JPH0740791B2 - Vibration wave motor - Google Patents
Vibration wave motorInfo
- Publication number
- JPH0740791B2 JPH0740791B2 JP61067588A JP6758886A JPH0740791B2 JP H0740791 B2 JPH0740791 B2 JP H0740791B2 JP 61067588 A JP61067588 A JP 61067588A JP 6758886 A JP6758886 A JP 6758886A JP H0740791 B2 JPH0740791 B2 JP H0740791B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating body
- vibration wave
- vibrating
- ring
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 230000000750 progressive effect Effects 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 description 15
- 238000005452 bending Methods 0.000 description 6
- 230000008602 contraction Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- RDYMFSUJUZBWLH-UHFFFAOYSA-N endosulfan Chemical compound C12COS(=O)OCC2C2(Cl)C(Cl)=C(Cl)C1(Cl)C2(Cl)Cl RDYMFSUJUZBWLH-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000007157 ring contraction reaction Methods 0.000 description 1
- 238000006049 ring expansion reaction Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
- H02N2/123—Mechanical transmission means, e.g. for gearing
- H02N2/126—Mechanical transmission means, e.g. for gearing for conversion into linear motion
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 ＜産業上の利用分野＞ 本発明は進行性振動波により移動体を駆動する振動波モ
ータ、特にその回転運動を直進運動に変換させる構造に
関する。Description: TECHNICAL FIELD The present invention relates to a vibration wave motor for driving a moving body by a progressive vibration wave, and more particularly to a structure for converting its rotational motion into linear motion.
＜従来技術＞ 円環弾性体に生ずる進行性振動波を利用する移動体を回
転運動させる振動波モータは、例えば特開昭59−201684
号公報等で開示されている様に、多種の構造が提案され
ている。<Prior Art> A vibration wave motor for rotating a moving body using progressive vibration waves generated in an annular elastic body is disclosed in, for example, Japanese Patent Laid-Open No. 59-201684.
Various structures have been proposed as disclosed in Japanese Patent Publication No.
ところで、この種の振動波モータの回転運動を直進運動
に変換させるためには、回転運動を直進運動に変換する
機構、即ちネジ，ラツクと歯車などが必要であった。例
えばカメラのレンズを光軸方向に移動させる為には、特
開昭59−111117号公報に開示されたような移動体の回転
運動を直進運動に変換する別構成のヘリコイドを使った
変換機構が必要となる。移動体から別構成の変換機構を
介して直進運動させる従来の如き装置ではエネルギー損
失が多く、その結果としてその損失だけモータ出力を増
加させなければならなかった。By the way, in order to convert the rotational motion of this type of vibration wave motor into a linear motion, a mechanism for converting the rotational motion into a linear motion, that is, a screw, a rack, and a gear is required. For example, in order to move the lens of the camera in the optical axis direction, a conversion mechanism using a helicoid of another structure for converting the rotational movement of the moving body into a rectilinear movement is disclosed in JP-A-59-111117. Will be needed. In a conventional device in which a moving body moves straight through a conversion mechanism having a different structure, a large amount of energy is lost, and as a result, the motor output must be increased by the loss.
＜発明の目的＞ 本発明は従来の如き運動方向を変換する別構成の変換機
構を除去し、エネルギー損失を減少すべく、円形状の振
動体に周方向進行性振動波を発生する振動波モータにお
いて、該振動体上に螺旋形状のネジ部を構成させ該ネジ
部と螺合させる接触体を前記進行性振動波の進行方向と
は異なる方向、具体的には前記円形状の振動体の中心軸
方向へ振動体と接触体とを相対運動させることを目的と
する。<Purpose of the Invention> The present invention eliminates a conventional conversion mechanism for converting the direction of motion and reduces the energy loss, so that the vibration wave motor generates a circumferentially progressive vibration wave in a circular vibrating body. In a direction different from the traveling direction of the progressive vibration wave, specifically, at the center of the circular vibrating body. The purpose is to relatively move the vibrating body and the contact body in the axial direction.
