JP4115224B2 - Substrate storage container - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate storage container used for storing a substrate such as a semiconductor wafer or a glass substrate and transporting, storing or connecting the substrate to a substrate processing apparatus and supplying the substrate, and in particular, the substrate storage container to the lid. The present invention relates to a substrate storage container that can prevent external fine particles from entering the substrate storage container and contaminating the substrate when removing the lid through the body opening / closing device.
[0002]
[Prior art]
Conventionally, as this type of substrate storage container, for example, the one disclosed in Japanese Patent Application Laid-Open No. 2000-58633 is known. The substrate storage container is engaged with a lid opening / closing device provided in a processing apparatus, It is used to supply and receive the substrate in the storage container to the processing apparatus. A conventional substrate storage container includes a container main body for storing a substrate therein and a lid for closing the opening of the container main body, and a latch mechanism for locking the container main body is included in the lid. ing. The latch mechanism includes a rotatable rotating plate having a plurality of cam grooves, a plate-like connecting member having one end connected to the cam groove of the rotating plate, and the other end of the plate-like connecting member, and is provided at the inner edge of the container body opening. It consists of a locking member that can be moved in and out of the provided recess. By operating the rotary plate by inserting an operation key from the outside into the operation hole, the latch mechanism is locked and unlocked, and the lid is opened and closed. Is done. For example, when the opening of the container body is closed by the lid body, the latch mechanism of the lid body is operated by the lid body opening / closing device, and the locking member protruding from the lid body is immersed in the lid body from the container body Then, the locking between the lid and the container body is released, and the lid is removed from the container body.
[0003]
[Problems to be solved by the invention]
In the conventional lid opening / closing device, as shown in FIG. 11, a processing device 31 is provided in the lid opening / closing device 30, and the substrate storage container 1 ′ is a lid 3 ′ provided with a container body 2 and a gasket member 6. (FIG. 11A). When the substrate storage container 1 ′ is mounted on the lid opening / closing device 30, when the latch mechanism of the lid 3 ′ is released and the lid 3 ′ is removed from the container body 2, the lid 3 ′ by the lid opening / closing device 30 is removed. Since the opening speed is fast, the inside of the substrate storage container 1 ′ suddenly becomes negative pressure, and as shown by the arrow in FIG. 11B, the gap between the substrate storage container 1 ′ and the front wall 26 is changed to the outside. There was a problem that 32 fine particles (hereinafter referred to as “particles”) entered the substrate storage container together with air.
[0004]
In order to solve such a problem, the pressure P on the processing device 31 side of the lid opening / closing device 30 has been conventionally known.₀Is the pressure P of the outside 32 of the lid opening / closing device 30₁Highly clean air with a cleanliness level of 1 is set down from the ceiling to the mounting portion of the substrate storage container 1. Normally, the cleanliness of the outside of the processing apparatus 31 is managed at a level of 100 to 1000, but this level of cleanness is not sufficient in consideration of particle contamination on the substrate stored in the substrate storage container 1 ′. there were. Therefore, when removing the lid 3 'from the substrate storage container 1', pressurized highly clean air is sent. However, since the lid 3 'of the substrate storage container 1' is removed before clean air is distributed, air from the outside is caught in the storage container, causing particle contamination of the substrate.
[0005]
As a lid opening / closing device capable of preventing such particle contamination, there is one disclosed in Japanese Patent Application Laid-Open No. 2001-44256. In this conventional example, particle entrainment is reduced by controlling the maximum speed at which the lid is opened on the lid opening / closing device side by dividing the maximum speed by the pressure difference between the inside and outside of the semiconductor manufacturing apparatus to a certain value or less. . However, this conventional example has a problem that the control of the lid opening / closing device is complicated and the device itself is expensive. Even if the initial speed of operation of the lid opening / closing device is slowed, the control method has the effect that the entrainment of particles can be reduced without eventually reducing the lid opening / closing cycle by increasing the intermediate speed. Be expected. However, an air cylinder is used for the opening / closing operation of the lid, and it has been difficult to perform delicate control in opening / closing the lid with such means. Also, the air cylinder has a problem that the device does not operate unless the initial speed is large to some extent.
