JPH0737423A - Dielectric ceramic composition for high-frequency - Google Patents

Dielectric ceramic composition for high-frequency

Info

Publication number
JPH0737423A
JPH0737423A JP5200313A JP20031393A JPH0737423A JP H0737423 A JPH0737423 A JP H0737423A JP 5200313 A JP5200313 A JP 5200313A JP 20031393 A JP20031393 A JP 20031393A JP H0737423 A JPH0737423 A JP H0737423A
Authority
JP
Japan
Prior art keywords
oxide
dielectric ceramic
ceramic composition
weight
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5200313A
Other languages
Japanese (ja)
Other versions
JP2977707B2 (en
Inventor
Tatsuya Kikuchi
竜哉 菊池
Osamu Taguchi
修 田口
Yasushi Iijima
康 飯島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
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Publication of JPH0737423A publication Critical patent/JPH0737423A/en
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Publication of JP2977707B2 publication Critical patent/JP2977707B2/en
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Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To provide a dielectric ceramic composition for high-frequency in which a large epsilonr over a wide baking temperature scope, and a large Q-value and a small TCf in the microwave scope can be obtained, and furthermore, the variation scope of the TCf to the unevenness of the baking temperature is small, and the electric characteristics is stable and excellent. CONSTITUTION:The main components are a barium oxide, a titanium oxide, and a neodymium oxide, and when they are converted to BaO, TiO2, and Nd2O3, and shown as the composition formula: xBaO.yTiO2.zNd2O3, x+y+z=100mol%, and 8<=x<=19, 62<=y<=73, and 12<=z<=19. Furthermore, a bismuth oxide, a niobium oxide, and manganese oxide are contained, and when they are converted to Bi2O3, Nb2O5, and MnO, 2.5 to 11.3wt.% of Bi2O3, 0.05 to 1.5wt.% of Nb2O5, and 0.05 to 1.5wt.% of MnO are contained to the main component.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、主にマイクロ波領域で
使用される誘電体共振器等の材料として用いる高周波用
誘電体磁器組成物に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high frequency dielectric ceramic composition used as a material for a dielectric resonator mainly used in a microwave region.

【0002】[0002]

【従来の技術】誘電体共振器の使用周波数領域が拡大す
るにつれて、マイクロ波領域で使用される誘電体共振器
でも小型化が求められている。そのためこれまでに種々
の誘電体磁器組成物が開発されているが、このような組
成物に求められる特性としては、特に小型化を可能にす
るために比誘電率(εr )が高く、誘電損失を低く押さ
えるためにQが高く、さらに温度変化に対する特性変動
を低く押さえるために共振周波数温度係数(TCf)が
小さいこと等である。
2. Description of the Related Art As the frequency range of use of dielectric resonators expands, there is a demand for miniaturization of dielectric resonators used in the microwave range. Therefore, various dielectric porcelain compositions have been developed so far, but the properties required for such compositions are high relative permittivity (εr) in order to enable downsizing and dielectric loss. Is high in order to keep low, and the resonance frequency temperature coefficient (TCf) is small in order to keep characteristic fluctuation due to temperature change low.

【0003】このような目的で用いるものとして、従来
提案されている誘電体磁器組成物としては、例えば、B
aO−TiO2 −Nd23 −Bi23 系などの材料
が知られている。さらに、特開平2−275756号公
報において、BaO−TiO2 −Nd23 −Me−B
23 (ただしMeはDy23 または 1/3Pr4
11)、あるいは特開平4−104949号公報におい
て、BaO−TiO2 −Nd23 −Pr211/3−B
23 等の組成物が開示されている。
As a dielectric ceramic composition conventionally proposed for use for such a purpose, for example, B
Materials such as aO—TiO 2 —Nd 2 O 3 —Bi 2 O 3 system are known. Further, in JP-A-2-275756 discloses, BaO-TiO 2 -Nd 2 O 3 -Me-B
i 2 O 3 (However, Me is Dy 2 O 3 or 1 / 3Pr 4 O
11), or in JP-A 4-104949 discloses, BaO-TiO 2 -Nd 2 O 3 -Pr 2 O 11/3 -B
Compositions such as i 2 O 3 have been disclosed.

