JPH07309008A - Ink jet head and production thereof - Google Patents

Abstract

PURPOSE:To provide an ink jet head capable of being efficiently produced in high yield with high accuracy and capable of properly and finely corresponding to the head. CONSTITUTION:A nozzle plate 2 having nozzles 3 formed thereto, a vibration plate 6 arranged so as to have a predetermined interval with the nozzle plate 2 and applying vibration to ink to eject the ink from the nozzles 3 and the partition wall plate 5 arranged between the nozzle plate 2 and the vibration plate 6 to form a predetermined ink chamber 10 are integrally formed by multilayered plating.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inkjet head and a manufacturing method thereof, and more particularly to an inkjet head for performing desired printing by ejecting ink from a nozzle and a manufacturing method thereof.

[0002]

2. Description of the Related Art Conventionally, based on a predetermined print signal,
For example, an inkjet head that performs desired printing by vibrating a vibrating plate by an actuator such as a piezoelectric element and ejecting ink stored in an ink chamber from a nozzle of a nozzle plate is often used.

FIG. 3 shows such a conventional ink jet head. For example, press working or laser working is performed above the nozzle plate 2 of the ink jet head 1 formed by Ni electroforming plating. A nozzle 3 for ejecting a predetermined ink is formed, and a nozzle expansion portion 4 having a large diameter is formed inside the nozzle plate 2 of the nozzle 3. A partition plate 5 made of a stamped foil, a film sheet, or the like is integrally formed inside the upper end of the nozzle plate 2, and the partition plate 5 has an end portion made of Ni.
A diaphragm 6 made of a metal foil such as a foil or a pressed product is arranged in parallel to the inner surface of the nozzle plate 2 and at a predetermined interval. Furthermore, this diaphragm 6
A vibrating film 7 having a small thickness is formed at a position corresponding to the nozzle 3.
A vibration operation portion 8 having substantially the same thickness as that of the diaphragm 6 is formed in the central portion of the. Further, a partition plate 9 is provided so as to project inside the vibrating plate 6 and below the vibrating film 7, and an upper portion of the partition plate 9 serves as an ink chamber 10 and serves as the partition. The lower part of the plate 9 serves as an ink flow path 11.

In the conventional ink jet head 1, an ink tank for storing ink of a predetermined color is connected to the lower end of the ink jet head 1, and a piezoelectric element is attached to the rear surface of the vibration operation portion 8 of the vibration plate 6. In this state, the piezoelectric element is operated based on a predetermined print signal to vibrate the vibrating film 7 via the vibrating operation unit 8 to send the ink from the ink tank to the ink chamber 10 via the ink flow path 11. The desired ink is ejected from the nozzle 3 and adhered to a predetermined paper or the like to perform desired printing.

And, conventionally, the nozzle plate 2,
The partition plate 5, the partition plate 9 and the vibration plate 6 are separately manufactured, and each member is assembled and fixed by, for example, an adhesive or the like to form the ink jet head 1 in which each member is integrated. Was there.

[0006]

However, in the conventional ink jet head, the nozzle plate 2, the partition plate 5, the partition plate 9 and the vibrating plate 6 are manufactured separately, and then the nozzle plate 2 and the partition plate 5 are manufactured. Since the partition plate 9 and the vibrating plate 6 are assembled and integrally fixed, the number of manufacturing processes is extremely large, the manufacturing efficiency is significantly reduced, and further, the variation of the processing accuracy of each member and the variation of the assembly accuracy are different. Alternatively, there is a problem in that the dimensional accuracy and the like of the product vary due to the protrusion of the adhesive and the like, and the yield is remarkably reduced.

Further, in recent years, in order to increase the printing resolution, it is required to miniaturize the ink jet head 1. However, as described above, the manufacturing means for assembling each member after manufacturing each member separately is There is a problem in that it is extremely difficult to form the inkjet head 1 into a fine shape, and it is not possible to appropriately cope with the miniaturization of the inkjet head 1.

