JPH073433A - Iron-base material excellent in high temperature oxidation resistance and production there of - Google Patents

Iron-base material excellent in high temperature oxidation resistance and production there of

Info

Publication number
JPH073433A
JPH073433A JP5169870A JP16987093A JPH073433A JP H073433 A JPH073433 A JP H073433A JP 5169870 A JP5169870 A JP 5169870A JP 16987093 A JP16987093 A JP 16987093A JP H073433 A JPH073433 A JP H073433A
Authority
JP
Japan
Prior art keywords
iron
oxygen
film
based alloy
high temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP5169870A
Other languages
Japanese (ja)
Inventor
Yasushi Fukui
康 福居
Hideo Miyake
日出男 三宅
Masahiko Soda
正彦 惣田
Atsushi Ando
敦司 安藤
Minoru Saito
実 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Nisshin Co Ltd
Original Assignee
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nisshin Steel Co Ltd filed Critical Nisshin Steel Co Ltd
Priority to JP5169870A priority Critical patent/JPH073433A/en
Priority to KR1019930024703A priority patent/KR100265101B1/en
Priority to EP93118671A priority patent/EP0599225B1/en
Priority to DE69318515T priority patent/DE69318515T2/en
Priority to US08/155,373 priority patent/US5631090A/en
Publication of JPH073433A publication Critical patent/JPH073433A/en
Priority to US08/467,637 priority patent/US5612090A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To obtain the iron-base material having a dense insulating film vapor- deposition Al onto the surface of an iron-base alloy while regulating partial pressure of oxygen in an atmospheric gas and forming an Al-O film having lower oxygen concentration than Al2O3. CONSTITUTION:Al is vapor-deposited onto the surface of an iron-base alloy while regulating partial pressure of oxygen in an atmospheric gas to form a film containing, in Al, oxygen by the amount lower than the oxygen of the stoichiometric amount of Al2O3. The above iron-base alloy contains, by mass, 8-35% Cr, 0.4-8% Al, or 0.6-6% Si and further <=0.2% rare earth elements or U. Moreover, oxygen is contained by 1-50mo.% in Al in the above film, and an Al2O3 layer is formed on the outermost surface.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は,絶縁性被膜をもつ耐高
温酸化性に優れた鉄基材料およびその製造法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an iron-based material having an insulating film and excellent in high temperature oxidation resistance, and a method for producing the same.

【0002】[0002]

【従来の技術】ヒータ用などの電気発熱材料は表面を絶
縁化しなければならないことが多い。表面が絶縁化した
金属材料を得る方法の1つとして,発熱体の表面に絶縁
性の酸化皮膜を形成する方法がある。例えば高合金鋼
(ステンレス鋼) を発熱体素材とする場合に, Al含有鋼
やAl被覆鋼を大気雰囲気中または酸化雰囲気中で加熱
して表面にAl23層を形成させる方法が知られてい
る。
2. Description of the Related Art Electric heating materials for heaters and the like must often have their surfaces insulated. One of the methods for obtaining a metal material whose surface is insulated is to form an insulating oxide film on the surface of the heating element. For example, high alloy steel
When (stainless steel) is used as a heating element material, a method is known in which Al-containing steel or Al-coated steel is heated in an air atmosphere or an oxidizing atmosphere to form an Al 2 O 3 layer on the surface.

【0003】この加熱により,Al含有鋼の場合には鋼
中のAlが酸化して表面にAl23層が形成し,Al被覆
鋼の場合も被覆AlがAl23に酸化すると共に残余のA
lは鋼中に拡散して, 表面に絶縁性のAl23層が形成さ
れる。
By this heating, in the case of Al-containing steel, Al in the steel is oxidized to form an Al 2 O 3 layer on the surface, and in the case of Al-coated steel, the coating Al is oxidized to Al 2 O 3 as well. The remaining A
l diffuses into the steel and forms an insulating Al 2 O 3 layer on the surface.

【0004】このようにして製造された材料は, 高温で
使用しても鋼中のAlの酸化が進行し, 絶縁性が維持さ
れるかまたは高くなるので,ヒータ用材料のほか,一般
の耐熱絶縁材料としても使用されている。とくにこの材
料は面状発熱体として有用な用途を有している。
The material produced in this manner, even if used at high temperature, undergoes oxidation of Al in the steel to maintain or increase the insulating property. It is also used as an insulating material. In particular, this material has a useful application as a sheet heating element.

【0005】[0005]

【発明が解決しようとする課題】高合金鋼等の鉄基材の
表面にAl23からなる絶縁層を形成する場合, 絶縁層
は緻密で且つクラック等が発生しないものでなければな
らない。クラックが発生したり剥離すれば絶縁性が損な
われるからである。
When an insulating layer made of Al 2 O 3 is formed on the surface of an iron base material such as high alloy steel, the insulating layer must be dense and free from cracks and the like. This is because if a crack occurs or peels off, the insulating property will be impaired.

【0006】だが,鉄基材表面に絶縁性の高い緻密なA
l23層を形成するには, 高温加熱または長時間加熱を
必要とする。例えばAlを5%含有する鋼では,厚さが
0.5μmのAl23層を形成するには1100℃で5時間
の加熱が必要である。したがって, この加熱酸化処理に
コストがかかると共に生産性が低く,また加熱炉の寿命
も短くなるといった問題がある。
However, on the surface of the iron base material, a dense A having a high insulating property is used.
To form the l 2 O 3 layer, high temperature heating or long time heating is required. For example, in steel containing 5% Al, the thickness is
Heating at 1100 ° C. for 5 hours is required to form a 0.5 μm Al 2 O 3 layer. Therefore, there are problems that this heating and oxidation treatment is costly, the productivity is low, and the life of the heating furnace is shortened.