【0004】しかし、これらの組成物を用いて高周波用
誘電体共振器を構成する際、誘電体磁器製造時に、焼成
温度がわずかに変化することでTCf特性が大きく変動
してしまう。さらに、焼成温度のわずかな低下によりε
r やQが大きく低下することがある。そのため、安定し
た電気特性をもつ誘電体磁器を得ることがむずかしく、
製品の不良率も高くなってしまう。したがって、従来の
組成物を用いて安定した電気特性をもつ誘電体磁器を得
るためには、焼成温度の精密な管理が必要となってい
る。
However, when a high-frequency dielectric resonator is formed by using these compositions, the TCf characteristics greatly change due to a slight change in the firing temperature during the production of the dielectric ceramic. Furthermore, due to a slight decrease in the firing temperature, ε
r and Q may be greatly reduced. Therefore, it is difficult to obtain a dielectric ceramic with stable electric characteristics,
The defective rate of the product will also increase. Therefore, it is necessary to precisely control the firing temperature in order to obtain a dielectric porcelain having stable electric characteristics by using the conventional composition.

【0005】[0005]

【発明が解決しようとする課題】本発明の目的は、広い
焼成温度範囲で大きな比誘電率εr と、マイクロ波領域
での大きなQと、小さなTCfとが得られ、さらに、焼
成温度変化に対してTCfの変化幅が小さい、安定です
ぐれた電気特性をもつ高周波用誘電体磁器組成物を提供
することにある。
The object of the present invention is to obtain a large relative permittivity εr, a large Q in the microwave region, and a small TCf in a wide firing temperature range, and further to a firing temperature change. Another object of the present invention is to provide a dielectric ceramic composition for high frequencies, which has a small change width of TCf and has stable and excellent electric characteristics.

【0006】[0006]

【課題を解決するための手段】このような目的は、下記
(1)〜(5)の本発明により達成される。 (1)酸化バリウムと酸化チタンと酸化ネオジムとを主
成分として含み、酸化バリウム、酸化チタンおよび酸化
ネオジムをそれぞれBaO、TiO2 およびNd23
に換算し、前記主成分を組成式xBaO・yTiO2
zNd23 で表わしたとき、x+y+z=100モル
%として、8≦x≦19、62≦y≦73および12≦
z≦19であり、さらに、酸化ビスマス、酸化ニオブお
よび酸化マンガンをそれぞれBi23、Nb25
よびMnOに換算したとき、前記組成式の主成分に対し
てBi23 が2.5〜11.3重量%、Nb25
0.05〜1.5重量%およびMnOが0.05〜1.
5重量%添加されている高周波用誘電体磁器組成物。 (2)9≦x≦18、65≦y≦73、14≦z≦19
であり、Bi23 が3.0〜11.0重量%、Nb2
5 が0.1〜1.0重量%、MnOが0.1〜1.0
重量%添加されている上記(1)の高周波用誘電体磁器
組成物。 (3)前記酸化ネオジムの一部は、酸化ランタンおよび
酸化プラセオジムの1種以上で置換されていてもよく、
酸化ランタンおよび酸化プラセオジムをそれぞれLa2
3 およびPr211/3に換算し、前記主成分を組成式
xBaO・yTiO2 ・z[(Nd231-m-n (L
23m (Pr211/3n ]で表わしたとき、0
≦m≦0.13、0≦n≦0.13である上記(1)ま
たは(2)の高周波用誘電体磁器組成物。 (4)0≦m≦0.1、0≦n≦0.1である上記
(3)の高周波用誘電体磁器組成物。 (5)4GHz における比誘電率εr が60以上、4GHz
における無負荷時のQが1000以上、さらに−40〜
80℃における共振周波数温度係数TCfが30ppm /
℃ 以下である上記(1)〜(4)のいずれかの高周波
用誘電体磁器組成物。
These objects are achieved by the present invention described in (1) to (5) below. (1) Contains barium oxide, titanium oxide, and neodymium oxide as main components, and contains barium oxide, titanium oxide, and neodymium oxide as BaO, TiO 2, and Nd 2 O 3 , respectively.
To the composition formula xBaO · yTiO 2 ·
When expressed by zNd 2 O 3 , x ≦ y + z = 100 mol%, 8 ≦ x ≦ 19, 62 ≦ y ≦ 73 and 12 ≦
z ≦ 19, and when bismuth oxide, niobium oxide and manganese oxide are converted into Bi 2 O 3 , Nb 2 O 5 and MnO, respectively, Bi 2 O 3 is 2. 5 to 11.3% by weight, Nb 2 O 5 is 0.05 to 1.5% by weight, and MnO is 0.05 to 1.
A high-frequency dielectric ceramic composition containing 5% by weight. (2) 9 ≦ x ≦ 18, 65 ≦ y ≦ 73, 14 ≦ z ≦ 19
And Bi 2 O 3 is 3.0 to 11.0 wt%, Nb 2
O 5 is 0.1 to 1.0% by weight, MnO is 0.1 to 1.0
The high frequency dielectric ceramic composition according to the above (1), which is added by weight%. (3) A part of the neodymium oxide may be substituted with one or more of lanthanum oxide and praseodymium oxide,
Lanthanum oxide and praseodymium oxide were added to La 2 respectively.
Converted to O 3 and Pr 2 O 11/3 , the main component is expressed by the composition formula xBaO · yTiO 2 · z [(Nd 2 O 3 ) 1-mn (L
a 2 O 3 ) m (Pr 2 O 11/3 ) n ]
The high frequency dielectric ceramic composition according to the above (1) or (2), wherein ≦ m ≦ 0.13 and 0 ≦ n ≦ 0.13. (4) The high frequency dielectric ceramic composition according to the above (3), wherein 0 ≦ m ≦ 0.1 and 0 ≦ n ≦ 0.1. (5) Dielectric constant εr at 4GHz is 60 or more, 4GHz
At no load in 1000 is 1000 or more, and further -40 to
Resonance frequency temperature coefficient TCf at 80 ℃ is 30ppm /
The dielectric ceramic composition for high frequencies according to any one of the above (1) to (4), which has a temperature equal to or lower than ° C.

