JPH073486B2 - Birefringent plate - Google Patents
Birefringent plateInfo
- Publication number
- JPH073486B2 JPH073486B2 JP61280114A JP28011486A JPH073486B2 JP H073486 B2 JPH073486 B2 JP H073486B2 JP 61280114 A JP61280114 A JP 61280114A JP 28011486 A JP28011486 A JP 28011486A JP H073486 B2 JPH073486 B2 JP H073486B2
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- substrate
- birefringent plate
- film
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、斜め蒸着膜を利用した複屈折板の改良に関す
る。TECHNICAL FIELD The present invention relates to improvement of a birefringent plate using an obliquely vapor-deposited film.
本発明の複屈折板は、視角依存性を緩和するものであ
る。The birefringent plate of the present invention alleviates the viewing angle dependency.
［従来の技術］ 従来、基板表面に誘電体材料の斜め蒸着膜を形成した複
屈折板が提供されている。[Prior Art] Conventionally, there has been provided a birefringent plate in which an oblique vapor deposition film of a dielectric material is formed on the surface of a substrate.
これは、蒸着材料（誘電体材料）の飛来方向に対して基
板表面を傾斜させて配置し、基板表面から斜め方向に成
長する柱状組織として蒸着膜を形成することにより、該
蒸着膜に、入射光に対する複屈折作用を付与せしめたも
のであり、例えば、1/4波長（λ）板等の光学機能素子
として利用されている。This is because the substrate surface is arranged to be inclined with respect to the flight direction of the vapor deposition material (dielectric material), and the vapor deposition film is formed as a columnar structure that grows in an oblique direction from the substrate surface. It has a birefringence effect on light and is used as an optical functional element such as a 1/4 wavelength (λ) plate.
［発明が解決しようとする問題点］ 上記した複屈折板は、視角依存性を有する。[Problems to be Solved by the Invention] The birefringent plate described above has a viewing angle dependency.
即ち、第４図図示のように、誘電体材料から成る上記蒸
着膜１は、基板２表面に対して斜め方向に柱状組織が成
長した構造を成す。このため、図のａ方向から入射する
光に対しては、比較的大きな複屈折作用を示すものの、
入射光の方向がｂ方向、さらにはｃ方向となるにつれ、
該作用は小さなものとなる。That is, as shown in FIG. 4, the vapor deposition film 1 made of a dielectric material has a structure in which a columnar structure grows in an oblique direction with respect to the surface of the substrate 2. Therefore, although it has a relatively large birefringence effect on the light incident from the direction a in the figure,
As the direction of incident light becomes the b direction, and further the c direction,
The effect is small.
したがって、前記斜め蒸着膜の複屈折作用を利用する1/
4λ板等の光学機能素子もまた、視角依存性を有するこ
ととなる。Therefore, the birefringence effect of the obliquely deposited film is used 1 /
An optical functional element such as a 4λ plate also has a viewing angle dependency.
本発明は、かかる事情に鑑み成されたものであり、斜め
蒸着膜を利用する複屈折板の視角依存性の解消を企図す
るものである。The present invention has been made in view of such circumstances, and is intended to eliminate the viewing angle dependency of a birefringent plate using an obliquely evaporated film.
［問題点を解決するための手段及び作用］ 本発明は、斜め蒸着膜を蒸着方向の異なる多層構造とす
るものである。[Means and Actions for Solving Problems] The present invention provides an obliquely vapor-deposited film having a multilayer structure in which vapor deposition directions are different.
即ち本発明は、 透明基板と、該基板表面に該基板の法線に対して斜め方
向から誘電体材料を蒸着して形成した斜め蒸着膜とから
成る複屈折板であって、 前記蒸着膜は少なくとも２層から成り、各層の誘電体材
料の基板に対する蒸着方向が異なることを特徴とする複
屈折板である。That is, the present invention is a birefringent plate comprising a transparent substrate and an obliquely vapor-deposited film formed by vapor-depositing a dielectric material on a surface of the substrate obliquely with respect to a normal line to the substrate, wherein the vapor-deposited film is The birefringent plate is composed of at least two layers, and the vapor deposition directions of the dielectric material of each layer on the substrate are different.
