JPH0730679Y2 - 成膜装置 - Google Patents

成膜装置

Info

Publication number
JPH0730679Y2
JPH0730679Y2 JP1989127587U JP12758789U JPH0730679Y2 JP H0730679 Y2 JPH0730679 Y2 JP H0730679Y2 JP 1989127587 U JP1989127587 U JP 1989127587U JP 12758789 U JP12758789 U JP 12758789U JP H0730679 Y2 JPH0730679 Y2 JP H0730679Y2
Authority
JP
Japan
Prior art keywords
window member
plate
film forming
thickness
sapphire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989127587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0367057U (cs
Inventor
雅浩 関谷
淳一 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP1989127587U priority Critical patent/JPH0730679Y2/ja
Publication of JPH0367057U publication Critical patent/JPH0367057U/ja
Application granted granted Critical
Publication of JPH0730679Y2 publication Critical patent/JPH0730679Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP1989127587U 1989-10-31 1989-10-31 成膜装置 Expired - Fee Related JPH0730679Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989127587U JPH0730679Y2 (ja) 1989-10-31 1989-10-31 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989127587U JPH0730679Y2 (ja) 1989-10-31 1989-10-31 成膜装置

Publications (2)

Publication Number Publication Date
JPH0367057U JPH0367057U (cs) 1991-06-28
JPH0730679Y2 true JPH0730679Y2 (ja) 1995-07-12

Family

ID=31675339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989127587U Expired - Fee Related JPH0730679Y2 (ja) 1989-10-31 1989-10-31 成膜装置

Country Status (1)

Country Link
JP (1) JPH0730679Y2 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61106770A (ja) * 1984-10-30 1986-05-24 Sumitomo Electric Ind Ltd 気相コ−テイング装置
JPS63163937A (ja) * 1986-12-26 1988-07-07 Minolta Camera Co Ltd メモリ制御装置

Also Published As

Publication number Publication date
JPH0367057U (cs) 1991-06-28

Similar Documents

Publication Publication Date Title
EP1061566A2 (en) Method for producing a semiconductor thin film by a separation step and solar cell production method
KR102568046B1 (ko) 고해상 쉐도우 마스크
US7229926B2 (en) Method of manufacturing nitride substrate for semiconductors, and nitride semiconductor substrate
US7112515B2 (en) Method of making a hybrid substrate having a thin silicon carbide membrane layer
US5804046A (en) Thin-film forming apparatus
US20030029376A1 (en) Large size single crystal seed crystal fabrication by intergrowth of tiled seed crystals
EP2900851B1 (en) Method of growing group iii nitride crystals
KR20030093359A (ko) 박막 및 그 제조방법
JP2003257804A (ja) 複合基板および基板製造方法
JP2849602B2 (ja) 単結晶サファイアの接合方法
AU2002222036A1 (en) Method for making a substrate
US20090235952A1 (en) Device and method for wet treating plate-like substrates
TWI552205B (zh) 用以形成薄層體之方法與裝置
KR20150046339A (ko) 사파이어 단결정 육성용 도가니 및 사파이어 단결정 육성용 도가니의 제조 방법
EP0123809B1 (en) Process for growing a large single crystal from multiple seed crystals
JPH0730679Y2 (ja) 成膜装置
JP3666044B2 (ja) ダイヤモンド部品
JPH0940495A (ja) 自立性ダイヤモンド皮膜の製造装置
Geis et al. Mosaic diamond substrates approaching single-crystal quality using cube-shaped diamond seeds
EP1537258B1 (en) Method of fabricating substrates, in particular for optics, electronics or optoelectronics----------------------------------------
CN116462155B (zh) 一种基于pva薄膜搭建多层二维层状材料的方法
KR20140055380A (ko) 공업용 사파이어를 이용한 휴대형 정보기기의 액정 보호 윈도우 제조방법
CN108866492A (zh) 粘接式保持件及被保持体的保持方法
JPH02291117A (ja) 特に半導体材料の溶融物から凝固層を成長させるための構造化表面を備えた支持体
JPS57194517A (en) Manufacture of semiconductor crystal film

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees