JPH0739057B2 - Wire electrode guide device used for wire cut electrical discharge machining - Google Patents

Wire electrode guide device used for wire cut electrical discharge machining

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Publication number
JPH0739057B2
JPH0739057B2 JP61001167A JP116786A JPH0739057B2 JP H0739057 B2 JPH0739057 B2 JP H0739057B2 JP 61001167 A JP61001167 A JP 61001167A JP 116786 A JP116786 A JP 116786A JP H0739057 B2 JPH0739057 B2 JP H0739057B2
Authority
JP
Japan
Prior art keywords
wire electrode
guide
machining
wire
peripheral wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61001167A
Other languages
Japanese (ja)
Other versions
JPS62162427A (en
Inventor
潔 井上
Original Assignee
株式会社井上ジャパックス研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社井上ジャパックス研究所 filed Critical 株式会社井上ジャパックス研究所
Priority to JP61001167A priority Critical patent/JPH0739057B2/en
Publication of JPS62162427A publication Critical patent/JPS62162427A/en
Publication of JPH0739057B2 publication Critical patent/JPH0739057B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、ワイヤカット放電加工に於て軸方向に走行移
動するワイヤ電極を被加工体と対向する加工部に位置決
めして案内するガイド装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention relates to a guide device for positioning and guiding a wire electrode that travels and moves in the axial direction in a wire-cut electric discharge machining at a machining portion facing a workpiece. Regarding

〔従来の技術〕[Conventional technology]

ワイヤカット放電加工は、間隔を置いて配置した一対の
位置決めガイド間に細線状のワイヤ電極を所定の張力と
速度とをもって軸方向に走行移動させ、この位置決めガ
イド間のワイヤ電極に被加工体を対向させて形成した加
工間隙に加工液を供給した状態で、ワイヤ電極と被加工
体間に間歇的な加工電圧パルスを印加して繰返し放電パ
ルスを発生させると共に被加工体に位置決めガイド間の
ワイヤ電極の軸方向と直交するX及びY軸方向の相対的
な加工送りを与えることによって所望形状の切抜き、切
断加工が行なわれる。ワイヤ電極としては、通常線径が
0.05〜0.5mmφ程度の銅、真鍮等の細線が使用されるた
め、ワイヤ電極に付与し得る張力がそれ程大きくないこ
ともあって、ワイヤ電極には各種外力の作用によって振
動が発生しやすい。振動発生の要因としては、軸方向に
走行するワイヤ電極が走行系から受ける外力、加工液の
供給に伴って作用する外力、加工送りに伴って作用する
外力、加工間隙で発生する放電パルスの圧力及び気泡の
破裂による圧力等が考えられる。又、通常のファースト
カットに於ては、ワイヤ電極の加工送り方向と直交する
両側面は被加工体の加工溝壁面に夫々対向していて作用
する外力がバランスしているため、ワイヤ電極は加工送
りの向きと反対の後方に撓むことになるが、ファースト
カット後の加工面を再び加工するセカンドカットや、被
加工体の表面の除去加工の場合は、ワイヤ電極の加工送
り方向と直交する両側面の内の片側が被加工体の対向壁
面がなく開放状態となるため、ワイヤ電極は加工送り方
向と直交する方向の前記開放状態側に撓んで振動しやす
い状態となる。そして、このような様々な原因による加
工部のワイヤ電極の振動は、一対の位置決めガイドを両
端の支点として発生し、振動の発生により、加工溝幅が
広がったり不均一になったりするほか、加工面に筋状痕
が形成されて加工精度を低下させることになる。
In the wire-cut electric discharge machining, a fine wire wire electrode is axially moved and moved between a pair of positioning guides arranged at intervals with a predetermined tension and speed, and a workpiece is attached to the wire electrode between the positioning guides. While the machining liquid is supplied to the machining gaps formed facing each other, intermittent machining voltage pulses are applied between the wire electrode and the workpiece to repeatedly generate electric discharge pulses and the wire between the positioning guides is positioned on the workpiece. By providing relative machining feed in the X and Y axis directions that are orthogonal to the axial direction of the electrodes, the desired shape is cut out and cut. As a wire electrode, the wire diameter is usually
Since a thin wire of copper, brass or the like having a diameter of about 0.05 to 0.5 mmφ is used, the tension that can be applied to the wire electrode may not be so large, and the wire electrode is apt to vibrate due to various external forces. The factors that cause vibration are the external force that the wire electrode traveling in the axial direction receives from the traveling system, the external force that acts with the supply of machining fluid, the external force that acts with machining feed, and the pressure of the discharge pulse generated in the machining gap. Also, the pressure due to the burst of bubbles may be considered. Also, in the normal first cut, since both side surfaces orthogonal to the machining feed direction of the wire electrode face the machining groove wall surface of the workpiece and the external force acting is balanced, the wire electrode is machined. It will bend backwards, which is the opposite of the feed direction, but in the case of a second cut that re-processes the machined surface after the first cut or removal processing of the surface of the workpiece, it is orthogonal to the machining feed direction of the wire electrode. Since one side of both side surfaces is in an open state without the facing wall surface of the workpiece, the wire electrode is easily bent and vibrated toward the open side in the direction orthogonal to the machining feed direction. The vibration of the wire electrode in the machined part due to such various causes occurs with the pair of positioning guides as fulcrums at both ends, and the machining groove width is widened or non-uniform due to the occurrence of vibration. A streak mark is formed on the surface, which reduces the processing accuracy.

