JPH0729386B2 - Optical disc master manufacturing method - Google Patents
Optical disc master manufacturing methodInfo
- Publication number
- JPH0729386B2 JPH0729386B2 JP28172488A JP28172488A JPH0729386B2 JP H0729386 B2 JPH0729386 B2 JP H0729386B2 JP 28172488 A JP28172488 A JP 28172488A JP 28172488 A JP28172488 A JP 28172488A JP H0729386 B2 JPH0729386 B2 JP H0729386B2
- Authority
- JP
- Japan
- Prior art keywords
- master
- manufacturing
- optical disc
- optical disk
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Manufacturing Optical Record Carriers (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、S/N比の高い高密度光ディスク原盤を安価に
製造する方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inexpensively manufacturing a high density optical disc master having a high S / N ratio.
従来の技術 光ディスクの高密度化に伴い、トラックピッチは狭くな
り隣接トラック間のクロストーク改善のため周に沿った
溝加工がなされている。2. Description of the Related Art As the density of optical discs has increased, the track pitch has become narrower and grooves have been formed along the circumference to improve crosstalk between adjacent tracks.
中でもＶ溝を有する光ディスクは１μｍピッチのトラッ
ク密度を可能とする技術である。またＶ溝の場合、光デ
ィスク原盤での溝加工が精密機械加工で可能なため、安
価な製造が可能である。Above all, an optical disk having a V groove is a technology that enables a track density of 1 μm pitch. Further, in the case of the V groove, since the groove processing on the optical disk master can be performed by precision machining, it can be manufactured at low cost.
発明が解決しようとする課題 光ディスク原盤に対し精密機械加工を可能とならしめる
には、原盤の内少なくともその表面は加工し易い材質で
出来ていなければならない。しかしそのような金属は高
価な金を除くと酸化の影響を受け易いものである。すな
わち表面が酸化された光ディスク原盤は表面性が悪く荒
れており、それから製造された光ディスクは大変ノイズ
レベルが高いものとなっていた。DISCLOSURE OF THE INVENTION PROBLEM TO BE SOLVED BY THE INVENTION In order to enable precision machining of an optical disk master, at least the surface of the master must be made of a material that can be easily processed. However, such metals are susceptible to oxidation except for expensive gold. That is, the surface of the optical disk master whose surface was oxidized was poor and the surface was rough, and the optical disk manufactured from it had a very high noise level.
本発明は、従来のこの様な課題を解決した、光ディスク
原盤の製造方法を提供することを目的とする。It is an object of the present invention to provide a method for manufacturing an optical disc master, which solves the above-mentioned conventional problems.
課題を解決するための手段 本発明は、精密機械加工を用いて表面に微細構造が形成
されている光ディスク原盤の製造方法において、原盤表
面を還元処理する工程を含ませる。Means for Solving the Problems The present invention includes a step of reducing the master disk surface in a method for manufacturing an optical disk master disk having a fine structure formed on the surface using precision machining.
作用 光ディスク原盤表面を還元処理することにより、酸化し
ていた原盤表面を元の金属に還元し平滑とすることが可
能となる。Action By reducing the surface of the optical disk master, the oxidized master surface can be reduced to the original metal and smoothed.
実施例 以下に、本発明の実施例を図面に基づいて説明する。Embodiment An embodiment of the present invention will be described below with reference to the drawings.
図は、本発明の光ディスク原盤の製造方法を説明するた
めの、製造プロセスを示す工程図である。工程１は銅メ
ッキ、２は平面研削加工、３はＶ溝カッティング、４は
フォトレジスト塗布、５はレーザーカッティングでレジ
スト内にピットを形成、６は現像、７はドライエッチン
グでピットを銅原盤表面に彫り込み、８はアセトンによ
るレジスト洗浄、９は酸素アッシングで残留レジストを
除去、10が還元処理で、11がインジェクションによる光
ディスク製造工程である。The drawings are process diagrams showing a manufacturing process for explaining a method for manufacturing an optical disc master according to the present invention. Step 1 is copper plating, 2 is surface grinding, 3 is V groove cutting, 4 is photoresist coating, 5 is laser cutting to form pits in the resist, 6 is development, and 7 is dry etching to form pits on the copper master surface. Engraving with, 8 is a resist cleaning with acetone, 9 is a residual resist by oxygen ashing, 10 is a reduction process, and 11 is an optical disk manufacturing process by injection.
工程１としては銅メッキ以外の材料も可能である。しか
し工程３でのＶ溝カッティングが精密切削加工ゆえ原盤
表面の材質としては銅以下の硬度しか持たない柔らかい
材料でなくてはならず、請求項３に挙げた材料（即ち、
金属がCu、In、Sn、アルカリまたはアルカリ土類金属）
と他には金しか考えられない。どの材料でもＶ溝カッテ
ィングは可能であるが、金を用いると安価な高密度光デ
ィスク原盤の特徴が失われるので本発明にはそぐわな
い。In step 1, materials other than copper plating are possible. However, since the V-groove cutting in the step 3 is a precision cutting process, the material of the master surface must be a soft material having a hardness equal to or lower than that of copper.
(The metal is Cu, In, Sn, alkali or alkaline earth metal)
And I can only think about money. Although any material can be used for V-groove cutting, the use of gold loses the characteristics of an inexpensive high-density optical disc master, which is not suitable for the present invention.
工程３で上記の低硬度金属で出来た光ディスク原盤表面
に精密機械加工を行うが、トラッキング用の溝加工とし
てはトラック幅１μｍのＶ溝カッティングが最も優れて
いる。またＶ溝カッティングには単純なダイヤモンドバ
イトで済むため安価に量産が可能である。In step 3, the surface of the optical disk master made of the above-mentioned low hardness metal is subjected to precision machining, and V groove cutting with a track width of 1 μm is the best as groove processing for tracking. Further, since a simple diamond cutting tool is sufficient for V-groove cutting, mass production is possible at low cost.
上記Ｖ溝光ディスク原盤作製での工程４〜９は再生専用
高密度光ディスク原盤作製のためのプロセスである。中
でも工程９の酸素アッシングは原盤表面の金属を強制酸
化し、特に請求項３に挙げた金属では酸化の影響を受け
易く原盤表面に酸化膜を張り表面粗度が粗くなってしま
う。Steps 4 to 9 in the production of the V-groove optical disc master are processes for producing the read-only high-density optical disc master. Among them, the oxygen ashing in the step 9 forcibly oxidizes the metal on the surface of the master, and particularly the metal recited in claim 3 is easily affected by the oxidation, and an oxide film is formed on the surface of the master to roughen the surface roughness.
記録膜をその上に形成する光ディスク用の原盤では工程
４〜９は含まれないが、工程11でディスクを作製するま
でに原盤表面に薄いながらも酸化膜が張り同じく表面粗
度が粗くなってしまう。A master for an optical disc on which a recording film is formed does not include steps 4 to 9, but by the time the disc is manufactured in step 11, a thin oxide film is formed on the surface of the master and the surface roughness becomes rough. I will end up.
ところが本発明の製造方法であるところの原盤表面還元
処理を用いると上記酸化膜が還元された元の金属に戻り
表面粗度も同じく平滑になる。すなわち本発明により得
られた原盤を用いて製造された光ディスクは表面性が平
滑に保たれるため再生ノイズが大変低く、特に再生専用
光ディスクでは3dB以上ノイズが抑えられた。However, when the master surface reduction treatment, which is the manufacturing method of the present invention, is used, the oxide film is restored to the original metal, and the surface roughness is also smoothed. That is, since the surface properties of the optical disc manufactured using the master disc obtained by the present invention are kept smooth, the reproduction noise is very low, and particularly in the reproduction-only optical disc, the noise is suppressed by 3 dB or more.
還元処理の中では還元性気体を用いたプラズマ処理が最
も効果的であり、安定して上記の3dBのノイズ抑制が達
成できた。しかし還元性気体として水素ガス以外のガス
を用いるとプラズマ処理時に原盤表面がスパッタされて
ピット端の弛れをおこし再生出力が1dB程度下がりがち
であった。そこでスパッタレートの小さい水素ガスを採
用することによりこの再生出力減少をなくすことが可能
となった。Among the reduction treatments, the plasma treatment using a reducing gas is the most effective, and the noise suppression of 3dB mentioned above could be stably achieved. However, when a gas other than hydrogen gas was used as the reducing gas, the master surface was sputtered during plasma processing and the pit edge was slackened, and the reproduction output tended to decrease by about 1 dB. Therefore, it was possible to eliminate this reduction in reproduction output by using hydrogen gas with a low sputter rate.
