JPH0736323Y2 - Beam vendor for laser processing machine - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a beam bender for a laser processing machine, and relates to a beam bender for a laser processing machine that uses a purge gas to clean a laser beam reflecting surface of a mirror. It is a thing.

[Prior Art] FIG. 5 is a sectional view showing a conventional beam bender for a laser beam machine, and FIG. 6 is an oblique sectional view showing a main part of the beam bender for a laser beam machine shown in FIG.

In the figure, 1 is a laser beam oscillated from a laser oscillator, 2 is a beam duct for blocking the laser beam 1 from the outside, 3 is a mirror for reflecting the laser beam 1 to change its traveling direction, and 4 is an installation angle of the mirror 3. Adjustable mirror holder 5, reference numeral 5 is a bend block that supports the mirror holder 4, and reference numeral 6 is a beam bender installation table that fixes and supports the bend block 5. 7 is a purge gas discharge hole formed in the bend block 5 so as to face the reflection surface of the mirror 3, 8 is a nipple for connecting a gas pipe, and 9 is a purge gas flow showing the flow of the purge gas injected from the purge gas discharge hole 7. Is.

The conventional beam bender for a laser processing machine is configured as described above, and the direction of travel of the laser beam 1 from the laser oscillator is changed by being reflected by the mirror 3.
It was used to propagate in a given direction.

However, if dust or the like adheres to the reflecting surface of the mirror 3, the reflectance of the laser beam 1 is reduced, the intensity of the propagated laser beam 1 is weakened, and the mirror 3 itself is also heated. Therefore, it is necessary to clean the reflecting surface of the mirror 3 as needed.

Conventionally, the above-mentioned mirror 3 has been used as a cleaning means of this kind.
The method of spraying a purge gas on the reflective surface of was used in many cases. Further, in this type of beam bender for a laser processing machine, for example, N ₂ gas or clean gas was used as a purge gas.

[Problems to be Solved by the Invention] As described above, in the conventional beam bender for a laser processing machine, the purging gas is blown onto the reflecting surface of the mirror 3 to remove dust attached to the mirror 3. However, since the conventional purge gas discharge hole 7 is installed at a position substantially vertical to the mirror 3, the purge gas bounces off the reflecting surface of the mirror 3 and becomes a turbulent flow. Therefore, since the dust is scattered in the beam duct 2, the dust may be caught again in the purge gas and blown onto the mirror 3, which causes a problem that the reflecting surface of the mirror 3 is contaminated.

On the other hand, as a prior art focusing on this kind of problem,
58-143084, Japanese Utility Model 55-169506, and Japanese Utility Model 60-1
No. 16258 can be mentioned.

First, in the technology disclosed in Japanese Utility Model Laid-Open No. 58-143084, since the opposite purge gas discharge holes are provided, a turbulent flow with a wind speed close to zero is generated at the center of the reflecting surface of the mirror, which causes the reflection of the mirror. There was a possibility of soiling the surface.

Further, in the technique disclosed in Japanese Utility Model Laid-Open No. 55-169506, since the purge gas discharge hole and the purge gas suction hole which are opposed to each other are provided, the apparatus becomes complicated and inevitably expensive.

In the technique disclosed in Japanese Utility Model Laid-Open No. 60-116258, a purge gas emission hole for emitting a purge gas is formed in the longitudinal direction of the laser beam reflection part on the reflection surface of the mirror, and the reflection surface of the mirror is formed. In order to remove dust adhering to the mirror with high efficiency, it is necessary to increase the ejection speed of the purge gas, and it is necessary to increase the ejection pressure of the purge gas, which is not economical.

Therefore, the present invention has been made in order to solve such a problem, without contaminating the reflecting surface of the mirror,
An object of the present invention is to obtain a beam bender for a laser processing machine that can remove dust attached to the reflecting surface of a mirror, can reduce the ejection speed of purge gas, and is inexpensive.

[Means for Solving Problems] A beam bender for a laser beam machine according to the present invention changes a traveling direction of a laser beam from a laser oscillator by a mirror, propagates the laser beam in a predetermined direction, and reflects the mirror. In a beam bender for a laser processing machine, wherein a purge gas emission hole for emitting a purge gas is arranged along a surface, a barge gas emission hole for emitting the purge gas is formed in a longitudinal direction of a reflection portion of a laser beam on a reflection surface of the mirror. It is formed on one side portion and on the mirror installation surface side of the bend block accommodating the mirror.

[Operation] In the beam bender for the laser processing machine of the present invention,
A purge gas discharge hole for discharging the purge gas is installed along the reflecting surface of the mirror, and the purge gas is discharged from the purge gas discharge hole, so that the purge gas can flow along the surface of the mirror without entrapping dust in the beam duct. Flow with a certain directionality to remove dust particles attached to the mirror.

[Embodiment] FIG. 1 is a sectional view showing a beam bender for a laser processing machine according to an embodiment of the present invention, and FIG. 2 is an oblique view of the beam bender for a laser processing machine shown in FIG. Side view,
FIG. 3 is a perspective view showing a bend block of a beam bender for a laser processing machine according to the present invention, and FIG. 4 is an oblique sectional view showing a main part of the beam bender for a laser processing machine shown in FIG. In the figure, 1 to 6 and 8 are the same or corresponding components as those of the conventional example.

In the figure, 10 is a purge gas discharge hole, 11 is a flat plate-shaped recess for accommodating the reflection surface of the mirror 3 on the installation surface of the mirror 3 of the bend block 5, 12 is the purge gas flow from the purge gas discharge hole 10, and 13 is the mirror 3. It is a reflection portion of the laser beam 1 on the reflection surface.

