles are mixed in, or excess 2P resin is dispensed so that the 2P resin does not protrude. There were problems such as occurrence. That is, as shown in FIG. 3C, the protrusions 16 of the 2P resin are formed at the end portions of the cured 2P resin 10, and the protrusions 16 are chipped in the subsequent step, and the cured 2P resin that has become dust is the 2P resin. There is a problem that it adheres to the pattern portion of 10 or the end portion of the original mold, and when the original mold is used again for making the cured 2P resin 10, it becomes a protrusion of the original mold.

Therefore, the burrs are removed by applying a release material to the edges of the original mold and the glass substrate, or by using a masking agent to peel off the 2P resin that has hardened to form burrs. However, the burr that has been peeled off may adhere to the 2P resin replica or the pattern surface of the original mold and cause a defect, which is also an unfavorable method.

Further, in order to solve the above-mentioned problems, in Japanese Patent Laid-Open No. 61-213130, the 2P resin is spread in a vacuum to suppress the inclusion of bubbles, and further, the 2P resin is provided on the peripheral edge portion. Proposals have been made to prevent the overflow by providing a leakage prevention wall for the. However, when the prevention wall is provided, it is necessary to accurately control the supply amount of the 2P resin to be dispensed, and when it is insufficient, the 2P resin may not be supplied to the desired pattern portion. Further, if it is excessive, protrusion occurs beyond the prevention wall.

Further, as another problem, after the 2P resin is cured, the curing shrinkage causes the so-called "float" or "sink", in which the cured 2P resin is peeled from the original mold from the peripheral edge of the prevention wall. As a countermeasure against this, Japanese Patent Laid-Open No.
In JP-A-196748, it is proposed that an elastic body made of rubber or a spring is interposed between the original die and the substrate to reduce "floating" and "sink".

[0010]

The present invention has been made to solve the above-mentioned drawbacks of the prior art. In particular, when a square original mold is used, a master is produced without the 2P resin protruding. It is an object of the present invention to provide a stamper master manufacturing method capable of manufacturing the stamper master.

[0011]

SUMMARY OF THE INVENTION The present invention to achieve the above object is a method of manufacturing a stamper master in which a photo-curable resin having a fine concavo-convex pattern formed on an original die is laminated on a glass substrate. In (1), the step of applying the uncured photocurable resin to the surface of the original mold on which the fine concavo-convex pattern is formed, and (2) irradiating the applied uncured photocurable resin with a light beam to cure the resin. Step (3) step of adhering the reinforcing plate to the cured resin, (4) step of peeling the original mold and the resin adhering the reinforcing plate at their interfaces, and the above (1) to ( 4) A method for manufacturing a stamper master, which comprises each step of 4).

The present invention will be described below with reference to the drawings.

FIG. 1 shows an example of a process for manufacturing a stamper master according to the present invention. FIG. 1 (a) shows an original mold 1 coated with uncured 2P resin 2 and 2P of light such as ultraviolet rays (UV).
The step of irradiating the resin 2 to cure it is shown.

As the 2P resin, a prepolymer, an oligomer or a monomer having an unsaturated bond in the molecule can be used. For example, unsaturated polyesters, acrylates such as epoxy acrylate, urethane acrylate, and polyether acrylate, and one or more methacrylates such as epoxy methacrylate, urethane methacrylate, polyether methacrylate, and polyester methacrylate, which are unsaturated in the molecule. A photopolymerizable monomer having a bond, for example, dicyclopentenyl acrylate, 1,3-butanediol acrylate,
Some are mixed with polyfunctional monomers such as polyethylene glycol diacrylate and pentaerythritol triacrylate. Further, a radical generating compound such as a halogenated acetophenone, benzophenone, benzoin, benzoin ether, Michler's ketone, benzyl, benzyl dimethyl ketal, tetramethyl thiuram monosulfide thioxanthone is used as a polymerization initiator.

The coating method includes coating with a roller bar, spraying, spin coating and the like.

FIG. 2 shows a state where the 2P resin is applied to the original die 1 by using the roller bar 5.

Energy rays such as ultraviolet rays and electron rays are used to cure the 2P resin by light irradiation.

When the 2P resin is anaerobic, a thin film or the like may be overlapped, irradiated with UV, and cured to remove the film.

Further, the above-mentioned work may be carried out in a vacuum in order to avoid inclusion of bubbles.

The thickness of the uncured 2P resin applied is preferably thinner. This is because, after that, the 2P resin is sputtered, subjected to electroconductivity treatment, and then electroformed, but in this case, the step due to the thickness of the 2P resin causes film breakage of the sputtered film and the like. May not be possible. Two
The thickness of the P resin is preferably 2 μm to 50 μm. Also,
When the 2P resin has a low viscosity, it is desirable that the thickness is such that it does not flow out after coating. 2 by UV irradiation
The P resin 2 is cured, and the cured 2P resin 10 shown in FIG.
become. On the surface of this resin 10, a replica in which the concavities and convexities of the original mold 1 are transferred is formed.

