JPH0540920A - Composite magnetic head and manufacture thereof - Google Patents
Composite magnetic head and manufacture thereofInfo
- Publication number
- JPH0540920A JPH0540920A JP19433491A JP19433491A JPH0540920A JP H0540920 A JPH0540920 A JP H0540920A JP 19433491 A JP19433491 A JP 19433491A JP 19433491 A JP19433491 A JP 19433491A JP H0540920 A JPH0540920 A JP H0540920A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- magnetic core
- insulating layer
- film magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えばハードディスク
に対して記録再生するのに好適な複合型磁気ヘッドに関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite magnetic head suitable for recording / reproducing on / from a hard disk, for example.
【０００２】[0002]
【従来の技術】例えば、ハードディスク・ドライブ（駆
動装置）の磁気記録再生用ヘッドの再生ヘッドとして、
短波長感度に優れた磁気抵抗効果型ヘッド（以下、ＭＲ
ヘッドと称する。）が用いられる方向にある。2. Description of the Related Art For example, as a reproducing head of a magnetic recording / reproducing head of a hard disk drive (driving device),
Magnetoresistive head with excellent short wavelength sensitivity (hereinafter referred to as MR
It is called a head. ) Is in the direction used.
【０００３】このヘッドにおいて浮上型構成をとる場
合、例えば図９に示すようにハードディスク５１に対
し、当該ハードディスク５１の回転による相対的移行に
よる空気流によって浮上するスライダ５２が設けられ
る。そして、これに磁気ヘッド、例えばインダクティブ
型ヘッドによる記録ヘッドと、ＭＲヘッドによる再生ヘ
ッドとが一体に形成された複合型磁気ヘッド５３が配置
される。なお、上記スライダ５２には、このスライダ５
２を支持する弾性部材よりなるジンバル５４が設けられ
る。When this head has a floating structure, for example, as shown in FIG. 9, a slider 52 is provided for the hard disk 51, which is floated by an air flow caused by relative movement of the hard disk 51 by rotation. Then, a composite type magnetic head 53 in which a magnetic head, for example, a recording head of an inductive type head and a reproducing head of an MR head are integrally formed is arranged on this. The slider 52 includes the slider 5
A gimbal 54 that is made of an elastic member that supports 2 is provided.
【０００４】図１０は、この複合型薄膜磁気ヘッド５３
の一部を断面とした拡大斜視図である。この複合型薄膜
磁気ヘッド５３においては、上述したスライダ５２自
体、或いはこれに取付けられる基板等よりなる基体５５
上に、ハードディスク５１との対接面、すなわちＡＢＳ
（エア・ベアリング・サーフェス）面５６に臨んでその
前方端部間に記録用の磁気ギャップｇを構成する第１の
薄膜磁気コア５７と第２の薄膜磁気コア５８が積層され
てなる。そして、上記磁気ギャップｇ内に少なくとも磁
気抵抗効果薄膜（以下、ＭＲ薄膜と称する。）よりなる
磁気抵抗効果感磁部（以下、ＭＲ感磁部と称する。）５
９の一端或いはその一電極６０ａが上記ＡＢＳ面５６に
臨むようにして配置される。FIG. 10 shows the composite thin film magnetic head 53.
It is an expanded perspective view which made a part a cross section. In the composite type thin film magnetic head 53, the slider 52 described above, or a substrate 55 made of a substrate or the like attached to the slider 52.
Above, the contact surface with the hard disk 51, that is, ABS
A first thin film magnetic core 57 and a second thin film magnetic core 58, which face a (air bearing surface) surface 56 and constitute a magnetic gap g for recording, are laminated between the front ends thereof. Then, in the magnetic gap g, a magnetoresistive effect magnetic sensitive portion (hereinafter referred to as MR sensitive portion) 5 which is composed of at least a magnetoresistive effect thin film (hereinafter referred to as MR thin film).
One end of 9 or one electrode 60a thereof is arranged so as to face the ABS surface 56.
【０００５】また、上記ＡＢＳ面５６と反対側には、上
記ＭＲ感磁部５９の他方の電極６０ｂが上記一電極６０
ａと略平行に設けられる。なお、これら電極６０ａ，６
０ｂは、いずれも導電薄膜によって形成される。また、
上記ＭＲ感磁部５９の略中央部には、このＭＲ感磁部５
９への通電によってこのＭＲ感磁部５９に所要の向きの
磁化状態を与え、磁気抵抗効果特性が優れた直線性と高
い感度を示す特性領域で動作するようになすバイアス導
体６１が、絶縁層６２を介して上記ＭＲ感磁部５９を横
切る形で設けられる。そしてさらに、上記薄膜磁気コア
５７，５８の接続部である磁気的結合部を取り囲むよう
にスパイラル状のヘッド巻線６３が設けられる。なお、
これらバイアス導体６１とヘッド巻線６３は、共に導電
性薄膜によって形成される。On the opposite side of the ABS surface 56, the other electrode 60b of the MR magnetic sensing section 59 is provided with the one electrode 60.
It is provided substantially parallel to a. In addition, these electrodes 60a, 6
0b is formed of a conductive thin film. Also,
The MR magnetic sensing section 5 is provided at a substantially central portion of the MR magnetic sensing section 59.
The bias conductor 61, which is provided with a magnetized state in a desired direction to the MR magnetic sensitive section 59 by energization of 9 to operate in a characteristic region exhibiting excellent linearity and high sensitivity of the magnetoresistive effect characteristic, is an insulating layer. It is provided so as to cross the MR magnetic sensing section 59 via 62. Further, a spiral head winding 63 is provided so as to surround a magnetic coupling portion which is a connection portion of the thin film magnetic cores 57 and 58. In addition,
Both the bias conductor 61 and the head winding 63 are formed of a conductive thin film.
【０００６】このように形成された複合型薄膜磁気ヘッ
ド５３は、第１の薄膜磁気コア５７と第２の薄膜磁気コ
ア５８間にＭＲ感磁部５９を配置したいわゆるシールド
型構成のＭＲヘッドと、上記第１の薄膜磁気コア５７と
第２の薄膜磁気コア５８による磁路上にヘッド巻線６３
が巻回されてなるインダクティブヘッドを有した、いわ
ゆる複合型磁気ヘッド構成とされる。なお、上記ＭＲヘ
ッドは、図１１にその回路図を示すように、ＭＲ感磁部
５９の一端が接地電位Ｖｓｓとされ、先端側の電極６０
ａと後端側の電極６０ｂの間に定電流源６４からセンス
電流ｉｓが通電されて、ハードディスク５１上の記録に
基づく信号磁界による抵抗変化を電圧変化として検出す
るように構成されている。The composite type thin film magnetic head 53 thus formed is a so-called shield type MR head in which the MR magnetic sensitive portion 59 is arranged between the first thin film magnetic core 57 and the second thin film magnetic core 58. , The head winding 63 on the magnetic path formed by the first thin film magnetic core 57 and the second thin film magnetic core 58.
A so-called composite magnetic head structure having an inductive head formed by winding In the MR head, as shown in the circuit diagram of FIG. 11, one end of the MR magnetic sensing part 59 is set to the ground potential Vss, and the electrode 60 on the tip side.
A sense current is is supplied from a constant current source 64 between a and the electrode 60b on the rear end side, and a resistance change due to a signal magnetic field based on recording on the hard disk 51 is detected as a voltage change.
