JPH07286281A - Electroless copper plating solution - Google Patents

Electroless copper plating solution

Info

Publication number
JPH07286281A
JPH07286281A JP8032394A JP8032394A JPH07286281A JP H07286281 A JPH07286281 A JP H07286281A JP 8032394 A JP8032394 A JP 8032394A JP 8032394 A JP8032394 A JP 8032394A JP H07286281 A JPH07286281 A JP H07286281A
Authority
JP
Japan
Prior art keywords
plating
electroless copper
plating solution
copper plating
dipyridyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8032394A
Other languages
Japanese (ja)
Other versions
JP3292419B2 (en
Inventor
Hiroyuki Yokoshima
廣幸 横島
Takeshi Sakai
武 酒井
Takao Takita
隆夫 滝田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP08032394A priority Critical patent/JP3292419B2/en
Publication of JPH07286281A publication Critical patent/JPH07286281A/en
Application granted granted Critical
Publication of JP3292419B2 publication Critical patent/JP3292419B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To lower the plating deposition stress and to improve the the plating deposition rate, plating appearance and stability of electroless copper plating soln. by adding alpha,alpha'-dipyridyl, mercaptosuccinic acid and a cyano complex compd. to the soln. CONSTITUTION:About 0.5-50mg/l alpha,alpha'-dipyridyl, about 0.1-20mg/l mercaptosuccinic acid and about 1-50mg/l cyano complex compd. are added to an electroless copper plating soln. consisting essentially of a cupric salt, copper complexing agent, reducing agent and pH regulator. The soln. is preferably controlled to about pH 11.80 to 13.00. Sodium ferrocyanide, sodium ferricyanide, etc., are used as the cyano complexing agent.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、プリント配線板の製造
に使用される無電解銅めっき液に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electroless copper plating solution used for manufacturing printed wiring boards.

【0002】[0002]

【従来の技術】従来、プリント配線板の製造に使用され
ている無電解銅めっき液は、硫酸第二銅などの2価の銅
塩、エチレンジアミン四酢酸などの2価銅イオンのアル
カリ可溶性錯化剤、ホルムアルデヒドなどの還元剤、お
よび水酸化アルカリなどのpH調整剤を主成分としてい
る。
2. Description of the Related Art Conventionally, electroless copper plating solutions used for manufacturing printed wiring boards are divalent copper salts such as cupric sulfate and alkali-soluble complexing of divalent copper ions such as ethylenediaminetetraacetic acid. The main components are agents, reducing agents such as formaldehyde, and pH adjusting agents such as alkali hydroxide.

【0003】しかし、この無電解銅めっき液から得られ
るめっき皮膜は、一般に脆く、液の安定性が悪いという
問題点があった。これを改善するために、特開昭52−
1733号公報、または特開昭43−12966号公報
には、シアン化ナトリウムなどの無機シアノ化合物、
α,α'-ジピリジル、エチルアミノエタノールアミン、
ロダニンなどの窒素系有機化合物、チオ尿素、ベンゾチ
アゾール、2−メルカプトベンゾチアゾール、硫化カリ
ウムなどのイオウ系化合物など各種の添加剤を用いるこ
とが記載されている。
However, the plating film obtained from this electroless copper plating solution is generally brittle and has a problem that the stability of the solution is poor. In order to improve this, Japanese Patent Laid-Open No. 52-
1733 or JP-A-43-12966, an inorganic cyano compound such as sodium cyanide,
α, α'-dipyridyl, ethylaminoethanolamine,
It is described that various additives such as nitrogen-based organic compounds such as rhodanine, thiourea, benzothiazole, 2-mercaptobenzothiazole, and sulfur-based compounds such as potassium sulfide are used.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、シアン
化ナトリウムなどの無機シアノ化合物を含むめっき液
は、スルーホールの内壁基材との密着性が悪く、めっき
析出応力が高いので、スルーホール内壁に半円球状の膨
れが生じることが多い。この膨れは、プリント配線板の
製造工程中で容易に剥がれやすく、スルーホールボイド
を引き起こす大きな要因となっている。
However, the plating solution containing an inorganic cyano compound such as sodium cyanide has poor adhesion to the base material of the inner wall of the through hole and has a high plating precipitation stress. Spherical swelling often occurs. This swelling is easy to peel off during the manufacturing process of the printed wiring board, and is a major factor causing a through hole void.

【0005】チオ尿素、ロダニン、硫化カリウムなどの
窒素系有機化合物やイオウ系化合物を添加した場合は、
めっき液の安定性を向上させるには有効であるが、析出
速度を抑制し、また析出銅の外観を悪くするという課題
がある。
When a nitrogen-based organic compound such as thiourea, rhodanine or potassium sulfide or a sulfur-based compound is added,
Although effective for improving the stability of the plating solution, there are problems that the deposition rate is suppressed and the appearance of the deposited copper is deteriorated.

【0006】本発明は、めっき析出応力が低く、めっき
析出速度、めっき外観および液安定性に優れた無電解銅
めっき液を提供することにある。
An object of the present invention is to provide an electroless copper plating solution which has a low plating deposition stress and is excellent in plating deposition rate, plating appearance and solution stability.

【0007】[0007]

【課題を解決するための手段】本発明の無電解銅めっき
液は、第二銅塩、銅錯化剤、還元剤およびpH調整剤を
主成分とする無電解銅めっき液に、α,α'-ジピリジ
ル、メルカプトコハク酸およびシアノ錯化合物を加えた
ことを特徴とする。
The electroless copper plating solution of the present invention is an electroless copper plating solution containing a cupric salt, a copper complexing agent, a reducing agent and a pH adjuster as the main components. It is characterized by adding'-dipyridyl, mercaptosuccinic acid and a cyano complex compound.

【0008】すなわち、基本組成とする無電解銅めっき
液は、第二銅塩、銅錯化剤、還元剤および水酸化アルカ
リなどのpH調整剤からなる水溶液である。銅言として
の第二銅塩には、硫酸銅・5水和物などを用いることが
でき、銅錯化剤には、エチレンジアミン四酢酸およびそ
の塩が使用でき、還元剤には、ホルムアルデヒドまたは
その水溶液が使用でき、また、pH調整剤には、水酸化
アルカリを用い、めっき液のpHが11.80〜13.
00の範囲となるように添加して調整することが好まし
い。
That is, the electroless copper plating solution having a basic composition is an aqueous solution containing a cupric salt, a copper complexing agent, a reducing agent and a pH adjusting agent such as an alkali hydroxide. Copper sulfate, pentahydrate, etc. can be used as the cupric salt as a copper word, ethylenediaminetetraacetic acid and its salt can be used as the copper complexing agent, and formaldehyde or its salt as the reducing agent. An aqueous solution can be used, an alkali hydroxide is used as the pH adjuster, and the pH of the plating solution is 11.80 to 13.
It is preferable to add and adjust the content to be in the range of 00.

【0009】本発明は、上記基本組成にさらにα,α'-
ジピリジル、メルカプトコハク酸およびシアノ錯化合物
を添加したことを特徴とするものである。α,α'-ジピ
リジルのめっき液中での濃度は、0.5〜50mg/l、更
に好ましくは1〜20mg/lで使用する。α,α'-ジピリ
ジルの濃度が0.5mg/l未満では、安定性が低く、50
mg/lを越えるとめっき析出速度が低下する。
In addition to the above basic composition, the present invention further comprises α, α'-
It is characterized by the addition of dipyridyl, mercaptosuccinic acid and a cyano complex compound. The concentration of α, α'-dipyridyl in the plating solution is 0.5 to 50 mg / l, more preferably 1 to 20 mg / l. When the concentration of α, α'-dipyridyl is less than 0.5 mg / l, the stability is low and 50
If it exceeds mg / l, the plating deposition rate will decrease.

【0010】メルカプトコハク酸のめっき液中での濃度
は、好ましくは0.1〜20mg/l、更に好ましくは1〜
10mg/lで使用する。メルカプトコハク酸の濃度が0.
1mg/l未満では、安定性が低く、20mg/lを越えるとめ
っき析出速度が低下する。
The concentration of mercaptosuccinic acid in the plating solution is preferably 0.1 to 20 mg / l, more preferably 1 to
Used at 10 mg / l. The concentration of mercaptosuccinic acid is 0.
If it is less than 1 mg / l, the stability is low, and if it exceeds 20 mg / l, the plating deposition rate decreases.

【0011】また、シアノ錯化合物には、フェロシアン
化ナトリウム、フェロシアン化カリウム、フェリシアン
化ナトリウム、フェリシアン化カリウムなどが使用でき
る。このシアノ錯化合物のめっき液中での濃度は、好ま
しくは1〜50mg/l、更に好ましくは5〜30mg/lであ
る。シアノ錯化合物の濃度が1mg/l未満では、めっき外
観が悪くなり、50mg/lを越えるとスルーホール内に膨
れが発生する。
As the cyano complex compound, sodium ferrocyanide, potassium ferrocyanide, sodium ferricyanide, potassium ferricyanide and the like can be used. The concentration of this cyano complex compound in the plating solution is preferably 1 to 50 mg / l, more preferably 5 to 30 mg / l. If the concentration of the cyano complex compound is less than 1 mg / l, the plating appearance becomes poor, and if it exceeds 50 mg / l, swelling occurs in the through holes.

【0012】[0012]

【作用】本発明の無電解銅めっき液に添加するα,α'-
ジピリジル、メルカプトコハク酸およびシアノ錯化合物
により、めっき析出応力が低く、めっき析出速度、めっ
き外観および液安定性に優れた無電解銅めっき液が得ら
れる。
[Function] α, α'- added to the electroless copper plating solution of the present invention
By using dipyridyl, mercaptosuccinic acid and a cyano complex compound, an electroless copper plating solution having a low plating deposition stress and excellent plating deposition rate, plating appearance and solution stability can be obtained.

【0013】[0013]

【実施例】【Example】

実施例1 両面銅張りガラスエポキシ積層板であるMCL−E67
(日立化成工業株式会社製、商品名)に1.0mm径のド
リルで穴明けし、表面研磨、高圧水洗処理したものを試
料とした。めっき前処理として、試料を、クリーナーコ
ンディショナであるCLC−401(日立化成工業株式
会社製、商品名)に浸漬処理して、表面の清浄化及びコ
ンディショニングした後、銅箔表面のソフトエッチング
及び孔内壁の増感処理液であるHS−202B(日立化
成工業株式会社製、商品名)に浸漬し、密着促進処理液
であるADP−501(日立化成工業株式会社製、商品
名)に浸漬処理を行った。このような前処理を行った試
料を、以下の組成を用いためっき液で、めっき温度40
℃で10分間めっきを行った。 (無電解銅めっき液の主成分) 硫酸銅・5水和物・・・・・・・・・・・・・・・・・・・・10g/l エチレンジアミン四酢酸・・・・・・・・・・・・・・・・・30g/l ホルムアルデヒド(37%)・・・・・・・・・・・・・・・10ml/l 水酸化アルカリ・・・・・上記組成と合わせてpHを12.50にする量 (添加剤) α,α'-ジピリジル・・・・・・・・・・・・・・・・・・・・1mg/l メルカプトコハク酸・・・・・・・・・・・・・・・・・・・・1mg/l シアノ錯化合物 フェロシアン化カリウム・・・・・・・・・・・・・・・・5mg/l
Example 1 MCL-E67 which is a double-sided copper-clad glass epoxy laminate
(Hitachi Chemical Co., Ltd., trade name) was drilled with a 1.0 mm diameter drill, surface-polished, and subjected to high-pressure water washing to obtain a sample. As a pretreatment for plating, the sample was immersed in CLC-401 (trade name, manufactured by Hitachi Chemical Co., Ltd.), which is a cleaner conditioner, to clean and condition the surface, and then soft etching and holes on the copper foil surface. Immerse in the inner wall sensitizing solution HS-202B (Hitachi Chemical Co., Ltd., trade name) and the adhesion promoting treatment solution ADP-501 (Hitachi Chemical Co., Ltd., trade name). went. The sample that has been subjected to such pretreatment is treated with a plating solution having the following composition at a plating temperature of 40.
The plating was performed at 10 ° C for 10 minutes. (Main component of electroless copper plating solution) Copper sulphate pentahydrate ... 10g / l Ethylenediaminetetraacetic acid ...・ ・ ・ ・ ・ ・ ・ ・ 30g / l Formaldehyde (37%) ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ 10ml / l Alkali hydroxide ・ ・ ・ pH together with the above composition Amount to make 12.50 (additive) α, α'-dipyridyl ・ ・ ・ ・ ・ ・ 1mg / l Mercaptosuccinic acid ・ ・ ・ ・・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ 1 mg / l Cyano-complex compound Potassium ferrocyanide ・ ・ ・ 5 mg / l

【0014】実施例2 実施例1と同じ主成分の無電解銅めっき液に、以下の組
成の添加剤を用い、実施例1と同じめっき条件、めっき
前処理にてめっきを行った。 (添加剤) α,α'-ジピリジル・・・・・・・・・・・・・・・・・・・・20mg/l メルカプトコハク酸・・・・・・・・・・・・・・・・・・・・10mg/l フェロシアン化カリウム・・・・・・・・・・・・・・・・・・30mg/l
Example 2 Plating was performed under the same plating conditions and plating pretreatment as in Example 1, using an electroless copper plating solution containing the same main components as in Example 1 with the additives having the following compositions. (Additive) α, α'-dipyridyl ・ ・ ・ ・ ・ ・ ・ ・ 20mg / l Mercaptosuccinic acid ・ ・ ・ ・ ・ ・ ・ ・・ ・ ・ ・ 10mg / l Potassium ferrocyanide ・ ・ ・ ・ 30mg / l

【0015】比較例1 実施例1と同じ主成分の無電解銅めっき液に、以下の組
成の添加剤を用い、実施例1と同じめっき条件、めっき
前処理にてめっきを行った。 α,α'-ジピリジル・・・・・・・・・・・・・・・・・・・・10mg/l シアン化ナトリウム・・・・・・・・・・・・・・・・・・・・10mg/l
Comparative Example 1 An electroless copper plating solution containing the same main components as in Example 1 was used, and an additive having the following composition was used, and plating was performed under the same plating conditions and plating pretreatment as in Example 1. α, α'-dipyridyl ・ ・ ・ ・ ・ ・ 10mg / l Sodium cyanide ・ ・ ・ ・..10 mg / l

【0016】比較例2 実施例1と同じ主成分の無電解銅めっき液に、以下の組
成の添加剤を用い、実施例1と同じめっき条件、めっき
前処理にてめっきを行った。 α,α'-ジピリジル・・・・・・・・・・・・・・・・・・・・10mg/l 硫化カリウム・・・・・・・・・・・・・・・・・・・・・・・1mg/l
Comparative Example 2 An electroless copper plating solution having the same main components as in Example 1 was prepared using the additives having the following compositions, under the same plating conditions and plating pretreatment as in Example 1. α, α'-dipyridyl ・ ・ ・ ・ ・ ・ ・ ・ 10mg / l Potassium sulfide ・ ・ ・ ・ ・ ・..... 1 mg / l

【0017】めっきの外観は、目視にて評価し、評価結
果は、目視の色を示す。膨れは、それぞれの試料の穴1
00について、試料を精密低速切断機を用いてスルーホ
ールの中心で切断後、実体顕微鏡で膨れの発生した穴数
を数えることにより評価した。液の安定性は、亜酸化銅
(Cu2O)を5mg/l添加し5時間めっき後、ビーカー
の底に析出した分解銅が発生すれば液の安定性が低く、
その分解銅の発生の有無により評価した。めっき析出量
は、SUS板上に前記と同様のめっき前処理を施し、め
っきを行い、めっき前後の重量差から算出した。各評価
結果を表1に示す。
The appearance of the plating is visually evaluated, and the evaluation result shows the color visually. Blisters are holes 1 in each sample
Sample No. 00 was evaluated by cutting the sample at the center of the through hole using a precision low speed cutting machine and then counting the number of holes in which blistering occurred with a stereoscopic microscope. The stability of the liquid is low if copper oxide (Cu 2 O) is added at 5 mg / l and plated for 5 hours, and if decomposed copper deposited on the bottom of the beaker occurs,
It was evaluated by the presence or absence of generation of the decomposed copper. The plating deposition amount was calculated from the difference in weight before and after plating after performing the same plating pretreatment on the SUS plate as described above. The evaluation results are shown in Table 1.

【0018】[0018]

【表1】 [Table 1]

【0019】[0019]

【発明の効果】以上に説明したように、本発明により、
めっき析出応力が低く、めっき析出速度、めっき外観お
よび液安定性に優れた無電解銅めっき液を提供すること
ができる。
As described above, according to the present invention,
It is possible to provide an electroless copper plating solution which has a low plating deposition stress and is excellent in plating deposition rate, plating appearance and solution stability.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】第二銅塩、銅錯化剤、還元剤およびpH調
整剤を主成分とする無電解銅めっき液に、α,α’−ジ
ピリジル、メルカプトコハク酸およびシアノ錯化合物を
加えたことを特徴とする無電解銅めっき液。
1. An electroless copper plating solution containing a cupric salt, a copper complexing agent, a reducing agent, and a pH adjusting agent as main components, to which α, α'-dipyridyl, mercaptosuccinic acid and a cyano complex compound were added. An electroless copper plating solution characterized in that
JP08032394A 1994-04-19 1994-04-19 Electroless copper plating solution Expired - Lifetime JP3292419B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08032394A JP3292419B2 (en) 1994-04-19 1994-04-19 Electroless copper plating solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08032394A JP3292419B2 (en) 1994-04-19 1994-04-19 Electroless copper plating solution

Publications (2)

Publication Number Publication Date
JPH07286281A true JPH07286281A (en) 1995-10-31
JP3292419B2 JP3292419B2 (en) 2002-06-17

Family

ID=13715058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08032394A Expired - Lifetime JP3292419B2 (en) 1994-04-19 1994-04-19 Electroless copper plating solution

Country Status (1)

Country Link
JP (1) JP3292419B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7473307B2 (en) * 2007-03-13 2009-01-06 Samsung Electronics Co., Ltd. Electroless copper plating solution, method of producing the same and electroless copper plating method
CN109628915A (en) * 2017-10-06 2019-04-16 罗门哈斯电子材料有限责任公司 Stable electroless copper composition and the on substrate method of electroless copper
CN115522237A (en) * 2022-10-11 2022-12-27 广东利尔化学有限公司 Additive capable of improving stability of electro-coppering solution

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7473307B2 (en) * 2007-03-13 2009-01-06 Samsung Electronics Co., Ltd. Electroless copper plating solution, method of producing the same and electroless copper plating method
CN109628915A (en) * 2017-10-06 2019-04-16 罗门哈斯电子材料有限责任公司 Stable electroless copper composition and the on substrate method of electroless copper
CN109628915B (en) * 2017-10-06 2021-01-26 罗门哈斯电子材料有限责任公司 Stable electroless copper compositions and methods for electroless copper plating on substrates
CN115522237A (en) * 2022-10-11 2022-12-27 广东利尔化学有限公司 Additive capable of improving stability of electro-coppering solution

Also Published As

Publication number Publication date
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