JPH0738365A - Energy confinement type resonator and its manufacture - Google Patents

Energy confinement type resonator and its manufacture

Info

Publication number
JPH0738365A
JPH0738365A JP18398193A JP18398193A JPH0738365A JP H0738365 A JPH0738365 A JP H0738365A JP 18398193 A JP18398193 A JP 18398193A JP 18398193 A JP18398193 A JP 18398193A JP H0738365 A JPH0738365 A JP H0738365A
Authority
JP
Japan
Prior art keywords
electrode
silicone
piezoelectric substrate
vibrating electrode
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18398193A
Other languages
Japanese (ja)
Inventor
Yoshihiro Ikeda
吉宏 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP18398193A priority Critical patent/JPH0738365A/en
Publication of JPH0738365A publication Critical patent/JPH0738365A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To prevent a fact that residual wax is remelted by reheating and suppresses vibration of a vibration electrode by forming a void in the vibration electrode part by a sheathing resin containing silicone, and covering a piezoelectric substrate. CONSTITUTION:On a piezoelectric substrate 1, a vibration electrode 2a, and a drawer electrode 2b led out in the opposite directions, respectively from the vibration electrode 2a are formed, and an external terminal 3 is soldered to the drawer electrode 2b. Subsequently, to the vibration electrode 2a on both faces and an area being wider than this electrode, one component type thermosetting silicone whose surface tension is small and whose permeability is strong is applied. Next, to the piezoelectric substrate 1, the thermosetting silicone and a connected part of the external terminal 3, a sheathing resin 5 consisting of a porous thermosetting resin is applied by an immersion method. Thereafter, that which is applied by the sheathing resin 5 is put into an oven, heated and the sheathing resin 5 is hardened porously, and simultaneously, silicone is infilterated into a calcined pore of the sheathing resin 5, and also, hardened, and a void 6 is formed in the part on which silicone is applied.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、エネルギー閉じ込め型
共振子およびその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an energy trap type resonator and a method for manufacturing the resonator.

【0002】[0002]

【従来の技術】従来、この種のエネルギー閉じ込め型共
振子の製造方法に関しては、特公昭45−22384号
公報に記載されている。この従来例における製造方法に
おいては、空隙形成剤として、パラフィンやワックスの
如く、加熱により融解と蒸発を径由する物質あるいは気
化する物質などが開示されている。そして、この従来技
術によって、エネルギー閉じ込め型共振子を利用したフ
ィルタ、例えば、FMラジオの10.7MHzフィル
タ、TVの4.5MHzフィルタ等、膨大な数のフィル
タが作られ、世界のAV製品に使用されてきている。
2. Description of the Related Art Conventionally, a method for manufacturing this type of energy trap type resonator is described in Japanese Patent Publication No. 45-22384. In the manufacturing method in this conventional example, as the void-forming agent, a substance that causes melting and evaporation by heating or a substance that vaporizes, such as paraffin and wax, is disclosed. Then, with this conventional technique, a huge number of filters such as a filter using an energy trap type resonator, for example, a 10.7 MHz filter for FM radio, a 4.5 MHz filter for TV, etc. are produced and used in AV products around the world. Has been done.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、この従
来の製造方法を工程で実施した場合、工程管理ミスも関
与して、次のような不具合がときに発生していた。即
ち、ワックスが加熱により完全に溶融して、外装樹脂に
吸収されず、もしくは外装樹脂の外に蒸発せずに、電極
上に残留して、その残留ワックスの負荷により電気特性
が劣化する。仮に、その初期特性がスペックを満足して
工場出荷されたとしても、セットに組み込んでセットを
動作させて、セットが回路の動作熱で熱くなり、50℃
〜60℃になってくると、この温度は丁度ワックスの溶
融温度なので、残留ワックスが再溶融して粘性を帯びて
きて、電極振動を抑圧するため、特性が変動悪化する。
これが、セラミック発振子の場合ならば、残留ワックス
が固化しているときには、通常振幅で発振しているが、
上記のように、50℃〜60℃になってくると、残留ワ
ックスが再溶融して粘性を帯びて、電極振動を抑圧する
ため、発振振幅が小さくなり発振停止になる。しかし、
セットをオフにして暫くしてからオンにすると、前記特
性悪化したセラミックフィルタあるいは発振停止したセ
ラミック発振子は、ワックスが冷えて固化しているの
で、尋常に動作する。そして、セットが熱を帯びて50
℃〜60℃になると、再度、前記のような不良モードを
繰り返すことになる。しかし、このサイクルを何回も繰
返しているうちに、この不良モードは起きなくなる。こ
のサイクルの間に、ワックスが熱溶融して外装樹脂に吸
収されるか、蒸発してしまうからである。
However, when this conventional manufacturing method is carried out in steps, the following problems sometimes occur due to process control errors. That is, the wax is completely melted by heating and is not absorbed by the exterior resin, or is not evaporated outside the exterior resin and remains on the electrode, and the load of the residual wax deteriorates the electrical characteristics. Even if the initial characteristics satisfy the specifications and are shipped from the factory, they are incorporated into the set and the set is operated, and the set heats up due to the operating heat of the circuit, and the temperature rises to 50 ° C.
When the temperature reaches -60 ° C, this temperature is just the melting temperature of the wax, so the residual wax remelts and becomes viscous, suppressing the electrode vibration, and the characteristics fluctuate and deteriorate.
If this is a ceramic oscillator, it will oscillate with normal amplitude when the residual wax is solidified,
As described above, when the temperature reaches 50 ° C. to 60 ° C., the residual wax is re-melted and becomes viscous to suppress the electrode vibration, so that the oscillation amplitude becomes small and the oscillation stops. But,
When the set is turned off and turned on after a while, the ceramic filter with deteriorated characteristics or the ceramic oscillator whose oscillation is stopped always operates because the wax is cooled and solidified. And the set gets hot and 50
When the temperature reaches 60 ° C to 60 ° C, the defective mode as described above is repeated again. However, after repeating this cycle many times, this failure mode does not occur. This is because the wax is melted by heat and absorbed by the exterior resin or evaporated during this cycle.