The present invention has been made in view of the above-mentioned points, and an ink jet head which can be manufactured with high precision and high yield efficiently, and can appropriately cope with the miniaturization of the head. And a method for producing the same.

[0009]

In order to achieve the above object, an ink jet head according to a first aspect of the invention is
In an inkjet head for performing desired printing by ejecting ink from a nozzle, the nozzle plate provided with the nozzle and the nozzle plate are arranged so that a predetermined space is provided between the nozzle plate and the ink to vibrate. Then, the vibrating plate for ejecting the ink from the nozzles and the partition plate which is arranged between the nozzle plate and the vibrating plate and forms a predetermined ink chamber are integrally formed. . Further, preferably, a thin vibrating film is formed on the vibrating plate, an actuator for vibrating the vibrating film is disposed in the vibrating film portion, and more preferably, the actuator is a piezoelectric element. To do.

According to a fourth aspect of the present invention, there is provided a method of manufacturing an ink jet head, wherein a nozzle plate having nozzles is disposed and a predetermined space is provided between the nozzle plate and the ink to vibrate. A method of manufacturing an inkjet head, comprising: a vibrating plate that applies the ink and ejects the ink from the nozzles; and a partition plate that is disposed between the nozzle plate and the vibrating plate to form a predetermined ink chamber. It is characterized in that the nozzle plate, the partition plate and the vibrating plate are integrally formed by applying plating in a predetermined shape in multiple layers.

Further, as a means for performing multi-layer plating, it is preferable that after patterning a photosensitive resin on the substrate to leave the photosensitive resin at a predetermined position, a portion other than the photosensitive resin on the substrate is left. Plating, patterning a photosensitive resin on this plating to leave the photosensitive resin at a predetermined position, and plating other than this photosensitive resin, and patterning and plating the photosensitive resin. By repeating, three-dimensionally forming a predetermined shape on the substrate, then, while removing the photosensitive resin portion, by removing the substrate, leaving only the plating of each layer, the nozzle plate, The partition plate and the vibrating plate are integrally formed, and more preferably, a dry filter is used as the photosensitive resin. It is characterized in that it has to use a beam.

[0012]

According to the present invention, the ink jet head in which the nozzle plate, the partition plate and the vibrating plate are integrated is formed by using the multi-layer plating means for performing the multi-layer plating by using the patterning of the photosensitive resin. Therefore, it is possible to manufacture a three-dimensional extremely fine shape in the thickness direction with high dimensional accuracy, and it is possible to appropriately cope with the miniaturization of the head. Moreover, unlike the conventional case, the process of assembling each member is not required, so that the number of processes can be reduced and the variation in dimensions due to the assembly does not occur, and the product can be easily manufactured with a high yield. Is.

[0013]

Embodiments of the present invention will be described below with reference to FIGS. 1 and 2.

FIG. 1 shows an embodiment of the ink jet head according to the present invention. Above the nozzle plate 2 of the ink jet head 1 of the present invention, nozzles 3 for ejecting a predetermined ink are formed. In the inner portion of the nozzle plate 2 of the nozzle 3, a nozzle expanding portion 4 having a large diameter is formed. A partition plate 5 is integrally formed inside the upper end of the nozzle plate 2, and a vibration plate 6 is formed at the end of the partition plate 5 in parallel with the inner surface of the nozzle plate 2. Moreover, they are arranged so as to have a predetermined interval. Further, a vibrating film 7 having a small thickness is formed at a position corresponding to the nozzle 3 of the vibrating plate 6, and the vibrating plate 6 and the vibrating plate 6 are formed in a central portion of the vibrating film 7. The vibration operation part 8 having substantially the same thickness dimension is formed. Further, a partition plate 9 is provided so as to project inside the vibrating plate 6 and below the vibrating film 7, and an upper portion of the partition plate 9 serves as an ink chamber 10 and serves as the partition. The lower part of the plate 9 serves as an ink flow path 11.