【0007】[0007]

【具体的構成】以下に、本発明の具体的構成について詳
細に説明する。
[Specific Configuration] The specific configuration of the present invention will be described in detail below.

【0008】本発明の高周波用誘電体磁器組成物は、酸
化バリウムと酸化チタンと酸化ネオジムとを主成分とし
て含む。この酸化バリウム、酸化チタンおよび酸化ネオ
ジムをそれぞれBaO、TiO2 およびNd23 に換
算し、前記主成分を組成式xBaO・yTiO2 ・zN
23 で表わしたとき、x+y+z=100モル%と
して、xは、8≦x≦19、より好ましくは9≦x≦1
8である。また、yは、62≦y≦73、より好ましく
は65≦y≦73である。さらに、zは、12≦z≦1
9、より好ましくは14≦z≦19である。
The high frequency dielectric ceramic composition of the present invention contains barium oxide, titanium oxide and neodymium oxide as main components. The barium oxide, titanium oxide and neodymium oxide are converted into BaO, TiO 2 and Nd 2 O 3 , respectively, and the main component is represented by the composition formula xBaO · yTiO 2 · zN.
When represented by d 2 O 3 , x + y + z = 100 mol%, x is 8 ≦ x ≦ 19, and more preferably 9 ≦ x ≦ 1.
8 Further, y is 62 ≦ y ≦ 73, and more preferably 65 ≦ y ≦ 73. Furthermore, z is 12 ≦ z ≦ 1.
9, more preferably 14 ≦ z ≦ 19.

【0009】xが小さすぎるとQが小さくなる。また大
きすぎてもQが小さくなり、その上焼成温度が高くなる
とTCfが+側に大きくなる。yが小さすぎると焼結性
が悪化し、εr およびQがともに小さくなる。また大き
すぎてもεr およびQがともに小さくなる。zが小さす
ぎるとQが小さくなり、また大きすぎてもεr およびQ
がともに小さくなる。
If x is too small, Q will be small. Further, if it is too large, Q becomes small, and if the firing temperature becomes high, TCf becomes large on the + side. When y is too small, the sinterability deteriorates, and both εr and Q become small. Further, if it is too large, both εr and Q become small. If z is too small, Q becomes small, and if too large, εr and Q
Both become smaller.

【0010】本発明の高周波用誘電体磁器組成物には、
さらに、前記主成分に、酸化ビスマス、酸化ニオブおよ
び酸化マンガンを添加する。添加量としては、酸化ビス
マス、酸化ニオブおよび酸化マンガンをそれぞれBi2
3 、Nb25 およびMnOに換算したとき、前記主
成分に対してBi23 の添加量は2.5〜11.3重
量%、より好ましくは3.0〜11.0重量%、特に
3.0〜10.0重量%である。また、Nb25 の添
加量は、前記主成分に対して0.05〜1.5重量%、
より好ましくは0.1〜1.0重量%である。さらに、
MnOの添加量は、前記主成分に対して0.05〜1.
5重量%、より好ましくは0.1〜1.0重量%であ
る。
The high frequency dielectric ceramic composition of the present invention comprises:
Further, bismuth oxide, niobium oxide and manganese oxide are added to the main component. The addition amounts of bismuth oxide, niobium oxide and manganese oxide are Bi 2
When converted into O 3 , Nb 2 O 5 and MnO, the added amount of Bi 2 O 3 is 2.5 to 11.3% by weight, more preferably 3.0 to 11.0% by weight, based on the main component. , Especially 3.0 to 10.0% by weight. The amount of Nb 2 O 5 added is 0.05 to 1.5% by weight with respect to the main component,
More preferably, it is 0.1 to 1.0% by weight. further,
The amount of MnO added is 0.05 to 1.
It is 5% by weight, more preferably 0.1 to 1.0% by weight.