＜実施例＞ 第１図は本発明の実施例で1aは電気−機械エネルギー変
換素子で、例えば圧電セラミツクスである1bは振動体で
ある振動リングで、アルミ合金，鉄−ニツケル合金，ス
テンレス，しんちゅう，りん青銅などの金属、あるいは
アルミナ等のリング状のセラミツクス材より構成され、
振動のリング1b内側には凹部10a1から成るネジ部10aが
形成されている。圧電セラミツクス1aは振動リング1bに
接着等で固着され振動体１を形成している。位相差をも
って配置された圧電セラミツクス1aに位相差（例えば90
゜）のある周波電圧を印加することにより、振動体１全
体には公知の原理により進行性振動波が発生する。３は
振動体１と接触する移動体で、これにも凸部10b1から成
るネジ部10bが形成され、振動リングのネジ部10aと螺合
する振動体１は不図示の固定手段にて固定されている移
動体３は圧電セラミツクスにより励起された振動体１の
振動波により相対的に回転運動をすると同時にネジ部分
で接触しているため螺旋運動となり、振動体リングの中
心軸100の方向にも移動する。<Embodiment> FIG. 1 shows an embodiment of the present invention, in which 1a is an electro-mechanical energy conversion element, for example, 1b which is a piezoelectric ceramic is a vibrating ring which is a vibrating body, and aluminum alloy, iron-nickel alloy, stainless steel, shin Made of metal such as brass and phosphor bronze, or ring-shaped ceramic material such as alumina,
Inside the vibration ring 1b, a screw portion 10a composed of a recess 10a 1 is formed. The piezoelectric ceramic 1a is fixed to the vibrating ring 1b by adhesion or the like to form the vibrating body 1. The phase difference (for example, 90
By applying a frequency voltage having a degree of (.degree.), A progressive vibration wave is generated in the entire vibrating body 1 according to a known principle. Reference numeral 3 denotes a moving body that comes into contact with the vibrating body 1, and a threaded portion 10b composed of a convex portion 10b 1 is also formed on the moving body 3. The moving body 3 is relatively rotated by the vibration wave of the vibrating body 1 excited by the piezoelectric ceramic, and at the same time, the moving body 3 is in a spiral motion because it is in contact with the screw portion, and in the direction of the central axis 100 of the vibrating body ring. Also moves.
尚、振動体１の振動モードは、日本音響学会講演論文集
（S.59年10月）あるいは特願昭60−49057号公報で開示
されている円環の伸縮モード、あるいは特開昭60−2101
75号公報で開示されている振動体１の径方向に変位を生
じさせる面内の曲げモード等が用いられる。The vibration mode of the vibrating body 1 is the ring expansion / contraction mode disclosed in the Proceedings of the Acoustical Society of Japan (October 1959) or Japanese Patent Application No. 60-49057, or in JP-A-60- 2101
The in-plane bending mode that causes displacement in the radial direction of the vibrating body 1 disclosed in Japanese Patent No. 75 is used.
第２図は円環の伸縮モードを励振させるための圧電セラ
ミツクス1aの電極パターンと分極極性および周波電圧を
印加するための結線方法の実施例で、圧電セラミツクス
1aの表面は８等分に分割された電極が形成されている。
（＋）および（−）は紙面垂直方向に分極処理された極
性を示す。各電極は１つおきに結線され、それぞれのグ
ループに90゜位相のずれた周波電圧を印加する。４は公
知の90゜位相器を示す。第２図は円環伸縮の２次モード
を励振する方法を示しているが、電極の分割数を変える
ことにより、他の次元のモードも励振でき、１次以上の
モードであれば原理的には移動体を駆動することができ
る。FIG. 2 shows an embodiment of the electrode pattern of the piezoelectric ceramics 1a for exciting the expansion and contraction modes of the ring and the connection method for applying the polarization polarity and the frequency voltage.
The surface of 1a has electrodes divided into eight equal parts.
(+) And (-) indicate polarities that are polarized in the direction perpendicular to the paper surface. Every other electrode is connected and a frequency voltage 90 ° out of phase is applied to each group. Reference numeral 4 represents a known 90 ° phaser. Fig. 2 shows the method of exciting the secondary mode of annular expansion and contraction, but by changing the number of divisions of the electrode, modes of other dimensions can also be excited, and in principle if it is a first or higher mode Can drive a moving body.
第３図は円環の面内曲げモードを励振させるための圧電
セラミツクス1aの電極パターンと分極極性および周波電
圧を印加するための結線方法の第２の実施例で、1aは圧
電セラミツクス、４は公知の90゜位相器である。第３図
は面内曲げの４次モードを励振する方法を示している
が、伸縮モードの場合と同様１次以上のモードであれば
移動体を駆動可能である。FIG. 3 shows a second embodiment of the electrode pattern of the piezoelectric ceramics 1a for exciting the in-plane bending mode of the annulus and the wiring method for applying the polarization polarity and the frequency voltage. 1a is the piezoelectric ceramics and 4 is the This is a known 90 ° phaser. FIG. 3 shows a method of exciting the fourth-order mode of in-plane bending, but the movable body can be driven in the first-order and higher modes as in the case of the expansion / contraction mode.