斜め蒸着膜各層の蒸着方向は、例えば、基板表面に立て
た法線を挟み、各対称な方向とすると、本発明の効果
を、より一層発揮することができる。The effects of the present invention can be further exerted if the vapor deposition directions of the respective layers of the oblique vapor deposition film are symmetrical with respect to the normal line standing on the substrate surface.
また、各蒸着膜の厚さ、材料、蒸着角（基板表面に対す
る法線と蒸着材料の飛来方向との為す角）は、該蒸着膜
に要求されるリターデーションにより異なる。Further, the thickness, material, and vapor deposition angle (angle formed by the normal to the substrate surface and the flying direction of the vapor deposition material) of each vapor deposition film differ depending on the retardation required for the vapor deposition film.
なお、蒸着膜の形成方法及び基板は、従来と同様でよ
い。The method of forming the vapor deposition film and the substrate may be the same as conventional ones.
本発明の複屈折板では、複屈折作用の大きくなる（また
は小さくなる）方向は、各層によってそれぞれ異なる。
このため、蒸着膜を全体として見た場合、視角依存性は
緩和される。In the birefringent plate of the present invention, the direction in which the birefringence action increases (or decreases) differs depending on each layer.
Therefore, when the vapor deposition film is viewed as a whole, the viewing angle dependence is relaxed.
［実施例］ 以下、本発明を図示する具体的な実施例に即して説明す
る。[Examples] The present invention will be described below with reference to specific illustrated examples.
第２図に示す装置を用い、ガラス基板２（50×250×1.
1）表面に、蒸着材料である酸化タングステン（WO3）
を、蒸着角70゜で下層11としてを成膜した後、蒸着角を
−70゜に変え、上層12を成膜して第１図に示す複屈折板
を得た。Using the device shown in FIG. 2, glass substrate 2 (50 × 250 × 1.
1) Tungsten oxide (WO 3 ) which is a vapor deposition material on the surface
Was deposited at a vapor deposition angle of 70 ° as the lower layer 11, the vapor deposition angle was changed to −70 °, and the upper layer 12 was deposited to obtain the birefringent plate shown in FIG.
該複屈折板上の各位置、Ａ、Ｂ、Ｃ、Ｄ、Ｅにおける膜
厚、位相差、及び、常光と異常光に対する屈折率の差△
ｎの分布を表に示す。Each position on the birefringent plate, the film thickness at A, B, C, D, and E, the phase difference, and the difference in refractive index between ordinary and extraordinary light Δ
The distribution of n is shown in the table.
表よりわかるように、複屈折板上の広い範囲に渡って、
△ｎ＝0.07〜0.08という高い複屈折性が得られ、また、
膜厚分布も均一であった。 As you can see from the table, over a wide range on the birefringent plate,
High birefringence of Δn = 0.07 to 0.08 is obtained, and
The film thickness distribution was also uniform.
また、上記複屈折板をクロスニコルの偏光板間に挟み、
透過光を観察したところ、どの角度から見ても均一であ
り、視角依存性は良好に解消されていた。Also, sandwiching the birefringent plate between crossed Nicols polarizing plates,
When the transmitted light was observed, it was uniform from any angle, and the viewing angle dependency was well resolved.
上記実施例では、誘電体材料として酸化タングステンを
用いたが、これは、可視光に対して透明な材料であれば
よく、例えば、酸化珪素（SiO2）を全膜厚3.4μとして
構成すると、上記と同様な効果が得られる。Tungsten oxide is used as the dielectric material in the above-mentioned embodiments, but any material that is transparent to visible light may be used. For example, if silicon oxide (SiO 2 ) is configured to have a total film thickness of 3.4 μ, The same effect as above can be obtained.
その他、蒸着材料としては、酸化チタン（TiO2）、イッ
トリア（Y2O3）、五酸化タンタル（Ta2O5）、五酸化ニ
オブ（Nb2O5）、三酸化ビスマス（Bi2O3）、SiO、ZnS、
MoO3、CeO2、SnO2等を用いることができる。Other vapor deposition materials include titanium oxide (TiO 2 ), yttria (Y 2 O 3 ), tantalum pentoxide (Ta 2 O 5 ), niobium pentoxide (Nb 2 O 5 ), bismuth trioxide (Bi 2 O 3). ), SiO, ZnS,
MoO 3 , CeO 2 , SnO 2 or the like can be used.
また、蒸着膜を多層構造としてもよいが、その場合は、
各層で十分な柱状組織が成長することが必要であり、こ
のためには、各層の厚さを500Å以上とする。Further, the vapor deposition film may have a multi-layer structure, but in that case,
It is necessary for each layer to grow sufficient columnar structure, and for this purpose, the thickness of each layer should be 500 Å or more.
第３図は、本発明の複屈折板を液晶防眩鏡に適用した場
合を示す模式断面図である。FIG. 3 is a schematic sectional view showing a case where the birefringent plate of the present invention is applied to a liquid crystal antiglare mirror.
図示の液晶防眩鏡は、ゲスト−ホスト型液晶セル３の後
方に、２層から成る斜め蒸着膜10（位相差90゜）と、ア
ルミニウム製の反射鏡４とを配置した構造を成すもので
ある。The illustrated liquid crystal anti-glare mirror has a structure in which a two-layer oblique vapor deposition film 10 (with a phase difference of 90 °) and a reflecting mirror 4 made of aluminum are arranged behind a guest-host type liquid crystal cell 3. is there.
上記液晶防眩鏡では、入射光は、反射鏡４での反射前後
で複屈折作用を受けるため、より、均一化が達成され
る。In the liquid crystal antiglare mirror, the incident light is subjected to the birefringence effect before and after the reflection by the reflecting mirror 4, so that the homogenization is further achieved.
［第２実施例］ 以下に本発明の第２実施例を示す。[Second Embodiment] A second embodiment of the present invention will be described below.
第５図に示す装置を用い、樹脂性偏光板（基板２）表面
に、Ar＋10％O2雰囲気中で五酸化タンタルをスパッタ蒸
着した。このときターゲット中央と基板２中央とを結ぶ
直線と基板２の表面法線とのなす角θを70゜とし、同直
線と同法線とが張る平面と基板表面との交線と、偏光板
の光軸とのなす角を45゜とした。この条件で五酸化タン
タルの膜厚が1.76μｍとなったところで成膜を一担停止
し、基板２をその中央を中心として180゜面内回転した
位置に再び固定し、さらに1.76μｍの成膜を行なった。
この結果、60×200×3mmの範囲でリターデーションが18
0゜±10゜の複屈折性・偏光性複合板を得た。Using the apparatus shown in FIG. 5, tantalum pentoxide was sputter-deposited on the surface of the resin polarizing plate (substrate 2) in an Ar + 10% O 2 atmosphere. At this time, the angle θ formed by the straight line connecting the center of the target and the center of the substrate 2 and the surface normal of the substrate 2 is 70 °, and the line of intersection between the plane formed by the straight line and the normal and the surface of the substrate and the polarizing plate The angle formed with the optical axis of is set to 45 °. Under this condition, when the film thickness of tantalum pentoxide reaches 1.76 μm, the film formation is stopped, the substrate 2 is fixed again at a position rotated 180 ° in the plane about the center of the film, and a film of 1.76 μm is formed. Was done.
As a result, the retardation is 18 in the range of 60 × 200 × 3 mm.
A 0 ° ± 10 ° birefringent / polarizing composite plate was obtained.
第６図は、本実施例の複屈折性・偏光性複合板を液晶調
光窓に適用した場合を示す模式断面図である。図示の液
晶調光窓は、ゲスト−ホスト型液晶セル３の後方に、上
記複屈折性・偏光性複合板を配置した構造を成すもので
ある。FIG. 6 is a schematic cross-sectional view showing a case where the birefringent / polarizing composite plate of this example is applied to a liquid crystal light control window. The illustrated liquid crystal light control window has a structure in which the birefringent / polarizing composite plate is arranged behind the guest-host type liquid crystal cell 3.
