JPH0744201B2 - Manufacturing method of copper-clad laminated composite tape for film carrier - Google Patents

Manufacturing method of copper-clad laminated composite tape for film carrier

Info

Publication number
JPH0744201B2
JPH0744201B2 JP28169386A JP28169386A JPH0744201B2 JP H0744201 B2 JPH0744201 B2 JP H0744201B2 JP 28169386 A JP28169386 A JP 28169386A JP 28169386 A JP28169386 A JP 28169386A JP H0744201 B2 JPH0744201 B2 JP H0744201B2
Authority
JP
Japan
Prior art keywords
film
tape
copper
laminated composite
polyetherimide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP28169386A
Other languages
Japanese (ja)
Other versions
JPS63135474A (en
Inventor
節夫 鈴木
信孝 高須
三素 村山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP28169386A priority Critical patent/JPH0744201B2/en
Publication of JPS63135474A publication Critical patent/JPS63135474A/en
Publication of JPH0744201B2 publication Critical patent/JPH0744201B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/386Improvement of the adhesion between the insulating substrate and the metal by the use of an organic polymeric bonding layer, e.g. adhesive

Landscapes

  • Laminated Bodies (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Wire Bonding (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、ICチップ搭載用テープ状エンドレスフイルム
回路板作製に際して用いられる、謂ゆるフイルムキャリ
アー用銅貼りテープの製造法に関するものであり、更に
詳しくはポリエーテルイミドフイルム上に、熱ラミネー
ト可能な光硬化組成物を含むフェノキシ樹脂接着層を形
成しておきこれを銅箔とラミネートし活性光で硬化せし
め更にテープ裏面にレジスト層を形成する、回路加工時
の寸法安定性に優れた銅貼り積層複合テープの製造方法
に係るものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention relates to a method for producing a so-called loose film carrier copper-clad tape used for producing a tape-shaped endless film circuit board for mounting an IC chip, and further Specifically, on the polyetherimide film, a phenoxy resin adhesive layer containing a thermally curable photocurable composition is formed and laminated with a copper foil and cured with active light to form a resist layer on the back surface of the tape. The present invention relates to a method for producing a copper-clad laminated composite tape having excellent dimensional stability during circuit processing.

〔従来技術〕[Prior art]

従来フイルムキャリアー用銅貼りテープとしては耐熱性
を生かしポリイミドフイルム銅貼りテープが広く用いら
れてきた。またこの場合、フイルムと銅箔のラミネート
用の接着剤樹脂はエポキシ樹脂又はエポキシポリアミド
系樹脂等の加熱硬化型接着剤が広く用いられて来てい
る。
Conventionally, a polyimide film copper-clad tape has been widely used as a copper-clad tape for a film carrier due to its heat resistance. Further, in this case, as the adhesive resin for laminating the film and the copper foil, a thermosetting adhesive such as an epoxy resin or an epoxy polyamide resin has been widely used.

しかしながら、この様な従来品は大きな欠点を有してお
り問題化して来ている。即ち、ポイミドフイルムは耐熱
性に優れており、耐熱寸法変化は小さいものの耐湿及び
耐アルカリ性に劣り、回路加工工程での寸法変化が大き
くパターン間精度および細線回路間位置精度が得難く、
回路工程での伸び縮みを見込んで回路設計を行わなけれ
ばならないというわずらわしさが有る。
However, such a conventional product has a big defect and has become a problem. That is, the polyimide film is excellent in heat resistance, heat resistance dimensional change is small but inferior in moisture resistance and alkali resistance, dimensional change in the circuit processing process is large, and it is difficult to obtain accuracy between patterns and position accuracy between fine line circuits.
There is a cumbersome task of designing a circuit in anticipation of expansion and contraction in the circuit process.

また極端な場合、耐アルカリ性に劣るためエッチングレ
ジストのアルカリ剥離工程で回路下のふくれ等が生じる
という問題があった。
Further, in an extreme case, there is a problem that swelling etc. under the circuit occurs in the alkali removing step of the etching resist due to poor alkali resistance.

