JPH0737226A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPH0737226A JPH0737226A JP22841591A JP22841591A JPH0737226A JP H0737226 A JPH0737226 A JP H0737226A JP 22841591 A JP22841591 A JP 22841591A JP 22841591 A JP22841591 A JP 22841591A JP H0737226 A JPH0737226 A JP H0737226A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin film
- film magnetic
- magnetic head
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Heads (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、浮上型の薄膜磁気ヘッ
ドに関し、更に詳しくは、磁性膜のポール部と媒体との
間に、キャパシタの蓄積電荷による放電が生じるのを阻
止できるようにした薄膜磁気ヘッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating type thin film magnetic head, and more specifically, it is possible to prevent discharge caused by accumulated charges in a capacitor between a pole portion of a magnetic film and a medium. The present invention relates to a thin film magnetic head.
【０００２】[0002]
【従来の技術】この種の薄膜磁気ヘッドは、スライダ
と、薄膜磁気変換素子とを有し、薄膜磁気変換素子があ
る電位に保たれるコイル膜と、コイル膜と共に薄膜磁気
回路を構成する磁性膜とを有しており、磁性膜とコイル
膜との間にキャパシタが発生する。2. Description of the Related Art A thin film magnetic head of this type has a slider and a thin film magnetic conversion element, and a coil film that holds the thin film magnetic conversion element at a certain potential, and a magnetic film that constitutes a thin film magnetic circuit together with the coil film. A film, and a capacitor is generated between the magnetic film and the coil film.
【０００３】一方、最近の小型ＨＤＤでは、パソコン搭
載を考慮してパソコン電源である５ボルト、１２ボルト
をそのまま利用すべく、小型ＨＤＤ用の読み書き用ＩＣ
も５ボルトまたは１２ボルトの片電源を用いるようにな
っている。このため、薄膜磁気ヘッドは一定電圧、具体
的には、６ボルトの正電圧で常時バイアスされる。その
結果、キャパシタはバイアス電圧により常時一方向に電
荷が蓄積される。On the other hand, in the recent compact HDD, a read / write IC for the compact HDD is used in order to use 5 volt and 12 volt which are the power source of the personal computer in consideration of mounting on the personal computer.
Also uses a single 5 or 12 volt power supply. Therefore, the thin film magnetic head is constantly biased with a constant voltage, specifically, a positive voltage of 6 volts. As a result, the capacitor always accumulates charges in one direction due to the bias voltage.
【０００４】キャパシタに蓄積された電荷はポ−ル部と
媒体との接触などによる放電により放出され、磁性膜の
電位が変動する。磁性膜の電位変動によりコモンモード
ノイズが発生し、読み取りデ−タにエラ−を生じる。か
かる放電防止技術に関する先行技術文献としては、例え
ば、特開平２−２４６０４８号公報等がある。この先行
技術においては、薄膜磁気ヘッドのバイアス電位と媒体
の電位とを等しくして放電を生じさせないようにしてい
る。The charges accumulated in the capacitor are discharged by the discharge caused by the contact between the pole portion and the medium, and the potential of the magnetic film fluctuates. Common mode noise is generated due to the potential fluctuation of the magnetic film, which causes an error in the read data. Prior art documents relating to such discharge prevention technology include, for example, Japanese Patent Laid-Open No. 2-246048. In this prior art, the bias potential of the thin film magnetic head and the potential of the medium are made equal to each other to prevent discharge.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上述し
た先行技術では、薄膜磁気ヘッドのバイアス電位と媒体
の電位とを等しくするために、回転する媒体に薄膜磁気
ヘッドと同電位にする手段を設けることが必須になるの
で、磁気ディスク装置の構造が複雑となり、大型化を招
くと共に、高価になっている。However, in the above-mentioned prior art, in order to equalize the bias potential of the thin-film magnetic head and the potential of the medium, the rotating medium is provided with a means for making the same potential as the thin-film magnetic head. Is essential, the structure of the magnetic disk device is complicated, the size is increased, and the cost is increased.
【０００６】そこで本発明の課題は、上述する従来の問
題点を解決し、薄膜磁気回路に対する影響を著しく小さ
くして、安定した放電防止作用が得られるようにした薄
膜磁気ヘッドを提供することである。Therefore, an object of the present invention is to solve the above-mentioned conventional problems and to provide a thin film magnetic head in which the influence on the thin film magnetic circuit is remarkably reduced and a stable discharge preventing action is obtained. is there.