発明の効果 以上述べたように、本発明は、光ディスク原盤表面を還
元処理することにより、酸化していた原盤表面を元の金
属に還元し平滑とすることが可能となる。本発明で得ら
れた原盤を用いて製造された光ディスクは再生ノイズが
低く抑えられる。EFFECTS OF THE INVENTION As described above, according to the present invention, by reducing the surface of the optical disc master, the oxidized master surface can be reduced to the original metal and smoothed. The reproduction noise of the optical disc manufactured using the master disc obtained in the present invention can be suppressed low.
図は、本発明の光ディスク原盤の製造方法の工程を示す
工程図である。 １……銅メッキ工程、２……平面研削加工工程、３……
Ｖ溝カッティング工程、４……フォトレジスト塗布工
程、５……レーザーカッティング工程、６……現像工
程、７……ドライエッチング工程、８……アセトンによ
るレジスト洗浄工程、９……酸素アッシング工程、10…
…本発明による還元処理工程、11……インジェクション
工程The drawings are process drawings showing the steps of the method for manufacturing an optical disk master according to the present invention. 1 ... Copper plating process, 2 ... Surface grinding process, 3 ...
V-groove cutting process, 4 ... Photoresist coating process, 5 ... Laser cutting process, 6 ... Development process, 7 ... Dry etching process, 8 ... Acetone resist cleaning process, 9 ... Oxygen ashing process, 10 …
… Reduction treatment process according to the present invention, 11 …… Injection process
Claims (6)
成されている光ディスク原盤の製造方法において、原盤
表面を還元処理する工程が含まれていることを特徴とす
る光ディスク原盤の製造方法。1. A method for manufacturing an optical disk master, which comprises a step of reducing the surface of the master disk, which is included in a method for manufacturing an optical disk master having a fine structure formed by precision machining.
銅以下の硬度を有する金属またはその合金で出来ている
ことを特徴とする請求項１記載の光ディスク原盤の製造
方法。2. The method of manufacturing an optical disc master according to claim 1, wherein at least the surface of the optical disc master is made of a metal having a hardness not higher than that of copper or an alloy thereof.
リ土類金属であることを特徴とする請求項２記載の光デ
ィスク原盤の製造方法。3. The method of manufacturing an optical disk master according to claim 2, wherein the metal is Cu, In, Sn, an alkali or an alkaline earth metal.
理であることを特徴とする請求項１記載の光ディスク原
盤の製造方法。4. The method of manufacturing an optical disc master according to claim 1, wherein the reduction treatment is a plasma treatment using a reducing gas.
が水素ガスであることを特徴とする請求項４記載の光デ
ィスク原盤の製造方法。5. The method of manufacturing an optical disk master according to claim 4, wherein the reducing gas used for the reduction treatment contains hydrogen gas as a main component.
ト形成にフォトレジストを使用しかつレジスト除去法と
して酸素アッシングを用いしかる後に上記原盤表面還元
処理を行うことを特徴とする請求項１記載の光ディスク
原盤の製造方法。6. The optical disc master according to claim 1, wherein the master disc is for reproduction only, a photoresist is used for pit formation, and oxygen ashing is used as a resist removing method, and then the master disc surface reduction treatment is performed. Master disk manufacturing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28172488A JPH0729386B2 (en) | 1988-11-08 | 1988-11-08 | Optical disc master manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28172488A JPH0729386B2 (en) | 1988-11-08 | 1988-11-08 | Optical disc master manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02127030A JPH02127030A (en) | 1990-05-15 |
| JPH0729386B2 true JPH0729386B2 (en) | 1995-04-05 |
Family
ID=17643098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28172488A Expired - Lifetime JPH0729386B2 (en) | 1988-11-08 | 1988-11-08 | Optical disc master manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729386B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080083566A1 (en) * | 2006-10-04 | 2008-04-10 | George Alexander Burnett | Reclamation of components of wellbore cuttings material |
| US9073104B2 (en) | 2008-08-14 | 2015-07-07 | National Oilwell Varco, L.P. | Drill cuttings treatment systems |
| US8556083B2 (en) | 2008-10-10 | 2013-10-15 | National Oilwell Varco L.P. | Shale shakers with selective series/parallel flow path conversion |
| US9079222B2 (en) | 2008-10-10 | 2015-07-14 | National Oilwell Varco, L.P. | Shale shaker |
| US9643111B2 (en) | 2013-03-08 | 2017-05-09 | National Oilwell Varco, L.P. | Vector maximizing screen |
-
1988
- 1988-11-08 JP JP28172488A patent/JPH0729386B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02127030A (en) | 1990-05-15 |
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