【０００７】[0007]
【発明が解決しようとする課題】ところで、上述の複合
型磁気ヘッド５３においては、高記録密度化に対処する
べく狭ギャップ化が進められており、例えば再生用のギ
ャップ長、すなわち第２の薄膜磁気コア５８とＭＲ感磁
部５９間の隙間が数千Åと非常に小さなものとなされて
いる。このため、ハードディスク５１上の導電性の微小
なごみ等の影響で、ＭＲ感磁部５９の先端部が電気的に
不安定なものとなり、再生時における特性が劣化する不
都合が生ずる。By the way, in the above-mentioned composite magnetic head 53, the gap is being narrowed in order to cope with the higher recording density. For example, the reproduction gap length, that is, the second thin film. The gap between the magnetic core 58 and the MR magnetic sensing part 59 is very small, several thousand Å. For this reason, due to the influence of minute conductive dust on the hard disk 51, the tip of the MR magnetic sensing part 59 becomes electrically unstable, and the characteristics during reproduction deteriorate.
【０００８】また、ハードディスク５１の表面は、上述
した空気流等によって表面電位が上昇し、静電気（電
荷）が蓄積された状態となっている。このため、磁気ヘ
ッド５３が動作開始時または停止時にハードディスク５
１に対して近接ないしは接触すると、接地状態にあるＭ
Ｒ感磁部５９のＡＢＳ面５６に臨んでいるＭＲ薄膜の端
部或いはその電極６０ａとの間に放電が生じ、この放電
による大きな電流がＭＲ薄膜に流れる。つまり、ハード
ディスク５１上に蓄積された電荷がヘッドに飛び込んで
きて、ＭＲ薄膜に流れることになる。この結果、高感度
化のために数百Åと極めて薄くされたＭＲ薄膜が上記放
電電流によって破壊されてしまうという事故、すなわち
静電破壊が起こり、ヘッド出力が得られなくなる現象が
生ずる。Further, the surface potential of the surface of the hard disk 51 rises due to the above-mentioned air flow and the like, and static electricity (electric charge) is accumulated. Therefore, when the magnetic head 53 starts or stops its operation, the hard disk 5
M that is in a grounded state when it comes close to or contacts 1
A discharge is generated between the end of the MR thin film facing the ABS surface 56 of the R magnetic sensing part 59 or the electrode 60a thereof, and a large current due to this discharge flows in the MR thin film. That is, the charges accumulated on the hard disk 51 jump into the head and flow into the MR thin film. As a result, an accident occurs that the MR thin film, which is made extremely thin by several hundred Å for high sensitivity, is destroyed by the discharge current, that is, electrostatic breakdown occurs, and a head output cannot be obtained.
【０００９】そこで本発明は、上述の技術的な課題に鑑
みて提案されたものであって、磁気抵抗効果感磁部先端
の電気的不安定さを解消するとともに、媒体からの電荷
飛び込みによる静電破壊を回避することができる信頼性
の高い複合型磁気ヘッドを提供することを目的とする。
さらに本発明は、磁気抵抗効果感磁部にダメージを与え
ずに先端電極と第２の薄膜磁気コアを電気的に接続可能
となす複合型磁気ヘッドの製造方法を提供することを目
的とする。Therefore, the present invention has been proposed in view of the above technical problems, and eliminates the electrical instability at the tip of the magnetoresistive effect magnetic sensitive portion, and at the same time, eliminates static electricity due to charge jumping from the medium. An object of the present invention is to provide a highly reliable composite magnetic head capable of avoiding electric breakdown.
A further object of the present invention is to provide a method of manufacturing a composite magnetic head in which the tip electrode and the second thin film magnetic core can be electrically connected without damaging the magnetoresistive effect magnetic sensitive portion.
【００１０】[0010]
【課題を解決するための手段】上述の目的を達成するた
めに、本発明の複合型磁気ヘッドは、前方端部間に磁気
記録媒体との対接面に臨んで磁気ギャップを構成する第
１の薄膜磁気コアと第２の薄膜磁気コアが積層され、上
記磁気ギャップ内に、先端部と後端部にそれぞれ電極が
積層された磁気抵抗効果感磁部の一端或いは先端部に積
層される電極が、上記磁気記録媒体との対接面に臨んで
配置され、上記先端部に積層される電極と第２の薄膜磁
気コアとが電気的に接続されていることを特徴とするも
のである。In order to achieve the above-mentioned object, the composite magnetic head of the present invention has a first magnetic gap which is formed between the front ends of the composite magnetic head so as to face the contact surface with the magnetic recording medium. Of the magnetoresistive effect magnetic sensing part in which the thin film magnetic core and the second thin film magnetic core are laminated, and electrodes are respectively laminated at the front end and the rear end in the magnetic gap. However, the second thin film magnetic core is electrically connected to the electrode laminated on the tip end portion so as to face the surface facing the magnetic recording medium.
【００１１】さらに本発明の複合型磁気ヘッドは、第１
の薄膜磁気コアの容量が第２の薄膜磁気コアの容量より
も大きく、且つ第１の薄膜磁気コアと第２の薄膜磁気コ
アがそれぞれ独立に接地電位に接続されていることを特
徴とするものである。Further, the composite magnetic head of the present invention has the first aspect.
The capacitance of the thin film magnetic core is larger than the capacitance of the second thin film magnetic core, and the first thin film magnetic core and the second thin film magnetic core are independently connected to the ground potential. Is.
【００１２】一方、本発明の方法は、第１の薄膜磁気コ
アの上に第１の絶縁層を介して磁気抵抗効果感磁部を磁
気記録媒体との対接面と略直交する方向に延在して形成
する工程と、上記磁気抵抗効果感磁部上に第２の絶縁層
を形成した後、当該磁気抵抗効果感磁部の先端部と後端
部に積層される第２の絶縁層を除去する工程と、上記磁
気抵抗効果感磁部の先端部と後端部にそれぞれ非磁性の
導電材料よりなる電極をその一部が上記第２の絶縁層に
積層されるように同時形成する工程と、上記電極を覆っ
て第３の絶縁層を形成した後、この上にバイアス導体層
を積層し、さらにこのバイアス導体を覆って第４の絶縁
層を形成する工程と、上記磁気抵抗効果感磁部上の先端
電極が露出するまで第３の絶縁層及び第４の絶縁層を除
去する工程と、露出した先端電極と電気的に接続して第
２の薄膜磁気コアを上記第４の絶縁層上に積層形成する
工程とを有してなるものである。On the other hand, according to the method of the present invention, the magnetoresistive effect magnetic sensitive portion is extended on the first thin film magnetic core through the first insulating layer in a direction substantially orthogonal to the contact surface with the magnetic recording medium. And the second insulating layer laminated on the front end portion and the rear end portion of the magnetoresistive effect magnetic sensing part after forming the second insulating layer on the magnetoresistive effect magnetic sensing part. And a step of removing the magnetic resistance effect magnetic sensitive portion at the same time so that electrodes made of a non-magnetic conductive material are respectively formed at the front end portion and the rear end portion of the magnetoresistive effect magnetic sensitive portion so that a part thereof is laminated on the second insulating layer. A step of forming a third insulating layer covering the electrode, laminating a bias conductor layer on the third insulating layer, and further forming a fourth insulating layer covering the bias conductor; and the magnetoresistive effect. A step of removing the third insulating layer and the fourth insulating layer until the tip electrode on the magnetic sensing part is exposed; The and the tip electrode and electrically connected to the second thin film magnetic core is made of a laminating formed on the fourth insulating layer.