【0004】したがって、本発明は、空隙形成剤に表面
張力が小さく且つ浸透性の強い熱硬化性シリコーンを使
用して、加熱処理後振動電極上にたとえ残留シリコーン
があったにしても、それを熱硬化させてしまうので、再
加熱により再溶融して振動電極の振動を抑圧することの
ないネルギー閉じ込め型共振子およびその製造方法を提
供することを目的とする。
Accordingly, the present invention uses a thermosetting silicone having a low surface tension and a high permeability as a void-forming agent to remove any residual silicone on the vibrating electrode after heat treatment. It is an object of the present invention to provide a energy confinement type resonator and a method for manufacturing the same, which does not suppress the vibration of the vibrating electrode by being re-melted by reheating because it is thermally cured.

【0005】[0005]

【課題を解決するための手段】本発明は、一つには、圧
電基板の両面にエネルギー閉じ込め型振動電極が設けら
れ、この振動電極からは引出し電極が導出され、この引
出し電極には外部端子がそれぞれ接続され、前記圧電基
板および外部端子の接続部分が、前記振動電極およびこ
の振動電極よりやや広いエリアの上部に空隙が形成され
て、シリコーンを含有する外装樹脂で被覆されてなるエ
ネルギー閉じ込め型共振子とし、二つには、圧電基板の
両面にエネルギー閉じ込め型振動電極およびこの振動電
極からの引出し電極を形成し、前記引き出し電極に外部
端子を接続し、前記振動電極およびこの振動電極よりや
や広いエリアに、熱硬化性シリコーンを塗布し、前記外
部端子が接続され、熱硬化性シリコーンが塗布された圧
電基板を、多孔性熱硬化性樹脂で被覆し、前記多孔性熱
硬化性樹脂を加熱硬化させてポアを形成し、このポア中
に前記シリコーンを浸透させ且つ硬化させて、シリコー
ンの塗布されていた部分に空隙を形成してなるエネルギ
ー閉じ込め型共振子の製造方法としたものである。
According to one aspect of the present invention, energy confinement type vibrating electrodes are provided on both surfaces of a piezoelectric substrate, an extraction electrode is led out from the vibrating electrode, and an external terminal is connected to the extraction electrode. Energy confinement type in which the piezoelectric substrate and the external terminal are connected to each other, and a void is formed in the upper part of the vibrating electrode and an area slightly larger than the vibrating electrode, and the piezoelectric substrate and the external terminal are covered with an exterior resin containing silicone. As the resonator, two are provided with an energy trapping vibrating electrode on both sides of the piezoelectric substrate and an extraction electrode from this vibrating electrode, an external terminal is connected to the extraction electrode, and the vibrating electrode and this vibrating electrode are slightly A large area is coated with thermosetting silicone, the external terminals are connected, and the piezoelectric substrate coated with thermosetting silicone is porous. Coating with a curable resin, heat-curing the porous thermosetting resin to form pores, and allowing the silicone to penetrate and cure into the pores to form voids in the portion where the silicone was applied. The present invention is a method for manufacturing an energy trap type resonator having the following structure.