【０００７】[0007]
【課題を解決するための手段】上述した課題解決のた
め、本発明は、スライダと、薄膜磁気変換素子と、接続
導体とを有する薄膜磁気ヘッドであって、前記スライダ
は、導電性基体の表面に絶縁膜を有しており、前記薄膜
磁気変換素子は、磁性膜とコイル膜とを含む薄膜磁気回
路を有し、前記絶縁膜の上に設けられており、前記接続
導体は、第１導電部と第２導電部とを有し、前記第１導
電部が前記絶縁膜を貫通して前記導電性基体に接続さ
れ、前記第２導電部が非磁性導電材料で構成され前記絶
縁膜の上に設けられて前記第１導電部と前記磁性膜とを
電気的に接続していることを特徴とする。In order to solve the above problems, the present invention is a thin film magnetic head having a slider, a thin film magnetic conversion element, and a connecting conductor, wherein the slider is a surface of a conductive substrate. Has an insulating film, the thin-film magnetic conversion element has a thin-film magnetic circuit including a magnetic film and a coil film, and is provided on the insulating film, and the connection conductor has a first conductive film. And a second conductive portion, the first conductive portion penetrating the insulating film and connected to the conductive base, and the second conductive portion made of a non-magnetic conductive material on the insulating film. And electrically connecting the first conductive portion and the magnetic film.
【０００８】[0008]
【作用】接続導体は、第１導電部が絶縁膜を貫通して導
電性基体に接続され、第２導電部が絶縁膜の上に設けら
れ第１導電部と磁性膜とを電気的に接続しているので、
磁性膜が、アース電位に保たれるスライダの導電性基体
と同電位となる。このため、キャパシタへ電荷が蓄積さ
れたとしても、アース電位にある磁性膜と、同じくアー
ス電位に保たれる媒体との間で、キャパシタの蓄積電荷
に起因する放電を生じる余地がない。In the connection conductor, the first conductive portion penetrates the insulating film and is connected to the conductive base body, and the second conductive portion is provided on the insulating film to electrically connect the first conductive portion and the magnetic film. Because
The magnetic film is at the same potential as the conductive substrate of the slider which is kept at ground potential. Therefore, even if the charge is stored in the capacitor, there is no room for causing the discharge due to the stored charge in the capacitor between the magnetic film at the ground potential and the medium also kept at the ground potential.
【０００９】接続導体は、第２導電部が非磁性導電材料
で構成されているから、薄膜磁気回路に対する磁気的な
影響が小さくなり、設計に即した特性を有する薄膜磁気
ヘッドが得られる。Since the second conductive portion of the connecting conductor is made of a non-magnetic conductive material, the magnetic influence on the thin film magnetic circuit is reduced, and a thin film magnetic head having characteristics suitable for the design can be obtained.
【００１０】接続導体は、第１導電部が絶縁膜を貫通し
て導電性基体に接続され、第２導電部が絶縁膜の上に設
けられているから、保護膜等によって完全に覆われた状
態で内部で電気的接続が完結している。このため、電気
的接続不良等を生じる余地がなく、安定した電荷蓄積阻
止作用が得られる。Since the connecting conductor has the first conductive portion penetrating the insulating film to be connected to the conductive substrate and the second conductive portion provided on the insulating film, it is completely covered with the protective film or the like. In this state, electrical connection is completed internally. For this reason, there is no room for electrical connection failure and the like, and a stable charge accumulation blocking action can be obtained.
【００１１】接続導体は、第１導電部が絶縁膜を貫通し
て導電性基体に接続され、第２導電部が絶縁膜の上に設
けられているから、接続導体及び薄膜磁気変換素子を、
基体の上で精度よく積層してゆくことが可能である。In the connection conductor, the first conductive portion penetrates the insulating film and is connected to the conductive substrate, and the second conductive portion is provided on the insulating film. Therefore, the connection conductor and the thin film magnetic conversion element are
It is possible to stack them on the substrate with high precision.
【００１２】[0012]
【実施例】図１は本発明に係る薄膜磁気ヘッドの薄膜磁
気変換素子の部分の透視図、図２は空気流出端側となる
薄膜磁気変換素子側から見た正面図、図３は接続導体の
構造をモデル化して示す図、図４は薄膜磁気変換素子部
分の拡大断面図である。各図は構造の概略を示すために
用いられているもので、各部寸法は誇張されている。図
において、１はスライダ、２は薄膜磁気変換素子、３は
接続導体である。1 is a perspective view of a thin film magnetic conversion element portion of a thin film magnetic head according to the present invention, FIG. 2 is a front view seen from the thin film magnetic conversion element side which is the air outflow end side, and FIG. 3 is a connecting conductor. FIG. 4 is a modeled view of the structure of FIG. 4, and FIG. 4 is an enlarged cross-sectional view of the thin film magnetic conversion element portion. The figures are used to show the outline of the structure, and the dimensions of each part are exaggerated. In the figure, 1 is a slider, 2 is a thin film magnetic conversion element, and 3 is a connection conductor.
【００１３】スライダ１はAl2O3-Tic 等で構成される導
電性基体１０１の上に、アルミナ等の絶縁膜１０２を有
している。図示のスライダ１は媒体対向面側に２つのレ
ール１０３、１０４を有し、レール１０３、１０４の表
面を空気ベアリング面１０５、１０６として利用するタ
イプを示している。図示はしないが、媒体対向面がレー
ル部を持たない平面状の空気ベアリング面となっている
スライダであってもよい。The slider 1 has an insulating film 102 made of alumina or the like on a conductive substrate 101 made of Al 2 O 3 -Tic or the like. The illustrated slider 1 has two rails 103 and 104 on the medium facing surface side, and shows a type in which the surfaces of the rails 103 and 104 are used as air bearing surfaces 105 and 106. Although not shown, a slider may be used in which the medium facing surface is a flat air bearing surface having no rail portion.
【００１４】薄膜磁気変換素子２は、下部磁性膜２１
と、上部磁性膜２２と、コイル膜２３とを有している。
下部磁性膜２１及び上部磁性膜２２は、通常、パーマロ
イ等で構成され、先端部が変換ギャップを構成するポ−
ル部２１１、２２１となっていて、ポ−ル部２１１、２
２１に連なるヨ−ク部２１２、２２２の後方側が磁気回
路を完成するように結合されている。ポール部２１１、
２２１はアルミナ等でなるギャップ膜２４により隔てら
れている。コイル膜２３は、下部磁性膜２１及び上部磁
性膜２２の結合部の回りに渦巻き状に設けられている。
コイル膜２３と下部磁性膜２１及びコイル膜２３と上部
磁性膜２２との間は、絶縁膜２５１〜２５３により絶縁
されている。絶縁膜２５１〜２５３は、通常、ノボラッ
ク樹脂等の有機樹脂で構成される。２６はアルミナ等で
なる保護膜、２７、２８はコイル膜２３に導通する取出
電極、２７１、２８１はリード電極である。The thin film magnetic conversion element 2 has a lower magnetic film 21.
And an upper magnetic film 22 and a coil film 23.
The lower magnetic film 21 and the upper magnetic film 22 are usually made of permalloy or the like, and the tips of the poles form a conversion gap.
And the pole parts 211, 221,
The rear sides of the yoke portions 212 and 222 connected to 21 are connected so as to complete a magnetic circuit. Pole part 211,
221 are separated by a gap film 24 made of alumina or the like. The coil film 23 is provided in a spiral shape around the coupling portion of the lower magnetic film 21 and the upper magnetic film 22.
The coil film 23 and the lower magnetic film 21, and the coil film 23 and the upper magnetic film 22 are insulated from each other by insulating films 251 to 253. The insulating films 251 to 253 are usually made of organic resin such as novolac resin. Reference numeral 26 is a protective film made of alumina or the like, 27 and 28 are extraction electrodes that are electrically connected to the coil film 23, and 271 and 281 are lead electrodes.