【0007】一方, 鉄基材が箔などのような薄板の場合
には,表面積に対して鉄基材の容積が小さいので,初め
の加熱酸化処理によってAlが消費される割合が多く,
鉄基材中のAl量が少なくなるという問題がある。この
ため, 使用中にAl23層を維持するのに必要な鉄基材
中のAlが少なくなり,鉄基材の表面絶縁性の寿命や耐
高温酸化寿命が短くなる。またヒーター材として使用す
るさいには箔中のAl量の減少により電気抵抗率が変化
し,期待した発熱が得られないことが多い。さらに高温
での使用中にAl23層の剥離などが起こると, Al消費
量がさらに増えて寿命が非常に短くなってしまう。
On the other hand, when the iron base material is a thin plate such as a foil, since the volume of the iron base material is small relative to the surface area, a large proportion of Al is consumed by the first thermal oxidation treatment,
There is a problem that the amount of Al in the iron base material decreases. Therefore, the amount of Al in the iron base material required to maintain the Al 2 O 3 layer during use is reduced, and the surface insulation life and high temperature oxidation life of the iron base material are shortened. Also, when used as a heater material, the electrical resistivity changes due to a decrease in the amount of Al in the foil, and the expected heat generation is often not obtained. If the Al 2 O 3 layer peels off during use at higher temperatures, the Al consumption will increase further and the life will be very short.

【0008】また,鉄基材の表面にAl被膜を形成した
うえで酸素雰囲気中で加熱する場合にも同様の問題があ
り,Al被膜が緻密なAl23層に酸化するには高温で長
時間の加熱を必要とする。また,長時間の加熱によって
異常酸化が生じ,体積膨張によって被膜にクラックが入
ったり剥離したりして,耐用寿命が短くなるという問題
もある。
The same problem occurs when an Al coating is formed on the surface of an iron base material and then heated in an oxygen atmosphere. To oxidize the Al coating into a dense Al 2 O 3 layer, a high temperature is required. Requires long-term heating. There is also a problem that abnormal oxidation occurs due to heating for a long time and the coating film cracks or peels off due to volume expansion, which shortens the useful life.

【0009】本発明の目的は,鉄基材表面にAl23
絶縁層を形成する場合の前記のような問題の解決を図る
ことにある。
An object of the present invention is to solve the above-mentioned problems when forming an Al 2 O 3 -based insulating layer on the surface of an iron base material.

【0010】[0010]

【課題を解決するための手段】本発明は, Al23より
も酸素濃度が低いAl-O系の被膜, すなわちAl23
化学量論量の酸素よりも少量の酸素をAl中に含有する
被膜, を鉄基合金の表面に形成した鉄基材料,さらには
この被膜の少なくとも最外表面にAl23層を形成して
なる鉄基材料を提供する。
The present invention is directed to an Al-O-based coating having a lower oxygen concentration than Al 2 O 3 , that is, a smaller amount of oxygen than the stoichiometric amount of Al 2 O 3 in Al. The present invention provides an iron-based material in which the coating contained in 1) is formed on the surface of an iron-based alloy, and further, an Al 2 O 3 layer is formed on at least the outermost surface of the coating.

【0011】当該被膜は金属Al中にAl23が混在した
層であると言うこともできる。このような被膜は,鉄基
合金の表面にAlを蒸着させるさいに,雰囲気ガスの酸
素分圧を調節することによって形成することができる。
It can be said that the film is a layer in which Al 2 O 3 is mixed in the metal Al. Such a coating can be formed by adjusting the oxygen partial pressure of the atmospheric gas when Al is vapor-deposited on the surface of the iron-based alloy.

【0012】[0012]

【作用】本発明に従って鉄基合金の表面に形成された,
Al23よりも酸素濃度が低いAl-O系の被膜は,Al中
にAl23が混在した層であるとも言えるから,大気中
で高温加熱すると(例えば1000〜1200℃で加熱
すると)表層部のAlは早期に酸化してAl23層を形成
するが,この最外表面のAl23層がバリヤーとなって
被膜内部のAlの酸化が進行しない間に,被膜内部のAl
は鉄基合金中に拡散し,被膜内部のAl23が濃縮され
る。鉄基合金中にAlが拡散することによって鉄基合金
自身の耐高温酸化性が高くなる。被膜中の酸素濃度が1
mol%未満であると表層部に早期にAl23層が形成する
効果は期待できない。また酸素濃度が50mol%を越えると
Al23の鉄基合金中への拡散が阻害され,鉄基合金中
のAl濃度が高くならない。したがって被膜中の酸素濃
度は1mol%以上50mol%以下が良い。
The function of the present invention is to form on the surface of an iron-based alloy,
Al 2 O 3 concentration of oxygen is low Al-O-based coatings than, since it can be said that the Al 2 O 3 in the Al is a layer mixed and heated at the high temperature heating in the air (e.g., 1000 to 1200 ° C. ) Al in the surface layer oxidizes early to form an Al 2 O 3 layer, but while the Al 2 O 3 layer on the outermost surface acts as a barrier and the oxidation of Al inside the film does not proceed, Al
Diffuses into the iron-based alloy and Al 2 O 3 inside the coating is concentrated. The diffusion of Al into the iron-based alloy increases the high temperature oxidation resistance of the iron-based alloy itself. Oxygen concentration in the film is 1
If it is less than mol%, the effect of early formation of the Al 2 O 3 layer on the surface layer cannot be expected. On the other hand, if the oxygen concentration exceeds 50 mol%, the diffusion of Al 2 O 3 into the iron-based alloy is hindered and the Al concentration in the iron-based alloy does not increase. Therefore, the oxygen concentration in the film is preferably 1 mol% or more and 50 mol% or less.

【0013】以下に,短時間のうちに鉄基合金の表面に
緻密なAl23層が形成する状況を図面に従って具体的
に説明する。
The situation in which a dense Al 2 O 3 layer is formed on the surface of the iron-based alloy in a short time will be described below in detail with reference to the drawings.

【0014】図1は,板状の鉄基合金1の両面に,Al2
3よりも酸素濃度が低いAl-O系の被膜2A,2Bを
被着した状態を図解的に示している。被膜2Aと2Bは
金属Al中にAl23の微粒子が混在した層であるとも言
える。
FIG. 1 shows that Al 2 is formed on both sides of a plate-shaped iron-based alloy 1.
The state in which the Al—O type coatings 2A and 2B having a lower oxygen concentration than O 3 are applied is schematically shown. It can be said that the coating films 2A and 2B are layers in which Al 2 O 3 fine particles are mixed in the metal Al.

【0015】図1の材料を後記実施例に示すように例え
ば大気雰囲気下で1100℃に加熱すると,図2の(a)
→(b) →(c) の段階を経て, 緻密なAl23層の被膜が
早期に生成する。初期の段階(a) では被膜2の最外表面
に薄いAl23層3が形成する。そして被膜2の内部か
ら鉄基合金母材中にAlの拡散が始まる。段階(b) では
最外表面のAl23層3がバリヤーとなって内部の酸化
が防止されつつ被膜内部のAlの拡散が進行して被膜2
の全厚みが減少し,被膜中のAl23は濃縮し,やが
て,Alが枯渇すると,段階(c) となり,被膜2はAl2
3層3だけとなり,鉄基合金は緻密なAl23層3で覆
われることになる。
When the material of FIG. 1 is heated to, for example, 1100 ° C. in an air atmosphere as shown in Examples described later, (a) of FIG.
→ through the steps of (b) → (c), the coating of dense the Al 2 O 3 layer is produced early. In the initial stage (a), a thin Al 2 O 3 layer 3 is formed on the outermost surface of the film 2. Then, Al starts to diffuse from the inside of the coating 2 into the iron-based alloy base material. In the step (b), the Al 2 O 3 layer 3 on the outermost surface serves as a barrier to prevent oxidation of the inside, and the diffusion of Al inside the film proceeds to promote the film 2
When the total thickness of Al 2 O 3 is reduced and Al 2 O 3 in the film is concentrated, and Al is depleted, the stage (c) is reached, and the film 2 is Al 2 O 3.
Only the O 3 layer 3 is formed, and the iron-based alloy is covered with the dense Al 2 O 3 layer 3.

【0016】このように早期に緻密なAl23層3がで
きるので, 以後の高温加熱で生成するAl23も緻密に
なり, 酸化増量が減少する。酸化増量が減少すること
は, 高温酸化寿命および絶縁性の寿命が長くなることを
意味する。
[0016] Since the early can dense the Al 2 O 3 layer 3, also become dense Al 2 O 3 produced in the subsequent high temperature heating, the oxidation increase is reduced. Decrease in oxidation weight increase means that high temperature oxidation life and insulating life are prolonged.

【0017】したがって,本発明の鉄基材料は,表面が
早期に絶縁化されしかも高温加熱を繰り返しても絶縁性
が失われることがないという作用を供する。すなわち本
発明によれば,耐高温酸化性が高い絶縁表面を有する鉄
基材料が提供できる。本発明材料は特にヒータ用の発熱
材料に適し,その形状が板状の面熱発熱体として好適で
ある。
Therefore, the iron-based material of the present invention has the effect that the surface is insulative at an early stage and the insulating property is not lost even if high temperature heating is repeated. That is, according to the present invention, it is possible to provide an iron-based material having an insulating surface having high high temperature oxidation resistance. The material of the present invention is particularly suitable as a heat generating material for heaters, and is suitable as a planar heat generating element having a plate shape.

【0018】本発明材料は,図1の状態,つまりAl2
3よりも酸素濃度が低いAl-O系の被膜2を施したまま
で,高温用途に使用することもできるが,実際には図2
の段階(a),(b),(c) のように少なくとも最外表面層に緻
密なAl23層を形成した状態で使用に供するのがよ
い。図1の状態または図2の(a)または(b) の状態で使
用に供した場合には,高温使用中に(c) の状態になるこ
ともあるが,絶縁性を確保する意味では,(c) 段階まで
予備加熱して緻密なAl23層を鉄基合金の表面に形成
しておくのがよい。
The material of the present invention has the state of FIG. 1, that is, Al 2 O.
Although it can be used for high temperature applications with the Al-O based coating 2 having an oxygen concentration lower than that of 3 , it is actually shown in FIG.
As in steps (a), (b), and (c), it is preferable to use it in a state in which a dense Al 2 O 3 layer is formed on at least the outermost surface layer. When used in the state of Fig. 1 or the state of (a) or (b) of Fig. 2, it may be in the state of (c) during high temperature use, but in the sense of ensuring insulation, It is preferable to preheat up to step (c) to form a dense Al 2 O 3 layer on the surface of the iron-based alloy.