Further, the ink jet head 1 having the above structure
An ink tank 12 that stores ink of a predetermined color is connected to the lower end of the vibrating plate 6, and the vibrating section 8 of the vibrating plate 6 is connected.
A piezoelectric element 14 as an actuator held by a substrate 13 is attached to the rear surface of the rear surface. The piezoelectric element 14 is operated in the contraction mode.

FIG. 2 shows an embodiment of the method of manufacturing the ink jet head 1 according to the present invention.
As shown in FIG. 2A, after a dry film as a photosensitive resin is laminated on the upper surface of the substrate 15, patterning is performed by a photolithography process to leave only the dry film 16a at a predetermined nozzle 3 position. Subsequently, as shown in FIG. 2B, the nozzle plate 2 is formed on the upper surface of the substrate 15 except the dry film 16a.
The first layer plating 17a which constitutes a part of is applied. In this case, if the substrate 15 is a conductor, electroplating or electroless plating is used, and if it is a non-conductor, electroless plating is used. Further, as the plating material, Ni electroforming plating or the like that can be thickened is generally used, but any other metal that can be plated such as Cu and Cr can be applied. .

Next, as shown in FIG. 2 (c), the first
After laminating a dry film on the upper surface of the layer plating 17a, patterning is performed by a photolithography process to leave only the dry film 16b at a predetermined nozzle expansion portion 4 position, and thereafter, as shown in FIG. The substrate 1
Second layer plating 17 forming a part of the nozzle plate 2 on the upper surface of the nozzle 5 except the dry film 16b.
Apply b.

Further, as shown in FIGS. 2 (e) and 2 (f),
After the dry film 16c at the positions of the ink chamber 10 and the ink flow path 11 is left by patterning a dry film on the upper surface of the second layer plating 17b, the third layer plating 17c forming the partition plate 5 is applied. Figure 2
As shown in (g) and (h), the third layer plating 17c
After the dry film 16d at the positions of the ink chamber 10 and the ink flow path 11 is left by patterning the dry film on the upper surface of, the fourth layer plating 17d forming the partition plate 9 and the partition plate 5 is applied. Furthermore, FIG.
As shown in (i), the fifth layer plating 17e forming a part of the diaphragm 6 is applied to the upper surface of the fourth layer plating 17d,
As shown in FIGS. 2 (j) and 2 (k), the fifth layer plating 1
After patterning a dry film on the upper surface of 7e to leave the dry film 16e in a portion corresponding to the vibrating film 7 and the vibrating motion unit 8, the sixth layer plating 17f constituting the vibrating plate 6 and the vibrating motion unit 8 is left. Give.

Then, as shown in FIG. 2 (l), the remaining dry films 16a, 16b, 16c, 1
While removing 6d and 16e, plating 17a and 17e
By removing the portions b, 17c, 17d, 17e, 17f from the substrate 15, only the plating 17 of each layer remains, and the nozzle plate 2, the partition plate 5, the partition plate 9, the diaphragm 6, the vibrating film 7 and the vibrating portion. The ink jet head 1 in which 8 is integrally formed can be manufactured.

As the photosensitive resin, it is possible to use a liquid resin instead of the above-mentioned dry film. In this case, a liquid photosensitive resin is applied and cured, and then a pattern is formed by a photolithography process. Training should be done.

Next, the operation of this embodiment will be described.

In this embodiment, the ink jet heads 1 are arranged in parallel for a predetermined number of dots, and the piezoelectric element 14 is operated based on a predetermined print signal to vibrate the operation section 8.
By vibrating the vibrating film 7 through the nozzles, the ink sent from the ink tank 12 to the ink chamber 10 through the ink flow path 11 is ejected from the nozzles 3, and the ink is attached to a predetermined sheet or the like. Thus, desired printing is performed.

In this case, in this embodiment, the ink jet head 1 is formed by using the multi-layer plating means which repeats the photolithography process of the dry film 16 and the plating 17 process several times to several tens of times. Therefore, it is possible to form a three-dimensional extremely fine shape in the thickness direction.