【００１３】[0013]
【作用】本発明の複合型磁気ヘッドにおいては、磁気記
録媒体との対接面に臨む磁気抵抗効果感磁部の先端側に
積層される電極が第２の薄膜磁気コアと電気的に接続さ
れているので、磁気抵抗効果感磁部と第２の薄膜磁気コ
アとが同電位となり、当該磁気抵抗効果感磁部の先端部
が電気的に安定する。In the composite magnetic head of the present invention, the electrode laminated on the tip side of the magnetoresistive effect magnetic sensitive portion facing the surface facing the magnetic recording medium is electrically connected to the second thin film magnetic core. Therefore, the magnetoresistive effect sensitive section and the second thin film magnetic core have the same potential, and the tip of the magnetoresistive effect sensitive section is electrically stabilized.
【００１４】また、本発明においては、第１の薄膜磁気
コアの容量が第２の薄膜磁気コアの容量よりも大きく、
且つ第１の薄膜磁気コアと第２の薄膜磁気コアがそれぞ
れ独立に接地電位に接続されているので、媒体からの電
荷はその殆どが大容量の第１の薄膜磁気コアを通じて接
地電位へと流れる。仮に、磁気抵抗効果感磁部の先端部
に電荷が飛び込んだとしても、電荷は先端電極を介して
第２の薄膜磁気コアへと流れ、最終的に接地電位へ放出
される。したがって、媒体からの電荷の磁気抵抗効果感
磁部への流れを確実に防止することができ、静電破壊が
回避される。Further, in the present invention, the capacitance of the first thin film magnetic core is larger than the capacitance of the second thin film magnetic core,
Moreover, since the first thin film magnetic core and the second thin film magnetic core are independently connected to the ground potential, most of the charge from the medium flows to the ground potential through the large-capacity first thin film magnetic core. .. Even if electric charge jumps into the tip of the magnetoresistive effect magnetic sensitive portion, the electric charge flows to the second thin film magnetic core through the tip electrode and is finally discharged to the ground potential. Therefore, it is possible to reliably prevent the charge from the medium from flowing to the magnetoresistive effect magnetic sensitive section, and avoid electrostatic breakdown.
【００１５】磁気抵抗効果感磁部の先端側に積層される
電極と第２の薄膜磁気コアを接続するのに、例えば磁気
抵抗効果感磁部の後端側にのみ電極を形成し、その上に
絶縁層を介してバイアス導体を積層し、さらにこれを覆
って絶縁層を形成した後に、先端側に積層される絶縁層
を磁気抵抗効果感磁部までエッチングして除去した場合
には、オーバーエッチングにより磁気抵抗効果感磁部が
ダメージを受ける。しかしながら、本発明の方法におい
ては、予め磁気抵抗効果感磁部の両端部に電極を同時に
形成した後に、先端側の電極上に積層された絶縁層を、
その電極が露出するまで除去するようにしているので、
磁気抵抗効果感磁部が損傷するようなことがない。In order to connect the second thin film magnetic core to the electrode laminated on the tip side of the magnetoresistive effect magnetic sensing portion, for example, the electrode is formed only on the rear end side of the magnetoresistive effect magnetic sensing portion, and on top of that. If a bias conductor is laminated on the insulating layer via the insulating layer, the insulating layer is formed to cover the bias conductor, and the insulating layer laminated on the tip side is removed by etching up to the magnetoresistive effect magnetic sensitive area, The magnetoresistive effect magnetic sensitive part is damaged by etching. However, in the method of the present invention, after simultaneously forming electrodes on both ends of the magnetoresistive effect magnetic sensing part in advance, an insulating layer laminated on the electrode on the tip side is formed,
Since I try to remove it until the electrode is exposed,
Magneto-resistive effect The magnetic sensitive section is not damaged.
【００１６】[0016]
【実施例】以下、本発明を適用した具体的な実施例につ
いて図面を参照しながら詳細に説明する。なお本実施例
は、ＭＲヘッドによる再生ヘッドと、インダクティブヘ
ッドによる記録ヘッドを一体に構成した複合型磁気ヘッ
ドの例である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described in detail below with reference to the drawings. Note that this embodiment is an example of a composite magnetic head in which a reproducing head including an MR head and a recording head including an inductive head are integrally configured.
【００１７】本実施例の複合型磁気ヘッドにおいては、
図１及び図２に示すように、前方端部間に磁気ギャップ
ｇを構成する第１の薄膜磁気コア１と第２の薄膜磁気コ
ア２がスライダに取付けられる基体３上に所定の間隔を
持って積層形成されている。第１の薄膜磁気コア１は、
上記基体３上に直接設けられ、磁気記録媒体（図示は省
略する。）との対接面となるＡＢＳ面４にその一端を臨
ませるようにしてこのＡＢＳ面４に対して略直交する方
向に延在して設けられている。一方、第２の薄膜磁気コ
ア２は、上記ＡＢＳ面４にその一端を臨ませるようにし
てこのＡＢＳ面４に対して略直交する方向に延在して設
けられ、そのＡＢＳ面４に臨む前方端部が上記第１の薄
膜磁気コア１との間隙が狭まるように屈曲形成されてい
る。その間隙が狭くなされた前方端部間には、記録用ギ
ャップとして機能する磁気ギャップｇが上記ＡＢＳ面４
に臨んで構成されている。さらに、上記第２の薄膜磁気
コア２は、後方端部で上記第１の薄膜磁気コア１と磁気
的に接触してバックギャップを構成するようになってい
る。In the composite magnetic head of this embodiment,
As shown in FIGS. 1 and 2, a first thin film magnetic core 1 and a second thin film magnetic core 2 forming a magnetic gap g between the front ends have a predetermined space on a base body 3 mounted on a slider. Are stacked and formed. The first thin film magnetic core 1 is
One end of the ABS 3 is provided directly on the base 3 and faces the magnetic recording medium (not shown). The ABS 4 is in a direction substantially orthogonal to the ABS 4. It is extended. On the other hand, the second thin-film magnetic core 2 is provided so as to have one end thereof facing the ABS surface 4 and extends in a direction substantially orthogonal to the ABS surface 4, and the front facing the ABS surface 4 is provided. The end portion is bent and formed so that the gap with the first thin film magnetic core 1 is narrowed. A magnetic gap g, which functions as a recording gap, is provided between the front ends of the ABS 4 where the gap is narrowed.
It is configured to face. Further, the second thin film magnetic core 2 magnetically contacts the first thin film magnetic core 1 at the rear end portion to form a back gap.
