JPH07321593A - Electrode structure for thickness-shear crystal vibrator - Google Patents
Electrode structure for thickness-shear crystal vibratorInfo
- Publication number
- JPH07321593A JPH07321593A JP6106897A JP10689794A JPH07321593A JP H07321593 A JPH07321593 A JP H07321593A JP 6106897 A JP6106897 A JP 6106897A JP 10689794 A JP10689794 A JP 10689794A JP H07321593 A JPH07321593 A JP H07321593A
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は厚みすべり水晶振動子の
偶数次オーバートン、特に２次オーバートンを励振する
ための電極構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrode structure for exciting even-order overtons, especially quadratic overtons, of a thickness sliding crystal oscillator.
【０００２】[0002]
【従来の技術】従来、厚みすべり水晶振動子で高い周波
数を必要とする場合は、基本波のほかに奇数次のオーバ
ートンを利用し、偶数次オーバートンは全く利用してい
なかった。これは厚みすべり水晶振動子の従来の電極構
造では基本波と奇数次のオーバートンだけが励振可能で
あり、偶数次オーバートンが励振不可能だったことによ
る。2. Description of the Related Art Conventionally, when a high frequency is required for a thickness-sliding crystal oscillator, an odd-order overton is used in addition to the fundamental wave, and an even-order overton is not used at all. This is because only the fundamental wave and odd-order overtons can be excited and the even-order overtons cannot be excited in the conventional electrode structure of the thickness-sliding crystal unit.
【０００３】以下これらのことを矩形の厚みすべり水晶
振動子で説明する。図３は従来の電極構造を有する矩形
の厚みすべり水晶振動子の斜視図であり、座標系Ｘ、
Ｙ’、Ｚ’はＸ軸が水晶片３０の長手方向に、Ｙ’軸が
厚み方向に、Ｚ’軸が幅方向になるようにとられてい
る。図４は座標系Ｘ、Ｙ’、Ｚ’が水晶結晶固有の座標
系Ｘ、Ｙ、Ｚに対して、Ｘ軸の回りに角度θ（以下カッ
ト角θと呼ぶ）回転していること説明する図である。以
下間単のため図３に示す水晶片を回転Ｙ板と呼ぶことに
する。図３に示すように従来の電極構造は二面電極から
なる。即ち一方の電極３１ａは水晶片３０の＋Ｙ’面に
設けられ、他方の電極３１ｂは−Ｙ’面に設けられてい
る。振動子の励振は二つの電極３１ａと３１ｂの間に、
振動子の共振周波数に等しい周波数の電圧を印加しＹ’
方向の電界を励振電界として利用していた。Hereinafter, these will be described with respect to a rectangular thickness-sliding quartz crystal resonator. FIG. 3 is a perspective view of a rectangular thickness-sliding quartz crystal resonator having a conventional electrode structure.
Y ′ and Z ′ are arranged such that the X axis is in the longitudinal direction of the crystal piece 30, the Y ′ axis is in the thickness direction, and the Z ′ axis is in the width direction. FIG. 4 illustrates that the coordinate systems X, Y ′ and Z ′ are rotated by an angle θ (hereinafter referred to as a cut angle θ) around the X axis with respect to the coordinate systems X, Y and Z specific to the crystal. It is a figure. The crystal piece shown in FIG. 3 will be referred to as a rotating Y plate for the sake of simplicity. As shown in FIG. 3, the conventional electrode structure is composed of two-sided electrodes. That is, one electrode 31a is provided on the + Y ′ surface of the crystal piece 30, and the other electrode 31b is provided on the −Y ′ surface. Excitation of the oscillator is between the two electrodes 31a and 31b,
Apply a voltage with a frequency equal to the resonance frequency of the oscillator
The electric field in the direction was used as the excitation electric field.