【0011】酸化ビスマスの添加量が少なすぎるとTC
fが+側に大きくなり、また多すぎるとQが小さくな
る。酸化ニオブの添加量が少なすぎると焼成温度により
TCfが大きく変化し、その上焼成温度が低い場合には
εr およびQがともに小さくなる。また多すぎてもεr
が小さくなる。酸化マンガンの添加量が少なすぎると焼
結性が悪化し、さらにεr およびQが小さくなる。また
多すぎるとεr およびQがともに小さくなり、さらにT
Cfが+側に大きくなる。
If the amount of bismuth oxide added is too small, TC
If f becomes large on the + side, and if it is too large, Q becomes small. When the amount of niobium oxide added is too small, TCf changes greatly depending on the firing temperature, and when the firing temperature is low, both εr and Q decrease. If too much, εr
Becomes smaller. If the amount of manganese oxide added is too small, the sinterability deteriorates and εr and Q decrease. If too much, both εr and Q become small, and
Cf increases toward the + side.

【0012】また、本発明の高周波用誘電体磁器組成物
では、前記酸化ネオジムの一部が、酸化ランタンおよび
酸化プラセオジムの1種または2種で置換されていても
よい。
In the high frequency dielectric ceramic composition of the present invention, part of the neodymium oxide may be replaced with one or two of lanthanum oxide and praseodymium oxide.

【0013】酸化ネオジムがこれらによって置換されて
いる場合、酸化ランタンおよび酸化プラセオジムをそれ
ぞれLa23 およびPr211/3に換算し、前記主成
分を組成式xBaO・yTiO2 ・z[(Nd23
1-m-n (La23m (Pr211/3n ]で表わし
たとき、m+n>0、0≦m≦0.13、好ましくは0
≦m≦0.1、0≦n≦0.13、好ましくは0≦n≦
0.1であり、通常は、m+nは0.01以上とされ
る。
When neodymium oxide is substituted by these, lanthanum oxide and praseodymium oxide are converted into La 2 O 3 and Pr 2 O 11/3 , respectively, and the main component is represented by the composition formula xBaO.yTiO 2 .z [( Nd 2 O 3 )
1-mn (La 2 O 3 ) m (Pr 2 O 11/3 ) n ], m + n> 0, 0 ≦ m ≦ 0.13, preferably 0
≦ m ≦ 0.1, 0 ≦ n ≦ 0.13, preferably 0 ≦ n ≦
0.1, and usually m + n is 0.01 or more.

【0014】酸化ネオジムの一部を置換した酸化ランタ
ンの置換量が多すぎると、εr およびQがともに小さく
なり、そのうえTCfが+側に大きくなってくる。ま
た、酸化ネオジムの一部を置換した酸化プラセオジムの
置換量が多すぎてもTCfが+側に大きくなる。
When the substitution amount of lanthanum oxide in which a part of neodymium oxide is substituted is too large, both εr and Q become small and TCf becomes large on the + side. Further, even if the substitution amount of praseodymium oxide, which is a part of neodymium oxide, is too large, TCf increases to the + side.

【0015】さらに、これらの組成成分の他に、原料あ
るいは製造工程の材質等に由来する成分等による酸化ケ
イ素、酸化アルミニウム等が組成物全体の0.1重量%
程度以下含まれていてもよい。
Further, in addition to these composition components, silicon oxide, aluminum oxide, etc. due to components derived from raw materials or materials in the manufacturing process are 0.1% by weight of the total composition.
It may be included below the degree.

【0016】このような組成とすることで、本発明の高
周波用誘電体磁器組成物は、製造時の焼成温度が125
0℃程度で、4GHz における比誘電率εr が60以上、
特に63〜73、また、4GHz における無負荷時のQが
1000以上、特に1000〜1480、さらに−40
〜80℃における共振周波数温度係数TCfが30ppm/
℃以下、特に+4〜+28ppm/℃というすぐれた電気特
性を有する。さらにTCfの変化幅が焼成温度1220
〜1380℃、特に1250〜1350℃の範囲で5pp
m/℃以内となり、TCfが焼成温度のバラツキに対して
すぐれた安定性をもつ。
With such a composition, the high frequency dielectric ceramic composition of the present invention has a firing temperature of 125 at the time of manufacture.
Relative permittivity εr at 4 GHz is 60 or more at about 0 ℃,
Especially, 63 to 73, and Q at no load at 4 GHz is 1000 or more, especially 1000 to 1480, and further -40.
Resonance frequency temperature coefficient TCf at ~ 80 ℃ is 30ppm /
It has excellent electrical characteristics below ℃, especially +4 to +28 ppm / ℃. Further, the change width of TCf is 1220 at the firing temperature.
〜1380 ℃, especially 5pp in the range of 1250-1350 ℃
Within m / ° C, TCf has excellent stability against variations in firing temperature.

