JPH07328933A - Abrasive sheet and manufacture thereof - Google Patents

Abstract

PURPOSE:To carry out the precise polishing in one stage by mixing abrasive grains, soluble solid grains, and a binder adhesive to form the slurry used for polishing. CONSTITUTION:The slurry 5 mixed with abrasive grains 2, soluble solid grains 3, and a binder adhesive 4 is applied on a base sheet 1 to form an abrasive sheet 10. A nonwoven fabric or the like is used for the base sheet 1. Diamonds or the like are used for the abrasive grains 2. Ammonium sulfate or the like is used for the soluble solid grains 3, and the weight mixing ratio between the abrasive grains 2 and the soluble solid grains 3 is set to 1: 9-9:1. Polyester or polyurethane is used for the binder adhesive 4. An elastic material is used for the base sheet 1 and the binder adhesive 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing sheet used for polishing an end face of an optical fiber, polishing a glass surface for a liquid crystal display panel, polishing a magnetic hard disk, a magnetic disk or a lens, and other precision finishing polishing, and a production thereof. Regarding the method.

[0002]

2. Description of the Related Art Heretofore, precision polishing has been performed by using loose abrasive particles or by using a polishing sheet.

A polishing method using loose abrasive particles is carried out by dropping abrasive particles together with a cooling liquid onto the surface of a polishing cloth such as a raised cloth, and pressing an object to be polished onto the surface to perform polishing. However, the polishing method using a polishing sheet has been one in which abrasive particles are fixedly adhered to a substrate sheet such as a plastic film, and an object to be polished is pressed against the surface of the polishing sheet to perform polishing.

[0004]

However, in polishing using loose abrasive particles, since the loose abrasive particles roll on the polishing cloth, scratches do not occur on the surface of the object to be polished and the surface of the object to be polished is compared. Although it can be polished smoothly, it requires a two-step polishing process, in which rough polishing must be performed before polishing using loose abrasive particles because the grinding force is small, and it takes time to polish. It was

Further, in polishing using loose abrasive particles, when abrasive particles are dropped together with a cooling liquid at a time interval, corrugated irregularities are generated on the surface of the object to be polished,
When the abrasive is continuously dropped, the cooling liquid impedes the pressure contact of the abrasive particles with the surface of the object to be polished, and the polishing efficiency is significantly reduced.

In the polishing using the polishing sheet, there is a grinding force and the surface of the object to be polished can be polished flatly, but since the abrasive particles are firmly fixed to the substrate sheet by the binder adhesive, the surface of the polishing sheet is The abrasive particles protruding to the surface rub against the surface of the object to be polished while being in contact with the surface of the object to be polished at an acute angle, causing scratches on the surface of the object to be polished.

Therefore, the object of the present invention is not to perform the two-step polishing steps of rough polishing and finish polishing, but to perform precise polishing without causing wavy unevenness or scratches on the surface of the object to be polished in the single-step polishing step. An object of the present invention is to provide a polishing sheet that can be polished and a manufacturing method thereof.

[0008]

In order to achieve the above object, the present invention provides a polishing sheet obtained by applying a slurry to a substrate sheet, wherein the slurry comprises abrasive particles, soluble solid particles, and a binder adhesive. It is a polishing sheet characterized by being a mixture of and.

The soluble solid particles are preferably ammonium sulfate, urea, saccharose, ammonium iron alum, ammonium chromium iron alum, ammonium sulfate,
Alternatively, it is zinc sulfate, and may be a salt, a complex salt, an organic crystal, or another soluble substance.

The weight mixing ratio of abrasive particles and soluble solid particles is in the range of 1: 9 to 9: 1. The method for producing a polishing sheet of the present invention is a method for producing a polishing sheet, which comprises a step of producing a slurry and a step of applying a slurry to a substrate sheet, wherein the step of producing a slurry comprises abrasive particles and a binder adhesive. And a step of further adding soluble solid particles to a mixture of abrasive particles and a binder adhesive and mixing them.