このような従来の銅貼りテープの欠点解消の要求はICの
高密度化に伴なう回路の微細化といった傾向の中で、強
く望まれている。また、加熱接着のため接着ラミネート
時間が長く、更に加熱硬化炉が長くなるという点も不都
合な点として指摘されている。
The demand for eliminating the drawbacks of the conventional copper-clad tape is strongly desired in the trend of circuit miniaturization accompanying the high density of ICs. Further, it is pointed out that the adhesive lamination time is long due to the heat adhesion, and that the heating and curing furnace is also long, which is disadvantageous.

〔発明の目的〕[Object of the Invention]

本願発明は、これら従来の欠点を解消すべく、耐熱性を
有し、且つ湿度ならびにアルカリ処理時の寸法変化の小
さいテープを得べく、各種フイルムを検討したところ、
ポリエーテルイミドが本目的に合致することを見い出
し、加えて光硬化可能なフイルム状接着剤を用いること
によりラミネート工程の合理化が図れるとの知見を得、
鋭意研究を重ねた結果、達成された発明である。
The present invention, in order to eliminate these conventional drawbacks, in order to obtain a tape having heat resistance, and a small dimensional change during humidity and alkali treatment, various films were examined,
It was found that polyether imide meets this purpose, and in addition to that, the use of a photo-curable film adhesive has led to the finding that the laminating process can be rationalized.
It is an invention achieved as a result of intensive studies.

本発明により工業的意味の大きいフイルムキャリアー用
銅貼り積層複合テープの供給が可能になった。
The present invention makes it possible to supply a copper-clad laminated composite tape for a film carrier, which has great industrial significance.

〔発明の構成〕 本発明は、ポリエーテルイミドフイルム上にフェノキシ
樹脂、光硬化性樹脂組成物及び溶剤から成るワニスを塗
布乾燥し、接着層付きテープを得、該接着層面に離型可
能な保護フイルムを貼り合せる工程(工程I)、該3層
構成のテープにガイド穴、チップマウント穴及び位置合
せ用穴を打抜く工程(工程II)、離型フイルムを剥離し
ながらガイド穴のみを残して、該テープよりも巾のせま
い、スリットされた銅箔を熱ラミネートして金属箔貼り
積層複合テープを得る工程(工程III)、金属箔貼り積
層板複合テープのポリエーテルイミドフイルム側から活
性光を照射して接着剤層中の光硬化樹脂組成物成分を硬
化せしめる工程(工程IV)、工程IVで得た金属箔貼り積
層複合テープのポリエーテルイミドフイルム面に最終的
に剥離可能なエッチングレジスト膜をガイド穴をのぞい
て形成する工程(工程V)からなることを特徴とするフ
イルムキャリアー用銅貼り積層複合テープの製造方法で
ある。
[Structure of the Invention] The present invention provides a varnish consisting of a phenoxy resin, a photocurable resin composition and a solvent on a polyetherimide film and dried to obtain a tape with an adhesive layer, and a protective layer capable of releasing the adhesive layer surface. A step of adhering the film (step I), a step of punching a guide hole, a chip mount hole and a positioning hole in the tape having the three-layer structure (step II), leaving only the guide hole while peeling the release film. A step of obtaining a metal foil-clad laminated composite tape by heat-laminating a slit copper foil, which is narrower than the tape (step III), and activates active light from the polyetherimide film side of the metal foil-clad laminated plate composite tape. The step of irradiating to cure the photocurable resin composition component in the adhesive layer (step IV), and finally peeling to the polyetherimide film surface of the metal foil-laminated composite tape obtained in step IV A method for producing a copper-clad laminated composite tape for a film carrier, which comprises a step (step V) of forming a possible etching resist film excluding a guide hole.

以下本発明を工程順に説明する。The present invention will be described below in the order of steps.

まず本発明に用いられるポリエーテルイミドフイルム
は、耐熱熱可塑性樹脂フイルムであり、押出法、キャス
ト法いずれの方法で得られたフイルムであっても使用可
能である。また厚みについてはテープキャリアーとして
引張り強度が要求されるため75μm〜150μmの厚みの
フイルムが好んで用いられる。75μm以下ではフイルム
の走行中破断、シワ等が発生して好ましくないし150μ
m以上ではフイルム走行性に難点が生じ、経済性の面か
らも150μm以上の厚みは不要である。
First, the polyetherimide film used in the present invention is a heat resistant thermoplastic resin film, and a film obtained by either an extrusion method or a casting method can be used. Regarding the thickness, a film having a thickness of 75 μm to 150 μm is preferably used because tensile strength is required as a tape carrier. If the thickness is less than 75 μm, the film may be broken or wrinkled while running, which is not preferable.
When the thickness is more than m, a problem occurs in the film running property, and the thickness of 150 μm or more is unnecessary from the economical point of view.