【0017】本発明の高周波用誘電体磁器組成物は、こ
のような組成物を、通常は例えば混合、仮焼、粉砕、混
練、成形、焼成等の処理を行なうことで得られるが、処
理工程等は特に限定されず、また、その条件等も公知の
条件から適宜選択すればよい。
The high frequency dielectric porcelain composition of the present invention is usually obtained by subjecting such a composition to treatments such as mixing, calcination, pulverization, kneading, molding and firing. Etc. are not particularly limited, and the conditions and the like may be appropriately selected from known conditions.

【0018】用いる原料に特に制限はないが、通常は前
記各酸化物を構成する金属成分元素を含む原料粉末を混
合して用いることが好ましい。この際原料粉末として
は、酸化物あるいは後の焼成により酸化物となるもので
ある。すなわち、通常前記の各酸化物を構成する元素を
含む例えば、酸化物、炭酸塩、水酸化物等から選択すれ
ばよい。
The raw materials to be used are not particularly limited, but it is usually preferable to mix and use raw material powders containing the metal component elements forming the above oxides. At this time, the raw material powder is an oxide or an oxide which is formed by subsequent firing. That is, it may be selected from, for example, oxides, carbonates, hydroxides, etc., which usually contain the elements constituting the above oxides.

【0019】これら用いる原料粉末の平均粒径は、好ま
しくは5μm 以下、より好ましくは0.5〜3.0μm
である。
The raw material powders used have an average particle size of preferably 5 μm or less, more preferably 0.5 to 3.0 μm.
Is.

【0020】このような原料粉末を、最終組成が前記組
成となるように秤量し、混合するが、混合する方法や時
間等に特に制限はなく、成分が十分分散する方法および
時間を選択すればどのようであってもよい。混合を湿式
で行なう場合には、溶媒として水や低級アルコール類等
を単独でまたは2種以上混合して用いればよい。
[0020] Such raw material powders are weighed and mixed so that the final composition is the above composition, but there is no particular limitation on the mixing method or time, and the method and time for sufficiently dispersing the components can be selected. It doesn't matter. When the mixing is performed by a wet method, water, lower alcohols or the like may be used as a solvent alone or in combination of two or more kinds.

【0021】得られた混合物は、適当な方法で脱水、乾
燥等を行った後、通常は仮焼を行なえばよい。仮焼は通
常、空気中で1000〜1200℃程度の温度で、2〜
4時間程度行なう。さらに、仮焼により得られた仮焼物
は、適当な方法により粗粉砕の後、平均粒径0.5〜
3.0μm 程度に粉砕すればよく、このとき湿式粉砕を
行う場合は前記湿式混合で用いられる溶媒から1種ある
いは2種以上混合して用いればよい。
The mixture thus obtained may be dehydrated and dried by an appropriate method, and then usually calcined. The calcination is usually performed in air at a temperature of about 1000 to 1200 ° C. for 2 to
Do about 4 hours. Further, the calcined product obtained by calcination is coarsely pulverized by an appropriate method, and then the average particle size is 0.5 to
The particles may be pulverized to about 3.0 μm, and when wet pulverization is performed at this time, one or more of the solvents used in the wet mixing may be mixed and used.

【0022】粉砕後の粉末に、通常は粉末100重量部
に対して2.0〜5.0重量部程度バインダを加えて混
合した後、加圧成形を行なえばよい。バインダとして
は、通常ポリビニルアルコール等が用いられる。加圧成
形は、例えば適当なサイズの金型にバインダ等を混合し
た前記粉末を充填し、成形圧2〜5t/cm2 程度で行えば
よい。
Usually, 2.0 to 5.0 parts by weight of a binder is added to the pulverized powder with respect to 100 parts by weight of the powder, and the mixture is mixed and then pressure-molded. As the binder, polyvinyl alcohol or the like is usually used. The pressure molding may be carried out, for example, by filling a mold of an appropriate size with the powder mixed with a binder and the like, and at a molding pressure of about 2 to 5 t / cm 2 .

【0023】焼成は、昇温速度を50〜300℃/h程
度、降温速度を50〜300℃/h程度とし、1250〜
1350℃程度で、1〜5時間程度、大気中等の酸素雰
囲気下で行えばよい。
The firing is carried out at a temperature rise rate of about 50 to 300 ° C./h and a temperature fall rate of about 50 to 300 ° C./h, at 1250 to 1250.
It may be performed at about 1350 ° C. for about 1 to 5 hours in an oxygen atmosphere such as the air.