このため、従来から加工部のワイヤ電極の振動を防止あ
るいは低減することが考えられ、例えば特開昭60-22802
6号公報により、位置決めガイドとガイドホルダとの間
に防振材を介在させるようにしたガイド装置が提案され
ている。
For this reason, it has been conventionally considered to prevent or reduce the vibration of the wire electrode in the processed portion.
Japanese Unexamined Patent Publication (Kokai) No. 6 proposes a guide device in which a vibration-proof material is interposed between a positioning guide and a guide holder.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

しかしながら、上記の公報に記載されるガイド装置は、
防振材として硬質のゴムやプラスチックあるいは制振合
金を用いるものであり、これ等防振材を用いることによ
り位置決めガイドとしてのワイヤ電極の位置決め精度を
保持することは可能となるかもしれないが、これ等防振
材は振動減衰作用が必ずしも大きくないため、ワイヤ電
極の振動低減効果に未だ不満が残る。又、防振材として
振動減衰作用の大きいゴム状弾性や粘弾性を有する物質
を用いると、ワイヤ電極の振動によって位置決めガイド
自体が変位することが避けられず、位置決め精度に問題
が生じる。
However, the guide device described in the above publication is
Hard rubber or plastic or damping alloy is used as a vibration isolator, and it may be possible to maintain the positioning accuracy of the wire electrode as a positioning guide by using these vibration isolator, Since these vibration damping materials do not necessarily have a large vibration damping effect, the vibration reduction effect of the wire electrode still remains unsatisfactory. Further, when a substance having rubber-like elasticity or viscoelasticity having a large vibration damping action is used as the vibration isolator, the positioning guide itself is inevitably displaced by the vibration of the wire electrode, which causes a problem in positioning accuracy.

本発明は、このような問題点に鑑み、ワイヤ電極の振動
を十分に低減することができ、且つ、位置決めガイドの
位置を安定に保持して加工部のワイヤ電極を高精度に位
置決めし得るガイド装置の提供を目的とする。
In view of such a problem, the present invention is a guide that can sufficiently reduce the vibration of the wire electrode and that can stably hold the position of the positioning guide and position the wire electrode of the processed portion with high accuracy. The purpose is to provide a device.

〔問題点を解決するための手段〕[Means for solving problems]

この目的を達成するため、本発明のワイヤ電極ガイド装
置は、ワイヤ電極が挿通する孔を有する軸状のダイスガ
イドを、該ダイスガイドの外形寸法よりも大きい内形寸
法を有する筒状の固定部材内に同軸状に配置し、前記ダ
イスガイド外周壁と前記固定部材内周壁間に結合部材を
放散同形に配置して両者を結合し、前記ダイスガイド外
周壁と前記固定部材内周壁間の空隙にゴム状弾性又は粘
弾性を有する物質を充填して形成してなることを特徴と
する。
In order to achieve this object, the wire electrode guide device of the present invention is a cylindrical fixing member having a shaft-shaped die guide having a hole through which a wire electrode is inserted and having an inner dimension larger than the outer dimension of the die guide. Are arranged coaxially within the die guide outer peripheral wall and the fixing member inner peripheral wall to dispose a coupling member in a radiation isomorphic manner to couple the two, and to form a gap between the die guide outer peripheral wall and the fixing member inner peripheral wall. It is characterized by being formed by filling a substance having rubbery elasticity or viscoelasticity.