【００１５】接続導体３は、第１導電部３１と第２導電
部３２とを有する。第１導電部３１は絶縁膜１０２を貫
通して導電性基体１０１に接続され、第２導電部３２は
絶縁膜１０２の上に設けられ第１導電部３１と下部磁性
膜２１とを電気的に接続している。第２導電部３２は非
磁性導電材料によって構成する。第１導電部３１の形成
位置は、薄膜磁気変換素子２の形成領域外であって、薄
膜磁気変換素子集積工程に悪影響を与えないような位置
に設定する。第１導電部３１は、薄膜磁気変換素子２を
２個有する場合、薄膜磁気変換素子２間で共用すること
もできる。第２導電部３２は、図示では下部磁性膜２１
のの下面の全体に及んでいるが、下面または側面に部分
的に設けてもよい。第１導電部３１は、銅を主成分とす
る非磁性導電材料によって構成し、第２導電部３２はチ
タンを主成分とする非磁性導電材料によって構成するこ
とができる。第２導電部３２をチタンによって構成した
場合には、下部磁性膜２１のメッキ下地膜として利用で
きる。The connection conductor 3 has a first conductive portion 31 and a second conductive portion 32. The first conductive portion 31 penetrates the insulating film 102 and is connected to the conductive substrate 101, and the second conductive portion 32 is provided on the insulating film 102 to electrically connect the first conductive portion 31 and the lower magnetic film 21. Connected. The second conductive portion 32 is made of a non-magnetic conductive material. The formation position of the first conductive portion 31 is set outside the formation region of the thin film magnetic conversion element 2 and at a position that does not adversely affect the thin film magnetic conversion element integration process. When the two thin film magnetic conversion elements 2 are provided, the first conductive portion 31 can be shared between the thin film magnetic conversion elements 2. The second conductive portion 32 corresponds to the lower magnetic film 21 in the figure.
Although it covers the entire lower surface of the above, it may be partially provided on the lower surface or the side surface. The first conductive portion 31 can be made of a nonmagnetic conductive material containing copper as a main component, and the second conductive portion 32 can be made of a nonmagnetic conductive material containing titanium as a main component. When the second conductive portion 32 is made of titanium, it can be used as a plating base film for the lower magnetic film 21.
【００１６】上述のように、接続導体３は、第１導電部
３１が絶縁膜１０２を貫通して導電性基体１０１に接続
され、第２導電部３２が絶縁膜１０２の上に設けられ第
１導電部３１と下部磁性膜２１とを電気的に接続してい
るので、下部磁性膜２１及び上部磁性膜２２が、アース
電位に保たれるスライダ１の導電性基体１０１と同電位
となる。このため、キャパシタへ電荷が蓄積されたとし
ても、アース電位にある磁性膜２１、２２のポール部２
１１、２２１と、同じくアース電位に保たれている媒体
（図示しない）との間で、キャパシタの蓄積電荷に起因
する放電を生じる余地がない。As described above, in the connection conductor 3, the first conductive portion 31 penetrates the insulating film 102 and is connected to the conductive substrate 101, and the second conductive portion 32 is provided on the insulating film 102. Since the conductive portion 31 and the lower magnetic film 21 are electrically connected, the lower magnetic film 21 and the upper magnetic film 22 have the same potential as the conductive substrate 101 of the slider 1 which is kept at the ground potential. Therefore, even if the charge is stored in the capacitor, the pole portions 2 of the magnetic films 21 and 22 at the ground potential.
There is no room for discharge due to the accumulated charge of the capacitor between 11, 221 and the medium (not shown) which is also kept at the ground potential.
【００１７】しかも、接続導体３は、非磁性導電材料で
構成されているから、薄膜磁気回路に対する磁気的な影
響が小さくなり、設計に即した特性を有する薄膜磁気ヘ
ッドが得られる。Moreover, since the connection conductor 3 is made of a non-magnetic conductive material, the magnetic influence on the thin film magnetic circuit is reduced, and a thin film magnetic head having characteristics suitable for the design can be obtained.
【００１８】更に、接続導体３は、第１導電部３１が絶
縁膜１０２を貫通して導電性基体１０１に接続され、第
２導電部３２が絶縁膜１０２の上に設けられているか
ら、保護膜２６等によって完全に覆われた状態で内部で
電気的接続が完結している。このため、電気的接続不良
等を生じる余地がなく、安定した電荷蓄積阻止作用が得
られる。Further, the connection conductor 3 is protected because the first conductive portion 31 penetrates the insulating film 102 and is connected to the conductive substrate 101, and the second conductive portion 32 is provided on the insulating film 102. The electrical connection is completed inside with the film 26 or the like completely covered. For this reason, there is no room for electrical connection failure and the like, and a stable charge accumulation blocking action can be obtained.
【００１９】図５は本発明に係る薄膜磁気ヘッドの別の
実施例における正面図である。図示では、薄膜磁気変換
素子２をレール１０３、１０４の片側１０３だけに設
け、レール１０４側に第１導電部３１を設けてある。FIG. 5 is a front view of another embodiment of the thin film magnetic head according to the present invention. In the figure, the thin film magnetic conversion element 2 is provided only on one side 103 of the rails 103 and 104, and the first conductive portion 31 is provided on the rail 104 side.