【0024】このようにして得られた焼成体は、主相と
してBaNd2 Ti514相、また、副相としてBa2
Ti920をもつ。このような相は、X線回折(XR
D)により確認することができる。
The thus obtained fired body, BaNd 2 Ti 5 O 14 phase as a main phase, also, Ba 2 as subphase
It has Ti 9 O 20 . Such a phase is an X-ray diffraction (XR
It can be confirmed by D).

【0025】得られた焼成体は、通常は1〜3μm 程度
のグレインサイズの主相と、3〜10μm 程度のグレイ
ンサイズの副相と、1μm 以下程度のバウンダリー相と
をもつ。
The fired body thus obtained usually has a main phase having a grain size of about 1 to 3 μm, a secondary phase having a grain size of about 3 to 10 μm, and a boundary phase of about 1 μm or less.

【0026】このような本発明の高周波用誘電体磁器組
成物は、通常800MHz 〜3GHz 程度の周波数帯域で好
ましく用いられる。代表的な用途例としては、自動車電
話共用器、段間フィルタに代表されるバンドパスフィル
タ電圧制御発振素子等の共振素子の材料等を挙げること
ができる。さらに、マイクロ波集積回路基板、高周波電
力用コンデンサ材料としても使用できる。
Such a high frequency dielectric ceramic composition of the present invention is usually preferably used in a frequency band of about 800 MHz to 3 GHz. Examples of typical applications include materials for resonance elements such as car telephone duplexers and bandpass filter voltage controlled oscillators represented by interstage filters. Furthermore, it can also be used as a microwave integrated circuit board and a capacitor material for high frequency power.

【0027】[0027]

【実施例】以下に、本発明の具体的実施例を示し、本発
明をさらに詳細に説明する。
EXAMPLES The present invention will be described in more detail below by showing specific examples of the present invention.

【0028】実施例1 出発原料として、BaCO3 、TiO2 、Nd23
Bi23 、Nb25 、MnOの粉末を用い、焼結後
の最終組成が表1および表2に示す各試料番号の組成と
なるように各成分粉末を秤量し、ボールミル中で、溶媒
として水を用いて20時間湿式混合したのち、脱水、乾
燥して混合物を得た。
Example 1 As starting materials, BaCO 3 , TiO 2 , Nd 2 O 3 ,
Using powders of Bi 2 O 3 , Nb 2 O 5 and MnO, each component powder was weighed so that the final composition after sintering would be the composition of each sample number shown in Table 1 and Table 2, and in a ball mill, Water was used as a solvent for 20 hours of wet mixing, followed by dehydration and drying to obtain a mixture.

【0029】この混合物を1000〜1200℃、2時
間仮焼後、得られた仮焼物を粗粉砕し、さらにボールミ
ル中でジルコニア球と共に溶媒として水を用いて湿式粉
砕を行った。
This mixture was calcined at 1000 to 1200 ° C. for 2 hours, the obtained calcined product was roughly pulverized, and then wet pulverized in a ball mill together with zirconia balls using water as a solvent.

【0030】得られた粉砕物にバインダとしてポリビニ
ルアルコールを加えて混合・造粒し、直径12.7mm、
高さ7mmの円柱状に加圧成形したのち、1250℃、1
300℃および1350℃の各温度で2時間焼成して誘
電体磁器を得た。
Polyvinyl alcohol was added as a binder to the obtained pulverized product, and the mixture was mixed and granulated to give a diameter of 12.7 mm,
After pressure molding into a cylinder with a height of 7 mm, 1250 ° C, 1
It was fired at each temperature of 300 ° C. and 1350 ° C. for 2 hours to obtain a dielectric ceramic.

【0031】得られた誘電体磁器を直径10mm、高さ5
mmに加工してそれぞれ試料番号1〜13および21〜3
4とし、2枚の平行な金属板の間に前記円柱状の各誘電
体磁器試料をはさんで共振器を構成して下記に示す方法
により諸特性を測定した。得られた結果を表1および表
2にまとめて示す。なお、表1および表2中で、添加物
成分の組成は、主成分に対する重量%で示した。
The obtained dielectric porcelain has a diameter of 10 mm and a height of 5
processed into mm and sample numbers 1 to 13 and 21 to 3 respectively
4, each of the cylindrical dielectric ceramic samples was sandwiched between two parallel metal plates to form a resonator, and various characteristics were measured by the following methods. The obtained results are summarized in Tables 1 and 2. In addition, in Table 1 and Table 2, the composition of the additive component is shown by weight% with respect to the main component.