Next, the cured 2P resin 10 shown in FIG.
As shown in FIG. 3, an adhesive is applied, the backing substrate 4 is overlaid, and the resin 10 and the substrate 4 are bonded.

The substrate is preferably glass, acrylic resin, polycarbonate, plastic such as polyethylene terephthalate, or the like.

The adhesive 3 is preferably an epoxy adhesive having a low shrinkage ratio. This is uniformly coated with a roll bar or spray. The adhesive may also be coated on the substrate 4 side.

Subsequently, the original mold 1 and the substrate 4 are overlapped with each other and the adhesive is cured to firmly bond the substrate and the cured 2P resin.

Next, when the original mold and the substrate are separated, the 2P resin 10 is separated from the original mold 1. As a result, a stamper master 13 is obtained in which the resin 10 having the concavo-convex pattern transferred to the surface is fixed on the substrate (FIG. 1).
(C).

In order to manufacture the stamper from the master 13, a Ni film of about 1000 Å is formed by sputtering or the like on the 2P resin on which the concavo-convex pattern is transferred, and Ni electroforming is performed using this as a conductive film. Next, the Ni stamper can be obtained by polishing the electroformed surface of the Ni film and then peeling the Ni film from the 2P resin.

[0027]

EXAMPLES The present invention will be specifically described below with reference to examples.

Example 1 2P resin (ThreeBond SS120) was applied by bar coating to the surface of an original mold in which pits and grooves were formed by etching glass, and cured to form a replica. Curing was done in a nitrogen atmosphere.

Then, an epoxy adhesive was applied to the 2P resin by bar coating. The glass substrate was also coated with the adhesive and superposed in a vacuum.

After the adhesive was hardened, the glass substrate and the original mold were peeled off, whereby a stamper master having a 2P resin replica formed on the surface was prepared.

A Ni film was sputtered on the master plate at a rate of 1500 Å, and then Ni electroforming was performed to form a stamper. The master surface was flat and had no defects, and the original mold was faithfully transferred. There were some bubbles with a diameter of about 0.1 mm in the adhesive layer, but there was no effect on the 2P layer on the surface. No burr was generated. The original mold was 100 mm in size, and the master was 140 mm in size. Since the 2P resin was cured on the original mold, peeling did not occur when it contracted in the thickness direction.

(Example 2) The same 2P resin as in Example 1 was spin-coated on the same original mold and cured. Further, the same 2P resin was applied onto the cured 2P resin by spin coating, and was superposed on a glass plate in a vacuum.
The glass plate was previously treated with a silane coupling material and the 2P resin was cured. All the 2P resin adhered on the glass plate. When the original mold and the glass plate were peeled off, a 2P-glass-master disk could be created. The 2P resin applied the second time serves as an adhesive.

[0033]

As described above, by applying the 2P resin on the original mold and curing it, the 2P resin is lined and peeled off, so that no burrs are generated by the protrusion of the 2P resin.

Sinking / peeling / caused by shrinkage of 2P resin
No cracks, etc.

A master having advantages such as the above can be obtained. Further, it is possible to create a master in a shape equivalent to the shape of the original mold, and for example, a square master can be easily created. Further, there is an advantage that the flatness of the original type is faithfully transferred and the master glass and the 2P surface are not inclined.

[Brief description of drawings]

FIG. 1 is a process drawing showing an example of manufacturing a stamper master according to the method of the present invention.

FIG. 2 is an explanatory diagram showing one method of applying uncured 2P to an original mold.

FIG. 3 is a process chart showing an example of manufacturing a conventional master.

[Explanation of symbols]

 1 Original type 2 Unhardened 2P resin 3 Adhesive 4 Substrate 5 Roller bar 6 Blade 10 Hardened 2P resin 11 Fixing plate 12 UV light 13 Master disc 16 Protrusion (burr)

Front page continuation (72) Inventor Hirofumi Uetakahara 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Kai-Oka 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Hitoshi Yoshino 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Naoki Kushida 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc.

Claims (1)

[Claims] 1. A method of manufacturing a stamper master, comprising a glass substrate and a photocurable resin on which a fine concavo-convex pattern formed on an original mold is transferred, wherein (1) the uncured photocurable resin is original. A step of applying the fine rugged pattern forming surface on the mold, (2) a step of irradiating the applied uncured photocurable resin with a light beam to cure the resin, and (3) a stiffening plate for the cured resin. And (4) a step of peeling the original mold and the resin to which the reinforcing plate is adhered at the interface between them, the stamper having the above-mentioned steps (1) to (4) Master disk manufacturing method.