【０００４】厚みすべり振動の基本波、２次オーバート
ン及び３次オーバートンのＸ方向振動変位に基ずくＸ
Ｙ’面内の弾性すべり歪み成分の分布をそれぞれ図５
（Ａ）（Ｂ）（Ｃ）に示す。水晶片５０の厚み方向
（Ｙ’方向）には、弾性すべり歪み成分が矢印５１で示
すように分布している。圧電基本式によれば、上記弾性
すべり歪み成分と励振電界成分の関係は次式であらわさ
れる。X based on the vibrational displacement of the fundamental wave of the thickness shear vibration, the second overtone and the third overton in the X direction
Fig. 5 shows the distribution of elastic slip strain components in the Y'plane.
It shows in (A) (B) (C). Elastic slip component is distributed as indicated by an arrow 51 in the thickness direction (Y ′ direction) of the crystal piece 50. According to the piezoelectric basic equation, the relationship between the elastic slip strain component and the excitation electric field component is expressed by the following equation.
【０００５】 γxy’＝ｄ’26Ｅy ’＋ｄ’36Ｅz ’ （１） ここで γxy’：ＸＹ’面内の弾性すべり歪み成分 Ｅy ’：Ｙ’方向の電界成分 Ｅz ’：Ｚ’方向の電界成分 ｄ’26、ｄ’36：座標系Ｘ、Ｙ’、Ｚ’に関する水晶の
圧電定数Γ xy ′ = d ′ 26 E y ′ + d ′ 36 E z ′ (1) where γ xy ′: XY ′ elastic slip strain component in the plane E y ′: Y ′ direction electric field component E z ′: Electric field components in Z'direction d' 26 , d' 36 : Piezoelectric constants of quartz crystal with respect to coordinate systems X, Y ', Z'
【０００６】（１）式からも明らかなように、図５
（Ａ）に示す弾性すべり歪み成分の分布は励振可能であ
るが、図５（Ｂ）に示す弾性すべり歪み成分の分布は励
振不可能である。これは、回転Ｙ板の厚み方向中央面で
弾性すべり歪み成分の符号が反転しているために、電界
成分Ｅy ’の符号も厚みの中央面で反転しない限り電界
による駆動力は打ち消しあってしまうためである。即ち
厚みすべり振動の２次オーバートンは、従来の電極構造
では励振出来ない。図５（Ｃ）の場合にも、電界による
駆動力の打ち消しはあるが、水晶板の厚みの１／３の部
分には有効な駆動力が生じているので、駆動力は基本波
の場合に較べると小さくなるが、３次オーバートンの励
振は可能である。一般に従来の電極構造では、奇数次の
オーバートンが励振可能であり、偶数次のオーバートン
は励振不可能である。As is clear from the equation (1), FIG.
The distribution of the elastic slip strain component shown in (A) can be excited, but the distribution of the elastic slip strain component shown in FIG. 5 (B) cannot be excited. This is because the sign of the elastic slip strain component is reversed at the center plane in the thickness direction of the rotating Y plate, so that the driving force due to the electric field is canceled out unless the sign of the electric field component E y 'is reversed at the center plane of the thickness. This is because it ends up. That is, the second overton of thickness shear vibration cannot be excited by the conventional electrode structure. In the case of FIG. 5C as well, although the driving force is canceled by the electric field, since the effective driving force is generated in a portion of 1/3 of the thickness of the crystal plate, the driving force is the case of the fundamental wave. Although it is smaller than the other, excitation of the third overton is possible. Generally, in the conventional electrode structure, odd-order overtons can be excited, and even-order overtons cannot be excited.
【０００７】[0007]
【発明が解決しようとする課題】このため基本波と奇数
次のオーバートンだけで高周波帯のいろいろな周波数の
振動子を製作しようとすると、水晶片の最大寸法はパッ
ケージによって制限されるため、周波数によっては振動
子の特性をだすことが難しくなり、製品周波数の拡大に
支障を来していた。従来の矩形厚みすべり水晶振動子の
課題は、水晶片の設計自由度をひろげ、製作が難しくな
る周波数を出来るだけ減らし、製品周波数の拡大を計る
ことである。このためには、従来利用してこなかった偶
数次、特に２次のオーバートンを利用していく方法があ
り、偶数次のオーバートンを励振出来るような電極構造
を実現するのが課題となる。Therefore, if an oscillator having various frequencies in the high frequency band is manufactured only by the fundamental wave and odd-order overtons, the maximum size of the crystal piece is limited by the package. In some cases, it became difficult to obtain the characteristics of the oscillator, which hindered the expansion of product frequencies. The problems of the conventional rectangular-thickness-slip crystal unit are to expand the design frequency of the crystal piece, reduce the frequency that makes it difficult to manufacture as much as possible, and expand the product frequency. For this purpose, there is a method of utilizing even-order overtones, particularly secondary-order overtons, which have not been used conventionally, and it is a problem to realize an electrode structure capable of exciting even-order overtons.
【０００８】本発明の目的は、上記課題を解決しようと
するもので、従来全く利用してこなかった偶数次オーバ
ートンの励振を可能にする電極構造を提案することにあ
る。An object of the present invention is to solve the above problems and to propose an electrode structure capable of exciting even-order overtons, which has never been used.
【０００９】[0009]
【課題を解決するための手段】上記目的を達成するため
の本発明の要旨は、水晶片形状が矩形で、厚みすべり振
動モードの偶数次オーバートンで動作する水晶振動子に
おいて、水晶片の±Ｙ’面及び±Ｚ’面の４面に設けら
れた金属膜から成る電極は、＋Ｙ’面の電極と−Ｙ’面
の電極が互いに電気的に接続されて一方の電極端子にな
り、＋Ｚ’面の電極と−Ｚ’面の電極が互いに電気的に
接続されて他方の電極端子になっていることを特徴とす
る。Means for Solving the Problems The gist of the present invention for attaining the above object is to provide a crystal unit having a rectangular crystal piece shape and operating in an even-order overton of a thickness shear vibration mode. The electrodes made of metal films provided on the four surfaces of the Y ′ surface and the ± Z ′ surfaces become one electrode terminal by electrically connecting the + Y ′ surface electrode and the −Y ′ surface electrode to each other. The electrode on the'plane and the electrode on the -Z 'plane are electrically connected to each other to form the other electrode terminal.
【００１０】[0010]
【実施例】図１（Ａ）（Ｂ）は本発明の一実施例を示す
斜視図である。図１（Ａ）は回転Ｙ板からなる水晶片１
０の＋Ｙ’面を上面にして示した図であり、図１（Ｂ）
は水晶片１０の−Ｙ’面を上面にして示した図である。
±Ｙ’面及び±Ｚ’面には、それぞれ金属膜から成る電
極１１ａ、１１ｂ及び１２ａ、１２ｂが蒸着等の手段で
設けられ、１１ａと１１ｂは一方の電極端子１３に接続
されており、１２ａと１２ｂは連結部１４で電気的に接
続されており、それらは他方の電極端子１５に電気的に
接続されている。水晶片１０は通常行われているように
電極端子１３と１５がパッケージ（図示しない）の水晶
片支持部に導電接着剤等で片持支持される。1 (A) and 1 (B) are perspective views showing an embodiment of the present invention. FIG. 1A shows a crystal piece 1 made of a rotating Y plate.
FIG. 1B is a view showing the + Y ′ surface of 0 as the upper surface, and FIG.
FIG. 3 is a view showing the −Y ′ surface of the crystal blank 10 as an upper surface.
Electrodes 11a, 11b and 12a, 12b each made of a metal film are provided on the ± Y ′ plane and the ± Z ′ plane by means such as vapor deposition, and 11a and 11b are connected to one electrode terminal 13 and 12a And 12b are electrically connected to each other at the connecting portion 14, and they are electrically connected to the other electrode terminal 15. In the crystal piece 10, the electrode terminals 13 and 15 are supported by a crystal piece supporting portion of a package (not shown) in a cantilever manner by a conductive adhesive or the like, as is usually done.