【００１８】そしてこの磁気ヘッドにおいては、上記磁
気ギャップ内に磁気抵抗効果感磁部であるＭＲ感磁部５
が設けられている。ＭＲ感磁部５は、磁気ギャップｇの
トラック幅よりも若干幅広の長方形パターンとして形成
され、その長手方向がＡＢＳ面４に対する直交方向と合
わせて設けられている。そしてこのＭＲ感磁部５は、そ
の一端縁がＡＢＳ面４に臨むようになされるとともに、
後端縁が相対向する第１の薄膜磁気コア１と第２の薄膜
磁気コア２の略中途部に至る位置とされている。なお、
上記ＭＲ感磁部５は、上記基体３上に設けられる第１の
薄膜磁気コア１との絶縁をとるために、第１の絶縁層６
ａを介して当該第１の薄膜磁気コア１上に設けられてい
る。また、上記ＭＲ感磁部５は、バルクハウゼンノイズ
の発生を回避するために、例えばＳｉＯ2 等よりなる非
磁性絶縁層を介して静磁的に結合する一対のＭＲ薄膜を
積層する形とすることが望ましい。In this magnetic head, the MR sensing section 5 which is the magnetoresistive sensing section is provided in the magnetic gap.
Is provided. The MR magnetic sensing section 5 is formed as a rectangular pattern slightly wider than the track width of the magnetic gap g, and the longitudinal direction thereof is provided so as to match the direction orthogonal to the ABS surface 4. The MR magnetic sensing section 5 has its one end facing the ABS surface 4, and
The rear edges are positioned so as to reach approximately the middle of the first thin film magnetic core 1 and the second thin film magnetic core 2 which face each other. In addition,
The MR magnetic sensing part 5 has a first insulating layer 6 in order to insulate it from the first thin film magnetic core 1 provided on the base body 3.
It is provided on the first thin film magnetic core 1 via a. In addition, the MR magnetic sensing unit 5 is formed by laminating a pair of MR thin films that are magnetostatically coupled via a non-magnetic insulating layer made of, for example, SiO 2 in order to avoid Barkhausen noise. Is desirable.
【００１９】そして、上記ＭＲ感磁部５には、図示しな
い定電流源からのセンス電流を通ずるための帯状パター
ンとされた一対の電極７ａ，７ｂ（以下、ＡＢＳ面４側
に設けられる電極７ａを先端電極７ａ、後端側に設けら
れる電極７ｂを後端電極７ｂと称する。）が当該ＭＲ感
磁部５と電気的に接続されるように積層形成されてい
る。先端電極７ａは、ＭＲ感磁部５へのセンス電流を通
ずるための電極として機能する他、ＭＲヘッドの再生用
ギャップのギャップ材としても機能する。したがって、
この先端電極７ａには非磁性で且つ導電性に優れた材料
が使用される。例えば、Ｔｉ，Ｃｒ，Ｍｏ，Ｗ，Ｃ，ス
テンレス等の耐湿性に優れた導電材料が好適である。A pair of electrodes 7a, 7b (hereinafter referred to as the electrode 7a provided on the ABS surface 4 side) are formed in the MR magnetic sensing section 5 in a strip pattern for passing a sense current from a constant current source (not shown). Is referred to as the front end electrode 7a, and the electrode 7b provided on the rear end side is referred to as the rear end electrode 7b) are laminated so as to be electrically connected to the MR magnetic sensing section 5. The tip electrode 7a functions not only as an electrode for passing a sense current to the MR magnetic sensing unit 5, but also as a gap material for a reproducing gap of the MR head. Therefore,
A material which is non-magnetic and has excellent conductivity is used for the tip electrode 7a. For example, a conductive material having excellent moisture resistance such as Ti, Cr, Mo, W, C, and stainless is suitable.
【００２０】ところで、上記先端電極７ａは、ＭＲ感磁
部５を完全に覆う幅広の帯状パターンとして設けられ、
上記ＡＢＳ面４よりＭＲ感磁部５の中央部に至る位置ま
で形成されている。その先端電極７ａの一端縁は、上記
ＡＢＳ面４に臨むようになされ、後端部は上記ＭＲ感磁
部５の先端部と後端部を除く中央部分に積層される第２
の絶縁層６ｂ上に積層されている。すなわち、上記ＭＲ
感磁部５は、全体として見ると断面形状が階段状となさ
れている。一方、後端電極７ｂは、ＭＲ感磁部５を横切
る形で設けられ、上記第２の絶縁層６ｂとＭＲ感磁部５
の後端部とに跨がって積層されている。なお、上記後端
電極７ｂは、バックギャップ側に平面略Ｌ字状のパター
ンとして引き出され、その後方端部８が端子とされてい
る。By the way, the tip electrode 7a is provided as a wide band-shaped pattern which completely covers the MR magnetic sensing section 5.
It is formed from the ABS surface 4 to a position reaching the central portion of the MR magnetic sensitive portion 5. One end edge of the tip electrode 7a is made to face the ABS surface 4, and the rear end portion is laminated on the central portion of the MR magnetic sensing portion 5 excluding the front end portion and the rear end portion.
Is laminated on the insulating layer 6b. That is, the MR
The magnetic sensing section 5 has a stepwise cross-sectional shape as a whole. On the other hand, the rear end electrode 7b is provided so as to cross the MR magnetic sensing part 5, and the second insulating layer 6b and the MR magnetic sensing part 5 are provided.
It is laminated so as to straddle the rear end portion. The rear end electrode 7b is drawn out as a substantially L-shaped pattern on the back gap side, and its rear end portion 8 serves as a terminal.
【００２１】また、上記ＭＲ感磁部５の上には、第３の
絶縁層６ｃを介して当該ＭＲ感磁部５への通電によって
このＭＲ感磁部５に所要の向きの磁化状態を与え、磁気
抵抗特性が優れた直線性と高い感度を示す特性領域で動
作するようになすバイアス導体９が設けられている。バ
イアス導体９は、ＭＲ感磁部５を横切る形で上記一対の
電極７ａ，７ｂ間に設けられ、その両端部がバックギャ
ップ側へ引き出されるようになっている。そのバックギ
ャップ側に引き出された後方端部９ａ，９ｂが、上記バ
イアス導体９に電流を通ずるための端子とされる。On the MR magnetic sensitive section 5, a magnetized state in a desired direction is given to the MR magnetic sensitive section 5 by energizing the MR magnetic sensitive section 5 through the third insulating layer 6c. A bias conductor 9 is provided so as to operate in a characteristic region in which the magnetoresistive characteristic exhibits excellent linearity and high sensitivity. The bias conductor 9 is provided between the pair of electrodes 7a and 7b so as to cross the MR magnetic sensing part 5, and both ends thereof are drawn out to the back gap side. The rear end portions 9a and 9b pulled out to the back gap side serve as terminals for passing a current through the bias conductor 9.
【００２２】また、上記第１の薄膜磁気コア１と第２の
薄膜磁気コア２の接続部である磁気的結合部１０には、
この磁気的結合部１０を取り囲むようにしてスパイラル
状のヘッド巻線１１が設けられている。ヘッド巻線１１
は、上記第１の薄膜磁気コア１と第２の薄膜磁気コア２
に記録情報に応じた電流を供給する役目をするものであ
り、上記第２の薄膜磁気コア２との絶縁性を確保するた
めに第４の絶縁層６ｄによって埋め込まれている。な
お、上記ヘッド巻線１１の両端部はそれぞれバックギャ
ップ側に引き出され、その引き出された後方端部１１
ａ，１１ｂが端子とされている。Further, the magnetic coupling portion 10 which is a connection portion between the first thin film magnetic core 1 and the second thin film magnetic core 2 has:
A spiral head winding 11 is provided so as to surround the magnetic coupling portion 10. Head winding 11
Is the first thin film magnetic core 1 and the second thin film magnetic core 2
To supply a current according to the recorded information, and is embedded with a fourth insulating layer 6d in order to ensure insulation with the second thin film magnetic core 2. Both ends of the head winding 11 are pulled out to the back gap side, and the pulled out rear end 11
The terminals a and 11b are used.