以上の実施例においては、例えば第１図における振動リ
ング1bの図面下側の面にのみリング状の圧電セラミツク
ス1aを配設し該リング状の圧電セラミツクス1a単体で進
行波を励起させて振動リング1bに進行波を発生させてい
たが、かかる構成の基では振動リング1bと圧電セラミツ
クス1aとの接合部周辺のみに、進行波が発生し易く振動
リング1bの全体で均一に進行波を伝達することが困難で
ある。そこで第４図の実施例では、振動リング1bの両側
の面に相対的に1/4波長、位相をずらした圧電セラミツ
クス1d,1eを接合し、各圧電セラミツクス1d,1eに移相器
90゜位相のずれた周波電圧を印加することにより振動リ
ング1bに全体的に伸縮モードの進行波を発生させる様に
したもので、この実施例の場合第１図および第２図に比
較し、出力を大きく且つ、効率よく駆動できるものであ
る。In the above embodiment, for example, the ring-shaped piezoelectric ceramics 1a is provided only on the lower surface of the vibration ring 1b in FIG. 1, and the traveling wave is excited by the ring-shaped piezoelectric ceramics 1a alone to vibrate the vibration ring. Although the traveling wave was generated in 1b, the traveling wave is easily generated only in the vicinity of the joint between the vibration ring 1b and the piezoelectric ceramics 1a in the structure of such a configuration, and the traveling wave is transmitted uniformly in the entire vibration ring 1b. Is difficult. Therefore, in the embodiment shown in FIG. 4, piezoelectric ceramics 1d and 1e, which are relatively shifted in phase by 1/4 wavelength, are joined to both surfaces of the vibration ring 1b, and a phase shifter is provided to each piezoelectric ceramics 1d and 1e.
By applying a frequency voltage with a 90 ° phase shift, a traveling wave in a stretching mode is generated entirely in the vibrating ring 1b. In the case of this embodiment, comparison is made with FIGS. 1 and 2. The output is large and can be efficiently driven.
第５図は第３図と同様、円環の面内曲げの４次モードを
励振する実施例で、第３図のものに比べ出力を大きくと
ることが可能となる。Similar to FIG. 3, FIG. 5 shows an embodiment in which the fourth-order mode of in-plane bending of an annulus is excited, and it is possible to obtain a larger output than that of FIG.
上述の実施例では、振動体に雌ネジを形成させている
が、逆に第６図に示すごとく振動体に雄ネジを形成さ
せ、該振動体を移動体とし、固定体20を雌ネジと振動体
に進行波を発生させ、固定体20との摩擦より振動体１が
自ら軸方向へ移動する様に構成することも可能である。In the above-described embodiment, the vibrating body is formed with a female screw. Conversely, as shown in FIG. 6, a vibrating body is formed with a male screw, the vibrating body is used as a moving body, and the fixed body 20 is formed with a female screw. It is also possible to generate a traveling wave in the vibrating body and cause the vibrating body 1 to move in the axial direction by friction with the fixed body 20.
さらに第７図は別の実施例で、リング状の振動体の内外
両側にネジを構成した断面図である。20は固定子であ
り、ボルト５にて固定され、振動体１の外周側にネジ部
10cを形成し、固定子20と螺合し、さらに振動体１の内
周側にもネジ部10dを形成し、該ネジ部10dと螺合する移
動体６とにより構成されている。ここで10eは固定子20
のネジ部で10fは振動体の内面のネジ部である。該構成
の基で圧電セラミックス1aに周波電圧を印加することに
より進行波がリング状振動体１に発生し、固定子20に対
して振動体１が回転軸100に沿って移動し、さらに振動
体１の内周側に設けられた移動体６が振動体１の振動に
よって振動体１の移動方向と同一方向に移動することに
なる。今、仮に振動体１のネジ山10c,10dの間隔が外周
側と内周側で等しいとすると結果的に移動体６は振動体
１の移動速度の２倍の速度で回転軸に沿って上方向に移
動する。Further, FIG. 7 is another embodiment, and is a cross-sectional view in which screws are formed on both inner and outer sides of a ring-shaped vibrating body. Reference numeral 20 denotes a stator, which is fixed by a bolt 5 and has a screw portion on the outer peripheral side of the vibrating body 1.
10c is formed, is screwed with the stator 20, is further formed with a screw portion 10d on the inner peripheral side of the vibrating body 1, and is constituted by the moving body 6 screwed with the screw portion 10d. Where 10e is the stator 20
10f is a threaded portion on the inner surface of the vibrating body. A traveling wave is generated in the ring-shaped vibrating body 1 by applying a frequency voltage to the piezoelectric ceramics 1a based on the structure, and the vibrating body 1 moves along the rotation axis 100 with respect to the stator 20, and further the vibrating body The moving body 6 provided on the inner peripheral side of 1 moves in the same direction as the moving direction of the vibrating body 1 by the vibration of the vibrating body 1. Now, assuming that the distance between the screw threads 10c and 10d of the vibrating body 1 is equal on the outer peripheral side and the inner peripheral side, the moving body 6 is consequently moved up along the rotation axis at a speed twice the moving speed of the vibrating body 1. Move in the direction.
但し、振動体に伸縮モードを励振する場合は内外のネジ
は同方向ネジとし、又面内曲げモードを励振する場合は
逆ネジとする必要がある。However, when exciting the expansion / contraction mode on the vibrating body, the internal and external screws must be screws of the same direction, and when exciting the in-plane bending mode, they must be reverse screws.
第８図は振動体１と接触する移動体３の接触圧を安定さ
せるための構成の断面図である。５は皿バネで、ネジ部
の山の間隔が、不均一の場合、移動体３と振動体１との
接触圧が均一とならず安定した駆動力を得られないた
め、該皿バネ５にて常時的均一な接触圧を得られるよう
作用するものである。又は左右の移動体の相対位置を固
定するピンで移動体3b側ではしっかり固着され、移動体
3a側ではある程度余裕をもって嵌合される。FIG. 8 is a cross-sectional view of a structure for stabilizing the contact pressure of the moving body 3 that contacts the vibrating body 1. Reference numeral 5 is a disc spring, and when the intervals of the threads of the screw portion are not uniform, the contact pressure between the moving body 3 and the vibrating body 1 is not uniform and a stable driving force cannot be obtained. In this way, a uniform contact pressure can always be obtained. Alternatively, a pin that fixes the relative position of the left and right moving bodies is firmly fixed on the moving body 3b side,
The 3a side is fitted with some margin.
尚、本実施例においてはネジ部の断面はほぼ三角形であ
るが、要は移動体と振動体とが夫々凹部凸部を有し、夫
々が嵌合する形状であれば良いものである。In this embodiment, the cross section of the screw portion is substantially triangular, but the point is that the moving body and the vibrating body each have a concave convex portion and the respective shapes can be fitted together.
＜効 果＞ 円環状の振動モータにおいて振動体と移動体あるいは固
定体の接触部にネジを形成することにより、 （１）回転運動から直線運動への変換機構が不要とな
る。<Effect> By forming a screw in the contact portion between the vibrating body and the moving body or the fixed body in the annular vibration motor, (1) a mechanism for converting the rotary motion into the linear motion is unnecessary.
（２）従って、変換機構に伴うエネルギー損失がなく、
高効率の直進アクチユエータとなるものである。(2) Therefore, there is no energy loss due to the conversion mechanism,
It is a highly efficient straight ahead actuator.