【００１１】以下本発明の電極構造で厚みすべり振動の
２次オーバートンの励振が可能であることを説明する。
図６は本発明の電極構造を回転Ｙ板６０に適用したとき
の振動子のＹ’Ｚ’断面内で発生する励振電界の分布を
示す図である。電極端子６１が電気的にプラスで、電極
端子６２がマイナスになったときの励振電界の分布は、
おおよそ矢印６３、６４、６５、６６のようになる。図
６で発生する電界分布６３、６４、６５、６６をＹ’方
向電界成分Ｅy ’とＺ’方向の電界成分Ｅz ’に分けて
示すと図７（Ａ）（Ｂ）のようになる。矢印７１は電界
成分Ｅy ’を示し、矢印７２は電界成分Ｅz ’を示す。
図７（Ａ）（Ｂ）で点線はそれぞれ回転Ｙ板７０の厚み
方向および幅方向の中央面を表す。また回転Ｙ板７０の
４面にある電極は記述を省略した。It will be explained below that the electrode structure of the present invention can excite the second overton of thickness shear vibration.
FIG. 6 is a diagram showing the distribution of the excitation electric field generated in the Y′Z ′ cross section of the vibrator when the electrode structure of the present invention is applied to the rotating Y plate 60. The distribution of the excitation electric field when the electrode terminal 61 is electrically positive and the electrode terminal 62 is negative is
It becomes roughly like arrows 63, 64, 65, 66. The electric field distributions 63, 64, 65, 66 generated in FIG. 6 are divided into a Y′-direction electric field component E y ′ and a Z′-direction electric field component E z ′, as shown in FIGS. 7A and 7B. . The arrow 71 indicates the electric field component E y ′, and the arrow 72 indicates the electric field component E z ′.
Dotted lines in FIGS. 7A and 7B represent the center planes of the rotating Y plate 70 in the thickness direction and the width direction, respectively. The description of the electrodes on the four sides of the rotating Y plate 70 is omitted.
【００１２】圧電基本式（１）によれば、厚みすべり振
動に必要な弾性すべり歪み成分γxy’の励振は一般に電
界成分Ｅy ’と電界成分Ｅz ’の二つの電界成分が利用
できる。ここで（１）式に現れる圧電定数ｄ’26、ｄ’
36がカット角θによってどのように変わるかは、水晶結
晶固有の圧電定数を用いて計算することが出来る。その
計算結果を図８に示す。圧電定数の単位はｃ．ｇ．ｓ．
単位で示す。よく使用されるＡＴカット（θ＝３５．２
５度）やＹカット（θ＝０度）では圧電定数の絶対値は
ｄ’26の方がｄ’36より大きい。即ちこれらのカット角
では励振電界の方向はＹ’方向がＺ’方向より有利であ
ることを示している。According to the piezoelectric basic equation (1), two electric field components, an electric field component E y ′ and an electric field component E z ′, can generally be used to excite the elastic slip strain component γ xy ′ necessary for thickness shear vibration. Here, the piezoelectric constants d' 26 and d'appearing in the equation (1)
How 36 changes with the cut angle θ can be calculated using the piezoelectric constant peculiar to the quartz crystal. The calculation result is shown in FIG. The unit of the piezoelectric constant is c. g. s.
Shown in units. AT cut often used (θ = 35.2
At 5 degrees) and Y-cut (θ = 0 degrees), the absolute value of the piezoelectric constant d' 26 is larger than d' 36 . That is, at these cut angles, the direction of the excitation electric field is more advantageous in the Y ′ direction than in the Z ′ direction.
