JPH07308855A - Lapping method and lapping surface plate - Google Patents

Abstract

PURPOSE:To make possible accurate correction of a lapping surface plate and highly precised polishing of a workpiece. CONSTITUTION:In a lapping surface plate, which is provided with a carrier 20 making rotations and also revolutions by engaging with and interposing between a solar gear 16 and an internal gear 18 which are respectively rotatable in the identical direction, and which is made by pressing a workpiece supported by the carrier 20 with the upper and lower rotatable lapping surface plates 12, 14, angular velocity of the solar gear 16 is larger than that of the internal gear 18 and a changeover means for changing the angular velocity of the solar gear 16 to a plurality of steps under this condition, is provided. A converter for rotating velocity of the solar gear 16 and the internal gear 18, of which angular velocity of the internal gear 18 is larger than that of the solar gear 16, and which is provided with a changeover means for rotating velocity of the solar gear 16 and the internal gear 18 under this condition, is also provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lapping method and a lapping machine, and more particularly, to a lapping method and a lapping machine in which the rotation speed of a carrier can be changed during the lapping operation to make the abrasion of the lapping plate uniform. Regarding the board.

[0002]

2. Description of the Related Art Among various conventionally known lapping machines, by rotating a sun gear and an internal gear at different angular velocities, a carrier carrying a processing material is rotated and revolved, and the carrier is vertically moved. A lapping device to which a lapping plate (hereinafter referred to as a plate) is crimped,
A so-called 4-way drive type lap device is known. The lapping device has relatively high accuracy, requires a short processing time, and is suitable for thin material processing. However, when the carrier continuously rotates and revolves in the same direction, the center of the surface plate, which rotates in the same direction as the direction of revolution of the carrier, wears more in the center than in the periphery, and the direction of carrier revolution The surface plate rotating in the opposite direction tends to wear in the opposite state. This bias is a serious problem when precision lapping is required.

Conventionally, in order to correct such uneven distribution of the surface plate, the lapping work is temporarily interrupted to replace the upper surface plate and the lower surface plate, or the surface plate is replaced with a cast iron correction plate instead of the carrier. Although it is polished, it reduces the efficiency of lapping work and requires many skilled workers per machine. As a result of detailed observation and examination of the motion of the carrier, the present inventor has found that, when focusing on the motion of the carrier, the carrier is in the same revolution direction and the same rotation direction, and therefore, uneven distribution occurs. That is, it has been conceived that the lapping can be carried out in a step of changing the revolution direction and the rotation direction of the carrier to correct the surface plate and the lapping can be performed with high precision. Then, the present inventor changes the angular velocity of at least one of the sun gear and the internal gear of the lapping device so that the rotation direction of the carrier with respect to the line connecting the sun gear and the center line of the carrier (the number of revolutions and the number of rotations of the carrier) The inventors have invented a method and a device for correcting a lapping plate that can make the wear of the platen uniform by reversing the (size relationship) (Japanese Patent Publication No. 61-58270).

[0004]

However, as a result of further intensive research, the inventor has made the movement of the carrier more complicated by changing the angular velocities of the sun gear and the internal gear during a series of lapping operations. It was thought that the trajectory of the lapping motion of the workpiece can be made more complicated, and the lapping plate can be finely corrected and the work can be polished with higher accuracy.
That is, the present invention provides a lapping method and a lapping machine capable of finely correcting the lapping surface and polishing the work piece with higher accuracy in a series of lapping operations with the lapping surface attached. With the goal.

[0005]

The present invention has the following constitution in order to solve the above problems. As a wrapping method, there is a carrier which is located between a sun gear and an internal gear which are respectively rotatable in the same direction and which meshes with them and revolves around the sun and revolves around the workpiece material carried on the carrier. Using a lapping machine that is crimped by rotating upper and lower lapping plates, the angular speed of at least one of the sun gear and the internal gear is changed while maintaining the same rotation direction of the sun gear and the internal gear. The angular velocity of the gear is made larger than the angular velocity of the internal gear, and the angular velocity of at least one of the sun gear and the internal gear is further changed while keeping the angular velocity of the sun gear larger than that of the internal gear. And the lapping process, the angular velocity of the internal gear is made higher than the angular velocity of the sun gear, The rotation direction of the carrier with respect to the line connecting the centers of is reversed, and while maintaining this state, the angular velocity of at least one of the sun gear and the internal gear is further changed, and the lapping process is performed alternately. And

Further, the lapping machine has a carrier, which is located between the sun gear and the internal gear, which are rotatable in the same direction, and which meshes with the sun gear and rotates and revolves around the sun gear and the internal gear. In the lapping machine formed by crimping the processing material with the upper and lower lapping plates that rotate together, the angular velocity of the sun gear is greater than the angular velocity of the internal gear, and in this state, switching means for switching the angular velocity of the sun gear over a plurality of stages, And the angular speed of the internal gear is greater than the angular speed of the sun gear, and in this state there is provided a conversion device for the rotational speed of the sun gear and the internal gear, which has a switching means for switching the angular speed of the internal gear over a plurality of stages. Characterize.

[0007]

Next, the operation of the present invention will be described. There is a carrier between the sun gear and the internal gear that can rotate in the same direction, respectively, which meshes with the sun gear and the internal gear to rotate and revolve, and upper and lower wraps that rotate the workpiece material carried on the carrier together. Using a lapping machine that is crimped with a surface plate, the angular speed of the sun gear is higher than the angular speed of the internal gear.In this state, the angular speed of the sun gear is switched over multiple stages, and the angular speed of the internal gear is higher than the angular speed of the sun gear. Lapping is performed so that the angular velocity of the internal gear is switched over a plurality of stages with the value also increased. As a result, the amount of wear of the upper and lower lapping platens can be made uniform.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will now be described in detail with reference to the accompanying drawings. FIG. 1 is a schematic mechanism diagram showing the entire mechanism of a lapping machine. 12 is an upper surface plate, 14 is a lower surface plate,
Reference numeral 16 is a sun gear, and 18 is an internal gear. 20
Is a carrier, the sun gear 16 and the internal gear 1
8 meshes and rotates. The workpiece 21 is carried in the through hole formed in the carrier 20. The upper surface plate 12 is connected to an upper surface plate turning metal 12a (a connecting portion is not shown), a shaft 12b is hung from the upper surface plate turning metal 12a, and a gear 12c is provided at a lower end of the shaft 12b. The gear 12c is meshed with the gear 12e via the idle gear 12d. The gear 12e is fixed to a spindle 26 arranged parallel to the shaft 12b and rotates integrally with the spindle 26.

In the lower surface plate 14, the gear 14a has the spindle 2
6 can be rotated by meshing with a gear 14b fixed on the gear 6. The sun gear 16 is rotatable by meshing a gear 16 a with a transmission gear 16 b loosely fitted on the spindle 26. The internal gear 18 is rotatable by meshing a gear 18 a with a transmission gear 18 b loosely fitted on the spindle 26. In addition, the gear 1 is set so that the angular velocity of the internal gear 18 is higher than the angular velocity of the sun gear 16.
The rotation ratio of 6a and the transmission gear 16b, and the rotation ratio of the gear 18a and the transmission gear 18b are set, respectively. In this case, the carrier 20 meshed between the sun gear 16 and the internal gear 18 revolves in the same direction (counterclockwise direction) as the rotation direction of the internal gear 18 and is counterclockwise as shown in FIG. Rotate clockwise. The lower turn table 14 also rotates counterclockwise, but the upper turn table 12 rotates clockwise because the idle gear 12d is interposed.

A gear 14c is provided integrally with the gear 14b of the spindle 26. Further, the transmission gear 16c is loosely fitted to the spindle 26 integrally with the transmission gear 16b, and is connected or disconnected from the spindle 26 by the clutch 28a. Further, the speed change gear 18c is loosely fitted to the spindle 26 integrally with the transmission gear 18b, and is connected or disconnected from the spindle 26 by the clutch 28b. Further, a rotary shaft 30 is provided in parallel with the spindle 26, and the gear 18 is provided on the rotary shaft 30.
d, 14d, 16d are provided, and each gear 18d, 14
d and 16d are provided so as to mesh with the transmission gears 18c, 14c and 16c, respectively. Further, the gear 18d and the gear 16d are connected or disconnected from the rotary shaft 30 by a clutch 28c and a clutch 28d, respectively. The rotation ratios of the transmission gears 16c and 16d and the transmission gears 18c and 18d are the same as those of the internal gear 1
As compared with 8, the sun gear 16 is set to have a higher angular velocity. Further, the gear 1 on the rotary shaft 30
A gear 16e that meshes with 6d is provided on the output shaft 32a of the variable speed reducer 32 via a clutch 28e. The variable speed reducer 32 is connected to the motor 34 via a belt 36. This variable speed reducer 32 has a rotation speed of the output shaft 32a,
The rotation time is controlled.

Next, the method of the present invention will be described together with the operation of the wrapping apparatus using the wrapping apparatus described above. The lap device has five clutches 28a to 28e, but there are six possible combinations for this combination. The six combinations will be described below in (a) to (f). (a) Clutch 28a and clutch 28b of the spindle 26
To connect the clutch 28c and the clutch 28 of the rotary shaft 30.
d and the clutch 28e of the variable speed reducer 32 are disengaged (state of FIG. 1). When the spindle 26 and the rotating shaft 30 are rotated, this rotation is directly transmitted to the upper surface plate 12, the lower surface plate 14, the sun gear 16, and the internal gear 18. At this time, the internal gear 18 is the sun gear 1
The carrier 20 rotates counterclockwise at an angle larger than 6 so that the carrier 20 rotates in the counterclockwise direction and revolves [referred to as A cycle] (see FIG. 2).

(B) The clutch 28a and the clutch 28b of the spindle 26 and the clutch 28e of the variable speed reducer 32 are disengaged, and the clutch 28c of the rotary shaft 30 and the clutch 2 are disengaged.
Connect 8d. Then, by connecting the clutch 28c and disconnecting the clutch 28b, the driving force generated by the rotation of the rotary shaft 30 is transmitted to the internal gear 18 via the gear 18d, the transmission gear 18c, the transmission gear 18b, and the gear 18a. Further, by connecting the clutch 28d and disconnecting the clutch 28a, the driving force for rotation of the rotary shaft 30 is transmitted to the sun gear 16 via the gear 16d, the transmission gear 16c, the transmission gear 16b and the gear 16a. In this case, the sun gear 16
Rotates at an angular velocity larger than that of the internal gear 18, and the carrier 20 revolves counterclockwise as in the A cycle, but the direction of rotation is conversely clockwise. [Referred to as B cycle] (see FIG. 3). The rotation direction and rotation speed of the upper surface plate 12 and the lower surface plate 14 are the same as those in the A cycle.

The rotation directions of the carrier 20 are reversed between the A cycle and the B cycle. The carrier 20
The rotation direction of is the direction with respect to the line connecting the center lines of the sun gear 16 and the carrier 20. In case of A cycle,
As shown in FIG. 5, the amount of wear around the upper surface plate and the center of the lower surface plate is large. In the case of the B cycle, as shown in FIG. 6, contrary to the A cycle, the wear amount of the central portion of the upper surface plate and the peripheral portion of the lower surface plate is large. For this reason, when lapping in the B cycle after lapping in the A cycle, the upper and lower surface plates are worn so that the wear of the upper and lower surface plates of the A cycle and the upper and lower surface plate of the B cycle cancel each other out. Will be evenly worn.

(C) The clutch 28a of the spindle 26, the clutch 28c of the rotary shaft 30 and the clutch 28e of the variable speed reducer 32 are disengaged, and the clutch 28b of the spindle 26 is released.
And the clutch 28d of the rotating shaft 30 is connected. In this case, the magnitude relationship of the angular velocities of the sun gear 16 and the internal gear 18 is the same as that in the A cycle, and in this state, the angular velocity of the sun gear 16 becomes slower than in the A cycle (internal gear). The rotation direction and rotation speed of 18 are the same). For this reason, the rotation direction of the carrier 20 is the same, but the rotation speed and the revolution speed are slow [C
Cycle].

(D) The clutch 28b of the spindle 26, the clutch 28d of the rotary shaft 30, and the clutch 28e of the variable speed reducer 32 are disengaged, and the clutch 28a of the spindle 26 is released.
And the clutch 28c of the rotating shaft 30 is connected. In this case, in the case of the A cycle and the sun gear 16 is in the rotation direction,
The rotation speed is the same, and the internal gear 18 has the same rotation direction, but the rotation speed becomes slow. That is, A
Sun gear 16 and internal gear 1 compared to the cycle
The magnitude relationship of the angular velocities of 8 is reversed. Therefore, as compared with the A cycle, the rotation direction of the carrier 20 reverses (rotates in the same direction as in the B cycle), and the revolution speed becomes slow [referred to as the D cycle]. That is, the D cycle is different from the B cycle only in that the rotation speed and the revolution speed of the carrier 20 become slower.

The C cycle described in (c) corresponds to the A cycle (comparing the C cycle with the A cycle,
Since the only difference is that the rotation speed and the revolution speed of the carrier 20 become slower, the wear parts of the upper and lower surface plates are the same, and the D cycle corresponds to the B cycle (the D cycle is the rotation speed of the carrier 20 as compared with the B cycle). And the only difference is that the revolution speed becomes slower, so the wear parts of the upper and lower surface plates are the same). Therefore, by combining the C cycle and the D cycle, as in the A cycle and the B cycle, lapping can be performed without causing uneven distribution on the upper and lower surface plates. Further, the lapping order of the A cycle to the D cycle can be appropriately combined.

(E) The clutch 28b of the spindle 26 and the clutch 28e of the variable speed reducer 32 are connected, and the clutch 28a of the spindle 26 and the clutch 28c of the rotary shaft 30 are connected.
And the clutch 28d is disconnected. In this case, the rotation speed of the transmission motor 34 is set so that it can be changed every predetermined time. The rotation speed of the sun gear 16 is
The angular velocity of the internal gear 18 is set so as to be switched over a plurality of stages such as a high speed and a low speed. Therefore, the upper and lower surface plates can be corrected by making a complicated motion of revolving while rotating the carrier 20 in the forward and reverse directions and changing the rotating speed [E cycle] (Fig. 4) In the lapping step, the angular velocity of the sun gear 16 may be switched so that the rotation speed and the revolution speed of the carrier 20 can be freely changed during the same rotation direction of the carrier 20.

(F) The clutch 28c of the rotary shaft 30 and the clutch 28e of the variable speed reducer 32 are connected, and the spindle 2
The clutches 28a and 28b of No. 6 and the clutch 28d of the rotary shaft 30 are disconnected. In this case, the speed of the internal gear 18 is set lower than that in the E cycle. The relationship between the set angular speed of the internal gear 18 and the angular speed of the sun gear 16 can be changed over a plurality of stages as in the E cycle [F cycle]. The difference from the E cycle appears as a difference in the lapping speed of the work piece. For this reason, wrapping by E cycle,
Whether to wrap in the F cycle may be selected depending on the material of the workpiece.

In the E cycle and the F cycle, the angular speed of the sun gear 16 is changed in the above embodiment, but the angular speed of the internal gear 18 is changed while keeping the angular speed of the sun gear 16 constant. You may do it. That is, the gear 16e on the output shaft 32a of the variable speed reducer 32 may be configured to mesh with the gear 18d on the drive shaft 30. Alternatively, the rotation shaft 30 may not be provided, and the gear 16e connected to the variable speed reducer 32 and the transmission gear 16c of the spindle 26 may be meshed with each other. Also in this case, the movement of the carrier 20 is changed variously to change the carrier 2
The rotation direction of 0 is rotated forward and backward, and the carrier 20
It is possible to variously change the rotation speed of, and it is possible to correct the upper and lower surface plates while lapping. In the above embodiment, the switching means for switching the angular velocities of the sun gear and the internal gear in a plurality of stages may be a combination of a gear and a clutch or a variable speed reducer.

Although various explanations have been given with reference to the preferred embodiments of the present invention, the present invention is not limited to the above embodiments and many modifications can be made without departing from the spirit of the invention. Is.

[0021]

As described above, according to the present invention, the magnitude relationship of the angular velocities of the sun gear and the internal gear is changed in a plurality of steps or continuously while keeping the rotation directions of the sun gear and the internal gear constant. The rotation direction can be reversed arbitrarily, and a correction cycle can be performed in which the rotation direction and the revolution direction are variously changed, making it possible to make finer corrections to the lapping plate and to polish the work with higher precision. It will be possible. Further, since the magnitude relationship of the angular velocities is simply switched while keeping the rotation directions of the sun gear and the internal gear constant, a remarkable effect that the conversion device including the switching means can be simply configured.

[Brief description of drawings]

FIG. 1 is a partial vertical cross-sectional view of a main part of a lapping machine.

FIG. 2 is an explanatory diagram of a case where a carrier rotates counterclockwise (A cycle).

FIG. 3 is an explanatory diagram of a case where a carrier rotates clockwise (B cycle).

FIG. 4 is an explanatory diagram showing a state of an E cycle.

FIG. 5 is a cross-sectional view of a surface plate during A cycle.

FIG. 6 is a cross-sectional view of a surface plate during B cycle.

[Explanation of symbols]

 12 Upper surface plate 14 Lower surface plate 16 Sun gear 18 Internal gear 20 Carrier 26 Spindle 30 Rotating shaft 32 Variable speed reducer 34 Motor

Claims (2)

[Claims] 1. A carrier, which is located between a sun gear and an internal gear, which are rotatable in the same direction, rotates and revolves while meshing with the sun gear and the internal gear. Using a lapping machine that is crimped by rotating upper and lower lapping plates, the angular speed of at least one of the sun gear and the internal gear is changed while maintaining the same rotation direction of the sun gear and the internal gear. The angular velocity of the gear is made larger than the angular velocity of the internal gear, and the angular velocity of at least one of the sun gear and the internal gear is further changed while keeping the angular velocity of the sun gear larger than that of the internal gear. The lapping process and the angular velocity of the internal gear are set to be higher than the angular velocity of the sun gear, The rotation direction of the carrier with respect to the line connecting the hearts is reversed, and the lap step of lapping by further changing the angular velocity of at least one of the sun gear and the internal gear while maintaining this state is alternately performed. How to wrap 2. A carrier is provided between a sun gear and an internal gear, which are rotatable in the same direction, and meshes with the sun gear and the internal gear to rotate and revolve. In a lapping machine that is crimped by rotating upper and lower lapping plates, the angular speed of the sun gear is higher than the angular speed of the internal gear, and in this state, the switching means that switches the angular speed of the sun gear over multiple stages, and the internal gear A lap machine having an angular velocity higher than that of the sun gear, and having a switching means for switching the angular velocity of the internal gear over a plurality of stages in this state, provided with a device for converting the rotational speeds of the sun gear and the internal gear. .