次いで接着剤層形成用のワニスを調整するがワニス構成
成分の一つはフェノキシ樹脂であり、以下の(1)式で
表わされる構造のビスフェノールA、ビスフェノールF
等のフェノール化合物とエピクロルヒドリンより合成さ
れる高分子量ポリヒドロキシポリエーテル構造の熱可塑
性樹脂である。
Next, a varnish for forming an adhesive layer is prepared. One of the constituent components of the varnish is a phenoxy resin, and bisphenol A and bisphenol F having a structure represented by the following formula (1)
It is a thermoplastic resin having a high molecular weight polyhydroxypolyether structure, which is synthesized from a phenol compound such as epichlorohydrin.

この構造から明らなか如く、該樹脂は高分子量のため造
膜性に優れ、かつ強度を有する塗膜フイルムを形成す
る。
As is clear from this structure, since the resin has a high molecular weight, it forms a coating film having excellent film-forming properties and strength.

また構造中に多くの水酸基を有しているため各種被着体
との接着性に優れ、加えて低融点熱可塑性樹脂であるた
め、加熱溶融接着が可能であり、これ単独でもラミネー
トは可能である。然しながら耐熱性に乏しいという欠点
はまぬがれえない。本願発明の骨子の一つはこの点の改
良にもある。
In addition, since it has many hydroxyl groups in its structure, it has excellent adhesiveness to various adherends, and since it is a low melting point thermoplastic resin, it can be heat melt-bonded and can be laminated by itself. is there. However, the drawback of poor heat resistance cannot be overlooked. One of the gist of the present invention is to improve this point.

また本発明で用いられる(1)式で示される樹脂の分子
量は重量平均分子量で35000以上、数平均分子量で5000
以上であり、これより小さいものは造膜性に欠け又粘着
性を有するため使用が難しい。
The resin represented by the formula (1) used in the present invention has a weight average molecular weight of 35,000 or more and a number average molecular weight of 5,000.
The above is the case, and those smaller than this are difficult to use because they lack film-forming properties and have tackiness.

次いで光硬化性を有する組成物とはエチレン性2種結合
を有するアクリル又はメタアクリルプレポリマー、エチ
レン性2種結合を有するアクリルモノマー又はメタアク
リルモノマー光開始剤および光増感剤から形成される。
Next, the photo-curable composition is formed from an acrylic or methacrylic prepolymer having an ethylenic double bond, an acrylic monomer or a methacrylic monomer photoinitiator having an ethylenic double bond, and a photosensitizer.

プレポリマーとしてはエポキシアクリレート又はエポキ
シメタアクリレート、ウレタンアクリレート又はメタア
クリレート、ポリエステルアクリレート又はメタアクリ
レート等が単独又は併用して用いられる。これら物質は
フェノキシ樹脂と相溶性に優れている。またアクリル又
はメタアクリルモノマーとしては一般にUV硬化樹脂系に
用いられるものはフェノキシ樹脂との相溶性が良好であ
ればすべて使用可能である。また開始剤としてベンゾイ
ンイソプロピルエーテル、2−エチルアントラキノン、
ベンジル等の通常の開始剤が用いられるがポリエーテル
イミドフイルム透過光で接着層を硬化せしめる必然性か
ら長波長光を吸収して、その励起エネルギーを開始剤に
移送する謂ゆる増感剤との組合せ使用が好ましい。
As the prepolymer, epoxy acrylate or epoxy methacrylate, urethane acrylate or methacrylate, polyester acrylate or methacrylate is used alone or in combination. These substances have excellent compatibility with the phenoxy resin. As the acrylic or methacrylic monomer, any of those generally used for UV curable resin can be used as long as it has good compatibility with the phenoxy resin. Further, benzoin isopropyl ether, 2-ethylanthraquinone, and
Ordinary initiators such as benzyl are used, but in combination with a so-called sensitizer, which absorbs long-wavelength light and transfers its excitation energy to the initiator due to the necessity of curing the adhesive layer with transmitted light from the polyetherimide film. Use is preferred.