【００２３】そして特に、本実施例の磁気ヘッドでは、
上記第２の薄膜磁気コア２とＭＲ感磁部５の先端電極７
ａとが電気的に接続されるようになっている。すなわ
ち、階段状となされた先端電極７ａ上に第２の薄膜磁気
コア２の先端部が積層されることによって電気的に接続
され、これら先端電極７ａと第２の薄膜磁気コア２とが
同電位とされている。したがって、先端電極７ａとＭＲ
感磁部５とが電気的に接続されていることから、該ＭＲ
感磁部５と第２の薄膜磁気コア２とが同電位となり、当
該ＭＲ感磁部５の先端部が電気的に安定する。これによ
り、媒体上の微小な導電性を有するごみ等の影響を受け
ることなく、再生時における特性が向上し、ノイズの発
生が回避される。また、上記第２の薄膜磁気コア２が先
端電極７ａと電気的に接続されることから、この第２の
薄膜磁気コア２が上記ＭＲ感磁部５の先端電極として機
能する。したがって、この第２の薄膜磁気コア２には、
後端縁よりバック側へ引き出される端子導出部が設けら
れ、その後端縁部２ａが外部端子部とされている。In particular, in the magnetic head of this embodiment,
The second thin film magnetic core 2 and the tip electrode 7 of the MR magnetic sensing part 5
and a are electrically connected. That is, the tip portion of the second thin-film magnetic core 2 is electrically connected by being stacked on the step-shaped tip electrode 7a, and the tip electrode 7a and the second thin-film magnetic core 2 have the same potential. It is said that. Therefore, the tip electrode 7a and the MR
Since the magnetic sensing section 5 is electrically connected, the MR
The magnetic sensitive section 5 and the second thin film magnetic core 2 have the same potential, and the tip of the MR magnetic sensitive section 5 is electrically stabilized. As a result, the characteristics at the time of reproduction are improved and the generation of noise is avoided without being affected by dust having a minute conductivity on the medium. Further, since the second thin film magnetic core 2 is electrically connected to the tip electrode 7a, the second thin film magnetic core 2 functions as the tip electrode of the MR magnetic sensing part 5. Therefore, in the second thin film magnetic core 2,
A terminal lead-out portion that is pulled out to the back side from the rear end edge is provided, and the rear end edge portion 2a is an external terminal portion.
【００２４】また、上記第２の薄膜磁気コア２と先端電
極７ａとの接続部においては、ＡＢＳ面４より先端電極
７ａの段差部までの距離Ｌ1 がＭＲヘッドのデプスとさ
れ、ＡＢＳ面４より先端電極７ａと第２の薄膜磁気コア
２との接続後端部までの距離Ｌ2 がインダクティブヘッ
ドのデプスとされている。すなわち、ＭＲヘッドとイン
ダクティブヘッドのそれぞれの磁気ギャップｇのデプス
が同一の先端電極７ａによって規制されるようになって
いる。At the connection between the second thin film magnetic core 2 and the tip electrode 7a, the distance L 1 from the ABS surface 4 to the stepped portion of the tip electrode 7a is the depth of the MR head, and the ABS surface 4 Further, the distance L 2 from the connection rear end of the tip electrode 7a to the second thin film magnetic core 2 is the depth of the inductive head. That is, the depth of the magnetic gap g of each of the MR head and the inductive head is regulated by the same tip electrode 7a.
【００２５】そしてさらに本実施例の磁気ヘッドでは、
媒体からの電荷を上記ＭＲ感磁部５へ流さないようにす
るため、第１の薄膜磁気コア１の容量を第２の薄膜磁気
コア２の容量よりも大きくし、且つ第１の薄膜磁気コア
１と第２の薄膜磁気コア２をそれぞれ独立に接地電位Ｖ
ss1 ，Ｖss2 に接続している。なお本例では、第２の薄
膜磁気コア２と直接接地を取るのではなく、当該第２の
薄膜磁気コア２と電気接続される基体３に接地電位Ｖss
1を接続している。もちろん、第２の薄膜磁気コア２と
接地電位Ｖss1を直接接続するようにしてもよい。Further, in the magnetic head of this embodiment,
In order to prevent the electric charge from the medium from flowing to the MR magnetic sensing section 5, the capacitance of the first thin film magnetic core 1 is made larger than that of the second thin film magnetic core 2, and the first thin film magnetic core is The first and second thin film magnetic cores 2 are independently grounded to V
It is connected to ss 1 and Vss 2 . In this example, instead of directly grounding the second thin film magnetic core 2, the ground potential Vss is applied to the substrate 3 electrically connected to the second thin film magnetic core 2.
1 is connected. Of course, the second thin film magnetic core 2 and the ground potential Vss 1 may be directly connected.
【００２６】この結果、媒体からの電荷が磁気ギャップ
部に飛び込んできた場合には、電荷はＭＲ感磁部５を通
らずに容量の大きい第１の薄膜磁気コア１へと流れ、最
終的に接地電位Ｖss1 へと放出される。仮に、ＭＲ感磁
部５に電荷が飛び込んできた場合でも、先端電極７ａを
介して第１の薄膜磁気コア１へと流れ、最終的に接地電
位Ｖss2 へと放出される。したがって、本実施例の磁気
ヘッドにおいては、ＭＲ感磁部５への電荷の飛び込みが
確実に防止され、静電破壊が回避される。As a result, when the charge from the medium jumps into the magnetic gap portion, the charge flows to the first thin film magnetic core 1 having a large capacitance without passing through the MR magnetic sensitive portion 5, and finally. It is discharged to the ground potential Vss 1 . Even if the electric charge jumps into the MR magnetic sensing part 5, it flows to the first thin film magnetic core 1 through the tip electrode 7a and is finally discharged to the ground potential Vss 2 . Therefore, in the magnetic head of the present embodiment, the electric charge is surely prevented from jumping into the MR magnetic sensing section 5, and electrostatic breakdown is avoided.
【００２７】ところで、上述の複合型磁気ヘッドを作製
するには、次のようにして行う。先ず、図３に示すよう
に、Ａｌ2 Ｏ3 −ＴｉＣ等の非磁性且つ導電性材料より
なる基体３上に、所要のパターンにＦｅ−Ｎｉ等よりな
る第１の薄膜磁気コア１をフレームメッキ法によって形
成する。次に、上記第１の薄膜磁気コア１を埋め込むよ
うにしてＳｉＯ2 ，Ａｌ2 Ｏ3 等の非磁性材料をスパッ
タリングし、第１の絶縁層６ａを形成する。次いで、上
記第１の絶縁層６ａ上にＮｉ−Ｆｅ，Ｎｉ−Ｃｏ，Ｎｉ
−Ｆｅ−Ｃｏ等よりなるＭＲ感磁部５を形成する。ＭＲ
感磁部５は、平面長方形パターンとして形成し、その一
端縁がＡＢＳ面４に臨むように、且つこのＡＢＳ面４に
対して略直交する方向に延在して形成する。By the way, the above-mentioned composite magnetic head is manufactured as follows. First, as shown in FIG. 3, a first thin-film magnetic core 1 made of Fe-Ni or the like is frame-plated on a substrate 3 made of a non-magnetic and conductive material such as Al 2 O 3 -TiC in a required pattern. Form by the method. Then, a nonmagnetic material such as SiO 2 or Al 2 O 3 is sputtered so as to fill the first thin film magnetic core 1 to form the first insulating layer 6a. Then, Ni-Fe, Ni-Co, Ni is formed on the first insulating layer 6a.
