JPH0741765U - Flying magnetic head - Google Patents

Abstract

(57) [Abstract] [Purpose] A flying magnetic head for recording / reproducing a signal on / from a magnetic recording medium. In the flying magnetic head having a minute step on the air bearing surface facing the magnetic recording medium, shape accuracy and minute step amount. To provide a floating magnetic head having an air bearing surface with high precision and surface precision of a processed surface. A high hardness film having a desired shape and a desired thickness is laminated on a rail surface of a slider substrate which constitutes a flying magnetic head to form an air bearing surface. [Effect] When designing the air bearing surface, it is possible to design a free shape that is not restricted by machining as compared with conventional cutting. Further, high shape accuracy and surface accuracy can be obtained.
Further, by laminating a film having a high hardness, the durability against the friction with the recording medium and the head crash is improved.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a levitation type magnetic head, and more particularly to a levitation type magnetic head having a minute step on the air bearing surface.

[0002]

[Prior art]

 FIG. 3 is a perspective view of a conventional flying type magnetic head having an air bearing surface composed of two rails. The floating magnetic head 11 floats due to the balance between the pressing force from the upper part of the head and the lift generated by the air bearing formed between the floating surface and the recording medium. Therefore, when incorporated in a hard disk drive (hereinafter abbreviated as HDD), the relative speed between the air bearing surface and the recording medium changes, and the angle between the longitudinal direction of the air bearing surface of the head and the recording medium advancing direction (hereinafter referred to as skew). Change in the angle) causes a large change in the magnitude and balance of the lift, and thus in a change in the flying height of the read / write gap portion for recording and reproduction.

As a method for compensating for the drawbacks of the conventional floating type magnetic head, there are methods disclosed in US Pat. No. 4,673,996 and US Pat. No. 4,870,519. As shown in FIG. 4, a minute step portion 17 having a width of several tens of μm and a depth of several μm is formed on both sides of the air bearing surface 19, and the pressure generated in the minute step portion 17 when a skew angle is formed is generated. The structure is such that the flying attitude is actively used to control the flying height change of the read / write gap when incorporated in an HDD etc. within the allowable value. At the time of processing, after forming the shape of the air bearing surface 19 in the same manner as the two-layer air bearing surface, the minute step portion 17 is formed by grinding or the like, and the air bearing surface 19 is finished by polishing.

Further, recently, the demand for the flying height has become more severe with the increase in recording density, and a method for reducing the flying height change by utilizing negative pressure due to a complicated flying surface shape or a curved flying surface shape. Has been taken. However, when the air bearing surface has a complicated shape, it is difficult to form the shape by grinding. Therefore, a minute step portion is removed by wet etching, ion beam etching, powder beam etching, or the like.

[0005]

[Problems to be solved by the device]

 However, the above-mentioned removal processing has a difficulty in processing accuracy, and the surface roughness of the removed portion becomes several tens to several hundreds of nm for the removal amount of the step portion of several μm, and the floating amount of the gap portion is designed. There was a problem that it was different from the value.

In order to solve this problem, it is an object of the present invention to provide a flying magnetic head having fine steps with good shape accuracy and surface accuracy.

[0007]

[Means for Solving the Problems]

 The above object can be achieved by laminating a high hardness film on the rail surface of the slider substrate in a predetermined shape and a predetermined thickness to form an air bearing surface of a floating magnetic head. More specifically, after the slider substrate of the floating magnetic head is processed in advance while considering the height of the minute step, a high-hardness film is laminated on the rail surface of the slider substrate in a predetermined shape with a predetermined thickness. This makes it possible to create a desired air bearing surface shape. Furthermore, when a minute step is formed according to the present invention, the surface roughness of the step can be several nm, which is equivalent to that of the conventional air bearing surface of two rails.

[0008]

【Example】

 Hereinafter, a first embodiment according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a floating magnetic head according to the present invention. The air bearing surface 19 is formed by adhering a high hardness film 15 such as diamond-like carbon on the rail surface 23 of the slider substrate 21, and at the same time forms a minute step portion 17. 2 shows a cross section of the floating magnetic head 11 shown in FIG. 1 in the order of manufacturing steps. The manufacturing process will be described below. As shown in FIG. 2B, the hatched portion is removed from the substrate 13 by cutting in the same manner as the conventional method, and the rail surface 23 of the slider substrate 21 is formed. At this time, the height of the minute step portion 17 is taken into consideration and polishing is performed until the surface roughness becomes several nm. After that, as shown in FIG. 2C, a high hardness film 15 of diamond-like carbon or the like is formed by sputtering using a mask having a desired air bearing surface shape. The thickness is the thickness corresponding to the minute step portion 17. As a result, the flying magnetic head 11 having the shape shown in FIG. 1 can be obtained.

Further, as another embodiment according to the present invention, the air bearing surface 19 has a simple shape in the first embodiment. However, even if the air bearing surface 19 has a complicated shape, the mask having the same shape as the desired air bearing surface shape is used. By using, to form the high-hardness film 15 on the rail surface 23 of the slider substrate 21, the film can be formed without increasing the number of steps. As a result, it is possible to freely design the air bearing surface shape without being restricted by processing.

[0010]

[Effect of device]

 As described above, by using the present invention, there is an effect that the shape and surface roughness of the air bearing surface of the floating magnetic head can be accurately formed. It also has the effect that even an air bearing surface with a complicated shape can be formed without increasing the number of steps. Further, by laminating a high hardness film on the air bearing surface, there is an effect that the durability against the friction with the recording medium and the head crash is improved.

[Brief description of drawings]

FIG. 1 is a perspective view of a flying magnetic head showing a first embodiment according to the present invention.

[FIG. 2] Manufacturing process of a floating magnetic head according to the present invention

FIG. 3 is a perspective view of a conventional floating magnetic head having a two-rail air bearing surface.

FIG. 4 is a perspective view of a conventional flying type magnetic head having a minute step portion.

[Explanation of symbols]

 11 Flying Type Magnetic Head 13 Substrate 15 High Hardness Film 17 Minute Step 19 Airborne Surface 21 Slider Substrate 23 Rail Surface

Claims (2)

[Scope of utility model registration request] 1. A flying type magnetic head having air-bearing surfaces having a predetermined length protruding from both ends and having a U-shape, wherein the air bearing surface has a predetermined hardness and a high hardness. The flying type magnetic head is characterized in that a minute step portion for controlling the flying posture is formed by stacking the above films. 2. The flying magnetic head according to claim 1, wherein diamond-like carbon is used for the high hardness film.