JPH07293744A - Vacuum gate valve - Google Patents

Abstract

PURPOSE:To prevent dusts, etc., from being stuck on a sealing material in a vacuum gate valve. CONSTITUTION:In a vacuum gate valve, an opening 10 is located on the upper part side, and a driving means 18 is used in the condition located on the lower side. When a seal plate 7 is stored from the opening 10 to a storing space 9, a communicating part 5A with a groove part 5 of this opening 10 is closed by a dust cover 12 to prevent dusts, etc., from articles to be carried passing through the opening 10 from being stuck on a sealing material of the seal plate 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum gate valve, and more particularly to a novel improvement for preventing dust and the like from adhering to a sealing material.

[0002]

2. Description of the Related Art Generally, when processing is performed in a vacuum state in a manufacturing process of semiconductors and the like, a processing device arranged in a first vacuum container and a second vacuum container adjacent to the processing device are provided between those vacuum containers. The workpiece is conveyed through an opening of a vacuum gate valve that can be opened and closed. That is,
With the vacuum gate valve open, the workpiece is loaded from the second vacuum container into the first vacuum container, the vacuum gate valve is closed, and the first vacuum container is evacuated to a predetermined vacuum state. After the drawing, the work piece is processed, and after the processing is completed, the vacuum gate valve is opened and
The work piece is carried out into the vacuum container.

As an example of the vacuum gate valve, there is a structure shown in FIGS. 5 and 6. That is, what is indicated by reference numeral 1 in FIGS. 5 and 6 is a valve box, and this valve box 1 has a tubular shape with a substantially rectangular cross section, and a valve seat 2 is provided on the lower side of the valve box 1. It is built in an airtight state, the upper part of the valve box 1 is covered with a bonnet flange 3 in an airtight state, and a storage space 9 is formed between the valve seat 2 and the bonnet flange 3. . A valve seat 2 is provided inside the valve box 1.
An opening 10 penetrating the valve box 1 and the valve seat 2 is formed in a direction orthogonal to the cylinder axis. The valve seat 2 is provided with a groove portion 5 communicating with the opening 10 from the storage space 9 and having a length equal to or larger than the transverse width of the opening 10. The inner periphery of the opening 10 corresponding to the tip of the groove portion 5 is provided. A first seal surface 4a that traverses the surface, a second seal surface 4b extending from both ends of the first seal surface 4a along both inner surfaces where the groove portion 5 expands, and a space for accommodating the groove portion 5 while being connected to the second seal surface 4b. The third seal surface 4c that goes around the end surface on the 9th side forms the seal surface 4 that is connected in a closed manner.

A seal plate 7 is provided in a storage space 9 inside the valve box 1 so as to reciprocate in the groove 5 in the direction of the opening 10. The tip side 7a of the seal plate 7 is the seal. A first seal member 8a, a second seal member 8b, and a third seal member, which are formed in a shape along the surface 4 and which correspond to the seal surface 4 of the valve seat 2, are formed around the tip side 7a of the seal plate 7. A sealing material 8 having a structure in which 8c are connected to each other is provided.

A through hole 3a is formed in the bonnet flange 3.
And a drive means 1 including a drive introduction portion 11 and a drive source 17 provided outside the bonnet flange 3.
The rod 6 reciprocally driven by 8 penetrates the through hole 3a and projects into the storage space 9 of the valve box 1 while maintaining an airtight state, and the tip portion 6a of the rod 6 is located behind the seal plate 7. It is connected to the end 7b.

In the vacuum gate valve 21 constructed as described above, the seal plate 7 is reciprocated according to the operation of the rod 6 which is reciprocally driven, and the seal plate 7 is inserted into the groove portion 5 to open the opening 10. Seal and seal 8
Comes into close contact with the sealing surface 4 of the valve seat 2 in an airtight closed state, and the seal plate 7 is pulled out from the groove portion 5 to open the opening 10
Is opened.

In the vacuum gate valve 21 provided between the connection openings of two vacuum containers (not shown), the sealing surface 4 of the valve seat 2 is usually directed upward, and the sealing material 8 is pressed from above. They are arranged so that they are in close contact with each other. The vacuum gate valve 21 is opened and closed at least once every time a conveyed product such as a workpiece is conveyed between two vacuum containers (not shown) and reciprocates once, and in the closed state, the valve seat 2 is sealed. Surface 4
The seal material 8 of the seal plate 7 is closely attached to the airtight state.