〔作用〕[Action]

加工部のワイヤ電極を位置決めするダイスガイドを筒状
の固定部材内に結合部材によって結合することにより、
ワイヤ電極の振動によってダイスガイドが変位すること
がなく、ダイスガイドは所定配置位置に安定に保持さ
れ、加工部のワイヤ電極の位置決めが高精度に行なわれ
る。又、軸状のダイスガイドと筒状の固定部材とが同軸
状に配置され、両者間の空隙に振動減衰作用の大きいゴ
ム状弾性や粘弾性を有する物質が充填されることによ
り、ワイヤ電極からダイスガイドに伝播した振動が効率
良く減衰すると共に、ダイスガイドから結合部材に伝播
した振動も結合部材表面が前記充填物質に接触している
ことから効率良く減衰し、ワイヤ電極の振動が十分に低
減される。
By connecting the die guide for positioning the wire electrode of the processing part to the tubular fixing member by the connecting member,
The die guide is not displaced due to the vibration of the wire electrode, the die guide is stably held at a predetermined arrangement position, and the wire electrode of the processing portion is positioned with high accuracy. In addition, the shaft-shaped die guide and the cylindrical fixing member are coaxially arranged, and the gap between the two is filled with a substance having rubber-like elasticity or viscoelasticity having a large vibration damping effect, so that Vibrations propagated to the die guide are efficiently damped, and vibrations propagated from the die guide to the coupling member are also efficiently damped because the coupling member surface is in contact with the filling material, and the vibration of the wire electrode is sufficiently reduced. To be done.

〔実施例〕〔Example〕

以下、図面に基づき本発明の一実施例を説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第1図は、本発明のガイド装置を用いたワイヤカット放
電加工の状態を示す簡略説明図である。第1図に於て、
1はワイヤ電極、2は被加工体で、両者相対向して加工
間隙を形成する。3,3は被加工体2と対向する加工部の
ワイヤ電極1を位置決めする一対のダイスガイドであ
り、ワイヤ電極1は図示しないリールから繰出し供給さ
れ、ダイスガイド3,3により位置決めされて矢印の方向
に走行移動する。又、ワイヤ電極1は図示しないブレー
キ及び駆動ローラによって走行速度及び張力が制御さ
れ、所定の速度及び張力をもって走行移動する。4,4は
ガイド装置を取付ける機械本体、5はワイヤ電極1及び
被加工体2間に加工電圧パルスを印加する加工電源、6
は加工間隙に加工液を供給するノズル、7は被加工体2
を固定保持する加工台である。
FIG. 1 is a simplified explanatory view showing a state of wire cut electric discharge machining using the guide device of the present invention. In Figure 1,
Reference numeral 1 is a wire electrode, and 2 is an object to be processed, which face each other to form a processing gap. Reference numerals 3 and 3 denote a pair of die guides for positioning the wire electrode 1 of the processed portion facing the workpiece 2, and the wire electrode 1 is fed from a reel (not shown) and positioned by the die guides 3 and 3, and the arrow marks To move in the direction. The traveling speed and tension of the wire electrode 1 are controlled by a brake and a driving roller (not shown), and the wire electrode 1 travels at a predetermined speed and tension. 4, 4 are machine bodies to which the guide device is attached, 5 is a machining power source for applying a machining voltage pulse between the wire electrode 1 and the workpiece 2, and 6
Is a nozzle for supplying a machining liquid to the machining gap, and 7 is a workpiece 2
It is a processing table that holds and holds.