[0006]
Furthermore, 500 to 1000 lid opening / closing devices used in one semiconductor manufacturing process are used. Moreover, these devices are manufactured by a plurality of manufacturers, and there are about 50 types. All of these lid opening / closing devices have been modified as described above, or their specifications have been changed. Thus, it has been difficult to take measures to prevent particle contamination of the substrate.
[0007]
The present invention has been made in view of the above-described problems, and is a lid for a substrate storage container that stores a semiconductor wafer, a glass substrate, etc., and stores, conveys, or supplies the substrate by being connected to a processing apparatus. It is an object of the present invention to provide a substrate storage container that can prevent particles from entering the substrate storage container from the outside when the lid is opened and closed by the lid opening / closing device.
[0008]
[Means for Solving the Problems]
  The present invention has been made to achieve the above object, and the invention of claim 1 is characterized in that a container body having an opening at one end and accommodating one or a plurality of substrates is sealed with a gasket member. A lid that closes,A latch mechanism provided on the lid is operated by a lid opening / closing device to open / close the lid.In the substrate storage container,
  The lidThe gasket member was providedClose the housing and the opening of the housingAnd an operation hole for unlocking the latch mechanism.A lid surface plate, and the lid body is provided with an elastic member that is pressed and compressed in contact with the front wall of the lid body opening and closing device, and the elastic member is the lid surface plateIs provided inOr it is provided between the said cover body surface plate and the said housing | casing, It is a board | substrate storage container characterized by the above-mentioned.
[0009]
  In the invention of claim 1, it comprises a container main body having an opening at one end and storing one or a plurality of substrates, and a lid for sealing and closing the opening with a gasket member,A latch mechanism provided on the lid is operated by a lid opening / closing device to open / close the lid.In the substrate storage container, the lidThe gasket member was providedClose the housing and the opening of the housingAnd an operation hole for unlocking the latch mechanism.A lid surface plate, and the lid body is provided with an elastic member that is pressed and compressed in contact with the front wall of the lid body opening and closing device, and the elastic member is the lid surface plateIs provided inAlternatively, the substrate storage container is provided between the lid surface plate and the housing, and the lid is provided with an elastic member so that the lid contacts the lid opening / closing device. When pressed, the elastic member compresses, and when the lid body opening / closing device releases the pressure and removes the lid body to open the container body, the elastic member acts to repel and return to its original state. When the lid of the substrate storage container is removed by the lid opening / closing device using the action of such an elastic member, the opening operation of the lid is slightly delayed, and the container body is completely opened.From a slight gapPressurized air is supplied into the substrate storage container, and the lid of the container body that is in close contact with the wall surface around the opening is removed by the lid opening / closing device, and the container body is opened. Invasion is suppressed, and it has the effect of avoiding particle contamination of the substrate.
[0010]
  Also,In the present inventionIsThe elastic member is provided not only in the lid surface plate but also between the lid surface plate and the housing, and the lid surface plate is slightly pressed in the pressing direction by the compression of the elastic member by the lid opening / closing device. When the lid is moved and removed from the substrate storage container, the lid is removed from the container body after the lid surface plate has moved slightly toward the lid opening / closing device, so the opening of the substrate storage container is slightly delayed. In the meantime, pressurized air is supplied to the substrate storage container, and the invasion of particles into the container main body is suppressed, so that particle contamination of the substrate can be avoided..
[0011]
  Further, in the invention of claim 2, the elastic member is formed from the lid surface plate.Front wall of the lid opening / closing deviceThe substrate storage container according to claim 1, wherein the substrate storage container protrudes sideways.
[0012]
  Claim2InventionsoIsThe elastic member is provided so as to protrude from the lid surface plate. When the substrate storage container is pressed by the lid opening / closing device, the elastic member is pressed and compressed to release the pressure by the lid opening / closing device. When removing the lid, the elastic member is repelled and returned to its original shape, and then the lid moves to open the storage container body, so that the invasion of particles into the storage container body is suppressed, and the storage container body Has the effect of avoiding particle contamination of the substrate inside.