【００２０】図６〜図１５は本発明に係る薄膜磁気ヘッ
ドの製造方法例を示している。まず、Al2O3-TiC 等の導
電性基体１０１を用意（図６）し、導電性基体１０１の
面上に、導電膜３１０をスパッタ等によって形成（図
７）する。次に、導電膜３１０の上に、フォトリソグラ
フィ工程によって穴４２を持つレジストフレーム４１を
形成（図８）した後、穴４２の内部に導電膜３１１を、
メッキ等によって成長させる（図９）。次にレジストフ
レーム４１を除去（図１０）し、続いてミーリング等の
手段によって、導電膜３１１の下面以外の導電膜３１０
を除去（図１１）する。6 to 15 show an example of a method of manufacturing a thin film magnetic head according to the present invention. First, a conductive substrate 101 such as Al 2 O 3 —TiC is prepared (FIG. 6), and a conductive film 310 is formed on the surface of the conductive substrate 101 by sputtering or the like (FIG. 7). Next, after forming a resist frame 41 having a hole 42 on the conductive film 310 by a photolithography process (FIG. 8), the conductive film 311 is formed inside the hole 42.
It is grown by plating or the like (FIG. 9). Next, the resist frame 41 is removed (FIG. 10), and then the conductive film 310 other than the lower surface of the conductive film 311 is formed by means such as milling.
Are removed (FIG. 11).
【００２１】次に、絶縁膜１０２を所望厚みとなるよう
にスパッタ等によって形成（図１２）した後、絶縁膜１
０２の表面を研磨（図１３）して導電膜３１１の表面の
面出しを行ない、導電膜３１０、導電膜３１１を含む第
１導電部３１を形成する。この後、望ましくは、第１導
電部３１を含む絶縁膜１０２の表面にメカノポリシング
処理を施して、第１導電部３１の表面を絶縁膜１０２の
表面から△ｈだけ突出させる（図１４）。Next, the insulating film 102 is formed to have a desired thickness by sputtering or the like (FIG. 12), and then the insulating film 1 is formed.
The surface of 02 is polished (FIG. 13) to expose the surface of the conductive film 311 to form the first conductive portion 31 including the conductive film 310 and the conductive film 311. After that, desirably, the surface of the insulating film 102 including the first conductive portion 31 is subjected to a mechanopolishing process so that the surface of the first conductive portion 31 protrudes from the surface of the insulating film 102 by Δh (FIG. 14).
【００２２】次に、第１導電部３１の表面に連なるよう
に、絶縁膜１０２の表面に、第２導電部３２を構成する
導電膜を、スパッタ等の手段によって形成（図１５）す
る。この後、通常の薄膜磁気変換素子製造工程を実行す
る。これにより、接続導体３及び薄膜磁気変換素子２
を、スライダ１の上で精度よく積層してゆくことが可能
である。Next, a conductive film forming the second conductive portion 32 is formed on the surface of the insulating film 102 so as to be continuous with the surface of the first conductive portion 31 by means such as sputtering (FIG. 15). After that, a normal thin film magnetic conversion element manufacturing process is performed. Thereby, the connection conductor 3 and the thin film magnetic conversion element 2
Can be stacked on the slider 1 with high precision.
【００２３】図１６及び図１７は別の工程例を示す図で
ある。図１３または図１４の工程を経た後、導電膜３１
１及び導電膜３１０をエッチングによって除去（図１
６）し、除去されて残った穴４２の内部に導電性基体１
０１に導通する第１導電部３１を形成すると共に、第１
導電部３１に連続する第２導電部３２を形成（図１７）
する。16 and 17 are views showing another example of the process. After passing through the process of FIG. 13 or FIG.
1 and the conductive film 310 are removed by etching (see FIG.
6) Then, the conductive substrate 1 is placed inside the hole 42 left after the removal.
01 to form a first conductive portion 31 that conducts,
Forming a second conductive portion 32 continuous to the conductive portion 31 (FIG. 17)
To do.
【００２４】実施例では、面内記録再生用の薄膜磁気ヘ
ッドを示したが、垂直記録再生用の薄膜磁気ヘッドにも
同様に適用が可能である。In the embodiment, the thin-film magnetic head for in-plane recording / reproducing is shown, but it can be similarly applied to the thin-film magnetic head for perpendicular recording / reproducing.