【0032】[0032]

【表1】 [Table 1]

【0033】[0033]

【表2】 [Table 2]

【0034】<誘電特性測定方法>比誘電率εr および
Qは誘電体共振器法(Hakki and Coleman の方法)によ
り、約4GHz でのTE01δモードの共振をネットワーク
アナライザで測定した。測定温度は25±10℃、測定
湿度は25〜85%RHとし、測定器はヒューレットパ
ッカード社製ネットワークアナライザ:HP8510B
を使用した。
<Method of Measuring Dielectric Properties> The relative permittivity εr and Q were measured by the dielectric resonator method (Hakki and Coleman's method) to measure the TE 01 δ mode resonance at about 4 GHz with a network analyzer. The measuring temperature is 25 ± 10 ° C., the measuring humidity is 25 to 85% RH, and the measuring instrument is a network analyzer made by Hewlett-Packard: HP8510B.
It was used.

【0035】<共振周波数温度係数TCf測定方法>測
定温度−40〜80℃における共振周波数frの変化を
誘電体共振器法(Hakki and Coleman の方法)により測
定し、数1式によりTCfを算出した。
<Resonance Frequency Temperature Coefficient TCf Measuring Method> The change of the resonance frequency fr at the measuring temperature of -40 to 80 ° C. was measured by the dielectric resonator method (Hakki and Coleman's method), and TCf was calculated by the equation (1). .

【0036】[0036]

【数1】 [Equation 1]

【0037】実施例2 出発原料として、BaCO3 、TiO2 、Nd23
La23 、Pr211/3、Bi23 、Nb25
MnOの粉末を用い、焼結後の最終組成が表3に示す各
試料番号の組成となるように各成分粉末を秤量し、他は
実施例1と同様に処理して試料番号41〜50を得た。
ただし、添加物成分の添加量は、Bi23 、Nb25
およびMnO換算で、それぞれ7.5重量%、0.2
重量%および0.1重量%とした。得られた各試料を実
施例1と同様にして諸特性を測定した。得られた結果を
表3にまとめて示す。なお、表3中で、置換成分の組成
は、Nd23 に対する置換量をモル比で示した。
Example 2 As starting materials, BaCO 3 , TiO 2 , Nd 2 O 3 ,
La 2 O 3 , Pr 2 O 11/3 , Bi 2 O 3 , Nb 2 O 5 ,
Using MnO powder, each component powder was weighed so that the final composition after sintering would be the composition of each sample number shown in Table 3, and otherwise the same as in Example 1 to treat sample numbers 41 to 50. Obtained.
However, the additive amount of the additive component is Bi 2 O 3 , Nb 2 O 5
And 7.5% by weight in terms of MnO and 0.2, respectively.
% And 0.1% by weight. Various properties of each of the obtained samples were measured in the same manner as in Example 1. The results obtained are summarized in Table 3. In Table 3, the composition of the substituting component is shown by the molar ratio of the substituting amount with respect to Nd 2 O 3 .

【0038】[0038]

【表3】 [Table 3]

【0039】[0039]