The beam bender for the laser processing machine of this embodiment is configured as described above, and the operation of changing the traveling direction of the laser beam 1 from the laser oscillator and propagating it in a predetermined direction and attaching it to the reflecting surface of the mirror 3 is performed. Since the use of the purge gas for removing the dust and the like is the same as that of the conventional example, the description thereof will be omitted.

Here, only the purge gas spraying operation and the purge gas flow 12 which are different from the conventional apparatus will be described.

The purge gas supplied from the gas pipe connected by the nipple 8 is introduced into the flow path in the bend block 5, and is discharged from the purge gas discharge hole 10 into the recess 11. This purge gas flows in the recess 11 from the end of the mirror 3 along the mirror creeping surface, which is the reflecting surface of the mirror 3, with a certain directionality. Then, the purge gas flow 12 wipes away the dust adhering to the reflecting surface of the mirror 3 and removes it.

Further, since the purge gas flow 12 of this embodiment has an orderly flow having a certain directionality, it does not involve dust and the like in the beam duct 2 as in the conventional case. Therefore,
The reflecting surface of the mirror 3 is not polluted. Therefore, in the beam bender for a laser processing machine of this embodiment, the mirror 3 can be reliably cleaned, and the propagation loss of the laser beam 1 can be reduced.

Here, the shapes and forming methods of the purge gas discharge hole 10 and the recess 11 will be described in detail.

First, the purge gas discharge hole 10 will be described. For example, when the laser beam 1 is bent 90 degrees, the mirror 3 is installed at an angle of 45 degrees with respect to the incident direction of the laser beam 1. Usually, the mirror 3 has a disk shape, and in this case, the diameter of the mirror 3 must be at least √√ × d with respect to the diameter d of the laser beam 1 (see FIG. 2). reference). In this case, the reflecting portion 13 of the laser beam 1 on the reflecting surface of the mirror 3 has an elliptical shape. Therefore, when the purge gas discharge hole 10 is formed on one side portion of the reflecting portion 13 in the longitudinal direction, the purge gas can be discharged from a place near the center of the reflecting portion 13.

Further, if the purge gas discharge hole 10 is formed into a long hole extending in the longitudinal direction of the reflecting portion 13, the same amount of purge gas is evenly distributed to the reflecting portion 13. Therefore, if the purge gas discharge holes 10 are formed and installed in this way, even if the flow rate of the purge gas is small compared to the conventional flow rate, the dust adhered to the mirror 3 can be extremely effectively and surely. Can be removed.

Next, the recess 11 will be described.

In the above embodiment, the bend block 5 is formed on the installation surface of the mirror 3, but the method is not necessarily limited to this method. For example, the mirror 3 may be installed in the mirror holder 4 slightly away from the bend block 5,
A concave portion 11 may be formed between the reflection surface of the mirror 3 and the reflection surface of the mirror 3.
The point is that it may be formed in contact with the reflecting surface of the mirror 3. However, also in this case, it is desirable that the shape of the recess 11 itself be such that the purge gas easily flows.

[Effects of the Invention] As described above, the beam bender for a laser processing machine according to the present invention is a beam bender for a laser processing machine that changes the traveling direction of a laser beam from a laser oscillator by a mirror and propagates in a predetermined direction. , A purge gas discharge hole for discharging a purge gas along the reflecting surface of the mirror is arranged on one side in the longitudinal direction of the reflecting portion of the laser beam on the reflecting surface of the mirror. Since the purge gas is emitted along with it, the purge gas flows in a certain direction along the reflecting surface of the mirror without entraining the dust in the beam duct, and removes the dust adhering to the mirror. Mirror cleaning can be done reliably without polluting the surface. Further, the purge gas discharge hole for discharging the purge gas is one end in the longitudinal direction of the laser beam reflecting portion on the reflecting surface of the mirror,
Moreover, since it is formed on the mirror installation surface side of the bend block accommodating the mirror, it is sufficient to inject the purge gas in the short width direction of the reflection portion of the laser beam on the reflection surface of the mirror, and the injection speed of the purge gas. In addition, the injection pressure can be reduced, and since the structure is simple, the device can be inexpensive.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a beam bender for a laser beam machine according to an embodiment of the present invention, and FIG. 2 is a side view of the beam bender for a laser beam machine shown in FIG.
FIG. 3 is a perspective view showing a bend block in a beam bender for a laser processing machine according to an embodiment of the present invention, and FIG.
FIG. 1 is a cross-sectional view showing a main part of the laser processing machine beam bender, FIG. 5 is a sectional view showing a conventional laser processing machine beam bender, and FIG. 6 is a laser processing machine shown in FIG. It is a perspective view which shows the principal part of a beam bender. In the figure, 1 ... Laser beam, 3 ... Mirror, 5 ... Bend block, 10 ... Purge gas release hole. In the drawings, the same reference numerals and symbols indicate the same or corresponding constituent parts.

Claims (1)

[Scope of utility model registration request] 1. A purge gas emission hole for emitting a purge gas is provided along a reflecting surface of the mirror while changing a traveling direction of a laser beam from a laser oscillator by a mirror to propagate the laser beam in a predetermined direction. In a beam bender for a laser processing machine, a purge gas discharge hole for discharging the purge gas is one side portion in a longitudinal direction of a reflection portion of the laser beam on the reflection surface of the mirror, and a bend block for accommodating the mirror. A beam bender for a laser processing machine, which is formed on the mirror installation surface side.