JPH0734924Y2 - イオン源 - Google Patents
イオン源Info
- Publication number
- JPH0734924Y2 JPH0734924Y2 JP1986122512U JP12251286U JPH0734924Y2 JP H0734924 Y2 JPH0734924 Y2 JP H0734924Y2 JP 1986122512 U JP1986122512 U JP 1986122512U JP 12251286 U JP12251286 U JP 12251286U JP H0734924 Y2 JPH0734924 Y2 JP H0734924Y2
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- electrode
- ion source
- ion
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 32
- 239000011148 porous material Substances 0.000 claims description 16
- 238000000605 extraction Methods 0.000 claims description 11
- 238000001659 ion-beam spectroscopy Methods 0.000 claims description 10
- 238000005452 bending Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 6
- 239000010409 thin film Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986122512U JPH0734924Y2 (ja) | 1986-08-09 | 1986-08-09 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986122512U JPH0734924Y2 (ja) | 1986-08-09 | 1986-08-09 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6330350U JPS6330350U (enrdf_load_html_response) | 1988-02-27 |
| JPH0734924Y2 true JPH0734924Y2 (ja) | 1995-08-09 |
Family
ID=31012767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986122512U Expired - Lifetime JPH0734924Y2 (ja) | 1986-08-09 | 1986-08-09 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0734924Y2 (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0776424B2 (ja) * | 1990-04-25 | 1995-08-16 | 株式会社日立製作所 | イオンビームスパッタリング装置 |
| CN117805565A (zh) * | 2024-02-06 | 2024-04-02 | 西安交通大学 | 一种离子流诱发真空绝缘击穿实验装置及方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5645600A (en) * | 1979-09-19 | 1981-04-25 | Hitachi Ltd | Perforated ion source assembly* adjustment* and device therefor |
| JPS58108699A (ja) * | 1981-12-21 | 1983-06-28 | 株式会社日立製作所 | 中性粒子入射装置用イオン源の電極組立方法 |
-
1986
- 1986-08-09 JP JP1986122512U patent/JPH0734924Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6330350U (enrdf_load_html_response) | 1988-02-27 |
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