第１図は本発明にかかる振動波モータの振動体および移
動体の斜視図、 第２図は伸縮モードを励振する実施例の圧電性セラミツ
クスの電極パターン、分極極性および結線図、 第３図は面内曲げモードを励振する実施例の圧電性セラ
ミツクスの電極パターン、分極極性および結線図、 第４図および第５図は振動体両端に圧電性セラミツクス
を接合した振動体の構成を説明する図、 第６図は振動体に雄ネジを形成した実施例を示す断面
図、 第７図は振動体の内外両側にネジを形成した実施例を示
す断面図、 第８図は接触圧を安定化する実施例を示す断面図であ
る。 図において、１は振動体、3,6は移動体である。FIG. 1 is a perspective view of a vibrating body and a moving body of a vibration wave motor according to the present invention, FIG. 2 is an electrode pattern, a polarization polarity and a connection diagram of a piezoelectric ceramic of an embodiment for exciting a stretching mode, and FIG. Electrode patterns, polarization polarities and connection diagrams of the piezoelectric ceramics of the embodiment for exciting the in-plane bending mode, FIGS. 4 and 5 are views for explaining the configuration of the vibrating body in which the piezoelectric ceramics are bonded to both ends of the vibrating body, 6 is a sectional view showing an embodiment in which a male screw is formed on the vibrating body, FIG. 7 is a sectional view showing an embodiment in which a screw is formed on both inner and outer sides of the vibrating body, and FIG. 8 stabilizes the contact pressure. It is sectional drawing which shows an Example. In the figure, 1 is a vibrating body, and 3 and 6 are moving bodies.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭59−175982（ＪＰ，Ａ) 特開 昭62−4654（ＪＰ，Ａ) 英国特許2088645（ＧＢ，Ａ) 昭和61年度春季研究発表会 日本音響学 会講演論文集＝▲ＩＩ▼＝、昭和63年３月 27日、Ｐ．557〜558 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-59-175982 (JP, A) JP-A-62-4654 (JP, A) British patent 2088645 (GB, A) Spring research presentation in 1986 Japan Acoustics Conference Proceedings = ▲ II ▼ =, March 27, 1988, P. 557 ~ 558
Claims (1)
を印加することにより円形状の振動体の周方向に進行性
振動波を発生させ、該振動体と、該振動体と接触する接
触体とで相対運動させる振動波モータにおいて、 前記振動体に凸部または凹部を形成し、該凸部または凹
部にて螺旋形状を構成し、前記接触体に前記凸部または
凹部と嵌合する嵌合部を形成し、前記周方向とは異なる
方向へ前記振動体と接触体とを相対運動させることを特
徴とする振動波モータ。1. A progressive vibration wave is generated in the circumferential direction of a circular vibrating body by applying a frequency voltage to an electro-mechanical energy conversion element, and the vibrating body and a contact body in contact with the vibrating body. In a vibration wave motor that moves relative to each other, a convex portion or a concave portion is formed on the vibrating body, a spiral shape is formed by the convex portion or the concave portion, and a fitting portion that fits the convex portion or the concave portion on the contact body. And a relative movement of the vibrating body and the contact body in a direction different from the circumferential direction.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61067588A JPH0740791B2 (en) | 1986-03-25 | 1986-03-25 | Vibration wave motor |
| US07/029,182 US4734610A (en) | 1986-03-25 | 1987-03-23 | Vibration wave motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61067588A JPH0740791B2 (en) | 1986-03-25 | 1986-03-25 | Vibration wave motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62225182A JPS62225182A (en) | 1987-10-03 |
| JPH0740791B2 true JPH0740791B2 (en) | 1995-05-01 |
Family
ID=13349221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61067588A Expired - Lifetime JPH0740791B2 (en) | 1986-03-25 | 1986-03-25 | Vibration wave motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740791B2 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7170214B2 (en) * | 2003-09-08 | 2007-01-30 | New Scale Technologies, Inc. | Mechanism comprised of ultrasonic lead screw motor |
| JP4841432B2 (en) * | 2003-09-08 | 2011-12-21 | ニュー スケール テクノロジーズ インク | Ultrasonic motor for lead screw |
| JP4554976B2 (en) * | 2004-04-16 | 2010-09-29 | 太陽誘電株式会社 | Drive device |
| KR101107915B1 (en) * | 2004-08-13 | 2012-01-25 | 뉴 스케일 테크놀로지스 인코포레이티드 | Mechanism comprised of ultrasonic lead screw motor |
| CN100438307C (en) * | 2005-11-18 | 2008-11-26 | 清华大学 | Screw thread driven polyhedron ultrasonic motor |
| JP4901598B2 (en) * | 2007-06-13 | 2012-03-21 | アルプス電気株式会社 | Vibration type actuator |
| WO2013129573A1 (en) * | 2012-02-28 | 2013-09-06 | 株式会社ニコン | Vibration actuator and lens barrel |
| JP2014158373A (en) * | 2013-02-15 | 2014-08-28 | Namiki Precision Jewel Co Ltd | Vibration actuator |
| CN103133488B (en) * | 2013-03-12 | 2015-04-08 | 哈尔滨工业大学 | Sandwich type free beam torsional vibration operating mode unlockable nut |
| CN107191563A (en) * | 2017-07-25 | 2017-09-22 | 顺德职业技术学院 | Brand-new ultrasonic wave screw thread pair |
-
1986
- 1986-03-25 JP JP61067588A patent/JPH0740791B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
| Title |
|---|
| 昭和６１年度春季研究発表会日本音響学会講演論文集＝▲ＩＩ▼＝、昭和６３年３月２７日、Ｐ．５５７〜５５８ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62225182A (en) | 1987-10-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |