JPH07296748A - Image display device and its manufacture - Google Patents

Abstract

PURPOSE:To stabilize an image quality so as to provide an image display device superior in its durability without reducing vacuum rate of the inside by arranging the second getter material in an exhaust pipe for vacuum exhausting the inside of a device in which the first getter material is arranged. CONSTITUTION:The inside of a phosphor display tube in which a face plate 108 having a phosphor member 110 and a back plate 101 having high-voltage application means 102, 103 are arranged opposedly each other is baked while being vacuum exhausted from an exhaust pipe 100. After the exhaust pipe 100 is heat melted and completely sealed, a getter material stored in a container 114 is heat evaporated and vacuum evaporated on the backing plate 101, etc., so as to hold vacuum in the inside of the pipe. In the above image display device, the second getter material is arranged in the exhaust pipe 100. This getter material is stored in a container 115 or vacuum evaporated on the inside wall of the exhaust pipe so as to be arranged. Generation of outgas in the case of sealing of the exhaust pipe is adsorbed by the getter material so as to prevent lowering of the vacuum rate in the pipe.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat image display device and a manufacturing method thereof, and more particularly to an image display device having a getter installed inside and a manufacturing method thereof.

[0002]

2. Description of the Related Art Conventionally, image display devices that mainly excite phosphors to emit light, such as a display device using a fluorescent display tube, a field emission type and a surface conduction type electron emission element as an image display device, are flat. It has the advantages of being bright and easy to see, and is positively applied and expected in industry.

A thin image display device which uses a surface conduction electron-emitting device as an electron beam generation source and accelerates an electron beam to irradiate a phosphor to emit light to display an image has been filed by the present applicant (special feature: Kaihei 3-261024, etc.).

3 and 4 are a sectional view and a perspective view of the image display device disclosed in the above publication. In FIGS. 3 and 4, reference numeral 300 denotes an exhaust pipe for exhausting the inside of the fluorescent display tube (the figure shows a state after sealing), 301 denotes a back plate made of soda-lime glass constituting an electron-emitting device, Reference numerals 302 and 303 denote electrodes arranged at a fixed interval, and 304 denotes electrodes 302 and 303.
A thin film including an electron emission portion provided therebetween, 306 is an electron passage hole, 307 is a grid, 308 is a metal back 309.
The face plate 311 made of soda-lime glass on which the phosphor 310 is formed is an outer frame, and 314 is a getter material container. The getter material container 314 is fixed to a getter material container fixing jig 313, and accommodates an evaporative getter material for a normal purpose of maintaining a vacuum inside the panel.
01 is vapor-deposited.

A method of manufacturing the image display device will be described with reference to FIGS. 3 and 4.

The inside of the airtight container is evacuated through an exhaust pipe 300, and after degassing by baking, a part of the exhaust pipe is heated to melt and sealed (blocked or cut). Finally, the getter material container 314, which is installed at one end inside the airtight container and in which the getter material for general purpose is housed, is heated, and the housed evaporation type getter material is replaced by the back plate 30.
The image display device is completed by vapor deposition on No. 1.

In general, a getter material container has a vaporized getter material containing Ba as a main component housed inside a partially opened metal tube, and has a linear or ring shape.

Usually, the getter material for the purpose is flashed by induction heating or electric heating to adhere the getter material to the inner surface of the image display device, adsorb gas, and maintain the vacuum in the panel.

On the other hand, in general, non-evaporable getters are Zr, V,
It is made of Fe alloy or the like, and has a gas adsorption ability and a vacuum maintaining function in the panel when heated to about 300 ° C. in vacuum.

Now, the surface conduction electron-emitting device will be described. FIG. 5 shows the schematic top view and cross-sectional view of the surface conduction electron-emitting device.

In the figure, 501 is a back plate made of an insulating material such as soda lime glass, 502 and 503 are electrodes that are installed with a certain gap, 504 is a thin film including an electron emitting portion, and 505 is an electron emitting portion. Is. In this case, the organic Pd (CCP423) is used as the thin film 504 including the electron emitting portion.
0 Okuno Seiyaku Co., Ltd.), and after baking, the electrode 502,
A voltage is applied between 503 to perform energization processing, and the electron emission unit 5
05 was formed.

The material of the thin film 504 including the electron emitting portion is Pd.
Not limited to only Ru, Ag, Au, Ti, In, C
Metals such as u, Cr, Fe, Zn, Sn, Ta, W and Pb, oxides such as PdO, SnO ₂ , In ₂ O ₃ , PbO and Sb ₂ O ₃ , HfB ₂ , ZrB ₂ , LaB ₆ , CeB. ₆ , YB
₄ , boride such as GdB ₄ , TiC, ZrC, HfC, Ta
Carbides such as C, SiC, WC, TiN, ZrN, HfN
Such as nitrides, semiconductors such as Si and Ge, carbon, AgM
It may be g, NiCu, Pb, Sn or the like.