検討の結果以下の構造式を有する化合物の組合せ使用が
特に好ましい。
As a result of investigation, the combined use of compounds having the following structural formulas is particularly preferable.

光開始剤 上記フェノキシ樹脂および光硬化組成成分を溶剤に溶か
してワニスを得る。この際ポリエーテルイミドフイルム
を溶解する溶剤は当然ながら使用出来ない。
Photoinitiator The phenoxy resin and the photocurable composition components are dissolved in a solvent to obtain a varnish. At this time, of course, a solvent that dissolves the polyetherimide film cannot be used.

次いで該ワニス組成物を常法によりポリエーテルイミド
フイルムテープ上に塗布し乾燥せしめる。乾燥は開始
剤、増感剤の飛散を防ぐ意味で極力低温であることが望
ましい。また塗布厚みは接着性に支障をきさない範囲で
可及的に薄いことが望ましいが乾燥後の膜厚として10〜
30μmであるのが一般的である。
Then, the varnish composition is applied onto a polyetherimide film tape by a conventional method and dried. It is desirable that the drying is performed at a temperature as low as possible in order to prevent scattering of the initiator and the sensitizer. In addition, it is desirable that the coating thickness be as thin as possible without impairing the adhesiveness, but the film thickness after drying is 10-
It is generally 30 μm.

かくして得られる接着性フイルムが表面に形成されたポ
リエーテルイミドフイルムを得るが、該接着フイルムは
均一透明な常温では粘着性の無い塗膜であり、巻き取り
可能である。なお巻き取り時のブロッキング防止のため
離型フイルムを添付することも好んで用いられる。
A polyetherimide film having the adhesive film thus obtained formed on its surface is obtained, and the adhesive film is a film that is uniformly transparent and has no tack at room temperature and can be wound. It is also preferred to attach a release film to prevent blocking during winding.

次いで得られたフイルムを帯状にスリットしてテープ状
フイルムをを得、フイルム両端部にスプロケット用ガイ
ド穴をあける。次いで該テープフイルムをスプロケット
にはめ込みIC搭載部となるべき箇所および回路パターン
ユニット毎の光センサー用位置合せ穴を打抜く。
Then, the obtained film is slit into a tape form to obtain a tape-like film, and sprocket guide holes are formed at both ends of the film. Then, the tape film is fitted into a sprocket, and a portion to be an IC mounting portion and an optical sensor alignment hole for each circuit pattern unit are punched.

この工程により接着剤毎打抜かれた穴を有するテープが
得られる。
By this step, a tape having a punched hole for each adhesive is obtained.

次に該スプロケット用ガイド穴を残すようにフイルムよ
り巾の狭いスリットされた銅箔を用意し、これを前記フ
イルムに重ねて熱ラミネーターを用いて熱圧着し、これ
を一体化する。この操作により銅箔およびフイルムは強
固に接着され一体化されるこの時点ですでに2kg/cmとい
う高いピール接着強度を有しているため、以後の取り扱
いが安全である。
Next, a slit copper foil narrower than the film is prepared so as to leave the sprocket guide holes, and the copper foil is superposed on the film and thermocompression-bonded using a heat laminator to integrate the foil. By this operation, the copper foil and the film are firmly bonded and integrated, and at this point, the copper foil and the film already have a high peel adhesive strength of 2 kg / cm, and hence the subsequent handling is safe.

次いでフイルム側より活性光線を照射し、フイルムを介
して接着層中に存在する光硬化樹脂組成物を反応硬化せ
しめる。この操作により接着層は耐熱性、耐薬品性とい
った機能が付与される。なお硬化を完全にするため照射
後、熱処理を行うことも有効な場合もある。
Then, an actinic ray is irradiated from the film side to reactively cure the photocurable resin composition present in the adhesive layer through the film. By this operation, the adhesive layer has functions such as heat resistance and chemical resistance. In some cases, it may be effective to perform a heat treatment after the irradiation in order to complete the curing.