【００１３】さて２次オーバートンの弾性すべり歪み成
分を励振するのに必要な電界成分Ｅy ’、Ｅz ’の分布
は図５（Ｂ）と式（１）を考慮すると、理想的には図９
（Ａ（Ｂ）のようなる。即ち図９（Ａ）は電界成分
Ｅy ’で励振する場合の電界分布を示し、図９（Ｂ）は
電界成分Ｅz ’で励振する場合の電界分布を示す。本発
明の電極構造では、電界成分Ｅy ’は図７（Ａ）のよう
になっており、これは図９（Ａ）と同じであるから。２
次オーバートンの励振が可能である。しかし電界成分Ｅ
z ’は図７（Ｂ）のようになり、これは図９（Ｂ）とは
異なり、２次オーバトンの励振にたいしては有効な駆動
力にはならない。尚図８からも明らかなようにカット角
θ＝０の場合、即ちＹカットの場合はｄ’36＝０とな
り、（１）式の第２項は電界成分Ｅz ’の如何にかかわ
らず零となるので、有効な駆動力だけで２次オーバトン
の励振が可能である。The distribution of the electric field components E y 'and E z ' required to excite the elastic slip strain component of the second-order Overton is ideally, considering FIG. 5B and equation (1). Figure 9
(A (B). That is, FIG. 9 (A) shows the electric field distribution when excited by the electric field component E y ′, and FIG. 9 (B) shows the electric field distribution when excited by the electric field component E z ′. In the electrode structure of the present invention, the electric field component E y 'is as shown in FIG. 7 (A), which is the same as in FIG. 9 (A).
Excitation of the next overton is possible. However, the electric field component E
z 'is as shown in FIG. 7 (B), which is different from FIG. 9 (B), the not a valid driving force against the excitation of the secondary Obaton. As is apparent from FIG. 8, when the cut angle θ = 0, that is, when the Y cut is performed, d ′ 36 = 0, and the second term of the equation (1) is zero regardless of the electric field component E z ′. Therefore, it is possible to excite the secondary overton with only the effective driving force.
【００１４】図２は本発明の他の実施例を示す斜視図で
ある。水晶片２０の±Ｙ’面及び±Ｚ’面には、それぞ
れ金属膜から成る電極２１ａ、２１ｂ及び２２ａ、２２
ｂが設けられ、水晶片はパッケージ（図示しない）に両
端支持を行うために、水晶片の両端にはそれぞれ電極端
子２３、２４がもうけられている。FIG. 2 is a perspective view showing another embodiment of the present invention. Electrodes 21a, 21b and 22a, 22 made of metal films are formed on the ± Y ′ surface and the ± Z ′ surface of the crystal piece 20, respectively.
b, the crystal piece is provided with electrode terminals 23 and 24 at both ends of the crystal piece to support both ends of the crystal piece (not shown).
【００１５】本実施例の電極構造で発生する電界分布お
よびそれらの電界により２次オーバートンの弾性すべり
歪み成分が励振可能なことは、第一実施例の場合と同じ
なので説明は省略する。本実施例では水晶片２０は両端
支持になるので、水晶片２０の寸法が大きくなるような
場合には、本実施の耐衝撃性は第一実施例に較べて、良
くすることが出来る。The electric field distribution generated in the electrode structure of the present embodiment and the fact that the elastic slip strain component of the secondary overton can be excited by those electric fields are the same as in the case of the first embodiment, and the explanation thereof will be omitted. In this embodiment, the crystal piece 20 is supported at both ends. Therefore, when the size of the crystal piece 20 is large, the impact resistance of the present embodiment can be improved as compared with the first embodiment.
【００１６】尚本発明の電極構造は、２次オーバートン
だけでなく、一般に偶数次のオーバートンに対して有効
であること、水晶片は回転Ｙ板に限定されることなく、
水晶結晶固有の座標系Ｘ、Ｙ、Ｚに対して任意の方位で
切り出された水晶片にも、圧電定数ｄ’26が零でない限
り適用可能であること、水晶片形状もフラットなものに
限定されることなく、水晶片の厚み方向ないし、幅方向
にベベル加工やコンベックス加工を施したものにも適用
可能である。The electrode structure of the present invention is generally effective not only for the second-order overtons but also for the even-ordered overtons, and the crystal piece is not limited to the rotating Y plate.