Further, as a method of forming the thin film 504 including an electron emitting portion, a vacuum vapor deposition method, a sputtering method, a chemical vapor deposition method, a dispersion coating method, a dipping method, a spinner method or the like can be applied.
In short, it does not matter as long as a thin film can be formed.

Besides, as a thin film of the surface conduction electron-emitting device, one using a SnO ₂ film and one using an Au thin film [G. Dittmer: "Thin Solid Fi
lms ”, 9, 317 (1972)], In ₂ O ₃ / Sn
O ₂ thin film [M. Hartwell and
C. G. Fonstad: “IEEE Trans.E
DConf. , 519 (1975)], by carbon thin film [Hiraki Araki et al .: Vacuum, Vol. 26, No. 1, 2]
2 (1983)] and the like are reported.

In addition to the surface conduction electron-emitting device as an electron source, a thermionic electron source using a hot cathode, a field emission electron-emitting device (WP Dyke & WW Dolan, "F").
field emission ”, Advance in
Electron Physics, 8, 89 (19
56) and C.I. A. Spindt, "Physicalp
properties of thin-film fi
eld emission cathodes wit
h molbdenum cones ", J. App.
l. Phys. , 47, 5248 (1976)), metal / insulating layer / metal type electron-emitting device (CA Mead,
"The tunnel-emission ampl
ifier, J.M. Appl. Phys. , 32,646
(1961) etc. are known.

[0016]

However, the above-mentioned conventional method for manufacturing the image display device has the following problems.

That is, in the degassing step by baking of the above-mentioned conventional example, the baking temperature of the image display device including the exhaust pipe is such that baking is performed while exhausting.
As a matter of course, the temperature becomes lower than the heating temperature when the exhaust pipe is completely closed. Therefore, when closing the exhaust pipe,
New outgas is generated from the sealed part, and when the sealed part is melted and clogged, the outgas is not exhausted by a vacuum pump or the like and enters the image display device, and the degree of vacuum inside is reduced. The conventional image display device manufactured by such a manufacturing method has the following drawbacks due to a decrease in internal vacuum degree.

(1) Since the degree of vacuum inside the image display device is lowered, the withstand voltage of the high voltage applied between the face plate and the rear plate is lowered, and electric discharge or the like occurs inside the image display device. Deteriorates and is destroyed in the worst case. In particular, such a problem is remarkable in an extremely thin plane type image forming apparatus in which the face plate and the rear plate are close to each other, and in an image display apparatus in which a high voltage is applied to form a high brightness light emitting portion.

(2) Since the atmosphere inside the image display device changes, the drive start voltage of the device changes and the durability deteriorates.

These above-mentioned drawbacks are remarkable when the baking temperature of the image display device including the exhaust pipe in which more outgas is generated is low or when the exhaust pipe is thick.

The present invention has been made in view of the problems of the prior art as described above, and the degree of vacuum inside the image display device does not decrease, the image quality is stable,
An object is to realize an image display device having excellent durability and a method for manufacturing the same.

[0022]

The inventors of the present invention have made extensive studies as a result of solving the above-mentioned problems in the conventional method of manufacturing an image display device and achieving the object of the present invention. The method of manufacturing an image display device and the image display device provided by the present invention are as follows.

The image display device of the present invention comprises an image display member consisting of a fluorescent member and a high voltage applying means, a face plate, a rear plate, an exhaust pipe, and a first getter material. An image display device capable of maintaining a vacuum inside by baking while exhausting vacuum through a tube, and then having the second getter material formed on the inner wall of the exhaust tube. Is characterized by.

In this case, the second getter material may be a vapor-deposited getter material deposited in a getter material container arranged in the exhaust pipe.

The second getter material may be an activated non-evaporable getter material provided in advance on the inner wall of the exhaust pipe.

The method of manufacturing an image display device of the present invention comprises an image display member including a fluorescent member and a high voltage applying means, a face plate, a rear plate, an exhaust pipe, and a first getter material. A method of manufacturing an image display device, comprising: a first step of performing baking while vacuum exhausting through the exhaust pipe; a second step of forming a second getter material on an inner wall of the exhaust pipe; And a third step of closing the exhaust pipe in order to maintain the vacuum.

In this case, the second getter material in the second step may be formed by vapor-depositing the evaporation type getter material contained in the getter material container arranged in the exhaust pipe.

The second getter material in the second step may be formed by activating a non-evaporable getter material provided beforehand on the inner wall of the exhaust pipe.

[0029]

As described above, by forming the getter material on the inner wall of the exhaust pipe, it is possible to provide the image display device which solves the above-mentioned problems.

That is, by depositing a getter material on the inner wall of the exhaust pipe before the step of sealing the exhaust pipe, when the exhaust pipe is sealed, the sealing portion is melted and clogged and exhausted by a vacuum pump or the like. Outgas newly generated from the sealed portion when it disappears is not adsorbed by the getter material on the inner wall of the exhaust pipe, and the degree of vacuum inside the image display device is not lowered. Therefore, it is possible to solve the drawbacks of the conventional technique. Further, if it has an adsorbing ability, it also has a vacuum maintaining action which is usually the purpose.

The getter material can be formed by either evaporation type or non-evaporation type.

Hereinafter, an example of an embodiment in which the present invention is applied to a display device using a fluorescent display tube and a surface-conduction electron-emitting device will be described. The image display device using the present invention is provided through an exhaust pipe. The present invention is not limited to these image display devices as long as the exhaust pipe is closed after the airtight container is exhausted. ￣

[0033]

Embodiments of the present invention will now be described with reference to the drawings.

Example 1 As Example 1, an example in which a surface conduction electron-emitting device is used and applied to a thin image display device for accelerating an electron beam and irradiating a phosphor to emit light to display a plane image will be described. .

FIG. 1 is a sectional view of the image display device of this embodiment. In the figure, reference numeral 100 denotes an exhaust pipe for exhausting the inside of the image display device (the drawing shows a state after being completely sealed). Reference numeral 112 denotes a getter material container for depositing vapor on the inner wall of the exhaust pipe 100.
It is attached to 13. 101 is a back plate made of soda-lime glass that constitutes an electron-emitting device, and 102 and 1
Reference numeral 03 is an electrode placed at a constant interval, 104 is a thin film including an electron emitting portion, 106 is an electron passage hole, 107 is a grid, 108 is a metal back 109 and a phosphor 110.
Face plate made of soda lime glass with a
11 is an outer frame, 114 is a getter material container for general purpose (maintaining vacuum in the panel), and is a getter material container fixing jig 113.
It is fixed to.

A method of manufacturing the image display device of this embodiment will be described with reference to FIG.

The inside of the airtight container formed by the back plate 101, the face plate 108 and the outer frame 111 is evacuated through the exhaust pipe 100, and after degassing by baking is performed, the getter material is attached to the inner wall of the exhaust pipe 100. After the evaporation type getter material stored in the container 112 is vapor-deposited, a part of the exhaust pipe is heated and melted, and the exhaust pipe is completely sealed (blocked or cut).

In this embodiment, when the exhaust pipe is sealed, the evaporation type getter material stored in the getter material container 112 is deposited on the inner wall of the exhaust pipe 100. Outgas newly generated from the closed portion is adsorbed by the getter material deposited on the inner wall of the exhaust pipe. In this way, even if a new outgas is generated from the sealed portion when the sealed portion is melted, clogged, and cannot be exhausted by the vacuum pump or the like, the degree of vacuum inside the image display device is not lowered. Absent.

Finally, the getter material container 114 for general purpose installed at one end inside the airtight container is heated to deposit the getter material on the back plate 101 to complete the image display device.

As described above, it was possible to manufacture an image display device in which the degree of vacuum inside did not drop even if outgas was generated when the exhaust pipe was closed. This image display device
Even if a high voltage was applied between the back plate 101 and the face plate 108 to drive and operate, no discharge was caused and the durability was excellent.

Example 2 An example in which the present invention is applied to a fluorescent display tube will be described as Example 2.

FIG. 2 is a sectional view showing the structure of the image display device using the fluorescent display tube of this embodiment.

In FIG. 2, reference numeral 200 denotes an exhaust pipe for exhausting the inside of the fluorescent display tube (the drawing shows a state after being sealed), and 203 denotes Zr and V formed on the inner wall of the exhaust pipe 200 in advance. , A non-evaporable getter material composed of Fe3 alloy. Reference numeral 201 denotes a face plate made of a transparent substrate such as a glass plate serving as a display surface, and 202 denotes a cup-shaped back plate that is adhered to each other at the peripheral edge of the face plate 201. Face plate 201
Has an anode pattern 204 and a control grid 205
And a plurality of display portions composed of filaments 206 are arranged side by side, and the getter material container 214 for normal purpose (in-panel vacuum maintaining action) is the getter material container fixing jig 2.
It is fixed at 13. The filament 206 and the anode pattern 204 constitute a high voltage generating means, and the high voltage generating means is a fluorescent substance (not shown) provided corresponding to each of the control grid 205 and the anode electrode forming the anode pattern 204. ) Together with an image display member.