【0006】[0006]

【作用】本発明に係るエネルギー閉じ込め型共振子は、
シリコーンを含有している外装樹脂で、振動電極部分に
空隙が形成されて、圧電基板が被覆されており、振動電
極上にたとえ残留シリコーンがあつたにしても、加熱に
より残留シリコーンは硬化しているので、再溶融して、
振動電極の振動を抑圧することがない。また、エネルギ
ー閉じ込め型共振子の製造方法においては、空隙形成剤
に、表面張力が小さく且つ浸透性の強い熱硬化性シリコ
ーンを使用しているので、前記多孔性熱硬化性樹脂を加
熱硬化させてポアを形成し、このポア中に前記シリコー
ンが浸透し且つ硬化されることになる。
The energy trap type resonator according to the present invention is
With the exterior resin containing silicone, the piezoelectric substrate is covered with voids formed in the vibrating electrode part, and even if there is residual silicone on the vibrating electrode, the residual silicone is cured by heating. So remelt it,
The vibration of the vibrating electrode is not suppressed. Further, in the method of manufacturing the energy trap type resonator, since the thermosetting silicone having a small surface tension and a high permeability is used as the void forming agent, the porous thermosetting resin is cured by heating. A pore will be formed into which the silicone will penetrate and cure.

【0007】[0007]

【実施例】次に、本発明の実施例を図面を参照して説明
する。図1の工程は、圧電基板1の両面中央部にエネル
ギー閉じ込め型共振子の振動電極2aと、この振動電極
2aからそれぞれ反対方向に導出された引き出し電極2
bとを、蒸着もしくはスパッタリングにより形成し、そ
して引き出し電極2bに外部端子3を半田接続するもの
である。
Embodiments of the present invention will now be described with reference to the drawings. In the process shown in FIG. 1, the vibrating electrode 2a of the energy trap type resonator is provided at the center of both surfaces of the piezoelectric substrate 1, and the extraction electrodes 2 are respectively led out in opposite directions from the vibrating electrode 2a.
b is formed by vapor deposition or sputtering, and the external terminal 3 is soldered to the extraction electrode 2b.

【0008】図2の工程は、両面の振動電極2aおよび
これよりやや広いエリアに、表面張力が小さく、浸透性
が強くおよび粘度35p(25℃において)の1成分型
熱硬化性シリコーン4を、ディスペンサで塗布するもの
である。
In the process shown in FIG. 2, the one-component thermosetting silicone 4 having a small surface tension, a high penetrability and a viscosity of 35 p (at 25 ° C.) is applied to the vibrating electrodes 2a on both sides and an area slightly wider than the vibrating electrodes 2a. It is applied with a dispenser.

【0009】図3の工程は、圧電基板1、熱硬化性シリ
コーン4および外部端子3の接続部分に、エポキシ樹脂
などの多孔性熱硬化性樹脂からなる外装樹脂5を、浸漬
方法により塗布するものである。
In the step shown in FIG. 3, the exterior resin 5 made of a porous thermosetting resin such as an epoxy resin is applied to the connection portion of the piezoelectric substrate 1, the thermosetting silicone 4 and the external terminal 3 by a dipping method. Is.

【0010】図4の工程は、図3に示す外装樹脂5の塗
布されたものを、オーブンに入れて150℃で、120
分間加熱して、外装樹脂5をポーラスに硬化させると同
時に、この外装樹脂5の焼成ポアの中にシリコーン4を
浸透させて且つ硬化させ、シリコーンが塗布されていた
部分に、空隙6を形成するものである。
In the process of FIG. 4, the product coated with the exterior resin 5 shown in FIG. 3 is placed in an oven at 150 ° C. for 120
By heating for 5 minutes to cure the exterior resin 5 into a porous state, at the same time, the silicone 4 is allowed to penetrate into the firing pores of the exterior resin 5 and cured to form a void 6 in the portion where the silicone was applied. It is a thing.

【0011】本発明に係るエネルギー閉じ込め型共振子
の製造方法は、上記のような工程よりなり、この製造方
法により製造されたエネルギー閉じ込め型共振子は、次
のような構成になる。即ち、圧電基板の両面にエネルギ
ー閉じ込め型振動電極が設けられ、この振動電極からは
引出し電極がそれぞれ反対方向に導出され、この引出し
電極には外部端子がそれぞれ半田接続され、前記圧電基
板および外部端子の接続部分が、前記振動電極およびこ
の振動電極よりやや広いエリアの上部に空隙が形成され
て、シリコーンを含有する外装樹脂で被覆されてなるエ
ネルギー閉じ込め型共振子。
The method of manufacturing the energy trapping resonator according to the present invention comprises the steps as described above, and the energy trapping resonator manufactured by this manufacturing method has the following structure. That is, energy confinement type vibrating electrodes are provided on both surfaces of a piezoelectric substrate, lead electrodes are led out in opposite directions from the vibrating electrodes, and external terminals are respectively solder-connected to the lead electrodes. The energy confinement type resonator in which a connecting portion of the above is formed with a void above the vibrating electrode and an area slightly wider than the vibrating electrode and is covered with an exterior resin containing silicone.

【0012】[0012]

【発明の効果】本発明に係るエネルギー閉じ込め型共振
子は、シリコーンを含有している外装樹脂で、振動電極
部分に空隙が形成されて、圧電基板が被覆されており、
振動電極上にたとえ残留シリコーンがあつたにしても、
加熱により残留シリコーンが硬化しているので、従来例
の使用ワックスのように、再溶融して、振動電極の振動
を抑圧することがない。また、外装樹脂のポアにシリコ
ーンが浸透して硬化しているので、耐湿性に優れてい
る。また、エネルギー閉じ込め型共振子の製造方法にお
いては、空隙形成剤に表面張力が小さくかつ浸透性の強
い熱硬化性シリコーンを使用しているので、従来例にお
ける使用ワックスに比べ、空隙に残留するワックスが少
なくなる。
The energy trap type resonator according to the present invention is an exterior resin containing silicone, in which a gap is formed in the vibrating electrode portion and the piezoelectric substrate is covered.
Even if there is residual silicone on the vibrating electrode,
Since the residual silicone is hardened by heating, it does not re-melt and suppress the vibration of the vibrating electrode unlike the wax used in the conventional example. Further, since the silicone penetrates into the pores of the exterior resin and is cured, it has excellent moisture resistance. Further, in the method of manufacturing the energy trap type resonator, since the thermosetting silicone having a low surface tension and a high permeability is used as the void forming agent, the wax remaining in the voids is larger than the wax used in the conventional example. Is less.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の製造方法において、圧電基板に振動
電極、引出し電極および外部端子を設ける工程図
FIG. 1 is a process diagram of providing a vibrating electrode, a lead electrode, and an external terminal on a piezoelectric substrate in a manufacturing method of the present invention.

【図2】 図1に示す振動電極およびそれよりもやや広
いエリアに熱硬化性シリコーンを塗布する工程図
FIG. 2 is a process diagram of applying thermosetting silicone to the vibrating electrode shown in FIG. 1 and an area slightly wider than it.

【図3】 図2に示す圧電基板、熱硬化性シリコーンお
よび外部端子接続部を多孔性熱硬化性樹脂中に浸漬して
外装樹脂を設ける工程図
3 is a process diagram in which the piezoelectric substrate, the thermosetting silicone, and the external terminal connecting portion shown in FIG. 2 are immersed in a porous thermosetting resin to provide an exterior resin.

【図4】 図3に示す外装樹脂の塗布されたものを加熱
して、外装樹脂をポーラスに硬化させると同時に、この
外装樹脂の焼成ポア中にシリコーンを浸透させて且つ硬
化させ、シリコーンが塗布されていた部分に、空隙を形
成する工程図
FIG. 4 is a diagram showing a case in which the coating of the exterior resin shown in FIG. 3 is heated to cure the exterior resin into a porous structure, and at the same time, silicone is allowed to penetrate into the firing pores of the exterior resin and to be cured to apply the silicone. Process drawing to form a void in the part that had been

【符号の説明】[Explanation of symbols]

1 圧電基板 2a 振動電極 2b 引出し電極 3 外部端子 4 熱硬化性シリコーン 5 外装樹脂 6 空隙 1 Piezoelectric Substrate 2a Vibration Electrode 2b Lead-out Electrode 3 External Terminal 4 Thermosetting Silicone 5 Exterior Resin 6 Void

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 圧電基板の両面にエネルギー閉じ込め型
振動電極が設けられ、この振動電極からは引出し電極が
導出され、この引出し電極には外部端子がそれぞれ接続
され、前記圧電基板および外部端子の接続部分が、前記
振動電極およびこの振動電極よりやや広いエリアの上部
に空隙が形成されて、シリコーンを含有する外装樹脂で
被覆されてなるエネルギー閉じ込め型共振子。
1. An energy trapping type vibrating electrode is provided on both surfaces of a piezoelectric substrate, a lead electrode is led out from the vibrating electrode, and external terminals are respectively connected to the lead electrode, and the piezoelectric substrate and the external terminal are connected. An energy trapping resonator in which a portion is covered with an exterior resin containing silicone in which a void is formed above the vibrating electrode and an area slightly wider than the vibrating electrode.
【請求項2】 圧電基板の両面にエネルギー閉じ込め型
振動電極およびこの振動電極からの引出し電極を形成
し、 前記引き出し電極に外部端子を接続し、 前記振動電極およびこの振動電極よりやや広いエリア
に、熱硬化性シリコーンを塗布し、 前記外部端子が接続されおよび熱硬化性シリコーンが塗
布された圧電基板を、多孔性熱硬化性樹脂で被覆し、 前記多孔性熱硬化性樹脂を加熱硬化させてポアを形成
し、このポア中に前記シリコーンを浸透させ且つ硬化さ
せて、シリコーンの塗布されていた部分に空隙を形成し
てなるエネルギー閉じ込め型共振子の製造方法。
2. An energy trapping type vibrating electrode and a lead electrode from the vibrating electrode are formed on both surfaces of a piezoelectric substrate, an external terminal is connected to the lead electrode, and the vibrating electrode and an area slightly wider than the vibrating electrode are provided. A thermosetting silicone is applied, the piezoelectric substrate to which the external terminals are connected and thermosetting silicone is applied is covered with a porous thermosetting resin, and the porous thermosetting resin is heat-cured to form a pore. And a method of forming an air gap in the portion where the silicone has been applied by infiltrating the silicone into the pores and curing the silicone.
JP18398193A 1993-07-26 1993-07-26 Energy confinement type resonator and its manufacture Pending JPH0738365A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18398193A JPH0738365A (en) 1993-07-26 1993-07-26 Energy confinement type resonator and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18398193A JPH0738365A (en) 1993-07-26 1993-07-26 Energy confinement type resonator and its manufacture

Publications (1)

Publication Number Publication Date
JPH0738365A true JPH0738365A (en) 1995-02-07

Family

ID=16145229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18398193A Pending JPH0738365A (en) 1993-07-26 1993-07-26 Energy confinement type resonator and its manufacture

Country Status (1)

Country Link
JP (1) JPH0738365A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6717328B2 (en) * 2001-03-27 2004-04-06 Murata Manufacturing Co., Ltd. Piezoelectric resonator and FM detection circuit incorporating the same
WO2022168937A1 (en) * 2021-02-05 2022-08-11 株式会社村田製作所 Elastic wave device and method for manufacturing elastic wave device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6717328B2 (en) * 2001-03-27 2004-04-06 Murata Manufacturing Co., Ltd. Piezoelectric resonator and FM detection circuit incorporating the same
WO2022168937A1 (en) * 2021-02-05 2022-08-11 株式会社村田製作所 Elastic wave device and method for manufacturing elastic wave device

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