It can be applied to a crystal piece cut out in any direction with respect to the coordinate system X, Y, Z peculiar to the crystal, as long as the piezoelectric constant d' 26 is not zero, and the shape of the crystal piece is limited to a flat shape. It is also applicable to a crystal piece that is beveled or convexized in the thickness direction or the width direction.
【００１７】[0017]
【発明の効果】本発明によれば、従来全く利用されてい
なかった厚みすべり振動の２次オーバートンが励振可能
になることから、水晶片の設計自由度が、基本波と奇数
次オーバートンだけの場合に較べて広がり、従来振動子
の特性をだすのが難しかった周波数がより少なく出来、
製品周波数の拡大が計れる効果がある。According to the present invention, since the second-order overton of the thickness shear vibration, which has never been used in the past, can be excited, the degree of design freedom of the crystal piece is limited to the fundamental wave and the odd-order overton. Compared with the case of, the frequency that was difficult to obtain the characteristics of the conventional oscillator can be reduced,
This has the effect of expanding the product frequency.
【００１８】又別の効果として、従来の電極構造ではオ
ーバートン発振をさせた場合に基本波発振の抑圧が一般
には困難であったが、本発明の電極構造によれば、基本
波発振の抑圧が完全に行える効果がある。As another effect, in the conventional electrode structure, it is generally difficult to suppress the fundamental wave oscillation when overton oscillation is generated. However, according to the electrode structure of the present invention, the fundamental wave oscillation is suppressed. There is an effect that can be completely done.
【図１】本発明の一実施例を示す電極構造の斜視図であ
る。（Ａ）は回転Ｙ板からなる水晶片１０の＋Ｙ’面を
上面にして示した図であり、（Ｂ）は水晶片１０の−
Ｙ’面を上面にして示した図である。FIG. 1 is a perspective view of an electrode structure showing an embodiment of the present invention. (A) is a view showing the + Y ′ surface of the crystal piece 10 made of a rotating Y plate as an upper surface, and (B) is a − of the crystal piece 10.
It is the figure which made the Y'plane the upper surface.
【図２】本発明の他の実施例を示す電極構造の斜視図で
ある。FIG. 2 is a perspective view of an electrode structure showing another embodiment of the present invention.
【図３】従来の電極構造を有する矩形厚みすべり振動子
の斜視図である。FIG. 3 is a perspective view of a rectangular thickness sliding oscillator having a conventional electrode structure.
【図４】回転Ｙ板の座標系Ｘ、Ｙ’、Ｚ’と水晶結晶固
有の座標系Ｘ、Ｙ、Ｚとの関係を説明する図である。FIG. 4 is a diagram illustrating a relationship between coordinate systems X, Y ′, Z ′ of a rotating Y plate and coordinate systems X, Y, Z unique to a quartz crystal.
【図５】厚みすべり振動の基本波、２次オーバートン、
３次オーバートンの弾性すべり歪み成分の振動子厚み方
向の分布を説明する図である。FIG. 5: Fundamental wave of thickness shear vibration, second overton,
It is a figure explaining distribution of the elastic slip strain component of a 3rd overton in the oscillator thickness direction.
【図６】本発明の電極構造を回転Ｙ板に適用したときの
振動子のＹ’Ｚ’断面内で発生する励振電界の分布を示
す図である。FIG. 6 is a diagram showing a distribution of an excitation electric field generated in a Y′Z ′ cross section of a vibrator when the electrode structure of the present invention is applied to a rotating Y plate.
【図７】本発明の電極構造による励振電界分布をＹ’方
向の電界成分とＺ’方向の電界成分に別けて示した図で
ある。FIG. 7 is a diagram showing an excitation electric field distribution according to the electrode structure of the present invention separately for an electric field component in the Y ′ direction and an electric field component in the Z ′ direction.
【図８】座標系Ｘ，Ｙ’，Ｚ’に関する圧電定数
ｄ’26、ｄ’36がカット角θによってどのように変わる
かを示すグラフである。FIG. 8 is a graph showing how the piezoelectric constants d ′ 26 and d ′ 36 relating to the coordinate systems X, Y ′ and Z ′ change depending on the cut angle θ.