［第２実施例の効果］ 第７図は、上記液晶調光窓を明りとりに用いた３畳間を
天井方向から見た模式図である。（ａ）は斜め蒸着膜１
層のみからなる液晶調光窓であり、その複屈折異方性の
ため、外光は部屋の半分の部分に主にはいる。しかし、
第６図に示した斜め蒸着膜２層からなる液晶調光窓を用
いた場合には、第７図（ｂ）のように外光は広く部屋を
てらす。[Effects of the Second Embodiment] FIG. 7 is a schematic view of a space between three tatami mats in which the liquid crystal light control window is used for lighting as seen from the ceiling direction. (A) is an oblique vapor deposition film 1
It is a liquid crystal dimming window consisting of only layers, and due to its birefringence anisotropy, outside light is mainly entering half of the room. But,
When the liquid crystal light control window composed of the two layers of the obliquely evaporated film shown in FIG. 6 is used, the room is widely exposed to outside light as shown in FIG. 7 (b).
［第３実施例］ 第３実施例は、第６図に示したと同じ構成を１画素とし
たドットマトリックス型透過光型表示素子である。[Third Embodiment] The third embodiment is a dot-matrix transmitted light type display device having the same configuration as shown in FIG. 6 as one pixel.
［第３実施例の効果］ 斜め蒸着膜１層を用いた場合に比し、表示状態を認識で
きる範囲が広がり、多くの人が同時に表示を見ることが
できる。[Effects of Third Embodiment] Compared to the case where one obliquely deposited film is used, the range in which the display state can be recognized is expanded, and many people can see the display at the same time.
［効果］ 以上、要するに本発明は、斜め蒸着膜を利用する複屈折
板であって、該斜め蒸着膜を、蒸着方向の異なる多層構
造として構成したものである。[Effects] As described above, in short, the present invention is a birefringent plate using an obliquely vapor-deposited film, and the obliquely vapor-deposited film is configured as a multilayer structure having different vapor deposition directions.
実施例に詳述したように、本発明によると、入射光は、
いづれかの層によって複屈折作用をうける。このため、
視角依存性は解消される。As detailed in the examples, according to the present invention, the incident light is
Birefringence is affected by either layer. For this reason,
The viewing angle dependency is eliminated.
また、蒸着方向を変えることにより、蒸着源と基板表面
各部分との距離を平均化できるため、膜厚分布を一様化
できる。Further, by changing the vapor deposition direction, the distance between the vapor deposition source and each part of the substrate surface can be averaged, so that the film thickness distribution can be made uniform.
第１図は、本発明の実施例にかかる複屈折板の模式的な
断面図である。第２図は、斜め蒸着膜を形成する装置の
模式図である。第３図は、本実施例にかかる複屈折板を
適用した液晶防眩鏡の模式断面図である。第４図は、従
来の複屈折板の欠点を説明する模式断面図である。第５
図は第２実施例にかかる複屈折板を製造する装置の構成
図である。第６図は第２実施例にかかる複屈折板の断面
模式図である。第７図（ａ）及び（ｂ）は調光窓を有す
る３畳間を天井方向から見た模式図である。 １……斜め蒸着膜、２……基板FIG. 1 is a schematic sectional view of a birefringent plate according to an example of the present invention. FIG. 2 is a schematic view of an apparatus for forming a diagonal vapor deposition film. FIG. 3 is a schematic sectional view of a liquid crystal antiglare mirror to which the birefringent plate according to this example is applied. FIG. 4 is a schematic cross-sectional view for explaining the defects of the conventional birefringent plate. Fifth
The figure is a block diagram of an apparatus for manufacturing the birefringent plate according to the second embodiment. FIG. 6 is a schematic sectional view of a birefringent plate according to the second embodiment. FIGS. 7 (a) and 7 (b) are schematic views of a 3-tatami room having a light control window as seen from the ceiling direction. 1 ... Diagonal evaporation film, 2 ... Substrate
───────────────────────────────────────────────────── フロントページの続き (72)発明者 元廣 友美 愛知県愛知郡長久手町大字長湫字横道41番 地の１ 株式会社豊田中央研究所内 (72)発明者 多賀 康訓 愛知県愛知郡長久手町大字長湫字横道41番 地の１ 株式会社豊田中央研究所内 (72)発明者 石井 昌彦 愛知県愛知郡長久手町大字長湫字横道41番 地の１ 株式会社豊田中央研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tomomi Motohiro Aichi Prefecture, Aichi Prefecture, Nagakute Town, Nagakage 1 41, Yokoshiro Yokoido Central Research Institute Co., Ltd. (72) Inventor Yasunori Taga, Aichi Prefecture, Nagakute Town No. 41 Nagamichi Yokomichi 1 Toyota Central Research Institute Co., Ltd. (72) Inventor Masahiko Ishii Nagachikute-cho, Aichi-gun Aichi No. 1 Nagamoji Yokomichi 41 Toyota Central Research Institute