【００２５】[0025]
【発明の効果】以上述べたように、本発明によれば、次
のような効果が得られる。 （ａ）接続導体は、第１導電部が絶縁膜を貫通して導電
性基体に接続され、第２導電部が絶縁膜の上に設けられ
第１導電部と磁性膜とを電気的に接続しているので、磁
性膜とスライダとなる導電性基体と同電位に保ち、キャ
パシタへの電荷蓄積に起因する磁性膜のポ−ル部と媒体
との間の放電を阻止し、放電による読み取りデ−タ・エ
ラ−をなくした薄膜磁気ヘッドを提供できる。 （ｂ）接続導体は、第２導電部が非磁性導電材料で構成
されているから、薄膜磁気回路に対する磁気的な影響が
小さく、設計に即した特性を有する薄膜磁気ヘッドを提
供できる。 （ｃ）接続導体は、第１導電部が絶縁膜を貫通して導電
性基体に接続され、第２導電部が絶縁膜の上に設けられ
ているから、安定した放電防止作用が得られる薄膜磁気
ヘッドを提供できる。 （ｄ）接続導体は、第１導電部が絶縁膜を貫通して導電
性基体に接続され、第２導電部が絶縁膜の上に設けられ
ているから、接続導体及び薄膜磁気変換素子を基体の上
で精度よく積層し得る製造の容易な薄膜磁気ヘッドを提
供できる。As described above, according to the present invention, the following effects can be obtained. (A) In the connection conductor, the first conductive portion penetrates the insulating film and is connected to the conductive substrate, and the second conductive portion is provided on the insulating film to electrically connect the first conductive portion and the magnetic film. Therefore, the electric potential of the magnetic film is kept at the same level as that of the conductive base material that serves as the slider, and the discharge between the pole portion of the magnetic film and the medium due to the charge accumulation in the capacitor is prevented, and the reading data due to the discharge is prevented. It is possible to provide a thin film magnetic head that eliminates data error. (B) Since the second conductive portion of the connection conductor is made of a non-magnetic conductive material, it is possible to provide a thin film magnetic head having a characteristic that is suitable for design with a small magnetic influence on the thin film magnetic circuit. (C) In the connection conductor, the first conductive portion penetrates the insulating film and is connected to the conductive base body, and the second conductive portion is provided on the insulating film, so that a thin film capable of obtaining a stable discharge prevention action is obtained. A magnetic head can be provided. (D) In the connection conductor, the first conductive portion penetrates the insulating film and is connected to the conductive substrate, and the second conductive portion is provided on the insulating film. It is possible to provide a thin-film magnetic head which can be laminated accurately on the top of the thin film magnetic head.
【図１】本発明に係る薄膜磁気ヘッドの薄膜磁気変換素
子の部分の透視図である。FIG. 1 is a perspective view of a portion of a thin film magnetic conversion element of a thin film magnetic head according to the present invention.
【図２】本発明に係る薄膜磁気ヘッドを空気流出端側と
なる薄膜磁気変換素子側から見た正面図である。FIG. 2 is a front view of the thin-film magnetic head according to the present invention viewed from the thin-film magnetic conversion element side which is the air outflow end side.
【図３】本発明に係る薄膜磁気ヘッドの接続導体構造を
モデル化して示す図である。FIG. 3 is a diagram showing a model of a connection conductor structure of the thin film magnetic head according to the present invention.
【図４】本発明に係る薄膜磁気ヘッドの薄膜磁気変換素
子部分の拡大断面図である。FIG. 4 is an enlarged cross-sectional view of a thin film magnetic conversion element portion of the thin film magnetic head according to the present invention.
【図５】本発明に係る薄膜磁気ヘッドの別の実施例にお
いて薄膜磁気変換素子側から見た正面図である。 図６〜図１５ 本発明に係る薄膜磁気ヘッドの製造工程例を示す図であ
る。 図１６及び図１７ 本発明に係る薄膜磁気ヘッドの別の製造工程例を示す図
である。FIG. 5 is a front view of the thin film magnetic head according to another embodiment of the present invention viewed from the thin film magnetic conversion element side. 6 to 15 are views showing an example of a manufacturing process of the thin film magnetic head according to the present invention. 16 and 17 are views showing another example of the manufacturing process of the thin film magnetic head according to the present invention.
