JPH0741116Y2 - Electric field device - Google Patents

Description

[Detailed Description of the Invention] Industrial field of application The present invention is used as an ion source for charging or discharging an object, or for an electromechanical operation such as adhesion or repulsion of an object due to an electric force. The present invention relates to an electric field device.

2. Description of the Related Art An electric field device is provided with a discharge electrode on the surface of a dielectric substrate in which an induction electrode is embedded, and a high DC voltage or a high AC voltage is applied to both electrodes to cause an air discharge or an electrodynamic phenomenon. This is a phenomenon that is unique to the electric field. (JP-A-59-44782
(See JP-A-59-44797) Problems to be Solved by the Invention In the conventional electric field device, the voltage was applied to the discharge electrode through the terminal provided on the back surface of the dielectric substrate. Since the shortest distance between the discharge electrode and the induction electrode is smaller than the shortest distance between the discharge electrode and the induction electrode, creeping discharge occurs on the surface of the terminal.

Therefore, the terminals are exposed to ozone and their surfaces are oxidized, which causes a problem in reliability when the leads are attached.

Further, since the electric field strength between the terminal and the induction electrode is strong, dielectric breakdown may occur.

In view of the above circumstances, the present invention aims to improve reliability when a lead is attached to a terminal and prevent dielectric breakdown between the terminal and the induction electrode.

Means for Solving the Problems The present invention relates to an electric field device in which a discharge electrode is provided on the surface of a dielectric substrate in which an induction electrode is embedded, and a terminal connected to the discharge electrode via a conductor is provided on the back surface of the substrate. A separation insulating layer is provided between the surface of the substrate and the conductor to keep the conductor away from the tip of the induction electrode, and the conductor is disposed on the surface of the separation insulating layer, and the rear end of the terminal The above problem is solved by making the shortest distance between the induction electrode and the tip of the induction electrode larger than the shortest distance between the discharge electrode and the conductor and the induction electrode.

When high frequency AC high voltage is applied to the induction electrode and the discharge electrode,
A high-frequency discharge is generated from the edge of the discharge electrode along the surface of the dielectric substrate, but since a creeping discharge does not occur on the terminal side of the discharge electrode, that is, on the back surface of the substrate, the terminal is
Not exposed to ozone.

Embodiments Embodiments of the present invention will be described with reference to the accompanying drawings, and the same reference numerals have the same names and functions.

First, the electric field device shown in FIGS. 1 and 4 will be described.

2% magnesia in alumina powder (weight ratio, same below),
50% by ball mill with 2% calcia and 4% silica
After wet grinding for 80 hours, dehydration and drying.

To this powder, 3% of methacrylic acid isobutyl ester, 1% of nitrocellulose and 0.5% of dioctyl phthalate are added, and then trichlorethylene and h-butanol are added as a solvent and mixed in a ball mill to form a fluid slurry.

After depressurizing and defoaming this slurry, it is poured out in a flat plate shape to remove heat and disperse the solvent to form a 0.5 mm thick upper alumina green sheet (hereinafter referred to as upper sheet) 1 and lower alumina green sheet (hereinafter referred to as lower sheet). ) 2 are each formed in a rectangular shape.

A rectangular planar induction electrode 3 is formed on the upper surface of the lower sheet 2 by a screen printing method in the longitudinal direction, and the induction electrode 3 is connected to a contact conductor portion 5 on the lower surface via a through conductor 4. .

Next, the upper sheet 1 is placed on the upper surface of the lower sheet 2 to form a dielectric substrate 6, and a linear discharge electrode 7 facing the induction electrode 3 is formed on the surface 6a by the screen printing method.
And the tip of the induction electrode 3 at the end of the surface 6a.
A convex insulating layer 8 is formed by stacking alumina green sheets extending right above 3a.

This insulating layer 8 increases the distance t between the conductor 9 connected to the discharge electrode 7 and the tip 3a of the dielectric electrode 3 to weaken the electric field strength between them and prevent dielectric breakdown. The distance t from the electrode 3 to the surface of the insulating layer 8 is
For example, it is formed so as to be 1.2 times the distance T between the induction electrode 3 and the discharge electrode 7.

The terminal 10 is printed on the back surface 6b of the dielectric substrate 6 by metallization. The rear end 10a of the terminal 10 and the tip 3a of the induction electrode 3 are printed.
Is formed to be larger than the shortest distance between the tip 3a and the discharge electrode 7 and the conductor 9. For example, the horizontal distance W between the tip 3a and the rear end 10a of the terminal 10 is set to the distance T Form twice.

Next, the conductor 9 is laid on the surface of the convex insulating layer 8 and on the side surface of the dielectric substrate 6 by metallization or the like to connect the discharge electrode 7 and the terminal 10, but the conductor 9 is prevented from deterioration due to oxidation or the like. Coating with a dielectric material such as Amisina
To do.