【図９】２次オーバートンの弾性すべり歪み成分を励振
するのに必要な電界成分Ｅy ’、Ｅz ’の分布を示す図
である。FIG. 9 is a diagram showing distributions of electric field components E y ′ and E z ′ necessary to excite a second-order Overton elastic slip component.
１０、２０ 回転Ｙ板厚みすべり振動水晶振動子 １１ａ、１１ｂ、１２ａ、１２ｂ、２１ａ、２１ｂ、２
２ａ、２２ｂ 金属膜電極 １３、１５、２３、２４ 電極端子10, 20 rotation Y plate thickness sliding vibration crystal oscillator 11a, 11b, 12a, 12b, 21a, 21b, 2
2a, 22b Metal film electrode 13, 15, 23, 24 Electrode terminal
Claims (1)
ードの偶数次オーバートンで動作する水晶振動子におい
て、水晶片の±Ｙ’面及び±Ｚ’面の４面に設けられた
金属膜から成る電極は、＋Ｙ’面の電極と−Ｙ’面の電
極が互いに電気的に接続されて一方の電極端子になり、
＋Ｚ’面の電極と−Ｚ’面の電極が互いに電気的に接続
されて他方の電極端子になっていることを特徴とする厚
みすべり水晶振動子の電極構造。1. A crystal resonator having a rectangular crystal piece shape and operating in an even-order overton of a thickness shear vibration mode, wherein a metal film provided on four surfaces of ± Y ′ plane and ± Z ′ plane of the crystal piece. In the electrode composed of, the + Y ′ surface electrode and the −Y ′ surface electrode are electrically connected to each other to form one electrode terminal,
An electrode structure of a thickness-sliding quartz crystal resonator, wherein an electrode on the + Z ′ surface and an electrode on the −Z ′ surface are electrically connected to each other to form the other electrode terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6106897A JPH07321593A (en) | 1994-05-20 | 1994-05-20 | Electrode structure for thickness-shear crystal vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6106897A JPH07321593A (en) | 1994-05-20 | 1994-05-20 | Electrode structure for thickness-shear crystal vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07321593A true JPH07321593A (en) | 1995-12-08 |
Family
ID=14445265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6106897A Pending JPH07321593A (en) | 1994-05-20 | 1994-05-20 | Electrode structure for thickness-shear crystal vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07321593A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000052821A1 (en) * | 1999-03-01 | 2000-09-08 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibration device |
| JP2009130586A (en) * | 2007-11-22 | 2009-06-11 | Epson Toyocom Corp | Piezoelectric vibration chip, piezoelectric device, and method of manufacturing piezoelectric vibration chip |
| JP2013102487A (en) * | 2012-12-27 | 2013-05-23 | Seiko Epson Corp | Piezoelectric vibration piece, piezoelectric device and manufacturing method of piezoelectric vibration piece |
| JP2014045519A (en) * | 2013-11-28 | 2014-03-13 | Seiko Epson Corp | Piezoelectric vibration piece, piezoelectric device, and manufacturing method of piezoelectric vibration piece |
-
1994
- 1994-05-20 JP JP6106897A patent/JPH07321593A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000052821A1 (en) * | 1999-03-01 | 2000-09-08 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibration device |
| US6518688B1 (en) | 1999-03-01 | 2003-02-11 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibration device |
| JP2009130586A (en) * | 2007-11-22 | 2009-06-11 | Epson Toyocom Corp | Piezoelectric vibration chip, piezoelectric device, and method of manufacturing piezoelectric vibration chip |
| JP2013102487A (en) * | 2012-12-27 | 2013-05-23 | Seiko Epson Corp | Piezoelectric vibration piece, piezoelectric device and manufacturing method of piezoelectric vibration piece |
| JP2014045519A (en) * | 2013-11-28 | 2014-03-13 | Seiko Epson Corp | Piezoelectric vibration piece, piezoelectric device, and manufacturing method of piezoelectric vibration piece |
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