The MR magnetic sensitive portion 5 made of —Fe—Co or the like is formed. MR
The magnetically sensitive portion 5 is formed as a flat rectangular pattern, and one end of the magnetically sensitive portion 5 is formed so as to face the ABS surface 4 and extend in a direction substantially orthogonal to the ABS surface 4.
【００２８】次に、上記ＭＲ感磁部５上に非磁性材料を
全面被着する。このときの膜厚は、ＭＲ感磁部５とこの
非磁性材料上に積層される電極７ａ，７ｂとが絶縁され
ればよいため、２０００Å程度と薄くてよい。次いで、
上記ＡＢＳ面４側の先端部と後端部に積層される非磁性
材料をエッチングによって除去する。このとき非磁性材
料の膜厚は薄いので、エッチング時間の短縮化が望め
る。なお、非磁性材料を除去する際は、ＡＢＳ面４から
除去後のＭＲ感磁部５の先端縁１２までの距離Ｌ1 がＭ
Ｒヘッドのデプスとなるようにする。この結果、図４に
示すように、ＭＲ感磁部５の中央部分を覆った形で第２
の絶縁層６ｂが形成される。Next, a non-magnetic material is entirely deposited on the MR sensitive section 5. The film thickness at this time may be as thin as about 2000 Å because the MR magnetic sensing section 5 and the electrodes 7a and 7b laminated on the non-magnetic material may be insulated. Then
The nonmagnetic material laminated on the front end and the rear end on the ABS 4 side is removed by etching. At this time, since the thickness of the non-magnetic material is thin, it is possible to shorten the etching time. When removing the non-magnetic material, the distance L 1 from the ABS surface 4 to the front edge 12 of the MR magnetic sensing part 5 after removal is M.
Set to the depth of the R head. As a result, as shown in FIG.
The insulating layer 6b is formed.
【００２９】そして、上記第２の絶縁層６ｂを含めてＭ
Ｒ感磁部５上に、エッチングされ難くしかも非磁性且つ
導電材料よりなる例えばＴｉを全面被着し、当該Ｔｉよ
りなる層を所定形状にパターニングする。この結果、図
５に示すように、ＭＲ感磁部５の先端部には第２の絶縁
層６ｂにその一部が積層された先端電極７ａが形成さ
れ、これと同時にＭＲ感磁部５の後端部には第２の絶縁
層６ｂにその一部が積層された後端電極７ｂが形成され
る。Then, including the second insulating layer 6b, M
For example, Ti, which is hard to be etched and which is non-magnetic and is made of a conductive material, is deposited on the entire surface of the R magnetic sensing section 5, and the layer made of Ti is patterned into a predetermined shape. As a result, as shown in FIG. 5, a tip electrode 7a, a part of which is laminated on the second insulating layer 6b, is formed at the tip of the MR magnetic sensing portion 5, and at the same time, the MR magnetic sensing portion 5 is formed. A rear end electrode 7b, which is partially laminated on the second insulating layer 6b, is formed at the rear end portion.
【００３０】次いで、図６に示すように、上記電極７
ａ，７ｂを覆って第３の絶縁層６ｃを形成する。次に、
この第３の絶縁層６ｃ上に上記ＭＲ感磁部９の略中央部
分を横切ってバイアス導体９を形成するとともに、これ
と同時に磁気的結合部１０を取り囲むようにして薄膜導
体よりなるヘッド巻線１１（図示は省略する。）をスパ
イラル状に形成する。そして、上記バイアス導体９を覆
って第２の薄膜磁気コア２との絶縁を図るための第４の
絶縁層６ｄを積層形成する。Then, as shown in FIG.
A third insulating layer 6c is formed to cover a and 7b. next,
A bias conductor 9 is formed on the third insulating layer 6c so as to traverse the substantially central portion of the MR magnetic sensing portion 9 and at the same time, a head winding made of a thin film conductor so as to surround the magnetic coupling portion 10. 11 (not shown) is formed in a spiral shape. Then, a fourth insulating layer 6d for covering the bias conductor 9 and for insulating the second thin film magnetic core 2 is laminated.
【００３１】次に、図７に示すように、先端電極７ａ上
に積層される第３の絶縁層６ｃと第４の絶縁層６ｄを当
該先端電極７ａが露出するまでエッチングするととも
に、ヘッド巻線１１の中心部において上記第１の絶縁層
６ａ、第３の絶縁層６ｃ、第４の絶縁層６ｄを第１の薄
膜磁気コア１が露出するまでエッチングする。なお、先
端電極７ａ上に積層される絶縁層６ｃ，６ｄをエッチン
グする際には、ＡＢＳ面４よりこれら絶縁層６ｃ，６ｄ
の先端縁１３までの距離Ｌ2 がインダクティブヘッドの
デプスとなるようにする。ここで例えば、ＭＲ感磁部５
の後端側にのみ電極を形成し、その上に絶縁層を介して
バイアス導体９を積層し、さらにこれを覆って絶縁層を
形成した後に、先端側に積層される絶縁層をＭＲ感磁部
５までエッチングして除去した場合には、オーバーエッ
チングによりＭＲ感磁部５がダメージを受けるが、本実
施例ではＭＲ感磁部５上に先端電極７ａがあるためにＭ
Ｒ感磁部５がエッチングによって損傷されない。Next, as shown in FIG. 7, the third insulating layer 6c and the fourth insulating layer 6d laminated on the tip electrode 7a are etched until the tip electrode 7a is exposed, and the head winding is formed. The first insulating layer 6a, the third insulating layer 6c, and the fourth insulating layer 6d are etched at the center of 11 until the first thin film magnetic core 1 is exposed. When the insulating layers 6c and 6d stacked on the tip electrode 7a are etched, the insulating layers 6c and 6d are removed from the ABS surface 4.
The distance L 2 to the tip edge 13 of the is set to be the depth of the inductive head. Here, for example, the MR magnetic sensing unit 5
An electrode is formed only on the rear end side, a bias conductor 9 is laminated on the electrode via an insulating layer, and an insulating layer is formed to cover the electrode, and then the insulating layer laminated on the front side is MR-sensitized. If the portion 5 is removed by etching, the MR sensitive portion 5 is damaged by over-etching. In this embodiment, however, the tip electrode 7a is present on the MR sensitive portion 5, so that M
The R magnetic sensitive section 5 is not damaged by etching.
【００３２】次いで、図８に示すように、露出した先端
電極７ａ上及び第１の薄膜磁気コア１上を含めて第４の
絶縁層６ｄａ上にＮｉ−Ｆｅ等よりなる磁性薄膜を被着
し、第２の薄膜磁気コア２を所望形状に形成する。この
結果、フロント部で先端電極７ａと第２の薄膜磁気コア
２とが電気的に接続されるとともに、バックギャップ部
で第２の薄膜磁気コア２と第１の薄膜磁気コア１が電気
的に接続される。そのフロント部では、先端電極７ａが
非磁性材料よりなることからギャップ材として機能し、
当該先端電極７ａのＡＢＳ面４から第２の絶縁層６ｂの
先端縁１３までの距離Ｌ1 がＭＲヘッドのデプスとな
る。同様に、ＡＢＳ面４より絶縁層６ｃ，６ｄの先端縁
１３までの距離Ｌ2 がインダクティブヘッドのデプスと
なる。Next, as shown in FIG. 8, a magnetic thin film made of Ni--Fe or the like is deposited on the fourth insulating layer 6da including the exposed tip electrode 7a and the first thin film magnetic core 1. , The second thin film magnetic core 2 is formed into a desired shape. As a result, the tip electrode 7a is electrically connected to the second thin film magnetic core 2 at the front portion, and the second thin film magnetic core 2 and the first thin film magnetic core 1 are electrically connected at the back gap portion. Connected. At the front part, since the tip electrode 7a is made of a non-magnetic material, it functions as a gap material,
The distance L 1 from the ABS surface 4 of the tip electrode 7a to the tip edge 13 of the second insulating layer 6b becomes the depth of the MR head. Similarly, the distance L 2 from the ABS surface 4 to the tip edges 13 of the insulating layers 6c and 6d becomes the depth of the inductive head.
【００３３】ところで、従来の磁気ヘッドでは、ＭＲヘ
ッドとインダクティブヘッドのデプスが同じであるため
に、ＭＲの再生という点ではデプスが短い方が先端の非
感磁領域が小さくなって出力が向上するが、インダクテ
ィブの記録という点では記録時に先端コアの飽和が生じ
やすくなり、記録の磁化反転領域が広がり望ましくな
い。これに対し、本実施例の磁気ヘッドでは、ＭＲヘッ
ドとインダクティブヘッドのデプスをそれぞれ再生時と
記録時とで最適な特性が得られるようにそのデプスを決
定することができるので、記録特性と再生特性の両方を
同時に満足させることができる。そして最後に、第２の
薄膜磁気コア２を覆って保護膜１４を形成した後、この
第２の薄膜磁気コア２を接地電位Ｖss2 に接続するとと
もに、基体３を接地電位Ｖss1 にそれぞれ独立に接続す
る。By the way, in the conventional magnetic head, since the MR head and the inductive head have the same depth, the shorter the depth, the smaller the non-sensitive area at the tip and the higher the output in terms of MR reproduction. However, in terms of inductive recording, saturation of the tip core is likely to occur during recording, and the magnetization reversal region of recording is widened, which is not desirable. On the other hand, in the magnetic head of the present embodiment, the depths of the MR head and the inductive head can be determined so that the optimum characteristics can be obtained at the time of reproducing and at the time of recording respectively, so the recording characteristics and the reproducing characteristics can be improved. Both characteristics can be satisfied at the same time. Finally, after forming the protective film 14 covering the second thin film magnetic core 2, the second thin film magnetic core 2 is connected to the ground potential Vss 2 and the base 3 is independently set to the ground potential Vss 1. Connect to.
【００３４】以上、本発明を適用した複合型磁気ヘッド
の一実施例について説明したが、本発明は上述の実施例
に限定されることなく種々の変更が可能である。例え
ば、前述の実施例では、インダクティブヘッドとＭＲヘ
ッドの複合型ヘッドの場合について本発明方法を適用し
たが、一対のシールドコアによってＭＲ感磁部を挾み込
んだＭＲヘッドの場合についても適用できる。もちろ
ん、この場合もＭＲ感磁部を損傷させることなく信頼性
の高いＭＲヘッドを作製することができることは言うま
でもない。An embodiment of the composite type magnetic head to which the present invention is applied has been described above, but the present invention is not limited to the above-mentioned embodiment and various modifications can be made. For example, in the above-mentioned embodiment, the method of the present invention is applied to the case of the composite type head of the inductive head and the MR head, but it is also applicable to the case of the MR head in which the MR magnetic sensitive portion is sandwiched by the pair of shield cores. .. Of course, in this case as well, it is needless to say that a highly reliable MR head can be manufactured without damaging the MR magnetic sensing part.
【００３５】[0035]
【発明の効果】以上の説明からも明らかなように、本発
明の複合型磁気ヘッドによれば、磁気記録媒体との対接
面に臨むＭＲ感磁部の先端側に積層される先端電極が第
２の薄膜磁気コアと電気的に接続されているので、ＭＲ
感磁部と第２の薄膜磁気コアとが同電位となり、当該Ｍ
Ｒ感磁部の先端部が電気的に安定し、媒体上の微小な導
電性を有するごみ等の影響を受けることなく、再生時に
おける特性が向上し、ノイズの発生が回避される。As is apparent from the above description, according to the composite type magnetic head of the present invention, the tip electrode laminated on the tip side of the MR magnetic sensing portion facing the contact surface with the magnetic recording medium is provided. Since it is electrically connected to the second thin film magnetic core, the MR
The magnetic field and the second thin film magnetic core have the same potential, and the M
The tip of the R magnetic sensing section is electrically stable, the characteristics at the time of reproduction are improved, and the generation of noise is avoided without being affected by dust having minute conductivity on the medium.
【００３６】また、本発明の複合型磁気ヘッドにおいて
は、第１の薄膜磁気コアの容量が第２の薄膜磁気コアの
容量よりも大きく、且つ第１の薄膜磁気コアと第２の薄
膜磁気コアがそれぞれ独立に接地電位に接続されている
ので、媒体からの電荷のＭＲ感磁部への飛び込みを確実
に防止することができ、静電破壊を回避できる。In the composite magnetic head of the present invention, the capacitance of the first thin film magnetic core is larger than the capacitance of the second thin film magnetic core, and the first thin film magnetic core and the second thin film magnetic core are Since they are independently connected to the ground potential, it is possible to reliably prevent electric charges from the medium from jumping into the MR magnetic sensitive section, and avoid electrostatic breakdown.
【００３７】一方、本発明の方法においては、ＭＲ感磁
部に至るまでエッチングを行って絶縁層を除去するので
はなく、ＭＲ感磁部上に積層した先端電極が露出するま
でエッチングを行うようにしているので、ＭＲ感磁部を
損傷させるようなことがない。したがって、信頼性の高
い磁気ヘッドを得ることができる。On the other hand, in the method of the present invention, the etching is not performed to reach the MR magnetic sensitive portion to remove the insulating layer, but the etching is performed until the tip electrode laminated on the MR magnetic sensitive portion is exposed. Therefore, the MR magnetic sensitive section is not damaged. Therefore, a highly reliable magnetic head can be obtained.
【図１】本発明を適用した複合型磁気ヘッドの断面図で
ある。FIG. 1 is a cross-sectional view of a composite magnetic head to which the present invention is applied.
【図２】図１の複合型磁気ヘッドの概略的な平面図であ
る。FIG. 2 is a schematic plan view of the composite magnetic head of FIG.
【図３】本発明を適用した複合型磁気ヘッドを順次作製
する工程を示すもので、ＭＲ感磁部形成工程を示す要部
拡大断面図である。FIG. 3 is an enlarged cross-sectional view of an essential part showing a step of sequentially forming a composite magnetic head to which the present invention is applied, showing a step of forming an MR magnetic sensitive portion.
【図４】第１の絶縁層形成工程を示す要部拡大断面図で
ある。FIG. 4 is an enlarged sectional view of an essential part showing a first insulating layer forming step.
【図５】電極形成工程を示す要部拡大断面図である。FIG. 5 is an enlarged sectional view of an essential part showing an electrode forming step.
【図６】バイアス導体形成工程を示す要部拡大断面図で
ある。FIG. 6 is an enlarged sectional view of an essential part showing a bias conductor forming step.
【図７】エッチング工程を示す要部拡大断面図である。FIG. 7 is an enlarged sectional view of an essential part showing an etching step.
【図８】第２の薄膜磁気コア形成工程を示す要部拡大断
面図である。FIG. 8 is an enlarged sectional view of an essential part showing a step of forming a second thin film magnetic core.
【図９】ハードディスク用磁気ヘッドの一例を示す斜視
図である。FIG. 9 is a perspective view showing an example of a magnetic head for a hard disk.
【図１０】従来の複合型磁気ヘッドを一部破断して示す
拡大斜視図である。FIG. 10 is an enlarged perspective view showing a conventional composite type magnetic head with a part thereof broken away.
【図１１】図１０の複合型磁気ヘッドの概略的な回路図
である。11 is a schematic circuit diagram of the composite magnetic head of FIG.
１・・・第１の薄膜磁気コア ２・・・第２の薄膜磁気コア ４・・・ＡＢＳ面 ５・・・ＭＲ感磁部 ６ａ・・・第１の絶縁層 ６ｂ・・・第２の絶縁層 ６ｃ・・・第３の絶縁層 ６ｄ・・・第４の絶縁層 ７ａ・・・先端電極 ７ｂ・・・後端電極 ９・・・バイアス導体 １１・・・ヘッド巻線 DESCRIPTION OF SYMBOLS 1 ... 1st thin film magnetic core 2 ... 2nd thin film magnetic core 4 ... ABS surface 5 ... MR magnetic sensing part 6a ... 1st insulating layer 6b ... 2nd Insulating layer 6c ... Third insulating layer 6d ... Fourth insulating layer 7a ... Front electrode 7b ... Rear electrode 9 ... Bias conductor 11 ... Head winding
Claims (3)
臨んで磁気ギャップを構成する第１の薄膜磁気コアと第
２の薄膜磁気コアが積層され、 上記磁気ギャップ内に、先端部と後端部にそれぞれ電極
が積層された磁気抵抗効果感磁部の一端或いは先端部に
積層される電極が、上記磁気記録媒体との対接面に臨ん
で配置され、 上記先端部に積層される電極と第２の薄膜磁気コアとが
電気的に接続されていることを特徴とする複合型磁気ヘ
ッド。1. A first thin film magnetic core and a second thin film magnetic core forming a magnetic gap facing a surface facing a magnetic recording medium are laminated between front end portions, and a tip is provided in the magnetic gap. The electrode to be laminated at one end or the tip end of the magnetoresistive effect magnetic sensing portion having the electrodes respectively laminated at the end portion and the rear end portion is disposed so as to face the contact surface with the magnetic recording medium, and is laminated at the tip portion. And a second thin-film magnetic core electrically connected to each other.
磁気コアの容量よりも大きく、且つ第１の薄膜磁気コア
と第２の薄膜磁気コアがそれぞれ独立に接地電位に接続
されていることを特徴とする請求項１記載の複合型磁気
ヘッド。2. The capacitance of the first thin film magnetic core is larger than the capacitance of the second thin film magnetic core, and the first thin film magnetic core and the second thin film magnetic core are independently connected to the ground potential. The composite type magnetic head according to claim 1, wherein
を介して磁気抵抗効果感磁部を磁気記録媒体との対接面
と略直交する方向に延在して形成する工程と、 上記磁気抵抗効果感磁部上に第２の絶縁層を形成した
後、当該磁気抵抗効果感磁部の先端部と後端部に積層さ
れる第２の絶縁層を除去する工程と、 上記磁気抵抗効果感磁部の先端部と後端部にそれぞれ非
磁性の導電材料よりなる電極をその一部が上記第２の絶
縁層に積層されるように同時形成する工程と、 上記電極を覆って第３の絶縁層を形成した後、この上に
バイアス導体層を積層し、さらにこのバイアス導体を覆
って第４の絶縁層を形成する工程と、 上記磁気抵抗効果感磁部上の先端電極が露出するまで第
３の絶縁層及び第４の絶縁層を除去する工程と、 露出した先端電極と電気的に接続して第２の薄膜磁気コ
アを上記第４の絶縁層上に積層形成する工程とを有して
なる複合型磁気ヘッドの製造方法。3. A step of forming a magnetoresistive effect magnetic sensing portion on a first thin film magnetic core with a first insulating layer interposed therebetween, extending in a direction substantially orthogonal to a contact surface with a magnetic recording medium. And a step of forming a second insulating layer on the magnetoresistive effect magnetic sensing portion, and then removing the second insulating layer laminated on the front end portion and the rear end portion of the magnetoresistive effect magnetic sensitive portion, A step of simultaneously forming electrodes made of a non-magnetic conductive material at the front end portion and the rear end portion of the magnetoresistive effect magnetic sensitive part so that a part thereof is laminated on the second insulating layer; and A step of forming a third insulating layer so as to cover it, then laminating a bias conductor layer thereon, and further forming a fourth insulating layer so as to cover the bias conductor; and a tip on the magnetoresistive effect magnetic sensing part. Removing the third insulating layer and the fourth insulating layer until the electrodes are exposed; Composite manufacturing method of a magnetic head comprising and a step of the second thin film magnetic core formed by lamination on the fourth insulating layer and connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19433491A JPH0540920A (en) | 1991-08-02 | 1991-08-02 | Composite magnetic head and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19433491A JPH0540920A (en) | 1991-08-02 | 1991-08-02 | Composite magnetic head and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0540920A true JPH0540920A (en) | 1993-02-19 |
Family
ID=16322865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19433491A Withdrawn JPH0540920A (en) | 1991-08-02 | 1991-08-02 | Composite magnetic head and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0540920A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0621584A2 (en) * | 1993-04-23 | 1994-10-26 | Sony Corporation | Magnetic reluctance effect magnetic head |
| US5675691A (en) * | 1994-12-09 | 1997-10-07 | Balzers Aktiengesellschaft | Diffraction gratings in optical waveguide components and production method thereof |
-
1991
- 1991-08-02 JP JP19433491A patent/JPH0540920A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0621584A2 (en) * | 1993-04-23 | 1994-10-26 | Sony Corporation | Magnetic reluctance effect magnetic head |
| EP0621584A3 (en) * | 1993-04-23 | 1996-07-31 | Sony Corp | Magnetic reluctance effect magnetic head. |
| US6130810A (en) * | 1993-04-23 | 2000-10-10 | Sony Corporation | Magnetic reluctance effect magnetic head with the connection length of the forward electrode less than the facing length of the magnetic gap |
| US5675691A (en) * | 1994-12-09 | 1997-10-07 | Balzers Aktiengesellschaft | Diffraction gratings in optical waveguide components and production method thereof |
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