Further, when the conveyed product passes through the opening 10 of the vacuum gate valve 21 by the conveying device (not shown), the conveyed product or dust adhering to the conveying device is inside the opening 10, that is, the first dust. It often happened that it dropped onto the seal surface 4a and stayed there. When the vacuum gate valve 21 is subsequently closed, the dust that has fallen onto the first sealing surface 4a is caught in the sealing material 8, damaging the sealing material 8 and failing to achieve an airtight state, resulting in poor sealing. there were.

Conventionally, as one method for solving this problem,
Although not shown, the vacuum gate valve 21 is arranged upside down with the driving means 18 shown in FIGS. 5 and 6 on the lower side, and the respective sealing surfaces 4a, 4b, 4c are respectively the respective sealing members 8.
A configuration has been adopted in which the sealing surface 4 is arranged so as to be positioned above the a, 8b, and 8c, and the sealing surface 4 faces downward. As a result, in the prior art, the vacuum gate valve 21 is arranged in the opposite direction as described above, so that dust does not drop on the sealing surface of the opening 10.

[0010]

Since the conventional vacuum gate valve is constructed as described above, there are the following problems. That is, the dust that has fallen from the conveyed object or the conveying device falls into the groove portion 5, and a part of the dust is discharged from the storage space 9 below the groove portion 5 to the surface of the seal material 8 provided on the seal plate 7. It had fallen on and adhered. As a result, when the opening 10 is blocked by the seal plate 7, the sealing material 8 to which dust is attached eventually comes into close contact with the sealing surface 4, and similarly, a sealing failure occurs and the sealing material 8 is damaged.

The present invention has been made to solve the above problems, and in particular, it is intended to prevent dust or the like falling from a conveyed object or a conveying device when passing through an opening from adhering to a sealing material. An object of the present invention is to provide a vacuum gate valve.

[0012]

A vacuum gate valve according to the present invention includes a valve box having a valve seat built therein, an opening formed in the upper part of the valve box together with the valve seat, and an opening of the valve box. A storage space that is formed from the lower end to the middle portion and whose lower end is covered with a bonnet flange, and a storage space that is formed in the lower part of the valve seat and traverses the opening while gradually increasing the transverse length thereof from the opening to the storage space. A seal plate having a groove communicating with the opening, a sealing surface formed in the opening and the groove, and a sealing material corresponding to the sealing surface, stored in the storage space, passing through the groove, and appearing in and out of the opening. When,
A vacuum gate valve comprising: a drive means provided under the bonnet flange; and a rod provided in the drive means and connected to the seal plate in an airtight state to reciprocate the seal plate. The dust cover is openably and closably provided in a communication portion of the inner surface of the opening with the groove portion.

More specifically, the dust cover is rotatably supported by a shaft support portion formed on either the valve box or the valve seat, and the communication portion is always closed via an elastic member. The configuration is biased so that

[0014]

In the vacuum gate valve according to the present invention,
When the seal plate is inserted into the groove and the opening is closed due to the dust cover on the inner surface of the opening that is in communication with the groove, the seal plate is pulled out from the groove and the opening is opened. Closed to. Further, the dust cover has one end rotatably supported by either the valve box or the valve seat, and is connected to either the valve box or the valve seat via an elastic member so as to close the communication part. The dust cover always tries to close the communication part. Therefore, when the seal plate is inserted into the groove, the seal plate pushes the dust cover against the force of closing the elastic member and projects into the opening to close the opening, and the seal plate is pulled out from the groove. When the seal plate is pulled out from the groove, the dust cover automatically gradually closes the communication part by the force to close the elastic member as the seal plate is pulled out from the groove, and when the seal plate is completely pulled out, the dust cover is closed. Covers the communication part and closes it. Therefore, the vacuum gate valve according to the present invention has the opening located on the upper side and the storage space located on the lower side.
When provided between the connection openings of the individual vacuum containers, when the transported object is transported through the opening of the vacuum gate valve, the dust cover always covers the communicating portion with the groove portion of the opening, Dust falling from the conveyed object or the conveying device falls on the upper surface of the dust cover, that is, the opening side surface. Therefore, the dust does not drop into the storage space through the communicating portion, and the dust does not adhere to the seal material of the seal plate stored in the storage space.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the vacuum gate valve according to the present invention will be described in detail below with reference to the drawings. In addition,
The same or equivalent parts as those of the conventional example will be described with the same reference numerals. 1 is a front view of a vacuum gate valve according to the present invention, FIG. 2 is a sectional view taken along line II-II of FIG. 1, FIG. 3 is an enlarged view of a main part of another embodiment, and FIG. 4 is a side view of FIG. Is. In the figure, what is indicated by reference numeral 21 is a vacuum gate valve having an oval opening 10 elongated in the horizontal direction,
The vacuum gate valve 21 has a cylindrical valve box 1 having a rectangular cross section, and an upper end 1 in an inner hole 1 a of the valve box 1.
a valve seat 2 which is built in airtight from aA to the intermediate portion 1aB,
Through the bonnet flange 3 that covers the lower end surface 1b of the valve box 1 in an airtight state, the seal plate 7 that is housed in the housing space 9 that is formed between the valve seat 2 and the bonnet flange 3, and the drive introduction portion 11. A drive source 17 connected to the bonnet flange 3 in an airtight state is a main component. The drive introducing section 11 and the drive source 17 constitute a drive means 18.

The valve box 1 has a valve seat 2 built therein, and the valve box 1 has a pair of valve box openings 1A, and the valve seat 2 communicates with the valve box opening 1A. The opening 10 is formed by each of these openings 1A and 2A. Therefore, the opening 10 is formed so as to penetrate through each valve box 1 and the valve seat 2.

The valve seat 2 has an elongated groove 5 communicating with the storage space 9 from the opening 10 in a direction perpendicular to the axis of the opening 10.
The groove portion 5 is provided such that the groove portion 5 crosses the opening 10 and gradually increases its transverse length, that is, the groove portion 5 communicating from the opening 10 to the storage space 9 is widened at both ends.

The valve seat 2 has a first seal surface 4a that crosses the inner peripheral surface of the opening 10 facing the groove portion 5 and both ends of the first seal surface 4a along both lengthwise inner surfaces of the groove portion 5. The second seal surface 4b reaching the storage space 9 and the groove 5 are formed around the end surface of the storage space 9 side and are connected in a closed manner by a third seal surface 4c which is connected to the end of the second seal surface 4b. A sealing surface 4 is formed. The seal plate 7 can be inserted into and removed from the groove portion 5 of the valve seat 2, and the upper end side 7 a thereof can be inserted into the seal surface 4 of the valve seat 2.
Are formed so as to be able to face each other, and each of the facing portions of the seal surface 4 is composed of a first seal member 8a, a second seal member 8b, and a third seal member 8c, which are connected in a loop shape. A sealing material 8 is provided.

The seal plate 7 has a lower end 7b side which is reciprocally driven in the cylinder axis direction of the valve box 1 by the drive means 18 which is projected from a through hole 3a provided in the bonnet flange 3. Connected to 6.
Further, a dust cover 12 that covers the groove portion 5 is provided in the communicating portion 5A of the inner surface 10a of the opening 10 with the groove portion 5. The dust cover 12 has one end 12a parallel to the lengthwise direction of the groove 5 supported in a cantilever manner on a shaft support 13 provided in the valve box 1 so as to be rotatable. The shaft support 13
May be provided on the valve seat 2. As shown in FIG. 2, the dust cover 12 is connected to the valve box 1 by a coil spring 15 that is an elastic member that applies a tensile force to a portion apart from the shaft support portion 13, or as shown in FIGS. As shown in FIG. 4, a torsion coil spring 15 a, which is an elastic member that applies a rotational force to the dust cover 12, is provided on the shaft support 13. The coil spring 15 may be another elastic member such as rubber.

In the vacuum gate valve 21 constructed as described above, the seal plate 7 is inserted and withdrawn in the groove portion 5 of the valve seat 2 by the reciprocating motion of the rod 6 by the driving means 18 and is withdrawn and withdrawn in the opening 10. To be The dust cover 12 is urged by the spring force of the coil spring 15 or the torsion coil spring 15a so as to constantly cover the inner surface 10a of the opening 10 on the groove portion 5 side, that is, the communicating portion 5A between the opening 10 and the groove portion 5. . Therefore, when the seal plate 7 is inserted into the groove portion 5, the seal material 8 is pressed against the seal surface 4 and brought into close contact therewith, and the opening 10 is blocked. Further, when the seal plate 7 is inserted into the groove portion 5, the dust cover 12 covering the communication portion 5A between the groove portion 5 and the opening 10 is pushed away against the biasing force of the coil spring 15 or the torsion coil spring 15a. Is inserted.