【0019】図1のように,Al23よりも酸素濃度が
低いAl-O系の被膜2を鉄基合金の表面に被着した材料
は,PVD法やCVD法などの蒸着法で製造することが
できる。すなわち,かような蒸着法によって鉄基合金の
表面にAlを蒸着させるさいに,雰囲気ガスの酸素分圧
を調節してAl23よりも少ない酸素をAl中に含有する
被膜を鉄基合金の表面に蒸着させればよい。
As shown in FIG. 1, a material in which an Al-O coating 2 having a lower oxygen concentration than Al 2 O 3 is applied to the surface of an iron-based alloy is manufactured by a vapor deposition method such as PVD method or CVD method. can do. That is, when Al is vapor-deposited on the surface of an iron-based alloy by such a vapor deposition method, the iron-based alloy is coated with a film containing oxygen less than Al 2 O 3 by adjusting the oxygen partial pressure of atmospheric gas. It may be vapor-deposited on the surface of.

【0020】そのさい,雰囲気中の酸素ガス分圧を調節
するには,酸素ガスはもとより酸素含有ガス例えばH2
O,CO2 ,CH3OHガスなどの分圧を調節すること
によって行うことができる。また,蒸着装置内を所定の
圧に維持することが有利な場合には,酸素含有ガスの他
にArなどの不活性ガスを存在させることもできる。
At that time, in order to adjust the partial pressure of oxygen gas in the atmosphere, not only oxygen gas but also oxygen-containing gas such as H 2
It can be performed by adjusting the partial pressure of O, CO 2 , CH 3 OH gas or the like. In addition to the oxygen-containing gas, an inert gas such as Ar may be present when it is advantageous to maintain the predetermined pressure inside the vapor deposition device.

【0021】被膜2を形成する母材としての鉄基合金
は,本発明材料を通電により発熱する発熱材用途に供す
る場合には合金成分によって電気抵抗を意図する値に調
節することが必要であるが,いずれにしても,高温で使
用される関係上,ステンレス鋼が望ましい。具体的に
は,鉄基合金は8〜35mass%のCrおよび0.4〜8mass
%のAlを含有しているステンレス鋼が望ましい。
When the iron-based alloy as the base material for forming the coating film 2 is used as a heat-generating material for heating the material of the present invention by energization, it is necessary to adjust the electric resistance to an intended value by the alloy component. However, in any case, stainless steel is preferable because it is used at high temperature. Specifically, iron-based alloys contain 8 to 35 mass% Cr and 0.4 to 8 mass%.
A stainless steel containing% Al is preferred.

【0022】このようなAl含有ステンレス鋼におい
て,Siを0.6〜6mass%含有させると耐高温酸化寿命が
さらに向上する。同様に希土類元素またはYを0.2mass
%以下の量で含有させても耐高温酸化寿命を向上させる
ことができる。
In such an Al-containing stainless steel, if Si is contained in an amount of 0.6 to 6 mass%, the high temperature oxidation resistance is further improved. Similarly, 0.2 mass% of rare earth element or Y
%, The high temperature oxidation resistance can be improved.

【0023】かような鉄基合金中のCr,Al,Si,希土類
元素またはYの作用を説明すると次のとおりである。
The action of Cr, Al, Si, rare earth elements or Y in the iron-based alloy will be described below.

【0024】Crについて。 鉄基合金が箔などの場合は加熱冷却のサイクルでクラッ
クの発生と自己修復の繰り返しによって含有しているA
lが枯渇する場合がある。このようになると導電性のFe
酸化物が急速に成長し, Al23膜が剥離し, 絶縁性が
喪失する。Fe酸化物の成長は鉄基材中に8mass%以上
のCrを含有させることによって防止することができ
る。これはAlが枯渇した場合にCr23やFeO・Cr
2 3が緻密にでき, その後の酸化物の成長を抑えるか
らである。またCrを含有させることによって素材の靭
性および加工性も高まる。しかしCr含有量の上限は3
5mass%までである。35mass%を超えると基材が30
0℃以下で極めて脆くなり加工ができなくなる。
Regarding Cr. When the iron-based alloy is foil, etc., it is contained due to repeated cracking and self-repairing during the heating / cooling cycle.
l may be exhausted. In this case, the conductive Fe
The oxide grows rapidly, the Al 2 O 3 film peels off, and the insulating property is lost. The growth of Fe oxide can be prevented by including 8 mass% or more of Cr in the iron base material. This is because when Al is exhausted, Cr 2 O 3 and FeO.Cr
This is because 2 O 3 can be made dense and the subsequent growth of oxide is suppressed. In addition, the inclusion of Cr enhances the toughness and workability of the material. However, the upper limit of Cr content is 3
Up to 5 mass%. When the content exceeds 35 mass%, the base material is 30
Below 0 ° C, it becomes extremely brittle and cannot be processed.