この際、硬化反応は低温で行われるため銅箔とポリエー
テルイミドフイルムの熱膨張係数の差が有るにも拘らず
反り、ねじれ等が生じないということも本発明の副次的
メリットである。
At this time, since the curing reaction is carried out at a low temperature, there is no difference in thermal expansion coefficient between the copper foil and the polyetherimide film, so that warping, twisting or the like does not occur, which is a secondary merit of the present invention.

次に一体化されたフイルム基板のフイルム側にレジスト
層を形成するこの目的は最終的に回路とする場合、ICと
の接続端子は裏面に絶縁層の無いエッチング回路が必要
となるため、穴部分の銅箔は表面にフイルムのない状態
でエッチングされる必要があり、銅箔裏側を保護する必
要があるためである。この層は銅箔のエッチング終了
後、銅箔表面のレジストと共に剥離される。
Next, a resist layer is formed on the film side of the integrated film substrate.When this purpose is finally used as a circuit, the connection terminal with the IC requires an etching circuit without an insulating layer on the back surface, so the hole This is because the copper foil needs to be etched without a film on the surface and the back side of the copper foil needs to be protected. This layer is peeled off together with the resist on the surface of the copper foil after the etching of the copper foil is completed.

かくしてテープ状のフイルムキャリアー用銅貼り回路板
が得られる。
Thus, a tape-shaped copper-clad circuit board for a film carrier is obtained.

〔発明の効果〕〔The invention's effect〕

かくして得られた複合テープは銅箔とポリエーテルイミ
ドフイルムが強固に接着され、そのまま回路加工に供せ
られる優れた積層フイルムである。またポリエーテルイ
ミドの回路加工時の収縮・伸びが従来のポリイミドフイ
ルム銅貼り積層テープに比して10分の1以下であり、ネ
ガ修正の必要は全く無い優れた積層体である。本基板を
用いて作成したテープキャリアー用回路板は充分実用に
耐え使用可能であった。また接着層の耐熱性および耐薬
品性も充分であり、ICマウント工程にも充分耐え得るも
のであった。
The composite tape thus obtained is an excellent laminated film in which the copper foil and the polyetherimide film are firmly adhered and can be directly used for circuit processing. Further, the shrinkage / elongation of the polyetherimide at the time of circuit processing is 1/10 or less of that of the conventional polyimide film copper-clad laminated tape, and it is an excellent laminated body that does not require any negative correction. The circuit board for a tape carrier prepared by using this substrate was sufficiently practical and usable. Also, the heat resistance and chemical resistance of the adhesive layer were sufficient, and the adhesive layer could withstand the IC mounting process.

以下に実施例を示す。Examples will be shown below.

〔実施例〕〔Example〕

(工程I) 厚み75μのポリエーテルイミドフイルムの片面上に以下
の組成物からなる接着剤ワニスをロールコーター法によ
り塗布し、80℃5mの乾燥ゾーン内を1m/minで通過させて
溶剤を除去した後、離型処理した25μ厚のポリエステル
フイルムを貼り合せて巻き取った。接着剤層の厚みは25
μであった。
(Step I) An adhesive varnish composed of the following composition was applied on one surface of a polyetherimide film having a thickness of 75 μm by a roll coater method, and the solvent was removed by passing it through a drying zone of 80 ° C. and 5 m at 1 m / min. After that, the release-treated 25 μm-thick polyester film was laminated and wound up. The thickness of the adhesive layer is 25
It was μ.

