JPH0730114Y2 - Gas washing tower - Google Patents
Gas washing towerInfo
- Publication number
- JPH0730114Y2 JPH0730114Y2 JP7174090U JP7174090U JPH0730114Y2 JP H0730114 Y2 JPH0730114 Y2 JP H0730114Y2 JP 7174090 U JP7174090 U JP 7174090U JP 7174090 U JP7174090 U JP 7174090U JP H0730114 Y2 JPH0730114 Y2 JP H0730114Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- cleaning
- contact layer
- liquid
- liquid contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
この考案は、消化ガスや臭気ガス等のガスを洗浄するた
めのガス洗浄塔に関するものである。The present invention relates to a gas cleaning tower for cleaning gases such as digestion gas and odorous gas.
【従来の技術】 周知のように、ガス洗浄塔は、充填材が充填された気液
接触層に消化ガスや臭気ガス等の洗浄しようとするガス
を下方から流入すると共に、水や薬液等の洗浄用液を気
液接触層に上方から流入して、充填材によりガスと洗浄
用液とを接触させることにより、ガスの洗浄、脱臭を行
っている。従って、充填材によるガスと洗浄用液との接
触が良好な程、効率の良い洗浄、脱臭を行える。 従来は、ガスと洗浄用液との接触を良好にすることのみ
を目的として、第４図に示すように合成樹脂製で、表面
がネット状に形成された円筒状充填材１や、第５図に示
すように合成樹脂製で、表面が花形模様に形成された球
状充填材２を使用していた。2. Description of the Related Art As is well known, in a gas cleaning tower, a gas to be cleaned such as a digestive gas or an odorous gas is introduced into a gas-liquid contact layer filled with a packing material from below, and water or a chemical solution The cleaning liquid is flown into the gas-liquid contact layer from above, and the gas and the cleaning liquid are brought into contact with each other by the filling material to clean and deodorize the gas. Therefore, the better the contact between the gas by the filler and the cleaning liquid, the more efficient cleaning and deodorization can be performed. Conventionally, a cylindrical filler 1 made of a synthetic resin and having a net-shaped surface as shown in FIG. 4 and a fifth filler only for the purpose of improving the contact between the gas and the cleaning liquid. As shown in the figure, a spherical filler 2 made of synthetic resin and having a flower-shaped surface was used.
しかし、従来の円筒状充填材１や球状充填材２は、ガス
と洗浄用液との接触は良好であったが、これら円筒状充
填材１や球状充填材２は、表面に水垢や藻等が付着して
閉塞し易いため、従来のガス洗浄塔では、１年に２〜３
回の割で、気液接触層から円筒状充填材１や球状充填材
２を外部に取り出して、高圧水によって洗浄しなければ
ならなかった。とかも、その円筒状充填材１や球状充填
材２の洗浄作業は、著しい汚れや悪臭を伴うために大変
な労働になっているという問題点があった。 この考案は上記のような問題点を解消するためになされ
たもので、気液接触層から充填材を取り出さなくても、
充填材を簡単に洗浄することができるガス洗浄塔を得る
ことを目的とする。However, the conventional cylindrical filler 1 and spherical filler 2 have good contact between the gas and the cleaning liquid, but these cylindrical filler 1 and spherical filler 2 have water stains, algae, etc. on the surface. Is easily attached and clogged, so in a conventional gas scrubber, 2-3 times a year
It was necessary to take out the cylindrical filler 1 and the spherical filler 2 from the gas-liquid contact layer to the outside every time and wash them with high pressure water. However, there is a problem in that the cleaning work of the cylindrical filler 1 and the spherical filler 2 is a laborious task because it is accompanied by remarkable dirt and bad odor. This invention was made in order to solve the above problems, and without removing the filler from the gas-liquid contact layer,
An object of the present invention is to obtain a gas scrubbing tower that can easily clean the packing material.
