JPH01295760A - Lapping method and lapping machine - Google Patents

Abstract

PURPOSE:To uniformly generate wearing of a surface plate by changing an angular speed of at least one of the sun gear and the internal gear and reversing a carrier in its direction of rotation on the own axis for a line connecting center lines of the sun gear and the carrier. CONSTITUTION:A carrier 20 is arranged between a sun gear 16 and an internal gear 18, able to rotate respectively in the same direction, and meshed with both the gears, rotating on the own axis while about the sun gear, and a lapping machine, having this carrier 20 and constituted forcing a workpiece 21, held by this carrier 20, to be mounted by upper and bottom lapping surface plates 12, 14 rotating together, is used. An angular speed of the sun gear 16 is larger than an angular speed of the internal gear 18, under this condition, switching the angular speed of the sun gear 16 over two or more stages while increasing the angular speed of the internal gear 18 larger than the angular speed of the sun gear 16, under this condition, lapping is performed so as to switch the angular speed of the internal gear 18 over two or more stages. By the method thus obtained, the upper and bottom lapping surface plates 12, 14 uniformly obtain their wearing amount.

Description

Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a lapping method and a lapping machine, and more particularly, the rotational speed of the carrier is changed during the lapping process to uniformly wear out the lapping platen. The present invention relates to a lapping method and a lapping machine that can be used for lapping.

(Prior art and interlayer points) Among various conventionally known lapping machines, a carrier carrying a processed material is rotated and revolved by rotating a sun gear and an internal gear at different angular velocities. A so-called 4-hand drive type lapping apparatus is known, in which upper and lower lapping plates (hereinafter referred to as lapping plates) are crimped together.

The above-mentioned lapping device has relatively high accuracy, requires a short processing time, and is suitable for processing thin objects.

However, when the carrier continuously rotates and revolves in the same direction, the surface plate that rotates in the same direction as the carrier's revolution has more wear at the center than at its periphery. A surface plate that rotates in the opposite direction tends to wear in the opposite direction.

Conventionally, in order to correct such uneven wear of the surface plate, the lapping operation was temporarily suspended and the upper and lower surface plates were replaced, or the surface plate was polished using a cast iron correction plate instead of a carrier. However, it reduces the efficiency of wrapping work and requires more machines and more skilled workers.

Further, in cases where particularly precise lapping is required for accuracy, this uneven reduction becomes a serious problem.

As a result of observing and studying the movement of the carrier in detail, the inventor of the present invention found that when focusing on the movement of the carrier, uneven loss occurs because the direction of revolution and the direction of rotation of the carrier are the same. That is, we have come up with the idea that by performing lapping by changing the revolution direction and rotation direction of the carrier, it is possible to correct the surface plate and to perform lapping with high precision. Then, the inventor changed the angular velocity of at least one of the sun gear and internal gear of the wrap device, and determined the direction of rotation of the carrier (the number of revolutions and the number of rotations of the carrier) with respect to the line connecting the sun gear and the center line of the carrier. He invented a method and device for repairing a lap surface plate that can make the wear of the surface plate uniform by reversing the size relationship (Japanese Patent Publication No. 6L-58270).

Therefore, as a result of further intensive research, we were able to make the movement of the carrier more complex by changing the angular velocity of the sun gear and internal gear in various ways during a series of lapping operations. The locus of motion can be made more complex, making it possible to modify the lapping surface plate and polish the workpiece with high precision.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a lapping method and a lapping plate that allow the lapping plate to be corrected during a series of lapping operations while the lapping plate is still attached.

(Means for Solving the Problems) In order to solve the above problems, the present invention includes the following configuration.

The lapping method uses a carrier that is located between a sun gear and an internal gear that are rotatable in the same direction, and that rotates and revolves around the sun while meshing with both, and the workpiece material carried on this carrier is Using a lap plate formed by crimping with rotating upper and lower lap plates, the rotation direction of the sun gear and internal gear is kept in the same direction, and the angular velocity of at least one of the sun gear and internal gear is changed. The angular velocity of the gear is made larger than the angular velocity of the internal gear, and the angular velocity of at least one of the sun gear and the internal gear is further changed while the angular velocity of the sun gear remains greater than the angular velocity of the internal gear. In the lapping process, the angular velocity of the internal gear is made larger than the angular velocity of the sun gear.
The lapping process alternately involves reversing the rotation direction of the carrier with respect to a line connecting the centers of the sun gear and the carrier, and further changing the angular velocity of at least one of the sun gear and the internal gear while maintaining this state. It is characterized by doing.

In addition, a lapping machine has a carrier that is located between a sun gear and an internal gear that are rotatable in the same direction, and that rotates and revolves around the sun while meshing with both, and the workpiece material carried on this carrier is In a lapping plate formed by crimping with upper and lower lapping plates that rotate together, the angular velocity of the sun gear is greater than the angular velocity of the internal gear,
A sun gear having a switching means for switching the angular velocity of the sun gear over a plurality of stages in this state, and a switching means for switching the angular velocity of the internal gear over a plurality of stages in this state, the angular velocity of the internal gear being greater than the angular velocity of the sun gear. and an internal gear rotational speed conversion device.

(effect) The operation of this invention will now be described.

A carrier is provided between a sun gear and an internal gear, which are rotatable in the same direction, and rotates and revolves around the sun while meshing with them. The angular velocity of the sun gear is greater than the angular velocity of the internal gear using a lapping plate that is crimped on a surface plate.In this state, the angular velocity of the sun gear is switched over multiple stages, and the angular velocity of the internal gear is set to the angular velocity of the sun gear. Wrapping is performed so that the angular velocity of the internal gear is switched over multiple stages while the angular velocity is increased.

This makes it possible to equalize the amount of wear on the upper and lower lap surface plates.

(Embodiments) Hereinafter, preferred embodiments of the present invention will be described in detail based on the accompanying drawings.

FIG. 1 is a schematic diagram showing the overall mechanism of the lapping machine.

12 is an upper surface plate, 14 is a lower surface plate, 16 is a sun gear, and 18 is an internal gear. 20 is a carrier, and a workpiece 21 is supported in a through hole formed in the carrier 20, and is rotated by meshing with the sun gear 16 and the internal gear 18.

The upper surface plate 12 is connected to an upper surface plate turner 12a, a shaft 12b hangs down from the upper surface plate turner 12a, and a gear 12c is provided at the tip of the shaft 1.2b. Then, the gear 12c is connected to the gear 1 via the idle gear 12d.
It meshes with 2e. This gear 12e is connected to the spindle 2
It is fixed to a spindle 26 so as to rotate together with the spindle 6.

The lower surface plate 14 is in mesh with a gear 14b fixed on a spindle 26 via a gear 14a.

The sun gear 16 meshes with a transmission gear 16b loosely fitted onto the spindle 26 via a gear 16a.

The internal gear 18 meshes with a transmission gear 18b loosely fitted onto the spindle 26 via a gear 18a.

Also, the rotation ratio between gear 16a and transmission gear 16b, and the rotation ratio between gear 18a and transmission gear 18 are adjusted such that the angular velocity of internal gear 18 is greater than the angular velocity of sun gear 16.
The rotation ratio of b is set respectively. In this case, the carrier 20 meshed between the sun gear 16 and the internal gear 18.

As shown in FIG. 2, it revolves in the same direction as the rotational direction of the internal gear 18 (counterclockwise direction) and rotates in the direction of the hour hand. Further, the lower surface plate 14 similarly rotates in the counterclockwise direction, but the upper chamber [12] rotates in the hourly direction because the idle gear 12d is interposed therebetween.

A gear 14c is provided integrally with the gear 14b of the spindle 26. Further, a transmission gear 16c is loosely fitted into the spindle 26 integrally with the transmission gear 16b, and is provided on the spindle 26 via a clutch 28a. Further, a transmission gear 18c is loosely fitted into the spindle 26 integrally with the transmission gear 18b, and is provided on the spindle 26 via a clutch 28b.

Further, a rotating shaft 30 is provided parallel to the spindle 26,
Gears 18d and 14d are provided on this rotating shaft 30.

16d is provided, and each gear 18d, 14d, 16d is provided so as to mesh with the transmission gear 18c, 14c, 16c, respectively. In addition, gear 18d and gear 16d
are provided on the rotating shaft 30 via a clutch 28c and a clutch 28d, respectively. And transmission gear 16
The rotation ratios between the gear 16c and the gear 16d, and the rotation ratio between the transmission gear 18c and the gear 18cl are set so that the angular velocity of the sun gear 16 is larger than that of the ink-null gear 18.

Further, a gear 16g that meshes with the gear 16e on the drive shaft 30 is connected to the drive shaft 32a of the variable reduction gear 32 and the clutch 2
8e. The variable speed reducer 32 is connected to a motor 34 via a belt 36. This variable reducer 32 controls the number of rotations, rotation time, etc. from the motor 34.

The lower surface plate 14 is driven when the clutch 28a is connected, the gear L4c is in a free state relative to the gear 14b, and the rotational force of the spindle 26 is transmitted. Furthermore, when the clutch 28a is disengaged, the gears 14b and 14c are in a free state with respect to the spindle 26, and the driving force of the rotating shaft 30 is transmitted to the lower surface plate 14 via the gears 14d, 14c, 14b, and 14a. .

Next, the method of the present invention will be explained using the above-mentioned wrapping device together with the operation of the wrapping device.

The wrap device includes five clutches 28a to 28e, but six possible combinations are possible. These six combinations will be explained below in terms of ta>~(0).

(Al Connect clutch 28a and clutch 28b of spindle 26 and connect clutch 28C of one rotation shaft 30.

Clutch 28d and clutch 28e of variable reducer 32
(as shown in Figure 1).

When the spindle 26 and the rotating shaft 30 are rotated, this rotation is directly transmitted to the upper surface plate 12, the lower surface plate 14, the sun gear 16, and the internal gear 18. At this time, the internal gear 18 rotates counterclockwise at a higher angular velocity than the sun gear 16, causing the carrier 20 to rotate counterclockwise and revolve around itself [referred to as A cycle] (see FIG. 2).

Clutch 28a, clutch 28b of spindle 26
Then, the clutch 28e of the variable speed reduction Ia32 is disconnected, and the clutches 28c and 28d of the one-rotation shaft 30 are connected.

Then, by connecting the clutch 28c and disconnecting the clutch 28d, the driving force due to the rotation of the drive shaft 30 is transferred to the gears 18d,
It is transmitted to internal gear 18 via transmission gear 18c, transmission gear 18b, and gear 18a. Further, by connecting the clutch 28d and disconnecting the clutch 28a, the rotational driving force of the drive shaft 30 is transmitted to the sun gear 16 via the gear 16d, the transmission gear 16c, the transmission gear 16b, and the gear 16a.

In this case, the sun gear 16 rotates at a higher angular velocity than the internal gear 18, and the carrier 20 revolves in the counterclockwise direction as in the A cycle, but the direction of rotation is opposite to the hour hand direction [referred to as B cycle]. (See Figure 3)
Note that the rotational speed of the upper surface plate 12 and the lower surface plate 14 in the rotational direction is the same as in the A cycle.

In the A cycle and the B cycle, the rotation direction of the carrier 20 is reversed. This is the rotation direction of the carrier 20 when directly facing the sun gear 16 (the rotation direction of the carrier with respect to the line connecting the center lines of the sun gear 16 and the carrier 20).
(Hereinafter, the rotation direction of the carrier refers to the direction with respect to the line connecting the center lines of the sun gear 16 and the carrier 20, and is simply expressed as forward and reverse rotation of the rotation direction.)

In the case of the A cycle, as shown in Figure 6, the amount of wear is large around the upper surface plate and in the center of the lower surface plate, and in the case of the B cycle, as shown in Figure 7, the amount of wear is the opposite of that of the A cycle. To,
The amount of wear at the center of the upper surface plate and the area around the lower surface plate is large. Therefore, if you wrap in the A cycle and then in the B cycle, the wear on the upper and lower surface plates in the A cycle and the wear on the upper and lower surface plates in the B cycle will be reduced. Since the upper and lower surface plates are worn to cancel each other out, the upper and lower surface plates are worn uniformly.

fc) Clutch 28a of spindle 26, rotating shaft 3
0 clutch 28c and variable reducer 32 clutch 2
8e is disconnected, and the clutch 28b of the spindle 26 and the clutch 28d of the rotating shaft 30 are connected.

In this case, the magnitude relationship between the angular velocities of the sun gear 16 and the internal gear 18 is the same as in the case of the A cycle, and in this state, the angular velocity of the sun gear 16 becomes slower than in the A cycle (the internal gear Therefore, although the direction of rotation of carrier 20 is the same, the rotation speed and revolution speed of carrier 20 are slower [referred to as C cycle].

(dl Clutch 28b of spindle 26, rotating shaft 3
0 clutch 28d and variable reducer 32 clutch 2
8e is disconnected, and the clutch 28a of the spindle 26 and the clutch 28c of the rotating shaft 30 are connected.

In this case, the rotation direction and rotation speed of the sun gear 16 are the same as in the case of the A cycle, and the internal gear 18
The rotation direction is the same, but the rotation speed is slower. That is, compared to the A cycle, the magnitude relationship between the angular velocities of the sun gear 16 and the internal gear 18 is reversed. For this reason,
Compared to the A cycle, the rotation direction of the carrier 20 is reversed and rotates in the same direction as in the B cycle), and the revolution speed is slower [referred to as the D cycle]. In other words, the only difference between the D cycle and the B cycle is that the rotation speed and revolution speed of the carrier 20 are slower.The C cycle described in [01] corresponds to the A cycle; Then carrier 2
The only difference is that the rotation speed and revolution speed of 0 are slower, so the wear parts of the upper and lower surface plates are the same), and the D cycle is B
cycle (compared to the B cycle, the only difference between the D cycle and the B cycle is that the rotation speed and revolution speed of the carrier 2o are slower, so the wear parts of the upper and lower surface plates are the same).

Therefore, by combining the C cycle and the D cycle, lapping can be performed without causing uneven wear on the upper and lower surface plates, similar to the A cycle and the B cycle.

Furthermore, the wrapping order of cycles A to D can be combined as appropriate.

te+ The clutch 28b of the spindle 26 and the clutch 28e of the variable reducer 32 are connected, and the spindle 26
clutch 28a, clutch 28c and clutch 28d of rotating shaft 30 are disconnected.

In this case, the rotational speed of the variable speed motor 34 is set to be able to be changed at predetermined time intervals. The rotational speed of the sun gear 16 is set so that it can be switched over multiple steps, such as faster and slower angular speeds, relative to the angular velocity of the internal gear 18. Therefore, carrier 2
It is possible to correct the upper and lower surface plates by performing a complex movement in which the rotation direction of 0 rotates in the forward and reverse directions, and while changing the rotation speed, it revolves around the Earth [E cycle] (see Figure 4) .

In addition, in the said lapping process, the angular velocity of the sun gear 16 may be switched so that the rotation speed and revolution speed of the carrier 2o may be freely changed while the carrier 20 is in the same rotation direction.

+f1 Clutch 28c of rotating shaft 30 and clutch 28e of variable reduction gear 32 are connected, and clutch 28a of spindle 26, clutch 28c and clutch 28d of rotating shaft 30 are disconnected.

In this case, the speed of the internal gear 18 is set slower than in the E cycle. The relationship between the angular velocity of the sun gear 16 and the set angular velocity of the internal gear 18 can be changed over multiple stages as in the E cycle [F cycle].The difference from the E cycle is that the lapping speed of the workpiece It appears as a difference.

Therefore, whether lapping is performed in the E cycle or in the F cycle may be selected depending on the material of the workpiece.

Note that in the above E cycle and F cycle, the angular velocity of the sun gear 16 was changed in the above embodiment, but the angular velocity of the internal gear 18 was changed while the angular velocity of the sun gear 16 was kept constant. is also good, i.e.
The gear 16e on the output shaft 32a of the variable speed reducer 32 may be configured to mesh with the gear 18d on the drive shaft 30.

Alternatively, the rotating shaft 30 may not be provided, and the gear 16e connected to the variable speed reducer 32- may be configured to mesh with the speed change gear 16c of the spindle 26. In this case as well, the movement of the carrier 20 can be varied in various ways, the rotation direction of the carrier 20 can be rotated in forward and reverse directions, and the rotation speed of the carrier 20 can also be varied in various ways, thereby realizing correction of the upper and lower surface plates while lapping. be able to.

In the above embodiments, the switching means for switching the angular velocities of the sun gear and the internal gear into multiple stages may be a combination of gears and clutches, or a variable speed reducer.

Although various explanations have been given above with reference to preferred embodiments of the present invention, the present invention is not limited to the above-described embodiments, and it goes without saying that many modifications can be made without departing from the spirit of the invention.