(接着剤ワニス組成物) フェノキシ樹脂、(数平均分子量7400、東部化成(株)
フェノトートYP−50) ……100 重量部 固型エポキシアクリレート樹脂(昭和高分子(株)リポ
キシVR−60) ……17 重量部 ウレタンアクリレート樹脂(日本合成化学工業(株)ゴ
ーセラックUV−3000B) 85 重量部 ペンタエリスリトールトリアクリレート……12.5重量部 チバガイギー社イルガキュアー907 ……4.7重量部 2.4−ジエチルチオキサントン ……3.3重量部 メチルセロリルブアセテート ……420 重量部 酢酸ブチル ……500 重量部 (工程II) この接着剤つきフイルムの両端にスプロケット用のガイ
ド穴を打ち抜きプレスによってあけ、次いでスプロケッ
トにガイド穴をセットし、チップマウント穴及び位置合
せ用穴を常法によってプレスを用い打ち抜いた。打ち抜
き穴周辺に接着剤層の浮きは認められなかった。
(Adhesive varnish composition) Phenoxy resin, (Number average molecular weight 7400, Tobu Kasei Co., Ltd.)
Phenothote YP-50) ...... 100 parts by weight Solid epoxy acrylate resin (Showa Polymer Co., Ltd. Lipoxy VR-60) …… 17 parts by weight Urethane acrylate resin (Nippon Gosei Chemical UV-3000B) 85 Parts by weight Pentaerythritol triacrylate 12.5 parts by weight Ciba-Geigy Irgacure 907 ...... 4.7 parts by weight 2.4-Diethylthioxanthone ...... 3.3 parts by weight Methyl cerolyl buacetate ...... 420 parts by weight Butyl acetate ...... 500 parts by weight (Process II) Guide holes for sprockets were punched on both ends of the film with adhesive, and then the guide holes were set on the sprockets, and the chip mounting holes and the positioning holes were punched using a press by a conventional method. No floating adhesive layer was observed around the punched holes.

(工程III) 打ち抜き後、ポリエステルの保護フイルムを剥離した
後、接着剤層上に片面粗化した厚み35μの圧延銅箔を80
℃、1Kg/cm2で圧着ロールを用いてラミネートした。こ
の条件では接着剤層のダレがないため打ち抜いた穴の内
側に接着剤層がしみ出す現象は認められなかった。
(Step III) After punching, the protective film of polyester was peeled off, and a rolled copper foil with a thickness of 35 μ, which was roughened on one side, was applied on the adhesive layer.
Laminated using a pressure roll at 1 ° C. and 1 Kg / cm 2 . Under this condition, there was no sagging of the adhesive layer, so that the phenomenon of the adhesive layer exuding inside the punched hole was not recognized.

この状態での貼り合せ品の接着強度を測定するため、銅
箔の90゜方向での剥離し強度を測定したところ2.2Kgf/c
mであり、両者が強固に接着していることがわかった。
しかし、この貼り合せ品を200゜、1時間の加熱処理を
施すと、接着剤層とポリエーテルイミド面との間に全面
浮きが発生し、また貼り合せ品の銅箔を常法によりエッ
チングで除去した後、アセトンにフイルムを浸漬すると
10分間で接着剤層は溶解した。
In order to measure the adhesive strength of the bonded product in this state, the copper foil was peeled in 90 ° and the strength was measured to be 2.2 Kgf / c
It was found that both were strongly bonded to each other.
However, when this bonded product is subjected to heat treatment at 200 ° for 1 hour, the entire surface is lifted between the adhesive layer and the polyetherimide surface, and the copper foil of the bonded product is etched by a conventional method. After removing it, dip the film in acetone
The adhesive layer dissolved in 10 minutes.

(工程IV) 工程IIIで得られた貼り合せ品の接着剤の硬化を施すた
め、1m/分のライン速度で流れる貼り合せ品のポリエー
テルイミド面より15cmの距離から80W/cmの高圧水銀灯1
灯を用いて光照射を行なった。光照射による基板の温度
上昇は殆どないため、硬化後の基板の反りは全く認めら
れなかった。
(Step IV) In order to cure the adhesive of the bonded product obtained in Step III, a high pressure mercury lamp of 80 W / cm from a distance of 15 cm from the polyetherimide surface of the bonded product flowing at a line speed of 1 m / min 1
Light irradiation was performed using a lamp. Since there was almost no temperature rise of the substrate due to light irradiation, no warp of the substrate after curing was observed.

(工程V) 市販の通常のアルカリ水溶液現像・剥離型フイルム状フ
ォトレジストを常法に従い、工程IVで得られた基板の両
面にラミネートした。銅箔面には回路パターンを形成す
る部分のみに、またポリエーテルイミド面には全面にエ
ッチングレジスト層が残るように露光・現像を行なった
後、常法によるエッチングパターン加工、エッチングレ
ジスト剥離を施して目的とするフイルムキャリアー用ポ
リエーテルイミドフイルム回路パターンを作成した。
(Step V) A commercially available ordinary alkaline aqueous solution developing / peeling film-like photoresist was laminated on both surfaces of the substrate obtained in Step IV according to a conventional method. After exposing and developing so that the etching resist layer remains on the copper foil surface only on the part where the circuit pattern is to be formed and on the entire surface of the polyetherimide surface, etching pattern processing and etching resist peeling are performed by a conventional method. Then, the intended polyetherimide film circuit pattern for the film carrier was prepared.