この考案に係るガス洗浄塔は、充填材が充填された気液
接触層に洗浄しようとするガスを下方からガス流入管に
よって流入すると共に、洗浄用液を上記気液接触層に上
方から洗浄用液流入管によって流入させてガスの洗浄を
行うように構成したガス洗浄塔において、上記充填材を
比重が1.0以下で、表面が波形に形成された小型円筒状
充填材で構成し、上記気液接触層内に上記洗浄用液を溜
めた状態で、その気液接触層内を上向き空気流によって
空気洗浄する空気洗浄設備を具備させたものである。In the gas cleaning tower according to the present invention, the gas to be cleaned is introduced into the gas-liquid contact layer filled with the filler through the gas inflow pipe from below, and the cleaning liquid is supplied to the gas-liquid contact layer from above. In a gas cleaning tower configured to flow gas through a liquid inflow pipe for cleaning gas, the packing material is composed of a small cylindrical packing material having a specific gravity of 1.0 or less and a corrugated surface, and the gas-liquid Air cleaning equipment is provided for cleaning the inside of the gas-liquid contact layer with an upward air flow while the cleaning liquid is stored in the contact layer.
この考案におけるガス洗浄塔に使用された小型円筒状充
填材は、比重が1.0以下で、表面が波形に形成されてい
るので、運転時におけるガスと洗浄用液との接触を良好
に伝えるにも拘わらず、水垢等の閉塞が少ない。しか
も、このガス洗浄塔は、気液接触層内に洗浄用液を溜め
た状態で、その気液接触層内を上向き空気流によって空
気洗浄する空気洗浄設備を備えており、その空気洗浄時
に、比重が1.0以下の小型円筒状充填材を気液接触層内
で十分に攪拌して、その小型円筒状充填材に付着した水
垢等を簡単に洗浄することができる。The small cylindrical packing used in the gas scrubbing tower in this invention has a specific gravity of 1.0 or less and a corrugated surface, so it can be used to effectively convey the contact between gas and scrubbing liquid during operation. Regardless, there is little blockage of water stains. Moreover, this gas cleaning tower is equipped with an air cleaning facility for cleaning the inside of the gas-liquid contact layer with an upward air flow in a state where the cleaning liquid is stored in the gas-liquid contact layer. A small cylindrical filler having a specific gravity of 1.0 or less can be sufficiently agitated in the gas-liquid contact layer to easily wash water stains and the like adhering to the small cylindrical filler.
以下、この考案の一実施例を図について説明する。 第１図及び第２図はガス洗浄塔３全体を示したものであ
り、気液接触層４内に後述する小型円筒状充填材５が充
填されている。気液接触層４の下部にドレーン室６が設
けられ、ガス流入管７が気液接触層４の下部に接続され
ている。洗浄水流入管８と薬液流入管９とが接続された
洗浄用液流入管10が気液接触層４の上部に水平に配置さ
れ、この洗浄用液流入管10には洗浄用液を下向きのシャ
ワー状に流入する複数のノズル10aが設けられている。
なお、気液接触層４の上部はガス排出管11に接続されて
いる。 前記洗浄用液流入管10と共に空気洗浄設備12を構成する
空気流入管13は気液接触層４の下部に水平に配置されて
いる。この空気流入管13には空気を上向きに噴出する複
数のノズル13aが設けられていて、コンプレッサに接続
されている。 そして、気液接触層４の上部には洗浄用液のレベルスイ
ッチ14が設けられ、また、ドレーン室６にはオーバーフ
ロー管15と併設されたドレーン管16が接続されている。
なお、ガス流入管7,洗浄水流入管8,薬液流入管9,空気流
入管13,オーバーフロー管15及びドレーン管16にはそれ
ぞれガス流入手動弁V1，洗浄水弁V2，薬液弁V3，空気弁
V4，オーバーフロー弁V5及びドレーン弁V6が設けられて
おり、V2〜V6は空気作動弁または電動弁で構成されてい
る。 第３図は小型円筒状充填材５を示したものであり、合成
樹脂等で成形され、比重が1.0以下であり、空隙率が70
％以上であり、表面が波形に形成された小型円筒状に形
成されたものである。 次に動作について説明する。 まず、運転時には、第１図に示すように、ガス流入手動
弁V1を常時開とし、空気弁V4，オーバーフロー弁V5及び
ドレーン弁V6を閉とする。 そして、CO2を含む消化ガスの洗浄時であれば、その消
化ガスをガス流入管７から気液接触層４の下部に流入し
て、その消化ガスを気液接触層４内の小型円筒状充填材
５間を上向き流として上昇させる。これと共に、薬液弁
V3を閉としたままで、洗浄水弁V2を開として、洗浄水を
洗浄水流入管８及び洗浄用液流入管10を通して、複数の
ノズル10aから気液接触層４の上部に下向きのシャワー
状に流入する。 すると、洗浄水は気液接触層４内の小型円筒状充填材５
間を下降し、下方から上昇される消化ガスと接触して、
その消化ガス中のCO2や塵等が洗浄水に溶解されて除去
されるように洗浄される。 そして、洗浄されたガスはガス排出管11から排出され、
気液接触層４内を下降してドレーン室６内に溜まった洗
浄水は、タイマーによって制御されるオーバーフロー弁
V5の開動作によってオーバーフロー管15から排出され
る。なお、オーバーフロー管15の高さは流入ガス圧以上
に設定されている。 次に、臭気ガスの洗浄時であれば、その臭気ガスをガス
流入管７から気液接触室４の下部に流入すると共に、洗
浄水弁V2を閉としたままで薬液弁V3を開として、薬液を
洗浄用液流入管10から気液接触層４の上部に流入する。
そして、前述同様に、気液接触層４内で臭気ガスと薬液
とを接触させて、悪臭物質を除去する脱臭を行う。な
お、オーバーフロー管15から排出される薬液は薬液循環
タンクへ回収する。 ところで、小型円筒状充填材５は、比重が1.0以下であ
り、空隙率が70％以上であり、表面が波形に形成されて
いるので、消化ガスや臭気ガス等のガスと水や薬液等の
洗浄用液との接触を良好に行えるので、ガスの洗浄、脱
臭を効率良く行える。それでいて、小型円筒状充填材５
の表面及び内部には水垢や藻類が閉塞されにくい。 次に、気液接触層４内の空気洗浄動作を説明する。 まず、洗浄水によるガス洗浄後の空気洗浄時であれば、
第２図に示すように、ガス流入手動弁V1を閉とした後、
オーバーフロー弁V5を閉とする。 すると、洗浄用液流入管10から流入されている洗浄水が
気液接触層４内に溜められる。そして、その洗浄水が洗
浄水位Ｌに達して、レベルスイッチ14によって検出され
ると、洗浄水弁V2が閉となると同時に空気弁V4が開とな
り、コンプレッサからの圧縮空気が空気流入管13の複数
のノズル13aから気液接触層４の下部に上向きに噴出さ
れる。 すると、その圧縮空気は気液接触層４内を上向き流とな
って上昇し、比重が1.0以下である小型円筒状充填材５
を気液接触層４内で十分に攪拌して、その小型円筒状充
填材５に付着した水垢や藻類を簡単かつ確実に洗浄す
る。 この洗浄工程は、洗浄タイマー（30分タイマー等で20分
程度に設定）で設定され、洗浄タイマーアップとなる
と、待機タイマー（10分タイマー等で５分程度に設定）
に切り換えられて、洗浄された水垢や藻類がドレーン室
６に沈降する時間がとられる。そして、待機タイマーア
ップとなると、ドレーン弁V6が開となり、気液接触層４
及びドレーン室６内の洗浄水を水垢や藻類と共にドレー
ン管16から排出する。そして、タイマーで設定された洗
浄水の排出完了時間に達すると、ドレーン弁V6が閉とな
り、オーバーフロー弁V5が開となって、運転準備に入
る。 次に、薬液によるガス洗浄後の空気洗浄時であれば、ガ
ス流入手動弁V1を閉とした後、オーバーフロー弁V5を閉
とし、薬液弁V3を閉とすると共に洗浄水弁V2を開とす
る。 すると、気液接触層４内への薬液の流入が停止されると
共に、洗浄用液流入管10から気液接触層４内に洗浄水が
流入されて溜められる。 そして、この後は、前述した空気洗浄動作が全く同様に
行われる。 従って、このガス洗浄塔３によれば、気液接触層４内か
ら小型円筒状充填材５を取り出さなくても、小型円筒状
充填材５に付着した水垢や藻類を簡単に空気洗浄するこ
とができ、また、その空気洗浄回数も自由に設定するこ
とができる。An embodiment of the present invention will be described below with reference to the drawings. 1 and 2 show the entire gas cleaning tower 3, in which the gas-liquid contact layer 4 is filled with a small cylindrical filler 5 to be described later. A drain chamber 6 is provided below the gas-liquid contact layer 4, and a gas inflow pipe 7 is connected to the bottom of the gas-liquid contact layer 4. A cleaning liquid inflow pipe 10 in which the cleaning water inflow pipe 8 and the chemical liquid inflow pipe 9 are connected is horizontally arranged above the gas-liquid contact layer 4, and the cleaning liquid is introduced into the cleaning liquid inflow pipe 10 in a downward shower. A plurality of nozzles 10a that flow in a shape are provided.