The polishing method using the polishing sheet of the present invention comprises the steps of spraying a cooling liquid on the slurry of the polishing sheet and pressing the polishing sheet against the surface of the shoe to be polished and running it. Here, the soluble solid particles around the abrasive particles of the slurry are dissolved by spraying a cooling liquid on the slurry, and the abrasive particles can easily move without separating from the abrasive sheet.

[0012]

Function: Abrasive particles, soluble solid particles of the present invention,
When a polishing sheet formed by applying a slurry mixed with a binder adhesive to a substrate sheet is pressed against the surface of an object to be polished, and a cooling liquid is sprayed onto the polishing sheet to perform polishing, the soluble solid particles are soft. Therefore, when the object to be polished is pressed during polishing, it is ground (that is, the soluble solid particles are ground by polishing), and when the cooling liquid is sprayed on the slurry, the soluble solid particles of the slurry are dissolved.
The soluble solid particles on the surface of the polishing sheet disappear in a short time.

Further, the abrasive particles are hard, do not dissolve even when the cooling liquid is sprayed on the slurry, and the soluble solid particles around the abrasive particles dissolve as described above, and the abrasive particles are not adhered to the substrate sheet and the binder adhesive. Since an elastic material is used, the abrasive particles move easily, and during polishing,
The abrasive particles act elastically on the surface of the object to be polished. At this time, the abrasive particles are not separated from the polishing sheet.

[0014]

EXAMPLE FIG. 1 shows a polishing sheet of the present invention.

As shown in FIG. 1, the polishing sheet 1 of the present invention.
In No. 0, the slurry 5 in which the abrasive particles 2, the soluble solid particles 3, and the binder adhesive 4 are mixed is applied onto the substrate sheet 1.

The substrate sheet 1 is made of a non-woven fabric, an electrografted fabric (that is, a sheet of hair is planted on the substrate sheet by using static electricity),
A raised cloth, a polyurethane foam film, a polyester film, or the like can be used.

Abrasive particles 2 are diamond (C), participating aluminum (Al ₂ O ₃ ), silicon carbide (S
iC), iron oxide (Fe ₂ O ₃ ), chromium oxide (Cr
₂ O ₃ ) or cerium oxide (CeO ₂ ) or the like.

The soluble solid particles 3 include ammonium sulfate [(NH ₄ ) ₂ SO ₄ ], urea [CO (NH ₂ ) ₂ ], sucrose (C ₁₂ H ₂₂ O ₁₁ ), ammonium iron alum [(N
H ₄ ) ₂ SO ₄ · Fe ₂ (SO ₄ ) ₃ / 24H ₂ O], Ammonium / chromium iron alum [(NH ₄ ) ₂ SO ₄ · Al ₂ (SO
₄ ) ₃・ 24H ₂ O], aluminum sulfate [Al ₂ (S
O ₄ ) ₃・ 18H ₂ O], zinc sulfate (ZnSO ₄・ 7H
₂ O) etc.

The binder adhesive 4 is polyester / polyurethane type, vinyl chloride / acrylic type, vinyl chloride /
A vinyl acetate-based or polyester-based resin adhesive can be used.

As the substrate sheet 1 and the binder adhesive 4, those having elasticity are used.

The weight mixing ratio of the abrasive particles 2 and the soluble solid particles 3 is in the range of about 1: 9 to 9: 1.

The method for producing the polishing sheet 10 of the present invention comprises a step of preparing the slurry 5 and a step of applying the slurry 5 onto the substrate sheet 1 to prepare the slurry 5. Is a step of mixing the abrasive particles 2 and the binder adhesive 4, and thereafter,
Further, the step of adding and mixing the soluble solid particles 3 is included.

FIG. 2 shows a polishing method using the polishing sheet of the present invention.