この構成により、一対の位置決めガイド3,3,間を更新送
りされるワイヤ電極1と被加工体2間の加工間隙にノズ
ル6から加工液を供給した状態で、加工電源5からワイ
ヤ電極1と被加工体2間に間歇的な加工電圧パルスを印
加して放電パルスを繰返して発生させると共に、通常は
加工台7にNC装置の指令によってダイスガイド3,3間の
ワイヤ電極1の軸方向と直交するX及びY軸方向の加工
送りを与えることにより、目的とする加工形状のワイヤ
カット放電加工が行なわれる。
With this configuration, the machining power is supplied from the machining power supply 5 to the wire electrode 1 while the machining liquid is supplied from the nozzle 6 to the machining gap between the wire electrode 1 and the workpiece 2 which are renewed and fed between the pair of positioning guides 3, 3. An intermittent machining voltage pulse is applied between the workpieces 2 to repeatedly generate an electric discharge pulse, and the machining table 7 is normally directed to the axial direction of the wire electrode 1 between the die guides 3 and 3 according to an NC device command. By giving the machining feeds in the X and Y axis directions orthogonal to each other, wire-cut electric discharge machining of a target machining shape is performed.

第2図及び第3図は、本発明のガイド装置の一実施例を
示す。第2図及び第3図に於て、1はワイヤ電極、3は
ワイヤ電極1が挿通する孔を有する軸状のダイスガイ
ド、10はダイスガイド3の外形寸法よりも大きい内形寸
法を有する筒状の固定部材で、一般に常用されている剛
性の高い硬質合成樹脂や金属材により形成され、ダイス
ガイド3と固定部材10は同軸状に配置されている。9は
ダイスガイド3外周壁と固定部材10内周壁間に放散同形
に、この実施例の場合90°間隔に4個配置されて、前記
外周壁と内周壁とを結合する結合部材であり、結合部材
として通常は棒状あるいは板状の金属が用いられ、結合
は溶接、接着、捩子止め等適宜手段による。8はダイス
ガイド3外周壁と固定部材10内周壁間の空隙に充填した
ゴム状弾性又は粘弾性を有する物質であり、ゴム状弾性
を有する物質としては天然ゴムや合成ゴムが、又、粘弾
性を有する物質としてはアクリル樹脂、エポキシ樹脂等
の高分子物質、コロイド分散系、金属等の多結晶質の物
質が用いられる。又、これ等の物質を適宜組合わせたも
の、あるいは前記アクリル樹脂やエポキシ樹脂と金属、
ボロン、カーボン、ガラス、繊維等を組合わせたものが
充填物質として用いられる。本発明のガイド装置はこの
ように構成され、固定部材10を機械本体4に固定して使
用される。
2 and 3 show an embodiment of the guide device of the present invention. 2 and 3, 1 is a wire electrode, 3 is a shaft-shaped die guide having a hole through which the wire electrode 1 is inserted, and 10 is a cylinder having an inner size larger than the outer size of the die guide 3. The fixing member 10 is formed of a hard synthetic resin or a metal material having high rigidity that is commonly used, and the die guide 3 and the fixing member 10 are coaxially arranged. Numeral 9 is a coupling member for radiating and isolating between the outer peripheral wall of the die guide 3 and the inner peripheral wall of the fixing member 10. In this embodiment, four are arranged at 90 ° intervals to couple the outer peripheral wall and the inner peripheral wall. A rod-shaped or plate-shaped metal is usually used as the member, and the joining is performed by an appropriate means such as welding, adhesion, and screw fixing. Reference numeral 8 is a substance having rubber-like elasticity or viscoelasticity filled in the space between the outer peripheral wall of the die guide 3 and the inner peripheral wall of the fixing member 10. As the substance having rubbery elasticity, natural rubber or synthetic rubber is used. As the substance having the above, a polymer substance such as an acrylic resin or an epoxy resin, a colloidal dispersion system, or a polycrystalline substance such as a metal is used. In addition, a combination of these substances as appropriate, or the acrylic resin or epoxy resin and a metal,
A combination of boron, carbon, glass, fibers, etc. is used as the filling material. The guide device of the present invention is configured in this way, and the fixing member 10 is used by fixing it to the machine body 4.