The upper portion of the gas-liquid contact layer 4 is connected to the gas exhaust pipe 11. An air inflow pipe 13 which constitutes an air cleaning facility 12 together with the cleaning liquid inflow pipe 10 is horizontally arranged below the gas-liquid contact layer 4. The air inflow pipe 13 is provided with a plurality of nozzles 13a for ejecting air upward, and is connected to a compressor. A level switch 14 for the cleaning liquid is provided above the gas-liquid contact layer 4, and an overflow pipe 15 and a drain pipe 16 attached to the overflow pipe 15 are connected to the drain chamber 6.
The gas inflow pipe 7, the wash water inflow pipe 8, the chemical liquid inflow pipe 9, the air inflow pipe 13, the overflow pipe 15 and the drain pipe 16 are respectively connected to a gas inflow manual valve V 1 , a wash water valve V 2 , a chemical liquid valve V 3 , Air valve
V 4 , an overflow valve V 5 and a drain valve V 6 are provided, and V 2 to V 6 are air operated valves or motor operated valves. FIG. 3 shows a small cylindrical filler 5, which is molded of synthetic resin and has a specific gravity of 1.0 or less and a porosity of 70.
% Or more, and the surface is formed in a small cylindrical shape having a corrugated shape. Next, the operation will be described. First, during operation, as shown in FIG. 1, the gas inflow manual valve V 1 is normally opened, and the air valve V 4 , the overflow valve V 5, and the drain valve V 6 are closed. When the digestion gas containing CO 2 is being washed, the digestion gas is introduced from the gas inflow pipe 7 into the lower portion of the gas-liquid contact layer 4, and the digestion gas is injected into the gas-liquid contact layer 4 into a small cylindrical shape. The space between the fillers 5 is raised as an upward flow. Along with this, the chemical valve
With V 3 kept closed, the wash water valve V 2 is opened, and wash water is passed downward through the wash water inflow pipe 8 and the wash liquid inflow pipe 10 from the plurality of nozzles 10 a to the upper part of the gas-liquid contact layer 4 for showering downward. Flows in. Then, the cleaning water is supplied to the small cylindrical filler 5 in the gas-liquid contact layer 4.
Between the digestive gas that rises from below,
It is cleaned so that CO 2 and dust in the digested gas are dissolved and removed in the cleaning water. Then, the cleaned gas is discharged from the gas discharge pipe 11,
The wash water that descends in the gas-liquid contact layer 4 and collects in the drain chamber 6 is an overflow valve controlled by a timer.
It is discharged from the overflow pipe 15 by the opening operation of V 5 . The height of the overflow pipe 15 is set to be equal to or higher than the inflowing gas pressure. Next, when cleaning the odorous gas, the odorous gas is introduced from the gas inflow pipe 7 into the lower part of the gas-liquid contact chamber 4, and the chemical liquid valve V 3 is opened while the cleaning water valve V 2 is closed. As a result, the chemical liquid flows into the upper part of the gas-liquid contact layer 4 from the cleaning liquid inflow pipe 10.