[0013]
  Also,ContractThe invention according to claim 3 is the substrate storage container according to claim 1 or 2, wherein one or a plurality of the elastic members are provided on the lid and are made of a rubber material or a thermoplastic elastomer material..
[0014]
  In the invention of claim 3, since one or a plurality of elastic members are provided on the lid and are made of a rubber material or a thermoplastic elastomer material, the elastic coefficient of the elastic member can be arbitrarily set. By adjusting the elastic coefficient according to the operation characteristics of the container, it has the effect of slightly delaying the timing at which the lid is removed from the container body.
[0015]
  The invention according to claim 4 is the substrate storage container according to claim 1, wherein the elastic member is a spring member provided inside the lid..
[0016]
  In the invention of claim 4, since the spring member is formed as an elastic member inside the lid body, an elastic coefficient that cannot be handled by an elastic member such as a rubber material can be arbitrarily set, and the lid body having various operating characteristics. It has the effect | action which can be set as the board | substrate storage container which can respond to an opening / closing apparatus..
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the substrate storage container of the present invention will be described with reference to the drawings. First, an embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view of an embodiment of the present invention. FIG. 2A is a side view of the main part showing the lid of the substrate storage container of this embodiment, and FIG. 2B is a schematic diagram showing this embodiment and the lid opening / closing device. FIG. 3A is a partially enlarged view of the elastic member according to this embodiment, and FIG. 3B is an enlarged sectional view taken along the line II. FIG. 4A is a front view showing an outline of a pair of latch mechanisms for locking the lid to the container body, and FIG. 4B is a sectional view taken along line II-II. FIGS. 5A to 5C are schematic diagrams for explaining the operation when the substrate storage container of the present embodiment removes the lid by the lid opening / closing device. FIG. 6A is a cross-sectional view of the main part showing a state in which the substrate storage container of the present embodiment is pressed by the lid opening / closing device, and FIG. 6B is a diagram when the substrate storage container is opened by the lid and the lid opening / closing device. It is principal part sectional drawing which shows this operation | movement. FIG. 7 is a view for explaining the opening operation of the lid when the lid is removed.
[0019]
The present embodiment will be described with reference to FIGS. 1 and 2. The substrate storage container 1 has an opening at one end and a container main body 2 that horizontally stores substrates A at regular intervals, and the opening is closed. And the lid 3 to be operated. The container body 2 is provided with a positioning member 4 (see FIG. 2B) on the bottom surface thereof, and the positioning member 4 is configured to be fitted to the positioning pins 22 of the mounting portion 21 of the lid opening / closing device 30. . A handle member 2 a for transporting the substrate storage container 1 is provided on the outer wall and the top surface of the container body 2. A plurality of locking recesses 17 for locking the lid 3 are formed on the inner peripheral edge of the opening of the container body 2.
[0020]
  On the inner surface of the lid 3, a pressing member 5 having a storage groove separated into a strip shape that holds the substrate A when the lid 3 is locked to the container body 2 is provided. A gasket member 6 for sealing that seals the inside of the container body 2 is attached. On the surface of the lid 3, a plurality of elastic members 20 are arranged equally on the left and right and up and down so as to slightly protrude from the surface of the lid. As shown in FIG. 2A, the elastic member 20 is a flat surface with a protruding amount t. However, when the elastic member 20 comes into contact with the lid opening / closing device 30 and is compressed, the lid surface plate 3a It is configured to be flush with the surface.The gasket member 6 is provided on the peripheral edge of the side wall of the lid 3, that is, on the peripheral edge of the side wall of the housing 3b as shown in FIG.
[0021]
  As shown in FIGS. 3A and 3B, the lid 3 of the substrate storage container 1 is placed on the surface of the housing 3 b and the lid 3.The opening of the provided housing 3bThe elastic member 20 is a donut-shaped bottomed cylindrical member, and is fixed to a through hole provided in the bottom surface portion of the elastic member 20 using a fixing screw 18. Bolts 18 are inserted and fixed to the protruding portion 13 of the housing 3b. The lid surface plate 3a on the surface of the lid 3 is provided with a plurality of circular recesses 19 for accommodating such elastic members 20, and the elastic members 20 are accommodated in the circular recesses 19 so that the lid surface plate 3a. Is fixed to the lid 3. The protruding amount t of the elastic member 20 from the surface of the lid surface plate 3a is about 0.2 to 0.6 mm. Further, the elastic member 20 is pressed in contact with the lid opening / closing device 30, and the protruding portion of the elastic member 20 is compressed and deformed and spreads in the lateral direction, and the circular concave portion 19 is an escape hole for releasing the deformation. The shape of the elastic member 20 is not limited to a cylindrical shape, and may be any shape such as a semicircular shape or an L shape.
[0022]
On the other hand, a pair of latch mechanisms 7 for locking the lid 3 to the container body 2 are housed inside the lid 3. If it demonstrates with reference to Fig.4 (a) and FIG.4 (b), this latch mechanism 7 will be comprised from the rotation plate 8, the connection plate 9, and the latching member 10. FIG. The rotary plate 8 is formed in a circular shape, and an operation hole 11 into which an operation key of the lid opening / closing device 30 is inserted is formed at the center of the outer surface, and a cam groove 8a is formed along the circumferential direction. An engagement protrusion 9a is provided at one end of the connection plate 9, and the engagement protrusion 9a is engaged with the cam groove 8a, and the connection plate 9 is driven in a substantially straight direction in accordance with the movement of the rotary plate 8. Has been. A locking member 10 having a T-shaped cross section is pivotally supported at the other end of the connecting plate 9. The locking member 10 is also pivotally supported by the lid 3, and the free end of the locking member 10 draws a circular path in accordance with the movement of the connecting plate 9, and can freely appear and disappear from the through hole 16 on the side wall of the lid 3. Is provided. The lid 3 is configured so that the opening of the container body 2 can be opened and closed by the protrusion and withdrawal of the locking member 10. When the substrate storage container 1 is placed on the mounting portion 21 of the lid opening / closing device 30, the operation key is inserted into the operation hole 11 of the lid 3, and the opening / closing operation of the lid 3 of the substrate storage container 1 is performed.
[0023]
Subsequently, the opening / closing operation of the substrate storage container 1 of the present embodiment will be described with reference to FIGS. 5A shows the substrate storage container 1 and the lid opening / closing device 30, and FIG. 5B is a diagram in which the substrate storage container 1 is mounted on the lid opening / closing device 30. FIG. These are figures which show the state from which the cover body 3 of the substrate storage container was removed. As shown in FIG. 5A, the positioning pin 22 protrudes from the mounting portion 21 of the lid opening / closing device 30 and is arranged in a substantially V shape. A positioning groove 4 disposed in a V shape is provided on the bottom surface of the substrate storage container 1 so as to correspond to the positioning pin 22, and the positioning groove 4 is engaged with and mounted on the positioning pin 22. A closure 23 is provided in the opening 24 of the lid opening / closing device 30, and the opening 24 can be opened and closed by the horizontal movement and lowering of the closure 23. The substrate storage container 1 positioned in the lid opening / closing device 30 moves so as to contact the front wall 26 at the periphery of the opening 24, and the lid of the substrate storage container 1 with a constant pressing force set in the SEMI standard. The body 3 surface is pressed against the closure 23 (FIG. 5B). Thereafter, the pressure on the closure 23 is released, and the lid 3 is removed from the container body 2 together with the closure 23.
[0024]
Note that the unlocking mechanism of the latch mechanism 7 of the present embodiment is such that when the lid 3 and the closure 23 are connected (FIG. 5B), the operation key provided on the surface of the closure 23 operates the lid 3. The rotary plate 8 (see FIG. 4) of the latch mechanism 7 of the lid 3 is inserted into the hole 11 and rotated 90 degrees by the operation key, so that the lid 3 and the container body 2 are locked by the locking member 10. Canceled.
[0025]
After the latch mechanism is unlocked, the closure 23 holding the lid 3 is retracted in a substantially horizontal direction so as to be away from the opening 24, and subsequently moved in the vertical direction (usually downward) to thereby store the container. The opening of the main body 2 and the opening 24 of the lid opening / closing device 30 are simultaneously opened. Subsequently, the opening 24 is opened in the front wall 26 of the lid opening / closing device 30, and the substrate in the substrate storage container 1 can be loaded into the processing device 31 through the opening 24 or unloaded. (FIG. 5C).
[0026]
In this embodiment, the elastic member 20 is provided on the surface of the lid so that the elastic member 20 protrudes, and when the elastic member 20 is pressed and compressed by the closure 23, the outer surface of the lid and the wall surface of the closure 23 are in contact with each other. To do. However, when the protruding amount of the elastic member 20 is large, the elastic member 20 is not completely compressed and a convex portion is generated on the surface of the lid, and a slight gap is formed between the closure 23 and the lid 3 by the elastic member 20. If such a small gap is generated outside the container body 2, the contaminated air may enter the container body 2 and cause particle contamination of the substrate as compared with the inside of the container body 2 or the processing apparatus 31. There is. Therefore, the protruding amount t of the elastic member 20 is preferably 0.6 mm or less. However, if the protruding amount t is extremely small, the delay in the opening operation of the lid 3 due to the displacement of the elastic member 20 in the repulsion direction is reduced. The amount t is 0.2 mm or more.
[0027]
In the present embodiment, when the closure 23 of the lid opening / closing device 30 opens and opens the lid 3 of the substrate storage container 1, the lid 3 moves with respect to the timing when the closure 23 starts to move. The timing of removal from the storage container main body 2 is slightly delayed. At the moment when the pressing force of the closure 23 is released and the opening operation is started, the compressed elastic member 20 is repelled and restored to the original state, and the distance between the lid 3 and the closure 23 by the elastic member 20 is restored. Since the lid 3 is not immediately opened following the closure 23 just by forming (substantially equivalent to the protruding amount), the lid 3 is suddenly opened, and the air outside 32 is placed inside the storage container body. Prevents particle contamination.
[0028]
The particle contamination prevention of the substrate according to the present embodiment will be described with reference to FIGS. 6 and 7. The pressure P on the processing device 31 side of the lid opening / closing device 30 is described below.₀Is the pressure P of the outside 32 of the lid opening / closing device 30₁When the lid 3 is pressed against the closure 23 as shown in FIG. 6 (a), the pressure is released and the opening operation of the closure 23 is started, as shown in FIG. 6 (b). As shown in the figure, due to the repulsive force of the elastic member 20, the closure 23 is moved first by the amount of protrusion of the elastic member 20, the opening of the lid opening / closing device 30 is opened only slightly ahead, and is opened from the processing device 31 side. As indicated by an arrow from the portion 24, clean air pressurized from the outside 32 flows into the storage container main body 2 and the opening of the storage container main body 2 is covered with the pressurized air. Thereafter, the lid 3 is removed together with the closure 23, so that air does not enter the storage container main body 2 from the container main body outside 32 and does not contaminate the substrate or the processing apparatus with particles.
[0029]
That is, as the speed model of the opening operation of the lid body 3 schematically shown in FIG. 7, the lid body 3 does not move initially due to the repulsion of the elastic member 20 even when the lid body opening / closing device 30 starts to move. Is the time t with respect to the movement of the lid opening / closing device 30.₀Delay, as shown by the theoretical curve, starts to move with a slight delay. As indicated by such a conventional curve, it is possible to effectively prevent the opening operation of the lid 3 from rising suddenly. By opening the lid 3 in this way, the operation of the lid 3 approaches the ideal curve indicated by the wavy line.
[0030]
The material of the elastic member 20 of the present embodiment is, for example, NBR (nitrile rubber), IR (isoprene rubber), EPDM (ethylene / propylene rubber), SBR (styrene butadiene rubber), silicone rubber, fluorine rubber, or the like. Various thermoplastic elastomers such as various rubbers, thermoplastic polyester elastomers, or thermoplastic polyolefin elastomers can be used, and those having a small volatile gas component and a small compression set value are preferable. Further, the elastic member 20 can be adjusted to an arbitrary elastic coefficient by using such a synthetic resin.
[0031]
In the present embodiment, the elastic member 20 is exemplified by a rubber member or a resin. However, a spring member made of metal can be provided on the surface of the lid. The amount of protrusion of the spring is adjusted to about 0.2 to 0.6 mm so as to be equal to the amount of compression. Even when the elastic member 20 is a metal spring member, the lid 3 opens with a slight delay in the closure 23, and the same effect can be obtained that external particles can be prevented from being caught. Further, instead of the spring member, a plate spring or a spring spring-like member can be used.
[0032]
Next, another embodiment of the substrate storage container according to the present invention will be described with reference to FIG. FIG. 8A is a partial cross-sectional view of the lid, and FIG. 8B is a main cross-sectional view showing a state where the elastic member is compressed. The lid 3 is composed of a housing 3b having an opening on one side and a lid surface plate 3a that closes the opening of the housing 3b. The lid surface plate prevents the elastic member 20 from protruding from the surface of the lid 3. 3a and the housing 3b, the fixing bolt 25 is inserted into the circular recess 19 provided in the lid surface plate 3a and the through hole of the elastic member 20, and fixed to the protrusion 13 provided in the housing 3b. The front end of the bolt 8 is screwed and attached, and the lid surface plate 3 a is supported by the housing 3 b with the fixing bolt 25.
[0033]
The lid surface plate 3a is fixed to the housing 3b via the elastic member 20. When the lid opening / closing device and the substrate storage container are pressed against each other, the lid surface plate 3a is pressed against the closure, and elastic. The member 20 is compressed. Therefore, the lid surface plate 3a supported by the elastic member 20 moves toward the housing 3b (see FIG. 8B), and the lid 3 comes into contact with the opening of the lid opening / closing device to open and close the lid. When the latch mechanism of the substrate storage container by the apparatus is released and the closure is released, when the closure starts to open, the compressed elastic member 20 is repelled and tries to return to the original position. The operation of removing the lid 3 with the same principle explained in the above is slightly delayed compared with the opening operation of the lid opening / closing device, so that clean air on the processing device side flows to the container body side, and the container body opening It is possible to prevent external air from being caught from the section. In addition, it is preferable to set so that the compression amount of the elastic member 20 may be about 0.2-0.5 mm. In addition, when the elastic member is compressed and repels in this way, the lower surface of the head of the fixing screw 25 and the bottom surface of the recess 19 come into contact with each other and function as a rebound stopper for the elastic member.
[0034]
Further, another embodiment of the present invention will be described with reference to FIG. In the embodiment shown in FIGS. 9A and 9B, the elastic member 40 is a spring member and is provided inside the lid 3. The lid 3 includes a housing 3b having an opening on one side and a lid surface plate 3a that closes the opening of the housing 3b, as in the embodiment of FIG. 8, and the lid surface plate 3a is an elastic member 40. It is supported by the housing | casing 3b through the spring member which is. When the lid opening / closing device comes into contact with and presses the substrate storage container, the lid surface plate 3a moves to the housing 3b side as the elastic member 40 is compressed (see FIG. 9B). The amount of compression may be adjusted to about 0.2 to 0.5 mm as in the previous embodiment. The amount of movement can be adjusted by the amount of compression of the spring or a stopper provided separately. Further, since the entire lid surface plate 3a moves, it is preferable to provide a guide pin 29 for sliding the lid surface plate 3a in parallel. In the case of this embodiment as well, since the movement when removing the lid can be delayed from the opening operation of the lid opening / closing device, the same effect can be obtained as in the above-described embodiment.