A method of manufacturing the image display device of this embodiment will be described with reference to FIG. The inside of the airtight container is evacuated through the exhaust pipe 200 by a vacuum pump or the like, and after degassing by baking, Z formed on the inner wall of the exhaust pipe 200.
Non-evaporable getter material 203 composed of r, V, and Fe three alloys
Is heated in vacuum at about 300 ° C. for 15 minutes to have a gas adsorbing ability, and then a part of the exhaust pipe is heated to melt and seal (block, cut).

In the present embodiment, a non-evaporable getter material is provided in the exhaust pipe, and the exhaust pipe itself has a gas adsorbing ability, so that outgas newly generated from the closed portion is vapor-deposited on the inner wall of the exhaust pipe. Adsorbed on the getter material. In this way, even if a new outgas is generated from the sealed portion when the sealed portion is melted, clogged, and cannot be exhausted by the vacuum pump or the like, the degree of vacuum inside the image display device is not lowered. Absent.

Finally, the general purpose getter material container 214 installed at one end inside the airtight container is heated to deposit the non-evaporable getter material, thereby completing the image display device.

As described above, it was possible to manufacture an image display device in which the degree of vacuum inside did not decrease even if outgas was generated when the exhaust pipe was closed. This image display device does not cause discharge like the first embodiment,
It also had excellent durability.

[0048]

Since the present invention is constructed as described above, it has the following effects.

According to the first aspect of the present invention, when the exhaust pipe is closed, even if the closed portion melts and is blocked and cannot be evacuated by a vacuum pump or the like, outgas newly begins to be generated from the closed portion. However, since the vacuum degree inside the image display device is not lowered by being adsorbed by the getter material on the inner wall of the exhaust pipe, it is possible to obtain an image display device having no electric discharge and excellent durability. There is.

An image display device having the above effects may be realized by either an evaporative getter material or a non-evaporable getter material as described in claims 2 and 3, respectively.

In the methods described in claims 4 to 6, the methods described in claims 1 to 3 can be produced.

[Brief description of drawings]

FIG. 1 is a diagram of an image display device according to an embodiment of the present invention.

FIG. 2 is a diagram of an image display device according to an embodiment of the present invention.

FIG. 3 is a diagram of a conventional image display device.

FIG. 4 is a diagram of a conventional image display device.

FIG. 5 is a diagram of an electron-emitting device.

[Explanation of symbols]

 100,200 Exhaust pipe 101,202 Back plate 102,103 Electrode 104 Thin film 106 Electron passage hole 107 Grid 108,201 Face plate 109 Metal back 110 Phosphor 111 Outer frame 112,114,214 Getter material container 113,115, 213 getter material container fixing jig 203 getter material 204 anode pattern 205 control grid 206 filament

Claims (6)

[Claims] 1. An image display member comprising a fluorescent member and a high voltage applying means, a face plate, a rear plate, an exhaust pipe, and a first getter material, and vacuum exhaust through the exhaust pipe. An image display device capable of maintaining an internal vacuum by sealing the exhaust pipe after baking is performed, wherein the image display has a second getter material formed on the inner wall of the exhaust pipe. apparatus. 2. The image display device according to claim 1, wherein the second getter material is vapor-deposited getter material contained in a getter material container arranged in the exhaust pipe. Image display device. 3. The image display device according to claim 1, wherein the second getter material is an activated non-evaporable getter material provided in advance on the inner wall of the exhaust pipe. Display device. 4. A method of manufacturing an image display device comprising an image display member including a fluorescent member and a high voltage applying means, a face plate, a rear plate, an exhaust pipe, and a first getter material. A first step in which baking is performed while vacuum exhausting through the exhaust pipe; a second step in which a second getter material is formed on an inner wall of the exhaust pipe; and the exhaust in order to maintain an internal vacuum. Third to seal the tube
And a step of manufacturing the image display device. 5. The method of manufacturing an image display device according to claim 4, wherein the second getter material in the second step is vaporized getter material contained in a getter material container arranged in the exhaust pipe. A method of manufacturing an image display device, comprising: 6. The manufacturing method according to claim 4, wherein the second getter material in the second step is formed by activating a non-evaporable getter material provided in advance on the inner wall of the exhaust pipe. A method for manufacturing an image display device, comprising: