JPH0737120Y2 - Electrode structure of heat treatment furnace - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION "Industrial application field" The present invention relates to an electrode structure of a heat treatment furnace for treating ceramics, metals, graphite materials or composite materials thereof at high temperatures.

“Prior Art” FIG. 4 is a diagram showing an example of a conventional heat treatment furnace. Furnace body 1
Is composed of an outer wall 2 and an inner wall 3 and is cooled by cooling water. The heating chamber 4 is composed of a heat insulating material 5, a heater 6, and a hearth 7, and a treatment object 8 is arranged inside. The electrode 10 penetrates the furnace body 1 and the heating chamber 4, and is connected to the heater 6 via the connector 12.

FIG. 5 shows a conventional example of an electrode section in a heat treatment furnace. The electrode 10 uses a graphite material 10a on the high temperature side and a metal material 10b such as copper on the low temperature side.

An insertion hole 15 for inserting the electrode 10 is formed in the heat insulating material 5. A nozzle 16 and a nozzle flange 17 are provided on the outer wall 2 and the inner wall 3. A sleeve 20 is provided from the insertion hole 15 of the heat insulating material 5,
The electrode 10 is supported via a ceramic insulating material 22.

On the other hand, on the nozzle flange 17 side, the flanges 18 and 19 are provided with a seal portion 21 for both insulation and vacuum sealing.

Further, another conventional example will be described with reference to FIG.

An insulating plate 25 is provided between the nozzle flange 17 and the flange 18,
Insulation from the furnace body 1 is performed.

On the other hand, the vacuum seal has an O-ring 27 by the flanges 18 and 19.
Is held around the electrode 10.

Further, in order to ensure the support of the electrode 10, a cylindrical support portion 18a having an integral structure with the flange 18 is provided.

[Problems to be Solved by the Invention] However, in the above-mentioned conventional example, there are the following problems due to restrictions on the material and structure of the heat treatment furnace.

Conductive graphite is used as the heat insulating material.

In order to hold the electrode stably, it must be insulated and supported from the heat insulating material at the high temperature portion of the inner wall.

When a graphite-based composite material is treated at high temperature, a large amount of vaporized product is often generated. These gases may condense and adhere to the periphery of the insulating part because the temperature of the electrode part is lower than that in the heating chamber.If the adhered substance is a conductive substance and it grows for a long time and the insulation deteriorates, In some cases, a circuit was formed to deposits, a sleeve, a heat insulating material, and a furnace body, resulting in leakage.

In these cases, the generated vaporized substance adheres to the electrode portion of the high temperature furnace that heat-treats the ceramic or graphite material, and becomes a conductive substance, so that electric leakage often occurs.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide an electrode structure of a heat treatment furnace in which a leakage does not occur even in a heat treatment in which a large amount of vaporized substance is generated.

"Means for Solving the Problem" A first aspect of the present invention is an electrode structure of a heat treatment furnace in which an electrode is drawn into a heating chamber provided in a furnace capable of holding a vacuum, an inert gas atmosphere, etc. An insertion hole for inserting the electrode is provided in the body and the heating chamber, the electrode and the heating chamber are held so as to have a gap, and the furnace body and the electrode are connected through an insulating material. A partition plate is provided between the portion and the insulating material so as to cover the insulating material and form a curved path from the gap portion to the insulating material.

A second aspect of the present invention is characterized in that a shielding plate is provided between the furnace body and the heating chamber so as to cover the electrode.

"Operation" In the first aspect of the electrode structure of the heat treatment furnace of the present invention, since the electrode and the heating chamber are held in non-contact with each other, the electric leakage does not occur through this path.

Further, even when gas or the like flows out from the gap between the electrode and the heating chamber, it is blocked by the partition plate, and it is possible to prevent the adhered matter from adhering to the insulating material.

Further, in the second aspect of the present invention, since the shielding plate is provided between the furnace body and the heating chamber, it is possible to prevent the outflow of gas or the like from the heating chamber to the outside of the heating chamber.

[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a view showing a first embodiment of the present invention, in which insertion holes 1a and 15 for inserting an electrode 10 into a furnace body 1 and a heat insulating material 5 constituting a heating chamber 4 are provided, and 10 and insulation 5
It is held so as to have a gap S between them. Also,
The furnace body 1 and the electrode 10 are connected via an insulator 21, and
A partition plate 30 is provided between the gap S and the insulating material 21.

The connection between the furnace body 1 and the electrode 10 will be described in detail.
Nozzles 16 and 16 having a concentric circle shape are provided outward from the insertion holes 1a of the inner wall 3 and the outer wall 2 constituting the nozzle.
A flange 17 is provided at the tips of the 16, 16. A flange 18 is further provided outside the flange 17. The flange 18 and the electrode 10 are connected via an insulating material 21. Further, a support portion 18a is integrally provided from the flange 18 toward the heating chamber 4, and a tip portion of the support portion and the electrode 10 are connected via an insulating material 21.

A partition plate 30 having an L-shaped cross section is provided so as to project from the surface of the electrode 10 between the support portion 18a and the heat insulating material 5.

According to the electrode structure of the heat treatment furnace of the present embodiment, the gap S is provided without insulating the electrode 10 and the heat insulating material 5, so that the electrode 10 is stabilized so as not to come into contact with the heat insulating material 5. By supporting it, it is possible to prevent leakage in this system.

On the other hand, since the gap S is provided between the electrode 10 and the heat insulating material 5, the gas flows toward the low temperature portion, but the insulating material 21 is separated by the partition plate 30 so that the insulating material 21 does not come into direct contact with the gas. By providing the partition plate 30 while covering the partition plate 30, it is possible to prevent gas from flowing into the partition plate 30 by using the path from the gap S to the insulating material 21 as a curved path, and as a result, deposits may be generated on the partition plate 30. Adhesion to the insulating material 21 located at the back of the road can be prevented.

A second embodiment of the present invention will be described with reference to FIG. It should be noted that parts having the same configurations as those in the above-mentioned embodiment are designated by common reference numerals and the description thereof will be omitted.

In this embodiment, the electrode 10 is supported by the cylindrical support portion 18a integrated with the flange 18, but the insulation is performed by the flanges 17, 18
An insulating plate (insulating material) 25 is inserted between them.

In order to prevent the conductive material from adhering to the insulating plate 25, a partition plate 18b is provided from the flange 18 toward the heat insulating material 5, and a partition plate 1b is provided from the insertion hole 1a. .

Also in the electrode structure of the heat treatment furnace of the present embodiment, the insulating plate 25 is covered by the partition plate 1b and the partition plate 18b, and the partition plate 1b, 18b forms a double path from the gap S to the insulating plate 25. Since it is a curved road, the same effect as that of the above-mentioned embodiment can be obtained.

Further, since the insulating support at the high temperature is not performed in the heat insulating material portion, the ceramic insulating material which has been conventionally used is not used. Therefore, there is a merit that it is not necessary to use ceramics which are expensive and have a fear of stability as a structural material.

Since the structure insulates only in the low temperature portion, an inexpensive synthetic resin such as bakelite can be used as an insulating material, and the cost can be reduced.

Since the partition plate is provided to prevent the invasion of gas into the insulating portion, it is possible to solve the problem of electric leakage due to conductive deposits.

Next, a third embodiment of the present invention will be described with reference to FIG. In the present embodiment, parts having the same configurations as those in the above-mentioned embodiments are designated by common reference numerals, and the description thereof will be omitted.

The electrode structure of this embodiment is different from the above embodiment in that a shield plate 35 is provided so as to shield between the inner wall 3 and the heat insulating material 5.

Also in the electrode structure of the present embodiment, the same effect as that of the above-mentioned embodiment can be obtained, and further, from the heating chamber 4 to the heating chamber 4
It is possible to prevent leakage of gas and the like to the outside. In this case, it is possible to obtain an excellent effect that it is particularly effective when operating the heating chamber in a pressurized state and that heat loss due to gas leakage can be prevented.

[Advantage of the Invention] As described above, according to the electrode structure of the heat treatment furnace according to the first aspect, without insulating the electrode and the heating chamber,
Since the gap is provided, it is possible to prevent electric leakage in this system by stably supporting the electrode so that it does not come into contact with the heating chamber.

On the other hand, since the gap is provided between the electrode and the heating chamber, the gas flows toward the low temperature portion, but the insulating material is covered with a partition plate so that the insulating material does not come into direct contact with the gas.
The partition plate makes the path from the gap to the insulating material curved, so that it is difficult for gas to flow and the gas does not reach the insulating material.As a result, deposits may occur on the partition plate. Also, it is possible to prevent adhesion to the insulating material located at the back of the curved path.

In addition, since the heating chamber does not support insulation under high temperature, it is not necessary to use the ceramic insulating material that has been used conventionally. Therefore, there is a merit that it is not necessary to use ceramics which are expensive and have a fear of stability as a structural material.

Further, since the structure is such that it is insulated only in the low temperature portion, an inexpensive synthetic resin such as bakelite can be used as an insulating material, and the cost can be reduced.

Since the partition plate is provided to prevent the invasion of gas into the insulating portion, it is possible to solve the problem of electric leakage due to conductive deposits.

Further, according to the electrode structure of the heat treatment furnace of the second aspect, since the shielding plate is provided between the heating chamber and the furnace body, it is possible to prevent leakage of gas and the like from the heating chamber to the outside of the heating chamber. In this case, it is possible to obtain an excellent effect that it is particularly effective when operating the heating chamber in a pressurized state and that heat loss due to gas leakage can be prevented.

[Brief description of drawings]

FIG. 1 is a side sectional view showing a first embodiment of the heat treatment furnace of the present invention, FIG. 2 is a side sectional view showing a second embodiment of the present invention, and FIG. 3 is a third embodiment of the present invention. Fig. 4 is a side sectional view showing an example, Fig. 4 is an overall view of a heat treatment furnace, and Figs. 5 and 6 are side sectional views showing an example of a conventional electrode structure of the heat treatment furnace. 1 ... Furnace body, 1a ... Insertion hole, 1b ... Partition plate, 2 ... Outer wall, 3 ... Inner wall, 4 ... Heating chamber, 10 ... Electrode, 15 ... Insertion hole, 17, 18, 19 ...... Flange, 18a …… Supporting part, 18b…
… Partition plate, 21 …… Insulation material, 25 …… Insulation plate (insulation material), 30
...... Partition plate, 35 …… Shield plate, S …… Gap.

Claims (2)

[Scope of utility model registration request] 1. An electrode structure of a heat treatment furnace for drawing an electrode into a heating chamber provided in a furnace capable of holding a vacuum, an inert gas atmosphere and the like, and an insertion hole for inserting the electrode into the furnace body and the heating chamber. Is provided so that a gap is provided between the electrode and the heating chamber, the furnace body and the electrode are connected through an insulating material, and the insulation is provided between the gap and the insulating material. An electrode structure of a heat treatment furnace, characterized in that a partition plate is provided for covering the material and for forming a curved path from the gap portion to the insulating material. 2. The electrode structure for a heat treatment furnace according to claim 1, wherein a shield plate is provided between the furnace body and the heating chamber so as to cover the electrode.