Claims (2)
対して斜め方向から誘電体材料を蒸着して形成した斜め
蒸着膜とから成る複屈折板であって、 前記蒸着膜は少なくとも２層から成り、各層の誘電体材
料の基板に対する蒸着方向が異なることを特徴とする複
屈折板。1. A birefringent plate comprising a transparent substrate and an obliquely vapor-deposited film formed by vapor-depositing a dielectric material on a surface of the substrate obliquely with respect to a normal line to the substrate, wherein the vapor-deposited film is formed. A birefringent plate comprising at least two layers, wherein each layer has a different vapor deposition direction of a dielectric material with respect to a substrate.
対する蒸着方向は、前記法線を挟み対称な方向である複
屈折板。2. The birefringence according to claim 1, wherein the vapor deposition film is composed of two layers, and the vapor deposition direction of the dielectric material of each layer with respect to the substrate is symmetrical with respect to the normal line. Board.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61280114A JPH073486B2 (en) | 1986-11-25 | 1986-11-25 | Birefringent plate |
| US07/118,932 US4874664A (en) | 1986-11-21 | 1987-11-10 | Birefringent plate and manufacturing method for the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61280114A JPH073486B2 (en) | 1986-11-25 | 1986-11-25 | Birefringent plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63132203A JPS63132203A (en) | 1988-06-04 |
| JPH073486B2 true JPH073486B2 (en) | 1995-01-18 |
Family
ID=17620520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61280114A Expired - Lifetime JPH073486B2 (en) | 1986-11-21 | 1986-11-25 | Birefringent plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073486B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012256024A (en) * | 2011-05-16 | 2012-12-27 | Dexerials Corp | Phase difference element |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2612196B2 (en) * | 1988-12-14 | 1997-05-21 | 富士写真フイルム株式会社 | Phase difference film and method of manufacturing the same |
| EP1223457A4 (en) * | 1999-10-15 | 2004-10-13 | Hitachi Ltd | Optically functional element and production method and application therefor |
| JP2002266072A (en) * | 2001-03-09 | 2002-09-18 | Sumitomo Electric Ind Ltd | Laminated film and film deposition method |
| JP4622685B2 (en) * | 2005-06-03 | 2011-02-02 | ソニー株式会社 | Reflective polarizer and method of manufacturing the same |
| KR100838066B1 (en) * | 2006-07-14 | 2008-06-16 | 삼성에스디아이 주식회사 | Organic light emitting device |
| JP2010210706A (en) * | 2009-03-06 | 2010-09-24 | Seiko Epson Corp | Polarizing element |
| JP5481664B2 (en) * | 2009-04-08 | 2014-04-23 | セイコーエプソン株式会社 | Manufacturing method of polarizing element |
| JP2012008363A (en) * | 2010-06-25 | 2012-01-12 | Sony Chemical & Information Device Corp | Method for manufacturing wavelength plate |
| JP6226902B2 (en) | 2015-03-19 | 2017-11-08 | デクセリアルズ株式会社 | Wave plate and optical device |
| JP6027199B2 (en) * | 2015-08-12 | 2016-11-16 | デクセリアルズ株式会社 | Phase difference element and manufacturing method thereof |
-
1986
- 1986-11-25 JP JP61280114A patent/JPH073486B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012256024A (en) * | 2011-05-16 | 2012-12-27 | Dexerials Corp | Phase difference element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63132203A (en) | 1988-06-04 |
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