JPH0744017Y2 - プラズマアッシング装置 - Google Patents

プラズマアッシング装置

Info

Publication number
JPH0744017Y2
JPH0744017Y2 JP1989037087U JP3708789U JPH0744017Y2 JP H0744017 Y2 JPH0744017 Y2 JP H0744017Y2 JP 1989037087 U JP1989037087 U JP 1989037087U JP 3708789 U JP3708789 U JP 3708789U JP H0744017 Y2 JPH0744017 Y2 JP H0744017Y2
Authority
JP
Japan
Prior art keywords
plasma
plasma generation
generation chamber
chamber
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989037087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02127031U (enrdf_load_stackoverflow
Inventor
恭一 小町
宏典 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP1989037087U priority Critical patent/JPH0744017Y2/ja
Publication of JPH02127031U publication Critical patent/JPH02127031U/ja
Application granted granted Critical
Publication of JPH0744017Y2 publication Critical patent/JPH0744017Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1989037087U 1989-03-28 1989-03-28 プラズマアッシング装置 Expired - Lifetime JPH0744017Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989037087U JPH0744017Y2 (ja) 1989-03-28 1989-03-28 プラズマアッシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989037087U JPH0744017Y2 (ja) 1989-03-28 1989-03-28 プラズマアッシング装置

Publications (2)

Publication Number Publication Date
JPH02127031U JPH02127031U (enrdf_load_stackoverflow) 1990-10-19
JPH0744017Y2 true JPH0744017Y2 (ja) 1995-10-09

Family

ID=31543883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989037087U Expired - Lifetime JPH0744017Y2 (ja) 1989-03-28 1989-03-28 プラズマアッシング装置

Country Status (1)

Country Link
JP (1) JPH0744017Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62213126A (ja) * 1986-03-13 1987-09-19 Fujitsu Ltd マイクロ波プラズマ処理装置
JPS64326U (enrdf_load_stackoverflow) * 1987-06-19 1989-01-05

Also Published As

Publication number Publication date
JPH02127031U (enrdf_load_stackoverflow) 1990-10-19

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term