本発明のガイド装置は、このように位置決めガイドであ
るダイスガイド3を筒状の固定部材10内に結合部材9に
よって一体に結合してなるため、ダイスガイド3はワイ
ヤ電極1の振動によって変位することがなく所定配置位
置に安定に保持され、ワイヤ電極が加工部に精度良く位
置決めされる。又、ワイヤ電極の振動は各種原因により
避けることができないが、軸状のダイスガイド3と筒状
の固定部材10とが同軸状に配置され、両者間の空隙に高
い振動減衰特性を有する前記充填物質8が充填されてい
るため、ワイヤ電極1からダイスガイド3に伝播した振
動を効率良く減衰させることができ、又、結合部材9の
表面も前記充填物質8に接触しているため、ダイスガイ
ド3から係合部材9に伝播した振動も効率良く減衰させ
ることができ、ワイヤ電極の振動を十分に減衰すること
ができる。
In the guide device of the present invention, since the die guide 3 which is the positioning guide is integrally connected to the cylindrical fixing member 10 by the connecting member 9 as described above, the die guide 3 is displaced by the vibration of the wire electrode 1. In this way, the wire electrode is stably held in a predetermined arrangement position, and the wire electrode is accurately positioned in the processed portion. Although the vibration of the wire electrode cannot be avoided due to various causes, the axial die guide 3 and the cylindrical fixing member 10 are coaxially arranged, and the gap between the two has a high vibration damping characteristic. Since the substance 8 is filled, the vibration propagated from the wire electrode 1 to the die guide 3 can be efficiently damped, and the surface of the coupling member 9 is also in contact with the filled substance 8, so that the die guide The vibration propagated from 3 to the engaging member 9 can also be efficiently damped, and the vibration of the wire electrode can be damped sufficiently.

実験結果によれば、0.2mmφの銅線をワイヤ電極として
従来通常の位置決めガイドを用いて加工したとき、加工
面に約10〜20μm程度の筋状凹凸が形成されたのに対し
て、本発明のガイド装置を用いたときには、この筋状凹
凸を1/10程度に減少させることができた。
According to the experimental results, when a 0.2 mmφ copper wire is processed as a wire electrode using a conventional ordinary positioning guide, streaky irregularities of about 10 to 20 μm are formed on the processed surface, whereas the present invention When the guide device of No. 1 was used, the streaky unevenness could be reduced to about 1/10.

又、本発明のガイド装置は、位置決めガイドとしてダイ
スガイドを用いているため、加工送りの向きに無関係に
ワイヤ電極を安定してガイドすることができ、又、ワイ
ヤ電極の加工送り方向と直交する両側面の内の片側が被
加工体と対向せず開放状態となるセカンドカット等を行
なう場合にもワイヤ電極を安定してガイドすることがで
きる。
Further, since the guide device of the present invention uses the die guide as the positioning guide, it can stably guide the wire electrode regardless of the direction of the machining feed, and is orthogonal to the machining feed direction of the wire electrode. The wire electrode can be stably guided even when a second cut or the like is performed in which one side of both side surfaces does not face the workpiece and is in an open state.

〔発明の効果〕〔The invention's effect〕

以上述べた通り、本発明のガイド装置によれば、加工部
のワイヤ電極の振動を十分に低減することができ、且
つ、位置決めガイドの位置を所定配置位置に安定に保持
して加工部のワイヤ電極を高精度に位置決めすることが
でき、この結果、精度の良いワイヤカット放電加工を安
定して行なうことができる。
As described above, according to the guide device of the present invention, it is possible to sufficiently reduce the vibration of the wire electrode of the processing part, and to stably hold the position of the positioning guide at the predetermined arrangement position and to wire the processing part. The electrodes can be positioned with high precision, and as a result, highly accurate wire cut electric discharge machining can be stably performed.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明のガイド装置を用いたワイヤカット放電
加工の状態を示す簡略説明図、第2図は本発明の一実施
例装置の側断面図、第3図はその上断面図である。 1……ワイヤ電極、2……被加工体、3……ダイスガイ
ド、8……ゴム状弾性又は粘弾性を有する物質、9……
結合部材、10……固定部材、
FIG. 1 is a simplified explanatory view showing a state of wire-cut electric discharge machining using a guide device of the present invention, FIG. 2 is a side sectional view of an embodiment of the present invention device, and FIG. 3 is an upper sectional view thereof. . 1 ... Wire electrode, 2 ... Workpiece, 3 ... Dice guide, 8 ... Substance having rubber-like elasticity or viscoelasticity, 9 ...
Coupling member, 10 ... Fixing member,