In this state, when the dielectric substrate 6 is fired in a non-oxidizing atmosphere at 1400 ° C. to 1600 ° C., the induction electrode 3 is embedded and the electric field device in which the upper sheet 1 and the lower sheet 2 are integrated is formed.

Next, the operation of this embodiment will be described. From the high frequency AC voltage power supply 12 via the contact conductor portion 5 and the terminal 10,
When a high frequency AC high voltage is applied between the discharge electrode 7 and the induction electrode 3 through the dielectric substrate 6, a high frequency discharge is generated from the edge of the discharge electrode 7 along the surface of the dielectric substrate 6 and abundant. A plasma containing positive and negative ions is formed.

Therefore, when this is brought close to the charged object, the ions having the opposite polarity to the charge are supplied from the plasma toward the charged object, and the charge is rapidly eliminated.

At this time, since the shortest distance between the terminal 10 and the induction electrode 3 is formed larger than the shortest distance between the induction electrode 3, the discharge electrode 7 and the conductor 9, high frequency discharge is generated from the edge of the terminal 10. Does not occur along the back surface of.

Therefore, since the terminal 10 is not exposed to ozone, deterioration due to oxidation or the like can be prevented. This electric field device can be widely used not only as a static eliminator as in the above-mentioned embodiment but also as an ozone generator, a charging device, or an electrostatic transport device.

Further, the geometrical shape of this electric field device can be formed not only in a flat plate shape but also in an arbitrary curved surface shape, for example, a spherical shape, a semi-cylindrical shape, a polygonal shape, a step shape, etc., and in performing this, it is highly flexible. At the stage of the electrode-attached alumina green sheet, it may be formed into a desired shape and then fired.

The embodiment of the present invention is not limited to the above,
For example, instead of routing the conductor 9 around the side surface of the dielectric substrate 6, as shown in FIG. 2, a through hole (through hole) 20 is formed at the end of the dielectric substrate 6, and the conductor 9 is passed through the hole 20. Is also good.

Moreover, instead of making the horizontal distance W between the tip 3a of the induction electrode 3 and the rear end 10a of the terminal 10 larger than the distance T between the induction electrode 3 and the discharge electrode 7, as shown in FIG. An alumina green sheet extending to just below the tip 3a of the induction electrode 3 is overlapped on the back surface 6b of the above to form a convex insulating insulation layer 30, and the terminal 10 is disposed on the lower surface of the insulation layer 30 to form the induction electrode 3. The shortest distance from the terminal 10 may be increased.

Effect of the Invention In this invention, the shortest distance between the terminal and the induction electrode is made larger than the shortest distance between the discharge electrode and the conducting wire and the induction electrode, so that creeping discharge does not occur on the back surface of the dielectric substrate.

Therefore, since the terminals are not exposed to ozone, deterioration due to oxidation or the like can be prevented, and reliability when the leads are attached can be improved.

Further, the electric field strength between the terminal and the induction electrode is weakened, so that no dielectric breakdown occurs.

Further, when the conductor is coated with a dielectric material, deterioration due to oxidation or the like can be prevented. Since the separation insulating layer is provided between the surface of the dielectric substrate and the conductor, the distance between the conductor and the tip of the induction electrode becomes large, so that the electric field strength between them becomes weak. for that reason,
It is possible to prevent the occurrence of dielectric breakdown.

[Brief description of drawings]

1 to 4 are longitudinal sectional views showing an embodiment of the present invention, respectively. FIG. 1 is an enlarged view of a main part of FIG. 4, FIG. 2 and FIG. 3 are other embodiments. FIG. 4 is an enlarged view showing an example and corresponds to FIG. 1, and FIG. 4 is a vertical sectional view showing a use state. 3 ... Induction electrode 6 ... Dielectric substrate 7 ... Discharge electrode 10 ... Terminal 11 ... Painting 30 ... Separation insulating layer

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification number Office reference number FI technical display location H01G 4/008 H05F 3/04 C 9470-5G

Claims (3)

[Scope of utility model registration request] 1. An electric field device in which a discharge electrode is provided on the surface of a dielectric substrate in which an induction electrode is embedded, and a terminal connected to the discharge electrode via a conductor is provided on the back surface of the substrate, the surface of the substrate and the conductor. A distance insulating layer is provided between the conductor and the tip of the induction electrode, and the conductor is disposed on the surface of the distance insulating layer, and the rear end of the terminal and the tip of the induction electrode. The electric field device is characterized in that the shortest distance is set larger than the shortest distance between the discharge electrode and the conductor and the induction electrode. 2. The electric field device according to claim 1, wherein the conductor is coated with a dielectric material. 3. The electric field device according to claim 1, wherein the terminal is provided on the dielectric substrate via a separation insulating layer.