この回路パターンの接着強度を評価するために、銅箔の
90゜方向での引き剥し強度を測定したところ、2.6Kgf/c
mであり、また200゜と、1時間の加熱処理を施した後で
も2.3Kgf/cmの強度を示した。
In order to evaluate the adhesive strength of this circuit pattern,
The peel strength in the 90 ° direction was measured and found to be 2.6 Kgf / c
m, and the strength was 2.3 Kgf / cm even after the heat treatment of 200 ° for 1 hour.

また、パターンをアセトン中に1時間浸漬したが接着剤
層には何らの変化も認められなかった。
Further, the pattern was immersed in acetone for 1 hour, but no change was observed in the adhesive layer.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】ポリエーテルイミドフイルム上にフェノキ
シ樹脂、光硬化性樹脂組成物及び溶剤から成るワニスを
塗布乾燥し、接着層付きテープを得、該接着層面に離型
可能な保護フイルムを貼り合せる工程…(工程I) 該3層構成のテープにガイド穴、チップマウント穴及び
位置合せ用穴を打抜く工程…(工程II) 離型フイルムを剥離しながらガイド穴のみを残して、該
テープよりも巾のせまい、スリットされた銅箔を熱ラミ
ネートして金属箔貼り積層複合テープを得る工程…(工
程III) 金属箔貼り積層板複合テープのポリエーテルイミドフイ
ルム側から活性光を照射して接着層中の光硬化樹脂組成
物成分を硬化せしめる工程…(工程IV) 工程IVで得た金属箔貼り積層複合テープのポリエーテル
イミドフイルム面に最終的に剥離可能なエッチングレジ
スト膜をガイド穴をのぞいて形成する工程…(工程V) からなることを特徴とするフイルムキャリアー用銅貼り
積層複合テープの製造方法。
1. A varnish comprising a phenoxy resin, a photocurable resin composition and a solvent is applied on a polyetherimide film and dried to obtain a tape with an adhesive layer, and a releasable protective film is attached to the adhesive layer surface. Step (Step I) Step of punching a guide hole, a chip mounting hole, and a positioning hole in the three-layer tape ... (Step II) While peeling the release film, leaving only the guide hole, The process of obtaining a laminated composite tape with metal foil by heat-laminating slitted copper foil with a narrow width ... (Step III) Irradiating active light from the polyetherimide film side of the laminated tape with metal foil and adhering it Step of curing the photo-curable resin composition component in the layer ... (Step IV) Finally peelable etch on the polyetherimide film surface of the metal foil-laminated composite tape obtained in Step IV (Step V) of forming an insulating resist film excluding the guide holes to form a copper-clad laminated composite tape for a film carrier.
JP28169386A 1986-11-28 1986-11-28 Manufacturing method of copper-clad laminated composite tape for film carrier Expired - Lifetime JPH0744201B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28169386A JPH0744201B2 (en) 1986-11-28 1986-11-28 Manufacturing method of copper-clad laminated composite tape for film carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28169386A JPH0744201B2 (en) 1986-11-28 1986-11-28 Manufacturing method of copper-clad laminated composite tape for film carrier

Publications (2)

Publication Number Publication Date
JPS63135474A JPS63135474A (en) 1988-06-07
JPH0744201B2 true JPH0744201B2 (en) 1995-05-15

Family

ID=17642665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28169386A Expired - Lifetime JPH0744201B2 (en) 1986-11-28 1986-11-28 Manufacturing method of copper-clad laminated composite tape for film carrier

Country Status (1)

Country Link
JP (1) JPH0744201B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101075192B1 (en) * 2009-03-03 2011-10-21 도레이첨단소재 주식회사 Adhesive tape for manufacturing electronic component
JP5541248B2 (en) * 2011-08-16 2014-07-09 東レ先端素材株式会社 Adhesive tape for manufacturing electronic components

Also Published As

Publication number Publication date
JPS63135474A (en) 1988-06-07

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