(Effects of the Invention) As described above, the present invention eliminates the need to remove the surface plate and replace the upper and lower surfaces during lapping work, or to polish using a cast iron correction plate. The surface plate can be corrected by simply changing at least one of the angular velocities of the null gear and further changing the angular velocity of at least one of the sun gear and internal gear while maintaining the magnitude relationship between the sun gear and the internal gear. can be easily done.

That is, by changing the rotational speed of the carrier while maintaining the size relationship between the sun gear and the internal gear (keeping the rotation direction of the carrier constant with respect to the line connecting the center line of the sun gear and the carrier). , the movement of the carrier can be made more complicated, and the correction of the surface plate can be made more uniformly.

[Brief explanation of the drawing]

Fig. 1 is a vertical cross-sectional view of the main part of the lapping machine, Fig. 2 is an explanatory diagram when the carrier rotates in the direction of the hour hand (A cycle), and Fig. 3 is an explanatory diagram when the carrier rotates in the direction of the hour hand (B cycle). ), Figure 4 is an explanatory diagram showing the state of E cycle, Figure 5 is a sectional view of the surface plate during A cycle, and Figure 6 is B
FIG. 3 is a cross-sectional view of the surface plate during a cycle. 12... Upper surface plate, 14... Lower surface plate, 16... Sun gear, 18... Internal gear, 20... Carrier, 26... Spindle, 30... Rotating shaft, 32 ...
Variable reducer, 34... motor.

Claims (1)

[Scope of Claims] 1. A carrier that is located between a sun gear and an internal gear that are rotatable in the same direction and that rotates and revolves around its own axis while meshing with both, and a workpiece material supported on this carrier. The angular velocity of at least one of the sun gear and the internal gear can be changed while keeping the rotation direction of the sun gear and internal gear in the same direction using a lapping plate formed by crimping them with upper and lower lapping surface plates that rotate together. The angular velocity of the sun gear is made larger than the angular velocity of the internal gear, and the angular velocity of at least one of the sun gear and the internal gear is increased while the angular velocity of the sun gear remains greater than the angular velocity of the internal gear. In the lapping process, the angular velocity of the internal gear is made larger than the angular velocity of the sun gear, and the direction of rotation of the carrier relative to the line connecting the center of the sun gear and the carrier is reversed, and this state is maintained. A lapping method characterized by alternately performing a lapping step in which lapping is performed while further changing the angular velocity of at least one of a sun gear and an internal gear. 2. A carrier is provided between the sun gear and the internal gear, which are rotatable in the same direction, and rotates and revolves around the sun while meshing with them. In a lapping machine formed by crimping on a lapping surface plate, the angular velocity of the sun gear is higher than the angular velocity of the internal gear, and in this state, there is provided a switching means for switching the angular velocity of the sun gear over multiple stages, and A lapping machine characterized by being provided with a device for converting the rotational speed of a sun gear and an internal gear, which has a switching means that is greater than the angular velocity of the gear and switches the angular velocity of the internal gear over a plurality of stages in this state. 3. A carrier is provided between the sun gear and the internal gear, which are rotatable in the same direction, and rotates and revolves around the sun while meshing with them. In a lapping machine formed by crimping with a lapping surface plate, a transmission gear 16b and a transmission gear 1 are integrally loosely fitted onto the spindle 26 in order to transmit the rotation of the spindle 26 to the sun gear and the internal gear, respectively.
6c group, transmission gear 18b, and transmission gear 16c group are connected to the spindle 26 via clutches 28a and 28b, respectively.
A drive shaft 30 is provided parallel to the spindle 26, and a drive shaft 30 is provided in parallel with the spindle 26.
Gears 16d and 18d are loosely fitted onto the drive shaft 30 through clutches 28d and 28c, respectively, and are loosely fitted onto the transmission gears 16c and 18c, respectively. A switching means is provided, and either one of clutch 28d and clutch 28a is connected to rotate the sun gear, and clutch 28b is connected to rotate the sun gear.
, 28c are connected to rotate each internal gear, the angular velocity of the sun gear is greater than the angular velocity of the internal gear, and either one of the clutches 28b, 28c is connected to rotate the internal gear, A lapping machine characterized in that the gear ratio of each gear is set so that when the clutches 28d and 28a are connected and the sun gears are rotated, the angular velocity of the sun gear is smaller than the angular velocity of the internal gear. .