When the seal plate 7 is inserted into the groove 5, the dust cover 12 is spring-loaded to support the shaft support 1.
The free end portion 12b separated from 3 comes into contact with and leans against the side surface 7c of the upper end side 7a of the seal plate 7.
When the seal plate 7 is pulled out from the groove portion 5 into the storage space 9, the dust cover 1 is initially drawn as it is pulled out.
The free end portion 12b of the second slides on the side surface 7c of the upper end side 7a of the seal plate 7, and the upper surface 7e of the seal plate 7 starts halfway.
The corners of the slips slide on the back surface 12c of the dust cover 12, and the dust cover 12 gradually covers the communicating portion 5A between the groove 5 and the opening 10.

Further, when the seal plate 7 is pulled out from the groove portion 5 and the first seal member 8a of the seal plate 7 is pulled in from the inner surface 10a of the opening 10, the dust plate 1
Reference numeral 2 completely covers the communication portion 5A between the groove portion 5 and the opening 10. In this state, the opening 10 is in a final penetrating state through which a conveyed product or the like can pass. That is, according to the reciprocating movement of the seal plate 7, the dust plate 12 is provided with the groove 5 and the opening 1.
The communication part 5A with 0 is automatically opened and closed. Therefore, the vacuum gate valve 21 according to the present invention is arranged with the opening 10 on the upper side and the storage space 9 on the lower side, so that the opening 10
When the conveyed object and the conveying device pass through the opening 10 in the penetrating state, the dust or the like falling from the conveyed object or the conveying device on the groove portion 5 falls on the dust plate 12, and the storage space in which the seal plate 7 is accommodated. It is possible to prevent the fall to 9. It should be noted that, in FIG. 2, the rod 6 is configured to be operable with a gap with respect to the bonnet flange 3.
8 is configured so that it can operate in a state where it is kept airtight from the outside.

[0023]

Since the vacuum gate valve according to the present invention is constructed as described above, the following effects can be obtained. That is, since the opening is arranged on the upper side and the storage space is arranged on the lower side, that is, the driving means is arranged on the lower side, dust and the like falling from the conveyed object when the conveyed object is conveyed through the opening in the penetrating state of the opening. The dust cover did not reach the groove and the storage space, and dust did not adhere to the seal material of the seal plate stored in the storage space. Therefore, when the opening 10 is blocked, the sealing material adheres to the sealing surface without catching dust,
Sealing defects no longer occur, and there is no damage to the sealing material due to dust entrapment.

[Brief description of drawings]

FIG. 1 is a front view of a vacuum gate valve according to the present invention.

FIG. 2 is a sectional view taken along the line II-II in FIG.

FIG. 3 is a front view showing a main part of another embodiment of the vacuum gate valve according to the present invention.

FIG. 4 is a side view of FIG.

FIG. 5 is a front view (cross-sectional view) of a conventional vacuum gate valve.
Is.

6 is a sectional view taken along line VV of FIG.

[Explanation of symbols]

 1 Valve Box 2 Valve Seat 3 Bonnet Flange 4 Sealing Surface 5 Groove 5A Communication 7 Seal Plate 8 Sealing Material 10 Opening 12 Dust Cover 13 Shaft Support 15 Coil Spring (Elastic Member) 15a Torsion Coil Spring (Elastic Member) 21 Vacuum Gate Valve

Claims (2)

[Claims] 1. A valve box (1) having a valve seat (2) built-in, and the valve box
An opening (10) formed through the valve seat (2) in the upper part of (1), and the lower end (1b) formed from the lower end (1b) to the intermediate part (1aB) of the valve box (1). The storage space (9) covered with the bonnet flange (3) and the opening (10) formed in the lower part of the valve seat (2) across the opening (10) while gradually increasing the crossing length thereof. A groove (5) communicating from 10) to the storage space (9),
Sealing surface (4) formed in the opening (10) and the groove (5)
And having a sealing material (8) corresponding to the sealing surface (4) and being stored in the storage space (9) and passing through the groove (5), the opening (1
The seal plate (7) that appears in and out of (0), the drive means (18) provided in the lower part of the bonnet flange (3), and the seal plate provided in the drive means (18) in an airtight state.
In a vacuum gate valve comprising a rod (6) connected to (7) for reciprocating the seal plate (7), a communicating part with the groove (5) on the inner surface of the opening (10). A vacuum gate valve characterized in that a dust cover (12) is provided on (5A) so as to be openable and closable. 2. The dust cover (12) is provided in the valve box (1).
Alternatively, a shaft support (13) formed on any of the valve seats (2)
2. The structure according to claim 1, wherein the connecting part (5A) is rotatably supported by the elastic member (15, 15a) and is urged so that the communication part (5A) is always closed. Gate valve for vacuum.