【発明の効果】表1、表2および表3に示す電気特性の
測定結果より明らかなように、本発明の高周波用誘電体
磁器組成物は、εr が大きく、TCfが比較的小さいた
め、従来の誘電体磁器組成物よりきびしい周波数温度安
定性の要求に応じることが可能となった。さらに、Nb
25 の添加により安定焼成温度域が広がったため、製
造時の焼成温度の管理が容易になり、焼成炉の精密な温
度管理設備が不要となった。また、Bi23 の添加量
を変化させることで、TCf値を30ppm/℃以下に制御
することが可能となった。さらにMnOの添加により焼
結性が向上し、その上Nb25 を添加したことによる
Q値の低下が防止できた。すなわち、すぐれた電気特性
をもつ高周波用誘電体磁器組成物が安定して製造可能と
なった。
As is clear from the measurement results of the electrical characteristics shown in Tables 1, 2 and 3, the high frequency dielectric ceramic composition of the present invention has a large εr and a relatively small TCf, and therefore has a conventional value. It is possible to meet the demand for frequency temperature stability which is more severe than that of the dielectric ceramic composition. Furthermore, Nb
Since the stable firing temperature range was expanded by the addition of 2 O 5 , it became easy to control the firing temperature during manufacturing, and the precise temperature control equipment of the firing furnace became unnecessary. Further, by changing the addition amount of Bi 2 O 3 , it became possible to control the TCf value to 30 ppm / ° C. or less. Further, the addition of MnO improved the sinterability, and the reduction of the Q value due to the addition of Nb 2 O 5 could be prevented. That is, a high frequency dielectric ceramic composition having excellent electrical characteristics can be stably manufactured.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 酸化バリウムと酸化チタンと酸化ネオジ
ムとを主成分として含み、酸化バリウム、酸化チタンお
よび酸化ネオジムをそれぞれBaO、TiO2 およびN
23 に換算し、前記主成分を組成式xBaO・yT
iO2 ・zNd23 で表わしたとき、x+y+z=1
00モル%として、8≦x≦19、62≦y≦73およ
び12≦z≦19であり、 さらに、酸化ビスマス、酸化ニオブおよび酸化マンガン
をそれぞれBi23、Nb25 およびMnOに換算
したとき、前記組成式の主成分に対してBi23
2.5〜11.3重量%、Nb25 が0.05〜1.
5重量%およびMnOが0.05〜1.5重量%添加さ
れている高周波用誘電体磁器組成物。
1. Barium oxide, titanium oxide and neodymium oxide are contained as main components, and barium oxide, titanium oxide and neodymium oxide are contained in BaO, TiO 2 and N, respectively.
Converted to d 2 O 3 , the main component is expressed by the composition formula xBaO · yT
When expressed as iO 2 · zNd 2 O 3 , x + y + z = 1
00 mol%, 8 ≦ x ≦ 19, 62 ≦ y ≦ 73 and 12 ≦ z ≦ 19. Further, bismuth oxide, niobium oxide and manganese oxide are converted into Bi 2 O 3 , Nb 2 O 5 and MnO, respectively. when, Bi 2 O 3 is 2.5 to 11.3 wt% with respect to the main component of the composition formula, Nb 2 O 5 is 0.05.
A dielectric ceramic composition for high frequencies, containing 5% by weight and 0.05 to 1.5% by weight of MnO.
【請求項2】 9≦x≦18、65≦y≦73、14≦
z≦19であり、Bi23 が3.0〜11.0重量
%、Nb25 が0.1〜1.0重量%、MnOが0.
1〜1.0重量%添加されている請求項1の高周波用誘
電体磁器組成物。
2. 9 ≦ x ≦ 18, 65 ≦ y ≦ 73, 14 ≦
z ≦ 19, Bi 2 O 3 is 3.0 to 11.0% by weight, Nb 2 O 5 is 0.1 to 1.0% by weight, and MnO is 0.
The high frequency dielectric ceramic composition according to claim 1, wherein the dielectric ceramic composition is added in an amount of 1 to 1.0% by weight.
【請求項3】 前記酸化ネオジムの一部は、酸化ランタ
ンおよび酸化プラセオジムの1種以上で置換されていて
もよく、酸化ランタンおよび酸化プラセオジムをそれぞ
れLa23 およびPr211/3に換算し、前記主成分
を組成式xBaO・yTiO2 ・z[(Nd23
1-m-n (La23m (Pr211/3n ]で表わし
たとき、0≦m≦0.13、0≦n≦0.13である請
求項1または2の高周波用誘電体磁器組成物。
3. A part of the neodymium oxide may be substituted with one or more kinds of lanthanum oxide and praseodymium oxide, and the lanthanum oxide and praseodymium oxide are converted into La 2 O 3 and Pr 2 O 11/3 , respectively. The composition of the main component is xBaO · yTiO 2 · z [(Nd 2 O 3 ).
1-mn (La 2 O 3 ) m (Pr 2 O 11/3 ) n ], 0 ≦ m ≦ 0.13 and 0 ≦ n ≦ 0.13. Dielectric porcelain composition.
【請求項4】 0≦m≦0.1、0≦n≦0.1である
請求項3の高周波用誘電体磁器組成物。
4. The high frequency dielectric ceramic composition according to claim 3, wherein 0 ≦ m ≦ 0.1 and 0 ≦ n ≦ 0.1.
【請求項5】 4GHz における比誘電率εr が60以
上、4GHz における無負荷時のQが1000以上、さら
に−40〜80℃における共振周波数温度係数TCfが
30ppm /℃ 以下である請求項1〜4のいずれかの高
周波用誘電体磁器組成物。
5. The relative permittivity εr at 4 GHz is 60 or more, the unloaded Q at 4 GHz is 1000 or more, and the resonance frequency temperature coefficient TCf at −40 to 80 ° C. is 30 ppm / ° C. or less. 2. A high-frequency dielectric ceramic composition according to any one of 1.
JP5200313A 1993-07-20 1993-07-20 High frequency dielectric ceramic composition Expired - Lifetime JP2977707B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100401943B1 (en) * 2000-11-17 2003-10-17 홍국선 Dielectric Ceramic Compositions and Manufacturing Method using the same compositions

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3640342B2 (en) 2000-05-22 2005-04-20 Tdk株式会社 Design method of dielectric composition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100401943B1 (en) * 2000-11-17 2003-10-17 홍국선 Dielectric Ceramic Compositions and Manufacturing Method using the same compositions

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