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】軸方向に走行移動するワイヤ電極を位置決
めして案内する一対のガイド装置を所定の間隔を置いて
配置し、該一対のガイド装置間のワイヤ電極に被加工体
を対向させて加工間隙を形成し、該加工間隙に加工液を
供給した状態で、ワイヤ電極と被加工体間に間歇的な加
工電圧パルスを印加して繰返し放電パルスを発生させる
と共に被加工体に前記一対のガイド装置間のワイヤ電極
の軸方向と直角方向の相対的な加工送りを与えて所望形
状の加工を行なうワイヤカット放電加工に用いる前記ガ
イド装置であって、ワイヤ電極が挿通する孔を有する軸
状のダイスガイドを、該ダイスガイドの外形寸法よりも
大きい内形寸法を有する筒状の固定部材内に同軸状に配
置し、前記ダイスガイド外周壁と前記固定部材内周壁間
に結合部材を放散同形に配置して両者を結合し、前記ダ
イスガイド外周壁と前記固定部材内周壁間の空隙にゴム
状弾性又は粘弾性を有する物質を充填して形成してなる
ことを特徴とするワイヤカット放電加工に用いるワイヤ
電極ガイド装置。
1. A pair of guide devices for positioning and guiding a wire electrode traveling in the axial direction are arranged at a predetermined interval, and a work piece is opposed to the wire electrode between the pair of guide devices. A machining gap is formed, and a machining liquid is supplied to the machining gap, and an intermittent machining voltage pulse is applied between the wire electrode and the workpiece to repeatedly generate electric discharge pulses, and at the same time A guide device for use in wire-cut electric discharge machining, in which a desired shape is machined by providing a relative machining feed in a direction perpendicular to the axial direction of the wire electrode between the guide devices, the shaft device having a hole through which the wire electrode is inserted. The die guide is coaxially arranged in a cylindrical fixing member having an inner dimension larger than the outer dimension of the die guide, and the coupling member is dissipated between the outer peripheral wall of the die guide and the inner peripheral wall of the fixing member. Formed by arranging them in a shape and connecting them, and filling the gap between the outer peripheral wall of the die guide and the inner peripheral wall of the fixing member with a substance having rubber-like elasticity or viscoelasticity. Wire electrode guide device used for processing.
JP61001167A 1986-01-07 1986-01-07 Wire electrode guide device used for wire cut electrical discharge machining Expired - Fee Related JPH0739057B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61001167A JPH0739057B2 (en) 1986-01-07 1986-01-07 Wire electrode guide device used for wire cut electrical discharge machining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61001167A JPH0739057B2 (en) 1986-01-07 1986-01-07 Wire electrode guide device used for wire cut electrical discharge machining

Publications (2)

Publication Number Publication Date
JPS62162427A JPS62162427A (en) 1987-07-18
JPH0739057B2 true JPH0739057B2 (en) 1995-05-01

Family

ID=11493879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61001167A Expired - Fee Related JPH0739057B2 (en) 1986-01-07 1986-01-07 Wire electrode guide device used for wire cut electrical discharge machining

Country Status (1)

Country Link
JP (1) JPH0739057B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999039859A1 (en) * 1998-02-05 1999-08-12 Mitsubishi Denki Kabushiki Kaisha Wire discharge machining apparatus
AU8357498A (en) * 1998-07-24 2000-02-14 Kiyoshi Inoue Wirecut electric discharge machining method and apparatus
JP5490255B2 (en) * 2010-11-24 2014-05-14 三菱電機株式会社 Wire electrical discharge machining apparatus and semiconductor wafer manufacturing method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60228026A (en) * 1984-04-21 1985-11-13 Inoue Japax Res Inc Wire guide device for wire-cut electric discharge machining

Also Published As

Publication number Publication date
JPS62162427A (en) 1987-07-18

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