As shown in FIG. 2, the polishing sheet 1 of the present invention.
In the polishing method by 0, the polishing sheet 10 in which the cooling liquid 6 is sprayed on the slurry 5 is brought into pressure contact with the surface of the object to be polished 7 and is run (in the direction of arrow 9 in FIG. 2). 6, the soluble solid particles 3 are dissolved to reduce the particle diameter of the soluble solid particles 3 around the abrasive particles 2 (see reference numeral 3'in FIG. 2), and the binder adhesive 4
Is elastic, so that the abrasive particles 2 can easily move without separating from the abrasive sheet 10, and when the abrasive sheet 10 is run (in the direction of arrow 9), the abrasive material is The particles 2 come into contact with the surface of the object to be polished 7 and are rotated (in the direction of arrow 8), so that the contact angle of the abrasive particles 2 with respect to the surface of the object to be polished 7 becomes gentle.

Examples of the polishing sheet of the present invention will be described in detail below.

Example 1 A polishing sheet for polishing the end face of an optical fiber according to the present invention was manufactured as follows.

Abrasive particles of cerium oxide particles having an average particle size of 1 μm and polyester / polyurethane adhesive were mixed and stirred, and then soluble solid particles of ammonium sulfate crystal particles having an average particle size of 1 μm were added and mixed, A slurry was produced.

At this time, the weight mixing ratio of the cerium oxide particles and the ammonium sulfate particles was 2: 3.

Since ammonium sulfate crystal particles are insoluble in organic solvents such as ethanol and acetone, they can be mixed with a binder adhesive containing an organic solvent, and the crystal particles are well soluble in water.

In the mixing and stirring of the cerium oxide particles and the polyester / polyurethane adhesive, since the cerium oxide particles aggregate to form irregularities on the surface of the optical fiber, these mixing and stirring were carefully performed.

When the mixture of the cerium oxide particles and the polyester / polyurethane adhesive is mixed with the ammonium sulfate particles for a long time, the ammonium sulfate particles are ground, so that the mixture is stirred for a short time and the viscosity is from 80 cp to 150 cp.
It was set as the slurry of the range.

This slurry was uniformly applied onto a substrate sheet of a polyurethane foam film having a thickness of 50 μm so that the thickness of the slurry would be about 4 μm, and dried at a temperature of 90 ° C. or less to obtain the slurry of the present invention. A polishing sheet for optical fiber was manufactured.

In the polishing of the end face of the optical fiber using this polishing sheet, water was used as the cooling liquid, and the polishing sheet sprayed with the cooling liquid was pressed against the end face of the optical fiber to run and polish.

Example 2 A polishing sheet for polishing a glass surface for a liquid crystal display plate of the present invention was manufactured as follows.

Abrasive particles of cerium oxide particles having an average particle size of 2 μm and a vinyl chloride / vinyl acetate adhesive are mixed by stirring, and then soluble solid particles of urea crystal particles having an average particle size of 3 μm are added and mixed by stirring. Viscosity of 80 cp to 150
A slurry in the cp range was produced.

At this time, the weight mixing ratio of the cerium oxide particles and the urea particles was 1: 2.

Urea crystal particles are hardly soluble in an organic solvent, but are highly soluble in water.

This slurry was uniformly applied onto a 100 μm-thick non-woven substrate sheet so that the slurry had a thickness of about 6 μm, and dried at a temperature of 90 ° C. or lower,
A polishing sheet for a glass surface of a liquid crystal display panel of the present invention was produced.

Polishing of the glass surface for a liquid crystal display panel using this polishing sheet was performed in the same manner as in Example 1 using water as a cooling liquid.

Example 3 A polishing sheet for polishing a magnetic hard disk according to the present invention was manufactured as follows.

Aluminum oxide abrasive particles having an average particle diameter of 1 μm and a polyester resin adhesive are mixed and stirred,
Then, soluble solid particles of sucrose crystal particles having an average particle size of 2 μm are added and mixed, and a viscosity of 80 cp to 150
A slurry having a cp range is manufactured, and the slurry is uniformly applied onto a substrate sheet of a polyester film having a thickness of 30 μm so that the slurry has a thickness of 5 μm.
After drying at a temperature of ° C or less, a polishing sheet for polishing the magnetic hard disk of the present invention was manufactured.

Here, the weight mixing ratio of aluminum oxide and sucrose crystal particles was 1: 2.

The saccharose crystals are hardly soluble in organic solvents, but they are soluble in water, and in particular, they can be dissolved with an appropriate viscosity by controlling the amount of the cooling liquid during polishing. Therefore, it is possible to retain the shattered aluminum oxide particles without flowing them away from the substrate sheet.

Polishing of a magnetic hard disk using this polishing sheet was performed in the same manner as in Example 1 using water as the cooling liquid.

Example 4 A polishing sheet for polishing a ferromagnetic material such as a magnetic head of the present invention was manufactured as follows.

Iron oxide abrasive particles having an average particle diameter of 2 μm,
A vinyl chloride / acrylic adhesive is mixed and stirred, and then ammonium iron alum having an average particle diameter of 2 μm is added and mixed to produce a slurry having a viscosity in the range of 80 cp to 150 cp. For polishing a ferromagnetic material such as a magnetic head according to the present invention, the slurry is evenly coated on a substrate sheet of a film so as to have a thickness of about 6 μm and dried at a temperature of 90 ° C. or less. Of the polishing sheet was manufactured.

Here, the mixing weight cost of iron oxide and ammonium iron alum was 1: 1.

Ammonium iron alum is insoluble in organic solvents but soluble in water.

The polishing of the magnetic head using this polishing sheet was performed in the same manner as in Example 1 using water as the cooling liquid.

[0050]

As described in detail above, when the polishing sheet of the present invention is used, the following effects are obtained.

The polishing sheet of the present invention is formed by coating a slurry of a mixture of abrasive particles, soluble solid particles and a binder adhesive on a substrate sheet. The soluble solid particles around the abrasive particles are dissolved, and the abrasive particles can easily move without separating from the polishing sheet. Therefore, even if the abrasive particles contact the surface of the object to be polished at an acute angle, the abrasive particles Moves and the angle of contact between the abrasive particles and the surface of the object to be polished becomes gradual, and it is possible to polish without causing scratches on the surface of the object to be polished, which was caused by using a conventional polishing sheet. Since the material particles are not completely separated, the surface of the object to be polished has a good grinding force, and the surface of the object to be polished can be uniformly polished without generating wavy irregularities.

Further, since the cooling liquid is sprayed on the polishing sheet, it is possible to disperse the frictional heat generated at the contact portion between the polishing sheet and the surface of the object to be polished.

Therefore, when the polishing sheet of the present invention is carried out, a two-step polishing process of rough polishing and finish polishing is not performed, and a single-step polishing process does not cause corrugated irregularities or scratches on the surface of the object to be polished. The effect is that precise polishing can be performed.

[Brief description of drawings]

FIG. 1 shows a polishing sheet of the present invention.

FIG. 2 shows a polishing method using the polishing sheet of the present invention.

[Explanation of symbols]

 1. ． ． Substrate sheet 2. ． ． Abrasive particles 3. ． ． Soluble solid particles 3 '. ． ． 3. Soluble solid particles being dissolved 4. ． ． Binder adhesive 5. ． ． Slurry 6. ． ． Coolant 7. ． ． Object to be polished 8. ． ． Rotation direction of abrasive particles 9. ． ． Running direction of polishing sheet 10. ． ． Polishing sheet

Claims (4)

[Claims] 1. A polishing sheet formed by applying a slurry to a substrate sheet, wherein the slurry is a mixture of abrasive particles, soluble solid particles and a binder adhesive. . 2. The polishing sheet according to claim 1, wherein the soluble solid particles are ammonium sulfate, urea, saccharose, ammonium iron alum, ammonium chrome iron alum, ammonium sulfate, or zinc sulfate. 3. The polishing sheet according to claim 1, wherein the weight mixing ratio of the abrasive particles and the soluble solid particles is in the range of 1: 9 to 9: 1. 4. A method of manufacturing a polishing sheet, which comprises a step of manufacturing a slurry and a step of applying the slurry to a substrate sheet, wherein the step of manufacturing the slurry mixes abrasive particles and a binder adhesive. And a step of further adding soluble solid particles to a mixture of the abrasive particles and the binder adhesive and mixing them.