JP3402780B2 - Image display device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [0001] BACKGROUND OF THE INVENTION 1. Field of the Invention
By colliding the electron beam with the phosphor in an airtight container,
An image display device for displaying an image using the generated light emission; and
It relates to the manufacturing method. [0002] 2. Description of the Related Art Plasma display devices are used in image display devices.
A, EL display device, image display device using electron beam, fluorescence
There is a display device, etc., and the need for larger screens, higher definition, and higher quality
The demands have increased, and each image display device has been developed. [0003] Here, a conventional image display device and its manufacture are described.
As an example of the fabrication method, an image display device using fluorescent display
I will explain. FIG. 7 shows an example of a conventional fluorescent display device.
FIG. 3A is a top view of the same, and FIG.
FIG. In FIG. 7, a substrate 101 is a glass plate or the like.
And a display surface on which an image is displayed. substrate
A cup-shaped lower plate 102 is provided on the periphery of the substrate 101.
The board 101 and the lower plate 102 are hermetically bonded at the edges.
Constitutes an airtight container. Inside this airtight container
And an anode pattern 106 is provided on the substrate 101.
I have. The surface of the anode pattern 106 is exposed to electron beam impact.
Is applied, and the charge of colliding electrons flows.
It is formed of a conductive material that leaves. Note that FIG.
As shown in the figure, a segment-shaped pattern
Turns. [0006] Then, the fan is opposed to the anode pattern 106.
The filament 104 is arranged. Filament 10
4 is a very thin line that does not interfere with the display
An electron beam source that emits electrons
You. Anode pattern 106 and filament 104
Control the electron emission from filament 104
Control grid 105 which is a reticulated control grid
Are arranged, and the filament 104 and the controller
Displayed by roll grid 105 and anode pattern 106
The unit 103 is configured. Further, inside the airtight container, a getter diffusion preventing
Getter separated from display unit 103 by stop plate 108
107 are arranged. The getter 107 is heated and diffused.
To form a vapor-deposited film of getter material in an airtight container.
This vapor deposition film absorbs the released gas in the hermetic container.
With a substance that has the function of maintaining the degree of vacuum in the airtight container
is there. The getter diffusion preventing plate 108 is a getter 1
07 is diffused on the display 103
To prevent adhesion, it is displayed as getter 107
It is arranged upright between the sections 103 and has a low
Fixed by melting glass. Note that this getter
-When the diffusion preventing plate 108 diffuses the getter,
In a position where the substance does not adhere to the display 103.
It is managed to be. The getter diffusion preventing plate 108 is set up.
One end of filament 104 is fixed at almost the center of the surface
And the getter 107 prevents this getter diffusion.
Spot welding is performed on the surface of the plate 108 opposite to the display 103.
Or it is fixed by means such as brazing. Next, an outline of a method of manufacturing a fluorescent display device will be described.
Explain. First, a plurality of display units 1 are placed on a substrate 101.
03, getter 107 and getter diffusion preventing plate 108
Place. Next, the lower plate 102 and the substrate 101 are overlapped.
Then, a low melting point glass or the like is applied to the overlapping portion. Soshi
Then, the entire apparatus is heated in an electric furnace, and the substrate 101 and the lower plate 1 are heated.
02 is fixed to form an airtight container. Then airtight
Vacuum pump through the exhaust pipe (not shown)
Perform more vacuum evacuation. Next, heat the hot plate etc.
The entire apparatus is heated and degassed by means. Finally
The exhaust pipe is connected to a gas burner while
The airtight container is sealed by heating and welding. The fluorescent display device is formed as described above.
I have. The substrate 101 constituting the airtight container,
For plate 102, withstand atmospheric pressure and maintain vacuum atmosphere
Between the filament 104 and the anode pattern 106
With enough insulation to withstand high voltage applied to
It is desirable to use Here, there is no particular problem in strength.
The airtight container is composed only of the substrate 101 and the lower plate 102.
Although the explanation is made using an example, the outer frame surrounding the outer circumference and
Two plates (faces)
The airtight container is composed of
Some have been made. [0018] [Problems to be solved by the invention]
With the conventional image display device as described above, the following problems
There are points. (1) Getter substance in the image display device
When diffused, getter material diffused from the getter
If adhered on the display, etc., the characteristics of the display may deteriorate or become unstable.
To prevent diffusion between the display and the getter.
A plate is provided. However, installation of getter diffusion prevention plate
The number of parts and the number of parts
turn into. (2) The getter diffusion preventing plate is a getter
To prevent substances from adhering on the display,
It is located between them. This getter diffusion prevention plate and getter
Because the target is placed in one corner of the substrate, the getter diffusion prevention plate
In addition, a space for disposing the getter is required. Therefore,
Display between the diffusion prevention plate and the outer frame
And the effective display area is reduced. In other words,
The screen area becomes smaller and more space is wasted.