[0035]
Moreover, as other embodiment of this invention, as shown in FIG. 10 other than having mentioned above as other embodiment which presses and displaces a cover body surface plate with a cover body opening / closing apparatus, as shown in FIG. 3a may support the lid surface plate 3a even if the elastic member 20 is provided on the peripheral edge of the opening of the housing 3b. The elastic member 20 may be a flexible rubber having a synthetic rubber, a bellows, or a hinge structure as in the above embodiment, or a leaf spring-like elastic member.
[0036]
【The invention's effect】
As described above, according to the present invention, since the lid has the elastic member, the elastic member is compressed and brought into close contact with the lid opening / closing device, and when the lid is removed, the lid is removed. Since the opening opens behind the closure of the lid opening / closing device, the pressurized air of the processing device flows into the substrate storage container side, so that particles from outside do not get caught inside the processing device or the substrate storage container, There is an advantage that particles are not adhered and contaminated. Of course, even if the substrate storage container of the present invention is used, the throughput does not decrease, and there is no need to install an expensive device or to attach it, and the effect of eliminating particle contamination of the substrate in the manufacturing process It is what has.
[Brief description of the drawings]
FIG. 1 is a perspective view for explaining an embodiment of the present invention.
FIG. 2A is a side view showing the main part of the lid of this embodiment, and FIG. 2B is a schematic view showing this embodiment and the lid opening / closing device.
3A is a partially enlarged view of the elastic member of the present embodiment, and FIG. 3B is an enlarged cross-sectional view taken along the line II.
4A is a front view showing an outline of a pair of latch mechanisms for locking a lid to a container body, and FIG. 4B is a sectional view taken along line II-II.
FIGS. 5A to 5C are schematic diagrams for explaining an operation of removing a lid by a lid opening / closing device by the substrate storage container of the present embodiment.
6A is a cross-sectional view of the main part showing a state in which the substrate storage container of the present embodiment is pressed by the lid opening / closing device, and FIG. 6B is a diagram when the substrate storage container is opened between the lid and the lid opening / closing device. It is principal part sectional drawing which shows this operation | movement.
FIG. 7 is a view for explaining the opening operation of the lid by the lid opening / closing device when the lid is removed from the substrate storage container of the present invention.
FIG. 8 is a perspective view for explaining another embodiment of the present invention.
FIG. 9 is a perspective view for explaining another embodiment of the present invention.
FIG. 10 is a perspective view for explaining another embodiment of the present invention.
FIG. 11 is a schematic cross-sectional view illustrating opening and closing of a lid by a conventional lid opening / closing device for a substrate storage container.
[Explanation of symbols]
1 Substrate storage container
2 Storage container body
3 lid
3a Lid surface plate
3b housing
4 Positioning member
5 Holding member
6 Gasket member
7 Latch mechanism
8 Rotating plate
9 Connecting plate
9a Engagement protrusion
10 Locking member
11 Operation hole
12 Cam groove
13 Protrusion
14,15 Shaft
16 Through hole
17 Locking recess
18 Fixing screw
19 Circular recess
20 Elastic member
21 Mounted part
22 Positioning pin
23 Closure
24 opening
25 fixing screw
26 Front wall
29 Guide pin
30 Lid opening / closing device
31 Pressurizer
40 Spring member

Claims (4)

A container body having an opening at one end and accommodating one or a plurality of substrates, and a lid for sealing the opening with a gasket member and closing the lid, and a latch mechanism provided on the lid is a lid In a substrate storage container that is operated by an opening and closing device to open and close the lid ,
The lid includes a casing provided with the gasket member , and a lid surface plate provided with an operation hole for closing the opening of the casing and unlocking the latch mechanism. between the elastic member is pressed compressed is provided in contact with the front wall of the lid opening and closing device, the elastic member or is provided in the lid surface plate or the lid surface plate and the housing A substrate storage container provided on the substrate. The substrate storage container according to claim 1, wherein the elastic member protrudes from the lid surface plate toward a front wall of the lid opening / closing device .   The substrate storage container according to claim 1, wherein one or a plurality of the elastic members are provided on the lid and are made of a rubber material or a thermoplastic elastomer material.   The substrate storage container according to claim 1, wherein the elastic member is a spring member provided inside the lid.

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