１ 基体 １０１ 導電性基体 １０２ 絶縁膜 ２ 薄膜磁気変換素子 ２１ 下部磁性膜 ２２ 上部磁性膜 ２３ コイル膜 ３ 接続導体 ３１ 第１導電部 ３２ 第２導電部 DESCRIPTION OF SYMBOLS 1 base 101 conductive base 102 insulating film 2 thin film magnetic conversion element 21 lower magnetic film 22 upper magnetic film 23 coil film 3 connection conductor 31 first conductive portion 32 second conductive portion
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成４年７月２５日[Submission date] July 25, 1992
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００３[Name of item to be corrected] 0003
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００３】一方、最近の小型ＨＤＤでは、パソコン搭
載を考慮してパソコン電源である５ボルト、１２ボルト
をそのまま利用すべく、小型ＨＤＤ用の読み書き用ＩＣ
も５ボルトの片電源を用いるようになっている。このた
め、薄膜磁気ヘッドは一定電圧、具体的には、２．５ボ
ルトの正電圧で常時バイアスされる。その結果、キャパ
シタはバイアス電圧により常時一方向に電荷が蓄積され
る。On the other hand, in the recent compact HDD, a read / write IC for the compact HDD is used in order to use 5 volt and 12 volt which are the power source of the personal computer in consideration of mounting on the personal computer.
Also uses a single 5 volt power supply. Therefore, the thin film magnetic head is constantly biased with a constant voltage, specifically a positive voltage of 2.5 volts. As a result, the capacitor always accumulates charges in one direction due to the bias voltage.
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】図面の簡単な説明[Name of item to be corrected] Brief description of the drawing
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図面の簡単な説明】[Brief description of drawings]
【図１】本発明に係る薄膜磁気ヘッドの薄膜磁気変換素
子の部分の透視図である。FIG. 1 is a perspective view of a portion of a thin film magnetic conversion element of a thin film magnetic head according to the present invention.
【図２】本発明に係る薄膜磁気ヘッドを空気流出端側と
なる薄膜磁気変換素子側から見た正面図である。FIG. 2 is a front view of the thin-film magnetic head according to the present invention viewed from the thin-film magnetic conversion element side which is the air outflow end side.
【図３】本発明に係る薄膜磁気ヘッドの接続導体構造を
モデル化して示す図である。FIG. 3 is a diagram showing a model of a connection conductor structure of the thin film magnetic head according to the present invention.
【図４】本発明に係る薄膜磁気ヘッドの薄膜磁気変換素
子の部分拡大断面図である。FIG. 4 is a partially enlarged sectional view of a thin film magnetic conversion element of a thin film magnetic head according to the present invention.
【図５】本発明に係る薄膜磁気ヘッドの別の実施例にお
いて薄膜磁気変換素子側から見た正面図である。FIG. 5 is a front view of the thin film magnetic head according to another embodiment of the present invention viewed from the thin film magnetic conversion element side.
【図６】本発明に係る薄膜磁気ヘッドの製造工程例を示
す図である。FIG. 6 is a diagram showing an example of a manufacturing process of a thin film magnetic head according to the present invention.
【図７】本発明に係る薄膜磁気ヘッドの製造工程例を示
す図である。FIG. 7 is a diagram showing an example of a manufacturing process of a thin film magnetic head according to the present invention.
【図８】本発明に係る薄膜磁気ヘッドの製造工程例を示
す図である。FIG. 8 is a diagram showing an example of a manufacturing process of a thin film magnetic head according to the present invention.
【図９】本発明に係る薄膜磁気ヘッドの製造工程例を示
す図である。FIG. 9 is a diagram showing an example of a manufacturing process of a thin film magnetic head according to the present invention.
【図１０】本発明に係る薄膜磁気ヘッドの製造工程例を
示す図である。FIG. 10 is a diagram showing an example of a manufacturing process of a thin-film magnetic head according to the present invention.
【図１１】本発明に係る薄膜磁気ヘッドの製造工程例を
示す図である。FIG. 11 is a diagram showing an example of a manufacturing process of a thin film magnetic head according to the present invention.
【図１２】本発明に係る薄膜磁気ヘッドの製造工程例を
示す図である。FIG. 12 is a diagram showing an example of a manufacturing process of a thin film magnetic head according to the present invention.
【図１３】本発明に係る薄膜磁気ヘッドの製造工程例を
示す図である。FIG. 13 is a diagram showing an example of a manufacturing process of a thin-film magnetic head according to the present invention.
【図１４】本発明に係る薄膜磁気ヘッドの製造工程例を
示す図である。FIG. 14 is a diagram showing an example of a manufacturing process of a thin-film magnetic head according to the present invention.
【図１５】本発明に係る薄膜磁気ヘッドの製造工程例を
示す図である。FIG. 15 is a diagram showing an example of a manufacturing process of a thin-film magnetic head according to the present invention.
【図１６】本発明に係る薄膜磁気ヘッドの別の製造工程
例を示す図である。FIG. 16 is a diagram showing another example of the manufacturing process of the thin film magnetic head according to the present invention.
【図１７】本発明に係る薄膜磁気ヘッドの別の製造工程
例を示す図である。FIG. 17 is a diagram showing another example of the manufacturing process of the thin-film magnetic head according to the present invention.
【符号の説明】 １ 基体 １０１ 導電性基体 １０２ 絶縁膜 ２ 薄膜磁気変換素子 ２１ 下部磁性膜 ２２ 上部磁性膜 ２３ コイル膜 ３ 接続導体 ３１ 第１導電部 ３２ 第２導電部[Explanation of reference numerals] 1 substrate 101 conductive substrate 102 insulating film 2 thin film magnetic conversion element 21 lower magnetic film 22 upper magnetic film 23 coil film 3 connection conductor 31 first conductive portion 32 second conductive portion
【手続補正３】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】図１６及び図１７[Name of item to be corrected] FIGS. 16 and 17
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図１６】及びFIG. 16 and
【図１７】本発明に係る薄膜磁気ヘッドの別の製造工程
例を示す図である。FIG. 17 is a diagram showing another example of the manufacturing process of the thin-film magnetic head according to the present invention.
Claims (3)
導体とを有する薄膜磁気ヘッドであって、 前記スライダは、導電性基体の表面に絶縁膜を有してお
り、 前記薄膜磁気変換素子は、磁性膜とコイル膜とを含む薄
膜磁気回路を有し、前記絶縁膜の上に設けられており、 前記接続導体は、第１導電部と第２導電部とを有し、前
記第１導電部が前記絶縁膜を貫通して前記導電性基体に
接続され、前記第２導電部が非磁性導電材料で構成され
前記絶縁膜の上に設けられて前記第１導電部と前記磁性
膜とを電気的に接続していることを特徴とする薄膜磁気
ヘッド。1. A thin film magnetic head having a slider, a thin film magnetic conversion element, and a connecting conductor, wherein the slider has an insulating film on a surface of a conductive base, and the thin film magnetic conversion element is A thin film magnetic circuit including a magnetic film and a coil film, the thin film magnetic circuit being provided on the insulating film, the connection conductor having a first conductive portion and a second conductive portion, and the first conductive portion. A portion that penetrates the insulating film and is connected to the conductive substrate, and the second conductive portion is made of a non-magnetic conductive material and is provided on the insulating film to connect the first conductive portion and the magnetic film. A thin-film magnetic head characterized by being electrically connected.
とを特徴とする請求項１に記載の薄膜磁気ヘッド。2. The thin-film magnetic head according to claim 1, wherein the first conductive portion contains copper as a main component.
ることを特徴とする請求項１または２に記載の薄膜磁気
ヘッド。3. The thin-film magnetic head according to claim 1, wherein the second conductive portion contains titanium as a main component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22841591A JPH0737226A (en) | 1991-08-13 | 1991-08-13 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22841591A JPH0737226A (en) | 1991-08-13 | 1991-08-13 | Thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0737226A true JPH0737226A (en) | 1995-02-07 |
Family
ID=16876120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22841591A Pending JPH0737226A (en) | 1991-08-13 | 1991-08-13 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737226A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61184711A (en) * | 1985-02-13 | 1986-08-18 | Fujitsu Ltd | Thin film magnetic head |
| JPH01116910A (en) * | 1987-10-29 | 1989-05-09 | Nec Corp | Thin film head |
-
1991
- 1991-08-13 JP JP22841591A patent/JPH0737226A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61184711A (en) * | 1985-02-13 | 1986-08-18 | Fujitsu Ltd | Thin film magnetic head |
| JPH01116910A (en) * | 1987-10-29 | 1989-05-09 | Nec Corp | Thin film head |
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