Then, in the same manner as described above, the odorous gas and the chemical liquid are brought into contact with each other in the gas-liquid contact layer 4 to perform deodorization for removing the malodorous substance. The chemical liquid discharged from the overflow pipe 15 is collected in the chemical liquid circulation tank. By the way, the small cylindrical filler 5 has a specific gravity of 1.0 or less, a porosity of 70% or more, and a corrugated surface, so that gas such as digestive gas or odorous gas and water or chemical liquids can be used. Since good contact with the cleaning liquid can be performed, gas cleaning and deodorization can be efficiently performed. Nevertheless, the small cylindrical filler 5
Water stains and algae are hard to be blocked on the surface and inside. Next, the air cleaning operation in the gas-liquid contact layer 4 will be described. First, if you are cleaning the air after cleaning the gas with cleaning water,
As shown in FIG. 2, after closing the gas inflow manual valve V 1 ,
Close the overflow valve V 5 . Then, the cleaning water flowing from the cleaning liquid inflow pipe 10 is stored in the gas-liquid contact layer 4. When the wash water reaches the wash water level L and is detected by the level switch 14, the wash water valve V 2 is closed and the air valve V 4 is opened at the same time, so that the compressed air from the compressor is introduced into the air inflow pipe 13 It is jetted upward from the plurality of nozzles 13a to the lower part of the gas-liquid contact layer 4. Then, the compressed air rises as an upward flow in the gas-liquid contact layer 4, and the small cylindrical filler 5 having a specific gravity of 1.0 or less.
Is sufficiently agitated in the gas-liquid contact layer 4 to easily and surely wash the scales and algae adhering to the small cylindrical filler 5. This cleaning process is set with a cleaning timer (30 minutes timer etc. is set to about 20 minutes), and when the cleaning timer is up, a standby timer (10 minutes timer etc. is set to about 5 minutes)
After that, it takes time for the washed scale and algae to settle in the drain chamber 6. Then, when the waiting timer is up, the drain valve V 6 is opened and the gas-liquid contact layer 4 is opened.
Also, the wash water in the drain chamber 6 is discharged from the drain pipe 16 together with scales and algae. When the discharge completion time of the wash water set by the timer is reached, the drain valve V 6 is closed and the overflow valve V 5 is opened, and the operation preparation is started. Next, in the case of air cleaning after cleaning the gas with the chemical liquid, after closing the gas inflow manual valve V 1 , the overflow valve V 5 is closed, the chemical liquid valve V 3 is closed, and the cleaning water valve V 2 is closed. To open. Then, the inflow of the chemical liquid into the gas-liquid contact layer 4 is stopped, and the cleaning water flows into the gas-liquid contact layer 4 from the cleaning liquid inflow pipe 10 and is stored therein. Then, after this, the air cleaning operation described above is performed in exactly the same manner. Therefore, according to the gas cleaning tower 3, even if the small cylindrical filler 5 is not taken out from the gas-liquid contact layer 4, the scale and algae attached to the small cylindrical filler 5 can be easily cleaned with air. In addition, the number of times of air cleaning can be freely set.
以上のように、この考案によれば、ガスと洗浄用液との
接触を良好に行えるにも拘わらず、水垢等の閉塞が少な
い小型円筒状充填材を気液接触層に充填させ、気液接触
層内に洗浄用液を溜めた状態で上向き空気流によって空
気洗浄する空気洗浄設備を備えたので、運転時には、ガ
スと洗浄用液との接触を良好に行って、ガスの洗浄、脱
臭を効率良く行えるにも拘わらず、空気洗浄設備によっ
て、小型円筒状充填材を気液接触層内で効果的に洗浄す
ることができるので、気液接触層から小型円筒状充填材
を取り出さなくても、小型円筒状充填材に付着した水垢
等を簡単に洗浄することができる。また、その空気洗浄
作業が簡単であるから、その空気洗浄回数を自由にとれ
るという効果がある。As described above, according to the present invention, the gas-liquid contact layer is filled with a small cylindrical filler having less clogging such as scales, though the gas and the cleaning liquid can be well contacted with each other. An air cleaning facility was installed to clean the cleaning liquid in the contact layer with an upward air flow, so during operation, the gas and cleaning liquid should be in good contact to clean and deodorize the gas. Even though it can be efficiently done, the small-sized cylindrical filler can be effectively cleaned in the gas-liquid contact layer by the air cleaning equipment, so that the small-sized cylindrical filler does not have to be taken out from the gas-liquid contact layer. , It is possible to easily wash the scales and the like adhering to the small cylindrical filler. Further, since the air cleaning work is simple, there is an effect that the air cleaning can be freely performed.