【0025】Alについて。 基材鋼中にAlが含有されていると,Al23被膜が何ら
かの原因によりクラックや剥離が生じた場合に,高温で
の使用中にそれを修復する作用を供する。本発明材料は
当初の被膜中のAlが母材中に拡散され,母材中にAlが
存在することになるが,母材自身が当初からAlを含有
していれば,Al補給源として十分となる。このため,
0.5 mass%以上のAlを含有した鉄基合金を用いるのが
よい。しかし,8mass%を超えるようなAlを含有する
鋼は熱衝撃に弱いので,鉄基合金は 0.5〜8mass%のA
lを含有したものがよい。
Regarding Al. When Al is contained in the base steel, when the Al 2 O 3 coating film is cracked or peeled off for some reason, it serves to restore it during use at high temperature. In the material of the present invention, Al in the original coating is diffused into the base material and Al exists in the base material. However, if the base material itself contains Al from the beginning, it is sufficient as an Al supplement source. Becomes For this reason,
It is preferable to use an iron-based alloy containing 0.5 mass% or more of Al. However, since steel containing Al exceeding 8 mass% is vulnerable to thermal shock, iron-based alloys contain 0.5-8 mass% of A.
Those containing l are preferable.

【0026】Siについて。 Siは後記の実施例に示すように,本発明材料の耐高温
酸化寿命を向上させる作用がある。すなわち, Crと同
様にAlが枯渇した場合にSiO2またはFe2 SiO2が緻
密にできて保護作用をし,その後の酸化を抑制する。こ
のようなSiの効果を得るには鉄基合金中のSi量が0.6m
ass%以上必要であるが,6mass%を超えて含有させて
もその効果は飽和すると共に鋼の製造性および加工性が
悪くなるので,0.6〜6mass%のSiを含有させるのがよ
い。
Regarding Si. Si is the high temperature resistance of the material of the present invention, as shown in Examples below.
It has the effect of improving the oxidation life. That is, the same as Cr
When Al is exhausted like2Or Fe2 SiO2Is precise
It becomes dense and has a protective effect, and suppresses subsequent oxidation. This
In order to obtain the effect of Si, the amount of Si in the iron-based alloy is 0.6m.
More than ass% is required, but if more than 6mass% is included
The effect is saturated, and the manufacturability and workability of steel are
Since it will worsen, it is better to add 0.6-6 mass% Si.
Yes.

【0027】希土類元素またはYについて。 希土類元素またはYも後記の実施例に示すように耐高温
酸化寿命を向上させる作用があり,Al23層の密着性
を高める効果がある。しかし,希土類元素とYの合計量
が0.2mass%を越えると介在物として鉄基材中に析出し
てかえってAl23膜が剥離しやすくなる。このため希
土類元素またはYの含有量の合計は0.2 mass%以下にす
べきである。
Regarding the rare earth element or Y. The rare earth element or Y also has the effect of improving the high temperature oxidation resistance as shown in the examples described later, and has the effect of increasing the adhesion of the Al 2 O 3 layer. However, if the total amount of rare earth elements and Y exceeds 0.2 mass%, the Al 2 O 3 film is likely to be peeled off by depositing as inclusions in the iron base material. Therefore, the total content of rare earth elements or Y should be 0.2 mass% or less.

【0028】[0028]

【実施例】【Example】

〔実施例1〕電子ビーム蒸発装置を備えた真空蒸着装置
を用いて,表1に示した化学成分値を有する2種のステ
ンレス鋼No.1とNo.2(いずれも厚み1mm,200×200mm)を
基板とし,電子ビームのターゲットに純Alを使用し
て,雰囲気中の酸素分圧を調節しながら該基板の両面に
酸素濃度が異なるAl蒸着膜を形成した。
[Example 1] Two kinds of stainless steel No. 1 and No. 2 having the chemical composition values shown in Table 1 (both having a thickness of 1 mm and 200 x 200 mm) were prepared by using a vacuum evaporation apparatus equipped with an electron beam evaporation apparatus. ) Was used as a substrate, and pure Al was used as the electron beam target to form Al vapor deposition films having different oxygen concentrations on both surfaces of the substrate while adjusting the oxygen partial pressure in the atmosphere.

【0029】操作手順は, 先ず装置内を1×10-5Torrま
で排気し, O2:Ar=1:1の混合ガスを設定酸素分圧
になるまで装置内に導入したうえで,Alを電子ビーム
で蒸発させた。Arガスを導入したのはポンプ油の劣化
防止のためである。鋼板基板上での蒸着速度は0.1μm/s
に調節し,O2とArの混合ガス分圧は, Al蒸着膜中の
酸素濃度が目標値となるように調整した。
The operating procedure is as follows. First, the apparatus is evacuated to 1 × 10 -5 Torr, a mixed gas of O 2 : Ar = 1: 1 is introduced into the apparatus until the set oxygen partial pressure is reached, and then Al is added. Evaporated with electron beam. Ar gas was introduced to prevent deterioration of pump oil. Vapor deposition rate on a steel plate substrate is 0.1 μm / s
The partial pressure of the mixed gas of O 2 and Ar was adjusted so that the oxygen concentration in the Al vapor deposition film would be the target value.

【0030】いずれの場合も,純Al当量が5.5g/m2含有
されるように基板の両面に蒸着された時点をもって蒸着
を終了した。表2に,得られた各被覆鋼板の蒸着膜中の
酸素濃度(モル%)を示した。Al23皮膜の場合の化
学量論的な酸素濃度は3/5×100モル%=60モル
%であるから,得られた各被覆鋼板の蒸着膜はAl2 3
よりもかなり低い酸素濃度の物質である。したがって,
これらはAl中にAl23が混在したものであると考えて
よい。なお,比較例中の蒸着膜中の酸素濃度が0%のも
のは酸素分圧を極低にして得た純Al皮膜である。
In all cases, the pure Al equivalent is 5.5 g / m2Inclusion
Deposition at the time it is deposited on both sides of the substrate
Finished. Table 2 shows the vapor deposition film of each coated steel sheet obtained.
The oxygen concentration (mol%) is shown. Al2O3In case of film
Stoichiometric oxygen concentration is 3/5 x 100 mol% = 60 mol
%, The deposited film of each coated steel sheet obtained is Al2O 3
It is a substance with a much lower oxygen concentration. Therefore,
These are Al in Al2O3Think of it as a mixture
Good. In addition, the oxygen concentration in the vapor deposition film in the comparative example is 0%.
Is a pure Al film obtained by making the oxygen partial pressure extremely low.

【0031】[0031]

【表1】 [Table 1]

【0032】[0032]

【表2】 [Table 2]

【0033】各被覆鋼板を大気中で1100℃で加熱し
た。そしてAl23膜の形成により抵抗値が1×108
Ωm以上となるまでの加熱時間を調べた。その結果を表
2に併記した。
Each coated steel sheet was heated at 1100 ° C. in the atmosphere. The resistance value is 1 × 10 8 due to the formation of the Al 2 O 3 film.
The heating time until it became Ωm or more was examined. The results are also shown in Table 2.

【0034】表2の結果から,本発明例のものは蒸着膜
中の酸素濃度が高いほど絶縁性が得られるまでの加熱時
間が短く,その程度は基材ステンレス鋼の化学成分値と
は無関係であることがわかる。すなわち,本発明例のも
のは図2の(a) →(b) →(c)の段階を経て緻密なAl23
層3が形成する時間が短い。これに対して,比較例のよ
うに純Al被覆のものや鋼中のAlを酸化させるものでは
同様のAl23層が形成するまでの時間が非常に長い。
From the results shown in Table 2, in the examples of the present invention, the higher the oxygen concentration in the vapor-deposited film, the shorter the heating time until the insulating property is obtained, and the extent thereof is independent of the chemical composition of the base stainless steel. It can be seen that it is. That is, according to the example of the present invention, a fine Al 2 O 3 film is formed through the steps (a) → (b) → (c) of FIG.
The formation time of layer 3 is short. On the other hand, in the case of pure Al coating or the case of oxidizing Al in steel as in the comparative example, it takes a very long time to form a similar Al 2 O 3 layer.

【0035】〔実施例2〕厚さが0.05μmである表1の
No.2の鋼を基板に使用し,純Al当量で4g/m2が含有さ
れるように基板両面に蒸着した以外は,実施例1と同様
の操作で表3の本発明例AとBおよび比較例Cの3種の
被覆鋼板を製造した。比較例Cは純Al被覆である。な
お比較例Dは,厚みが0.05μmである表1のNo.1の素材
鋼そのものである。
Example 2 In Table 1, the thickness was 0.05 μm.
Inventive Examples A and B of Table 3 were prepared in the same manner as in Example 1 except that No. 2 steel was used as the substrate and vapor deposition was performed on both sides of the substrate such that the pure Al equivalent was 4 g / m 2. And three types of coated steel sheets of Comparative Example C were manufactured. Comparative Example C is a pure Al coating. Comparative Example D is the No. 1 raw material steel in Table 1 itself having a thickness of 0.05 μm.

【0036】[0036]

【表3】 ここで,本発明例AとBは蒸着膜中の酸素濃度は異なる
が,両者ともAl含有量3.03%のステンレス鋼にAlを4
g/m2づつ両面に蒸着しているものであり,比較例DはA
l含有量5.01%のステンレス鋼の蒸着無しの素材であっ
て,A,BおよびCの総Al量は等しくなっている。
[Table 3] Inventive Examples A and B differ from each other in the oxygen concentration in the vapor-deposited film.
g / m 2 is vapor-deposited on both sides, and Comparative Example D is A
It is a material without vapor deposition of stainless steel with a content of 5.01%, and the total amount of Al of A, B and C is equal.

【0037】これち4種の材料の耐熱試験を行った。試
験は各試料を大気雰囲気中1100℃で連続加熱し,その酸
化増量を経時的に測定した。その結果を図3に示した。
横軸の時間の単位は平方根で表してあり,実際の時間は
その二乗である。
Then, heat resistance tests of four kinds of materials were conducted. In the test, each sample was continuously heated at 1100 ° C in the atmosphere and the increase in oxidation was measured over time. The results are shown in Fig. 3.
The unit of time on the horizontal axis is the square root, and the actual time is its square.

【0038】図3の結果から,本発明例AとBのものは
222〜252時間(480〜630h)までは酸化増量が徐々にし
か大きくならず異常酸化は生じないが,比較例CとDで
は早期に鋼中のAlが枯渇し約122〜142時間 (140〜190
h)で異常酸化が始まることがわかる。
From the results of FIG. 3, the invention samples A and B are
Up to 22 2 to 25 2 hours (480 to 630 h), the amount of oxidation increase gradually increased and abnormal oxidation did not occur, but in Comparative Examples C and D, Al in the steel was depleted early and about 12 2 to 14 2 Time (140-190
It can be seen that abnormal oxidation starts in h).

【0039】比較例の異常酸化後の試片の表面の電気抵
抗を測定したところ,1×108Ωm以下となっており絶
縁性が低下していた。これは異常酸化時に皮膜が体積膨
張を起こしてクラックや剥離が生じたことによる。
When the electric resistance of the surface of the sample after the abnormal oxidation of the comparative example was measured, it was 1 × 10 8 Ωm or less, and the insulating property was deteriorated. This is because the coating film expanded in volume during abnormal oxidation, causing cracks and peeling.

【0040】〔実施例3〕表4に示す化学成分値のステ
ンレス鋼No.3〜No.8からなる厚みが0.05μmの両面に平
均酸素濃度が20モル%のAl23含有Al蒸着膜を形成
した以外は,実施例1と同様にして被覆鋼板を製造し
た。各被覆鋼板とも蒸着はAl当量で5.5g/m2となるよう
に調節した。また,比較のためにNo3,No.4およびNo.7の
鋼 (厚み0.05μm) に対して純Alの蒸着を施したもの
も製造した。
Example 3 Al 2 O 3 -containing Al vapor-deposited film made of stainless steel No. 3 to No. 8 having chemical composition values shown in Table 4 and having an average oxygen concentration of 20 mol% on both surfaces having a thickness of 0.05 μm. A coated steel sheet was manufactured in the same manner as in Example 1 except that The vapor deposition of each coated steel sheet was adjusted so as to have an Al equivalent of 5.5 g / m 2 . For comparison, No. 3, No. 4 and No. 7 steels (thickness 0.05 μm) were also vapor-deposited with pure Al.

【0041】各被覆鋼板を1150℃に加熱し, 酸化が急速
に進み始めるまでの時間, すなわち酸化増量が急に大き
くなり始める時間 (高温酸化寿命) を測定した。その結
果を表4に併記した。なお,各例とも,高温酸化寿命に
なると抵抗が1×108Ωm以下となり絶縁性が低下し
た。
Each coated steel sheet was heated to 1150 ° C., and the time until the oxidation started to proceed rapidly, that is, the time when the increase in the oxidation increased suddenly (high temperature oxidation life) was measured. The results are also shown in Table 4. In addition, in each case, the resistance became 1 × 10 8 Ωm or less at the high temperature oxidation life, and the insulating property deteriorated.

【0042】[0042]

【表4】 [Table 4]

【0043】表4の結果から次のことがわかる。 (1) 同一鋼種であっても,本発明例のAl23含有Al蒸
着膜のものは比較例の純Al蒸着膜のものに比べて高温
酸化寿命が高くなる。 (2) 同一Al23含有Al蒸着膜でも鋼中のAl含有量が
高くなれば高温酸化寿命が高くなる。 (3) 鋼No.4とNo.5の比較に見られるように,鋼中のSi
が高くなると高温酸化寿命が高くなる。 (4) 鋼No.6とNo.7の比較に見られるように,鋼中に希土
類元素を含有すると高温酸化寿命が高くなる。
The following can be seen from the results in Table 4. (1) Even with the same steel type, the Al 2 O 3 -containing Al vapor deposition film of the present invention has a higher high temperature oxidation life than the pure Al vapor deposition film of the comparative example. (2) Even with the same Al 2 O 3 -containing Al vapor-deposited film, the higher the Al content in the steel, the higher the high temperature oxidation life. (3) As seen in the comparison of steel No. 4 and No. 5,
The higher the value, the higher the high temperature oxidation life. (4) As can be seen from the comparison between Steel No. 6 and Steel No. 7, the inclusion of rare earth elements in steel increases the high temperature oxidation life.

【0044】[0044]

【発明の効果】以上説明したように,本発明によれば鉄
基合金の表面に緻密な絶縁性被膜をもつ鉄基材料が得ら
れる。本発明材料は表面が絶縁されているのでヒータ材
として使用する場合に特に有益であり,その絶縁被膜が
長時間安定である。また,絶縁被膜が損傷した場合にも
鉄基合金中からAlの補給を受けて自己修復する能力が
ある。本発明材料は,製造の面でもAl23層からなる
絶縁被膜の形成が短時間に形成されるので製造コストが
廉価であるという効果もある。
As explained above, according to the present invention, an iron-based material having a dense insulating coating on the surface of an iron-based alloy can be obtained. The material of the present invention is particularly useful when used as a heater material because its surface is insulated, and the insulating coating is stable for a long time. Further, even when the insulating coating is damaged, it has the ability to be self-repaired by receiving Al supplementation from the iron-based alloy. The material of the present invention also has an effect that the manufacturing cost is low because the insulating coating formed of the Al 2 O 3 layer is formed in a short time in terms of manufacturing.

【図面の簡単な説明】[Brief description of drawings]

【図1】Al23含有Al被膜を鉄基合金の表面にもつ本
発明材料の中間品の状態を示す略断面図である。
FIG. 1 is a schematic sectional view showing a state of an intermediate product of the material of the present invention having an Al 2 O 3 -containing Al coating on the surface of an iron-based alloy.

【図2】図1の中間品の状態からAl23層が形成する
段階を図解的に示す図1と同様の略断面図である。
FIG. 2 is a schematic cross-sectional view similar to FIG. 1, schematically showing a step of forming an Al 2 O 3 layer from the state of the intermediate product of FIG.

【図3】本文の実施例3の結果を示す図であり,本発明
材AとBおよび比較材CとDの耐熱試験の結果を示す図
である。
FIG. 3 is a diagram showing the results of Example 3 in the text, and is a diagram showing the results of heat resistance tests of the present invention materials A and B and the comparative materials C and D.

【符号の説明】[Explanation of symbols]

1 鉄基合金 2 Al23含有Al被膜 3 Al231 Iron-based alloy 2 Al 2 O 3 containing Al coating 3 Al 2 O 3 layer

───────────────────────────────────────────────────── フロントページの続き (72)発明者 安藤 敦司 大阪府堺市石津西町5番地 日新製鋼株式 会社鉄鋼研究所内 (72)発明者 斉藤 実 大阪府堺市石津西町5番地 日新製鋼株式 会社鉄鋼研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Atsushi Ando 5 Ishizu Nishimachi, Sakai City, Osaka Prefecture Nisshin Steel Co., Ltd. (72) Inventor Minoru Saito 5 Ishizu Nishimachi, Sakai City, Osaka Nisshin Steel Co., Ltd. Steel Research Institute

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 Al23の化学量論量の酸素よりも少量
の酸素をAl中に含有する被膜が鉄基合金の表面に形成
されている耐高温酸化性に優れた鉄基材料。
1. An iron-based material excellent in high-temperature oxidation resistance, wherein a coating containing a smaller amount of oxygen in Al than the stoichiometric amount of Al 2 O 3 is formed on the surface of an iron-based alloy.
【請求項2】 Al23の化学量論量の酸素よりも少量
の酸素をAl中に含有する被膜が鉄基合金の表面に形成
され,該被膜の少なくとも最外表面にAl23層が形成
されている耐高温酸化性に優れた鉄基材料。
2. A coating containing a smaller amount of oxygen in Al than the stoichiometric amount of Al 2 O 3 is formed on the surface of the iron-based alloy, and Al 2 O 3 is formed on at least the outermost surface of the coating. An iron-based material that has excellent resistance to high-temperature oxidation in which layers are formed.
【請求項3】 被膜のAl中に1mol%以上50mol%以下の
酸素が含有されている請求項1または2に記載の鉄基材
料。
3. The iron-based material according to claim 1, wherein 1 mol% or more and 50 mol% or less of oxygen is contained in Al of the coating film.
【請求項4】 鉄基合金は8〜35mass%のCrおよび
0.4〜8mass%のAlを含有している請求項1,2または
3に記載の鉄基材料。
4. The iron-based alloy contains Cr of 8 to 35 mass% and
The iron-based material according to claim 1, containing 0.4 to 8 mass% of Al.
【請求項5】 鉄基合金は0.6〜6mass%のSiを含有し
ている請求項4に記載の鉄基材料。
5. The iron-based material according to claim 4, wherein the iron-based alloy contains 0.6 to 6 mass% Si.
【請求項6】 鉄基合金は0.2mass%以下の希土類元素
またはYを含有している請求項4に記載の鉄基材料。
6. The iron-based material according to claim 4, wherein the iron-based alloy contains 0.2 mass% or less of a rare earth element or Y.
【請求項7】 鉄基合金の表面にAlを蒸着させるさい
に,雰囲気ガスの酸素分圧を調節してAl23よりも少
ない酸素をAl中に含有する被膜を鉄基合金の表面に蒸
着させることを特徴とする耐高温酸化性に優れた鉄基材
料の製造法。
7. When depositing Al on the surface of an iron-based alloy, a film containing oxygen less than Al 2 O 3 in Al is adjusted on the surface of the iron-based alloy by adjusting the oxygen partial pressure of atmospheric gas. A method for producing an iron-based material excellent in high-temperature oxidation resistance, characterized by vapor deposition.
JP5169870A 1992-11-20 1993-06-17 Iron-base material excellent in high temperature oxidation resistance and production there of Withdrawn JPH073433A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP5169870A JPH073433A (en) 1993-06-17 1993-06-17 Iron-base material excellent in high temperature oxidation resistance and production there of
KR1019930024703A KR100265101B1 (en) 1992-11-20 1993-11-19 Iron-based material having excellent oxidation resistance at elevated temperaturees and process for the production thereof
EP93118671A EP0599225B1 (en) 1992-11-20 1993-11-19 Iron-based material having excellent oxidation resistance at elevated temperatures and process for the production thereof
DE69318515T DE69318515T2 (en) 1992-11-20 1993-11-19 Iron-based alloy with high oxidation resistance at elevated temperatures and method of manufacturing the same
US08/155,373 US5631090A (en) 1992-11-20 1993-11-22 Iron-based material having excellent oxidation resistance at elevated temperatures and process for the production thereof
US08/467,637 US5612090A (en) 1992-11-20 1995-06-06 Iron-based material having excellent oxidation resistance at elevated temperatures and process for the production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5169870A JPH073433A (en) 1993-06-17 1993-06-17 Iron-base material excellent in high temperature oxidation resistance and production there of

Publications (1)

Publication Number Publication Date
JPH073433A true JPH073433A (en) 1995-01-06

Family

ID=15894484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5169870A Withdrawn JPH073433A (en) 1992-11-20 1993-06-17 Iron-base material excellent in high temperature oxidation resistance and production there of

Country Status (1)

Country Link
JP (1) JPH073433A (en)

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