Therefore, in this embodiment, since the ink jet head 1 in which the respective members are integrated is formed by performing the plating 17 using the patterning of the dry film 16, the fine shape is obtained. Even if there is, it can be manufactured with high dimensional accuracy, and it is possible to appropriately cope with the miniaturization of the head. Moreover, unlike the conventional case, the process of assembling each member is not required, so that the number of processes can be reduced, and the variation in dimensions due to the assembly does not occur, and the manufacturing can be easily performed with a high yield.

The present invention is not limited to the above-mentioned embodiments, but can be variously modified as necessary.

[0026]

As described above, in the ink jet head and the method for manufacturing the same according to the present invention, the ink jet head in which the nozzle plate, the partition plate and the vibrating plate are integrated is formed by using the multi-layer plating means for performing multi-layer plating. Therefore, a three-dimensional extremely fine shape in the thickness direction can be manufactured with high dimensional accuracy, and it is possible to appropriately cope with the miniaturization of the head. Moreover, unlike the conventional case, the process of assembling each member is not required, so that the number of processes can be reduced and the variation in dimensions due to the assembly does not occur, and the manufacturing can be easily performed with a high yield. Produce the effect of.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing an embodiment of an inkjet head according to a manufacturing method of the present invention.

2 (a) to 2 (l) are explanatory views showing a flow of a method for manufacturing an inkjet head of the present invention.

FIG. 3 is a vertical sectional view showing a conventional inkjet head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Inkjet head 2 Nozzle plate 3 Nozzle 5 Partition plate 6 Vibrating plate 7 Vibrating film 8 Vibrating motion part 9 Partition plate 10 Ink chamber 14 Piezoelectric element 15 Substrate 16 Dry film 17 Plating

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Tatsuo Sugawara Inventor Tatsuo Sugawara 1-7 Yukiya Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd.

Claims (6)

[Claims] 1. An inkjet head for performing desired printing by ejecting ink from a nozzle, the nozzle plate having the nozzle formed thereon, and the nozzle plate being provided with a predetermined interval. A vibrating plate that applies vibration to the ink and ejects the ink from the nozzles, and a partition plate that is disposed between the nozzle plate and the vibrating plate to form a predetermined ink chamber are integrally formed. And inkjet head. 2. The ink jet head according to claim 1, wherein a thin vibrating film is formed on the vibrating plate, and an actuator for vibrating the vibrating film is provided in the vibrating film portion. 3. The ink jet head according to claim 2, wherein the actuator is a piezoelectric element. 4. A nozzle plate having nozzles formed thereon,
A vibrating plate which is disposed so as to have a predetermined space between the nozzle plate and the nozzle plate and which vibrates the ink to eject the ink from the nozzle, and is disposed between the nozzle plate and the vibrating plate. In a method of manufacturing an inkjet head including a partition plate that forms an ink chamber, by performing a multi-layer plating in a predetermined shape on a predetermined substrate,
A method for manufacturing an inkjet head, wherein the nozzle plate, the partition plate and the vibrating plate are integrally formed. 5. After patterning a photosensitive resin on the substrate to leave the photosensitive resin at a predetermined position, a portion of the substrate other than the photosensitive resin is plated, and the photosensitive resin is applied on the plating. The resin is patterned to leave the photosensitive resin at a predetermined position, and plating is performed on a portion other than the photosensitive resin, and the patterning and plating steps of the photosensitive resin are repeated to form a predetermined shape on the substrate. Is formed three-dimensionally, and then the photosensitive resin portion is removed, and the substrate is removed to leave only the plating of each layer, so that the nozzle plate, the partition plate and the vibration plate are integrated. The inkjet head manufacturing method according to claim 4, wherein the inkjet head is formed. 6. The method of manufacturing an inkjet head according to claim 5, wherein a dry film is used as the photosensitive resin.