第１図はこの考案の一実施例によるガス洗浄塔の運転時
の動作を示す概略的な断面図、第２図は同様に空気洗浄
時の動作を示す概略的な断面図、第３図は本考案の小型
円筒状充填材を示す斜視図、第４図及び第５図は従来の
充填材を示す斜視図である。 ３はガス洗浄塔、４は気液接触層、５は小型円筒状充填
材、７はガス流入管、10は洗浄用液流入管、12は空気洗
浄設備、13は空気流入管。FIG. 1 is a schematic sectional view showing the operation of the gas cleaning tower according to an embodiment of the present invention during operation, FIG. 2 is a schematic sectional view showing the operation during air cleaning, and FIG. FIG. 4 is a perspective view showing a small cylindrical filler of the present invention, and FIGS. 4 and 5 are perspective views showing a conventional filler. 3 is a gas cleaning tower, 4 is a gas-liquid contact layer, 5 is a small cylindrical packing material, 7 is a gas inflow pipe, 10 is a cleaning liquid inflow pipe, 12 is an air cleaning facility, and 13 is an air inflow pipe.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｂ０１Ｄ 53/77 Ｂ０１Ｊ 19/30 8822−4Ｇ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI technical display location B01D 53/77 B01J 19/30 8822-4G
Claims (1)
ようとするガスを上記気液接触層に下方から流入するガ
ス流入管と、洗浄用液を上記気液接触層に上方から流入
する洗浄用液流入管とを具備するガス洗浄塔において、
上記充填材を比重が1.0以下で、表面が波形に形成され
た小型円筒状充填材で構成し、上記気液接触層内に上記
洗浄用液を溜めた状態で、その気液接触層内を上向き空
気流によって空気洗浄する空気洗浄設備を具備させたこ
とを特徴とするガス洗浄塔。1. A gas-liquid contact layer filled with a filling material, a gas inflow pipe for flowing a gas to be cleaned into the gas-liquid contact layer from below, and a cleaning liquid into the gas-liquid contact layer from above. In a gas scrubbing tower having an inflowing cleaning liquid inflow pipe,
The specific gravity of the filling material is 1.0 or less, and the surface is formed in a corrugated small cylindrical filling material, the cleaning liquid is stored in the gas-liquid contact layer, in the gas-liquid contact layer A gas scrubbing tower comprising an air scrubbing facility for scrubbing air by an upward air flow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7174090U JPH0730114Y2 (en) | 1990-07-05 | 1990-07-05 | Gas washing tower |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7174090U JPH0730114Y2 (en) | 1990-07-05 | 1990-07-05 | Gas washing tower |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0430020U JPH0430020U (en) | 1992-03-11 |
| JPH0730114Y2 true JPH0730114Y2 (en) | 1995-07-12 |
Family
ID=31609046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7174090U Expired - Lifetime JPH0730114Y2 (en) | 1990-07-05 | 1990-07-05 | Gas washing tower |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0730114Y2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002079037A (en) * | 2000-09-08 | 2002-03-19 | Kurita Water Ind Ltd | Method for cleaning gas-liquid contact tower |
| JP3750648B2 (en) * | 2001-11-02 | 2006-03-01 | Ｊｆｅエンジニアリング株式会社 | Digestion gas desulfurization apparatus and desulfurization method |
| JP5326187B2 (en) * | 2006-03-31 | 2013-10-30 | 栗田工業株式会社 | Gas processing apparatus provided with gas pretreatment apparatus and cleaning method |
-
1990
- 1990-07-05 JP JP7174090U patent/JPH0730114Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0430020U (en) | 1992-03-11 |
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