JPH0730679Y2 - 成膜装置 - Google Patents

成膜装置

Info

Publication number
JPH0730679Y2
JPH0730679Y2 JP1989127587U JP12758789U JPH0730679Y2 JP H0730679 Y2 JPH0730679 Y2 JP H0730679Y2 JP 1989127587 U JP1989127587 U JP 1989127587U JP 12758789 U JP12758789 U JP 12758789U JP H0730679 Y2 JPH0730679 Y2 JP H0730679Y2
Authority
JP
Japan
Prior art keywords
window member
plate
film forming
thickness
sapphire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989127587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0367057U (enrdf_load_html_response
Inventor
雅浩 関谷
淳一 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP1989127587U priority Critical patent/JPH0730679Y2/ja
Publication of JPH0367057U publication Critical patent/JPH0367057U/ja
Application granted granted Critical
Publication of JPH0730679Y2 publication Critical patent/JPH0730679Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP1989127587U 1989-10-31 1989-10-31 成膜装置 Expired - Fee Related JPH0730679Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989127587U JPH0730679Y2 (ja) 1989-10-31 1989-10-31 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989127587U JPH0730679Y2 (ja) 1989-10-31 1989-10-31 成膜装置

Publications (2)

Publication Number Publication Date
JPH0367057U JPH0367057U (enrdf_load_html_response) 1991-06-28
JPH0730679Y2 true JPH0730679Y2 (ja) 1995-07-12

Family

ID=31675339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989127587U Expired - Fee Related JPH0730679Y2 (ja) 1989-10-31 1989-10-31 成膜装置

Country Status (1)

Country Link
JP (1) JPH0730679Y2 (enrdf_load_html_response)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61106770A (ja) * 1984-10-30 1986-05-24 Sumitomo Electric Ind Ltd 気相コ−テイング装置
JPS63163937A (ja) * 1986-12-26 1988-07-07 Minolta Camera Co Ltd メモリ制御装置

Also Published As

Publication number Publication date
JPH0367057U (enrdf_load_html_response) 1991-06-28

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Legal Events

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