You. (3) The getter diffusion preventing plate is
Is fixed with a low melting point glass between
Prevents getter diffusion when the temperature of the image display increases due to heating
The viscosity of the low-melting glass applied to the stop plate decreases,
Glass may flow into the display or getter diffusion prevention plate
It may cause misalignment. No getter diffusion prevention plate
When the getter is spread, it is spread from the getter.
The getter material adheres to the display unit or the like. this
These factors cause deterioration of display characteristics and cause instability.
This leads to a decrease in fabrication yield. The present invention has the prior art as described above.
This was done to solve the problem
Reduced number, shortened manufacturing process, and improved manufacturing yield
Image display that eliminates wasted space on the screen at the same time
It is to provide a device. [0023] [MEANS FOR SOLVING THE PROBLEMS] To achieve the above object
An image display device according to the present invention includes an electron source that generates an electron beam.
A back plate provided with the electron source
Phosphor that emits light by collision of electron beam is provided
And is arranged to face the back plate via an outer frame.
In this way, the airtight container whose inside is
Face play composed with the pute and the outer frame
To maintain the degree of vacuum in the airtight container.
Image display device having a getter diffused in a tight container
In the above, the getter is formed inside the outer frame.
The getter storage section, and the outer frame
Communication means for communicating between the container housing and the airtight container is formed.
Being doneThe communication means includes the back plate and
Formed on the face plate side of the face plate
Notched cutoutIt is characterized by the following. [0024] [0025] The image display device constructed and manufactured as described above.
In such a case, the getter communicates with the inside of the hermetic container through the communication means.
Since it is stored in the getter storage section that passes through,
During the diffusion of the substance, the getter substance is
It is diffused to a predetermined part in the airtight container through the communication means.
You. This regulates where the getter material diffuses.
The need for a getter diffusion prevention plate is eliminated. The getter storage section is formed inside the outer frame.
Getter and getter in an airtight container
There is no need to place a diffusion prevention plate, and the space can be imaged
It can be a display unit. Further, a getter is formed inside the outer frame.
Positioning the getter by placing it in the
This eliminates the need to strictly control [0028] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An image display device using an electron beam has, for example,
The vacuum volume sandwiched between the face plate and the back plate
An electron source for generating an electron beam in a vessel;
Uses a surface conduction electron-emitting device for the electron beam.
Accelerate and irradiate the phosphor, emit light and display the image
A thin image display device has been filed by the present applicant.
Kaihei 3-261024). Here, the present invention relates to the above surface
Example applied to an image display device using a conduction electron-emitting device
Will be described. (First)referenceExample) FIG. 1 shows a first embodiment of the image display device of the present invention.referenceBreak part of example
FIG. FIG. 2 shows the image display device shown in FIG.
FIG. 3 is an enlarged view of a main part of FIG.
Plane showing an example of a mask used when forming a thin film
FIG. In FIGS. 1 and 2, an electron beam is emitted.
A plurality of surface conduction electron-emitting devices 4 as generated electron sources
Is formed on the back plate 1 and the electron-emitting device 4.
A face play that displays an image by acting on the emitted electrons
And the sheet 7 are arranged to face each other with the outer frame 11 interposed therebetween.
You. Back plate 1 and outer frame 11 and face play
7 and the outer frame 11 are hermetically bonded with low melting glass.
(Sealing), the back plate 1, the outer frame 11 and
The face plate 7 constitutes an airtight container. An insulating material (not shown) is formed on the electron-emitting device 4.
A grid 6 is provided through the gap. This grid 6
Is a modulation for controlling electrons emitted from the electron-emitting device 4.
Electrodes, controlled electrons provided on grid 6
It reaches the face plate 7 through the electron passage hole 5. The face plate 7 has fluorescent light on its inner surface.
The body 8 and the metal back 9 which is an accelerating electrode are formed
And the collision of the electrons emitted from the electron-emitting device 4
An image is displayed when the phosphor 8 emits light. On the other hand, a getter 12 is housed in the outer frame 11.
The getter storage section 13 is formed, and the getter storage section 13 is formed.
13 and the inside of the airtight container are slits 1 as communication means.
6 communicates. This slit 16 is a getter
-12 is necessary to diffuse and degas inside the hermetic container.
The volume is sufficiently filled, and the electron-emitting device 4 and the getter
Because of the relationship between the storage section and the angle of the slit 16, the getter 12
Is not diffused to the electron-emitting device 4 etc.
It is designed to be BookreferenceIn the example, getters are
12 are arranged, and their positions and numbers are
As many as necessary for the diffusion of
be able to. In the above configuration, first,
FIG. 4 shows a typical device configuration of a surface conduction electron-emitting device.
This will be explained in consideration. In FIG. 4, an insulating substrate 21 has
A pair of device electrodes 23 and 23a are arranged, and between the device electrodes.
Metal oxide thin film formed by sputtering
A thin film 22 for forming an electron-emitting portion is formed.
You. The thin film 22 for forming an electron emission portion has a forming
The electron emission portion 24 is formed by an energization process called
I have. Forming refers to the thin film 22 for forming the electron-emitting portion.
Voltage is applied to both ends of the thin film 22 to form an electron emitting portion.
Cause local destruction, deformation or alteration, and
Forming an electron emitting portion 24, which is a region in a resistant state.
And In the electron emitting section 24, the electron emitting section is formed.
Cracks occur in a part of the thin film 22 for use,
Child release is taking place. Hereinafter, the electrons formed by the forming method will be described.
The thin film 22 for forming an electron emission portion including the emission portion 24 is
It is called the thin film including the protrusion. Table subjected to the forming process
The surface conduction electron-emitting device is a thin film including the above-described electron-emitting portion.
And apply a current between the device electrodes 23 and 23a.
As a result, electrons are emitted from the above-described electron emitting portion 24.
You. Electrons in the thin film including the above-described electron emitting portion
The discharge part 24 is a conductive fine particle having a particle size of several tens angstroms.
And the thin film other than the electron emission portion 24 is made of a fine particle film.
Become. In addition, the fine particle film described here is
The aggregated film has a fine structure in which fine particles are individually separated.
Fine particles are adjacent to each other, not only in the dispersed state
Or it refers to a film in an overlapping state (including an island shape). A specific example of a thin film including the electron emitting portion 24 will be described.
Pd, Ru, Ag, Au, Ti, In, C
gold such as u, Cr, Fe, Zn, Sn, Ta, W, Pb
Genus, PdO, SnO_Two , In_Two O_Three , PbO, Sb_Two O
_Three Oxides such as HfB_Two , ZrB _Two , LaB₆ , CeB
₆ , YB_Four , GdB_Four Boride such as TiC, ZrC, H
Carbides such as fC, TaC, SiC, WC, TiN, Zr
Nitride such as N and HfN, semiconductor such as Si and Ge, carbohydrate
, AgMg, NiCu, Pb, Sn and the like. In addition,
Among them, SnO_Two Using film, Au thin film
[G. Dittmer: "Thin Solid Films", 9,317 (1972)],
In_TwoO_Three/ SnO_ThreeBy thin film [M. Hartwell and
C.G.Fonstad: "IEEE Trans. ED Conf.", 519 (1975)]
By carbon thin film [Hisashi Araki et al .: Vacuum, Vol. 26,
No. 1, p. 22 (1983)] etc. are reported in detail.
You. Next, PdO was used as the electron-emitting device 4.
An example in which an image display device is manufactured will be described below. First, a lift-off method is applied on the back plate 1.
As a result, the element electrode interval L1 (see FIG. 3) is 2 μm,
Sub electrode width W1 (see FIG. 3) is 400 μm, thickness 1000
Angstrom Au element electrodes 3 and 3a are formed.
You. Next, add an organic Pd solution (CCP4230 Okuno Pharmaceutical Co., Ltd.)
About 30 minutes at about 300 ° C.
Heat and bake. Then, as shown in FIG.
A pair of device electrodes 3 positioned at intervals of the pole interval L1,
Using a mask 20 having an opening 20a that straddles 3a.
Apply a resist pattern, etch,
280 μm wide and 30 μm wide thin film for electron emission part formation
To make. Through these steps, the surface conduction electron-emitting device
600 × 400 pieces are manufactured on the same glass substrate. What
In addition, the thin film for forming the electron-emitting portion is formed by vacuum evaporation,
Putter method, chemical vapor deposition method, dispersion coating method, dipping
Can be formed by any of the
Wear. Next, fabrication of the surface conduction type electron-emitting device 4
Later, for electrical connection with the outside,
An Au wiring having a thickness of 1 μm is formed by using the above process. As an insulating material, for example, SiO 2_Two Membrane
Approximately 10μm formed by sputtering etc.
Etch metal such as Au, Al, Cu etc. on top
To form the electron passing holes 5 and the grid 6. Also, the face plate 7 of the image display device
The phosphor 8 is applied in advance to the inner surface of the
Form a metal back 9 with conductivity on the surface of phosphor 8
Be completed. Then, the face plate 7 and the slot
The outer frame 11 having the unit 16 and the back plate 1
The low melting glass 15
(LS-3081 manufactured by NEC Glass Co., Ltd.)
The getter 12 is arranged in the getter storage part 13 in the frame 11
Keep it. Next, a back-up is carried out so as to sandwich the outer frame 11.
Rate 1 and face plate 7 facing each other
And a container that can heat the entire device while fixing it with a jig etc.
Placed in an electric furnace (not shown) equipped with
Heat in the range of ° C. Then slowly cool to room temperature
And remove the image display device from the electric furnace. As described above, the face plate 7
Back plate 1 and outer frame 11 are attached to low melting point glass 15
Therefore, it is fixed and sealed, and it is strong without vacuum leakage.
A good junction can be obtained. Incidentally, the back plate, the outer frame and the
The sealing material that seals the base plate and the outer frame
Rate 1 and face plate 7 are hermetically sealed via outer frame
Any material that can be made
No problem. In particular, to give a specific example, amorphous
Low melting glass, crystalline low melting glass, etc.
Mix them with organic solvents or use nitrocellulose
Binder and an organic solvent that dissolves the binder
It may be mixed and prepared into a paste. Less
Both must be sticky at the application temperature of the sealing material.
Is desirable. The sealing material can be applied by spraying,
What kind of method, such as the injection method by the Pencer method,
The desired sealing material can be applied to the sealing material storage
I just need. Next, the exhaust pipe attached to the image display device
(Not shown), the inside of the airtight container is
^-6Evacuate to below Torr. Then, through the wiring
A voltage of several volts to several tens of volts is applied between the device electrodes to form
An electron emission portion is formed by performing an energization process called “emission”. Subsequently, a main image is formed on a hot plate or the like.
The display is heated at about 130 ° C. and degassed. Then, while appropriately diffusing the getter 12,
Heat the exhaust pipe (not shown) of the image display device with a gas burner
Then, the hermetic container is sealed by welding. The outer frame 11 has a getter storage section 13
Open a slit-shaped gap into the airtight container.
The getter diffuses to a predetermined location inside the airtight container.
Then, a deposited film made of a getter material is formed. This steam
Outgassing inside the hermetic container is adsorbed by the deposition, and the hermetic capacity
The degree of vacuum in the vessel is maintained. As described above, the getter is attached to the outer frame 11.
-The storage section 13 is formed, and the getter storage section 13
And the getter storage unit 13
Forming a slit 16 communicating with the inside of the airtight container
To expand the getters that regulate where the getter material diffuses.
Do not use the getter material in the airtight container
Can be diffused to the site. The result
As a result, the use of getter diffusion prevention plates
The number is reduced and the manufacturing process is shortened. Also getter
-By not using a diffusion prevention plate, a getter diffusion prevention plate
Problems caused by, for example, misalignment of getter diffusion prevention plate
And the yield improved. Further, the getter 12 is a getter of the outer frame 11.
-Since it is stored in the storage unit 13, there is space in the device.
To increase the image area of the entire device
be able to. Further, a getter storage section 13 is provided on the outer frame 11.
This allows you to manage the getter without strictly controlling the getter position.
Productivity can be easily determined.
Improved. (Example) FIG. 5 shows the image display device of the present invention.ExampleIt is a perspective view of. In this embodiment, as shown in FIG.
1 means for communication between the getter storage section 33 and the inside of the airtight container
As the notch 37 on the face plate side
Is the firstreferenceDifferent from the example. Other configurations and manufacturing methods
Is the firstreferenceThe description is omitted because it is the same as the example. In such a configuration, one of the outer frames 31
The getter 32 is diffused
When the getter material is an electron source
Is less likely to adhere to the surface. Also, the strength of the outer frame
Also increases. (No.2 referencesExample) FIG. 6 shows a second embodiment of the image display device of the present invention.2 referencesFIG.
FIG. 3A is a perspective view of the same, and FIG.
It is sectional drawing. BookreferenceIn the example, as shown in FIG.
1 for communicating with the getter storage section 43 and the inside of the airtight container
The point of having a hollow 48 is the firstreferenceDifferent from the example
Become. Other configurations and manufacturing methods are the firstreferenceSame as the example
Therefore, the description is omitted. In such a configuration, the hollow 4
8 is not limited to a cylinder as shown in FIG.
Characteristics of getter 42 and size of airtight container
The getter substance can be set freely according to the shape,
The best shape and size that does not adhere to the output element
Electron-emitting devices whose getter substance is an electron source
To become less adherent. In addition, the hollow 48
Is a shape excluding a part of the outer frame.
It becomes. The bookreferenceIn the example, the getter storage section 43
Has one hollow 48 for one
However, the number of the hollow 48 is not limited to one, and may be any number.
No. By the way, each of the aboveReference examples andExample
Then, I think of a ring getter for high frequency heating as a getter.
It was explained that it is limited to the high frequency heating getter.
The getter is diffused by applying a current with a linear getter.
Type of getter.
It may be a tar. As a method for heating the image display device, an electric
Although the explanation is made using a furnace, it is not particularly limited to this.
Rather, the image display device is not
Any material can be used as long as it can be heated for a certain period of time. The electron source is a surface conduction type electron emission device.
In addition to the output element, thermionic electron source using a hot cathode, field emission
Type electron-emitting device (W.P.Dyke & W.W.Dolan, "Field emissi
on ", Advance in Electoron Physics, 8, 89 (1956) and C.A.S.
pindt, "Physical properties of thin-film field emiss
ion cathodes with molybdenum cones ", J. Appl. Phys., 4
7,5248 (1976) etc.) or metal / insulating layer / metal type
Element (C.A.Mead, "The tunnel-emission amplifie
r, J. Appl. Phys., 32, 648 (1961), etc.)
You. The present invention relates to the above-mentioned surface conduction electron-emitting device.
Is limited to image display devices that use
No, the above thermionic sources, field emission electron-emitting devices, metal
/ Insulation layer / Image display using metal-type electron-emitting device as electron source
Devices, such as plasma displays, fluorescent displays, etc.
The display is composed of an airtight container, and the inside is evacuated.
Other display devices and recording devices
It is effective. [0068] The present invention is configured as described above.
Therefore, the following effects can be obtained. [0069]GetIn the getter storage section of the outer frame
Communication means for communicating between the getter storage part and the inside of the airtight container
By eliminating the need for a getter diffusion prevention plate
Thus, the number of parts was reduced, and the manufacturing process was shortened. Further, a problem caused by the getter diffusion preventing plate.
Point, for example, the displacement of the getter diffusion prevention plate
As a result, the yield has improved. Further, the getter is a getter storage section of the outer frame.
To increase the image area for the entire device.
can do. Also, a getter storage section is provided on the outer frame
This eliminates the need to strictly control the getter position
Productivity. [0072] [0073]Also,It ’s a form that only removes part of the outer frame
Then, when the getter is diffused, the getter substance becomes an electron source
The possibility of adhesion is further reduced. Also, the strength of the outer frame
growing. [0074] [0075]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a partially broken perspective view of a first reference example of an image display device of the present invention. FIG. 2 is an enlarged view of a main part of the image display device shown in FIG. FIG. 3 is a plan view showing an example of a mask used when forming a thin film for forming an electron-emitting portion. 4A and 4B are diagrams showing a typical device configuration of a surface conduction electron-emitting device, wherein FIG. 4A is a plan view thereof, and FIG. 4B is a sectional view taken along line AA ′. FIG. 5 is a perspective view of an embodiment of the image display device of the present invention. FIGS. 6A and 6B are views showing a second reference example of the image display device of the present invention, wherein FIG. 6A is a perspective view thereof, and FIG.
FIG. 3 is a sectional view taken along line A ′. FIGS. 7A and 7B are views showing an example of a conventional image display device, wherein FIG. 7A is a top view and FIG. 7B is a cross-sectional view. [Description of Signs] 1 Back plate 3, 3a, 23, 23a Device electrode 4, 34 Electron emission device 5 Electron passage hole 6 Grid 7 Face plate 8 Phosphor 9 Metal back 11, 31, 41 Outer frames 12, 32, 42 Getters 13, 33, 43 Getter storage unit 15 Low melting point glass 16 Slit 20 Mask 20a Opening 21 Insulating substrate 22 Thin film (thin film for forming electron emission unit) 24 Electron emission unit 37 Notch 48 Hollow hole

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Claims (1)

(57) Claims 1. A back plate provided with an electron source that generates an electron beam, and a phosphor that emits light when the electron beam generated by the electron source collides are provided, By being arranged opposite to the back plate via an outer frame,
An image display device comprising: a face plate that constitutes an airtight container having a vacuum inside together with the backput and the outer frame; and a getter that is diffused into the airtight container to maintain a degree of vacuum in the airtight container. in the getter is accommodated in the getter housing portion formed in the interior of the outer frame, the outer frame is communication means for communicating the formation of the hermetic container and the getter housing portion, the communicating means
Is one of the back plate and the face plate.
An image display device comprising a notch formed on the side of a base plate .