JPH07284738A - Washing apparatus - Google Patents

Abstract

PURPOSE:To enable effective local washing in good yield by providing a washing apparatus with a washing device consisting of an inner pipe supplying a washing soln. under constant pressure and an outer peripheral pipe recovering the washing soln. by recovery force larger than supply force and a transfer mechanism moving the washing device and a surface to be washed in a contact state. CONSTITUTION:The washing apparatus is constituted of a washing device 10 consisting of an inner pipe 11 supplying a washing soln. under a specific pressure and an outer peripheral pipe 12 recovering the washing soln. by recovery force larger than the supply force of the washing soln. of the inner pipe 11, a transfer mechanism 20 moving the surface of an object 30 to be washed and the washing device 10 in an X-Y direction in a contact state and a pump supplying and recovering the washing soln. When the supply pressure of the washing soln. from the inner pipe 11 is set, for example, to 0.7kg/cm<2> or more and the suction and recovery pressure of the washing soln. of the outer peripheral pipe 12 is set to 1.2 times the supply pressure or more to recover the washing soln., air bubbles are formed on the surface to be washed and a cavitation phenomenon is generated to wash the object to be washed. Since this washing apparatus is constituted so as to be automatically subjected to ON/OFF control, only a necessary part can be selectively washed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus for cleaning electronic parts such as color filter substrates for liquid crystal displays, photomasks and semiconductor wafers, and more particularly to a cleaning apparatus for cleaning the peripheral parts of these electronic parts. .

[0002]

2. Description of the Related Art Conventionally, an apparatus for cleaning electronic parts such as a color filter substrate for a liquid crystal display and a photomask is an apparatus for cleaning the entire surface of these electronic parts. In some cases, the filter film in the center of the color filter substrate was flawed, which affected the yield in the production of electronic components. Further, although it is possible to locally wash the seal portion and the like in the peripheral portion of the color filter substrate by hand, the work is extremely inefficient.

[0003]

SUMMARY OF THE INVENTION The present invention solves the above problems of a cleaning apparatus for electronic parts such as color filter substrates for liquid crystal displays, and does not affect the filter film surface in the center of the parts, for example. As described above, it is an object of the present invention to provide a cleaning device that can selectively and automatically clean only the peripheral seal portion of a color filter, and therefore can effectively and locally perform local cleaning.

[0004]

In order to achieve the above object in the present invention, there is provided a cleaning device for cleaning a local surface such as a peripheral portion of an object to be cleaned, the inner tube supplying a cleaning liquid at a constant pressure. And a cleaning device including an outer peripheral pipe that recovers the cleaning liquid with a recovery power larger than the cleaning liquid supply power of the inner pipe, and the surface to be cleaned of the object to be cleaned and the cleaning device are relatively in contact with each other in the XY direction. And a transporting mechanism for moving the cleaning device in a predetermined direction.

[0005]

As described above, according to the present invention, the cleaning device has the inner pipe for supplying the cleaning liquid at a constant pressure and the outer peripheral pipe for recovering the cleaning liquid with a recovery force larger than the cleaning liquid supply force of the inner pipe. Therefore, the surface to be cleaned can be cleaned automatically and cleanly. Since the cleaning device of the cleaning device has a mechanism for moving in the XY direction relatively in contact with the surface to be cleaned of the object to be cleaned, only the necessary cleaning surface can be cleaned. Further, since the washing device is carried on the carrier, the washing device carried by the carrier can be freely moved,
Alternatively, the cleaning device is fixed by the fixed arm, and the object to be cleaned can be freely moved, and the local surface such as the peripheral portion of the object to be cleaned can be washed.

[0006]

The present invention will be described in detail with reference to the following examples.
The transport mechanism for moving the surface to be cleaned of the object to be cleaned and the cleaning device in the XY direction in a contact state includes a mechanism for moving the cleaning device in the XY direction and a member to be cleaned in the XY direction. There are two mechanisms, namely, a mechanism for moving the mechanism to each other. Each mechanism will be described.

<Embodiment 1> In the case of a cleaning device having a mechanism in which the cleaning device moves in the XY directions. As shown in FIG. 1 and FIG. 2, the present cleaning apparatus uses an inner pipe (11) which is a cleaning liquid supply pipe for supplying a cleaning liquid at a constant pressure, and a recovery force larger than the cleaning liquid supply force of the inner pipe (11). A cleaning device (1) including an outer peripheral pipe (12) which is a cleaning liquid recovery pipe for recovering the cleaning liquid
0), the cleaning surface of the cleaning object (30) and the cleaning device (10)
And a carrying mechanism (2 for moving the and in the XY direction in a contact state.
0) and a rotary pump (not shown) for supplying and collecting the cleaning liquid.

The carrier mechanism (20) moves the carrier (27) carrying the cleaning device, the X-axis rail (24) for mounting the carrier and moving it to the left and right in the X direction, and the carrier to the left and right. It comprises a wire (25) and a support shaft (23) which moves in the Y direction orthogonal to the X direction. The detailed structure is as follows.

A carrier (27) carrying a cleaner (10)
Are mounted on the X-axis rail (24). A wire (25) is attached to the end of the carrier (27), and the tip of the wire is one of the rotating wheels (22, 22) installed at both ends of the X-axis rail (24). To the other rotary wheel (22), and through this rotary wheel (22) is connected to the end of the carrier (27) to which the wire (25) is not attached. When the rotating wheel (22) is rotated by the power from the drive unit (21), the carrier (27) has a structure capable of moving along the X-axis rail (24) via the wire (25). . Support shafts (23, 23) are provided from the vicinity of the rotating wheels (22, 22) installed at both ends of the X-axis rail (24) toward the Y-axis direction orthogonal to the X-axis rail (24). A feed screw (26) is formed near one of the support shafts (23). The carrier (27) has a structure that can be moved also in the Y-axis direction by rotating the feed screw (26) back and forth. The cleaning device (10) has a structure capable of covering the entire surface of the object to be cleaned (30). A rubbing body (13) made of felt, cloth, bristles or the like may be attached to the tip of the washer (10). The role of the rubbing body is to improve the accuracy of the cleaning range, improve the efficiency of collecting the cleaning liquid, and improve the effect of cavitation.

When cleaning the object to be cleaned, the type of cleaning liquid used is preferably water, an alkaline aqueous solution, a neutral detergent such as water, and an inner pipe (cleaning liquid supply pipe) (11) and an outer peripheral pipe (cleaning liquid recovery pipe). ) Desirable dimensions such as the diameter of (12) are shown in FIG. 2, where the inner diameter of the inner tube is a, the inner diameter of the outer tube is b,
The tip of the washer has a structure in which the inner pipe is slightly recessed. If the step between the inner pipe and the outer pipe is c, the desired size range for each is 2 mm ≤ a ≦ 6 mm a × 1.5 mm ≦ b ≦ a × 3.0 mm a × 0.3 mm ≦ c ≦ a × 1.5 mm is good, and the supply liquid pressure from the inner pipe (cleaning liquid supply pipe) (11) is 0.7 kg / cm. ^{When the} cleaning liquid is recovered by setting the suction liquid recovery pressure from the outer peripheral pipe (cleaning liquid recovery pipe) (12) to 1.2 times the supply liquid pressure or more, bubbles are created on the surface to be cleaned of the object to be cleaned. A cavitation phenomenon occurs, and this phenomenon is used to clean an object to be cleaned. Since the cleaning device has a mechanism that can automatically control ON-OFF,
Only the required portion can be selectively washed. That is, the local surface such as the peripheral portion can be cleaned.

<Embodiment 2> In the case of a cleaning apparatus having a mechanism in which an object to be cleaned moves in the XY directions. As shown in FIG.
The present cleaning apparatus includes an inner pipe (51) which is a cleaning liquid supply pipe for supplying the cleaning liquid at a constant pressure, and an outer periphery which is a cleaning liquid recovery pipe for recovering the cleaning liquid with a recovery force larger than the cleaning liquid supply force of the inner pipe (51). A cleaning device (50) including a pipe (52), a carrier mechanism (60) for moving the surface to be cleaned of the cleaning object (70) and the cleaning device (50) in the XY directions in a contact state. , A rotary pump (not shown) for supplying and collecting the cleaning liquid.

The carrier mechanism (60) is provided with an X stage (62) for moving the body to be cleaned (70) in the X direction, and is movable on the X stage in the Y direction orthogonal to the X direction. , Y stage which is slightly smaller than the X stage (63)
Etc. The detailed structure is as follows.

The flat X stage (62) has a drive unit (61) for moving the X stage (62) in the X direction, and a drive shaft for transmitting the movement of the drive unit (61) to the X stage. (66) and two X-axis rails (64) for guiding the X stage in the X direction, etc., and an X stage movable on the X stage (62) in the Y direction orthogonal to the X direction. The Y stage (63), which is a flat plate having a size slightly smaller than that of the Y stage (63), drives the Y stage (63) in the Y direction and transfers the power of the drive unit to the Y stage (63). Transmission drive shaft (68) and Y
Two Y-axis rails (65) for guiding the stage in the Y direction are provided and installed, and the Y stage (63) is designed so that the body (70) to be cleaned can be fixed.

The object to be cleaned (70) is cleaned as follows. That is, by freely moving the X stage and the Y stage, the cleaning device (50) fixed to a fixed portion by the fixed arm (53) rubs the entire surface or a part of the object to be cleaned (70). Do it. Various conditions at the time of cleaning are the same as those in the case of the above-described cleaning device having a mechanism in which the cleaning device moves in the XY directions.

[0015]

As described above, according to the present invention, since the local surface of the object to be cleaned can be selectively and automatically cleaned, efficient and high-yield cleaning can be performed.
As a result, the cleaning device can be downsized and the running cost can be reduced.

[Brief description of drawings]

FIG. 1 is a side view illustrating an embodiment of the present invention.

FIG. 2 is an enlarged explanatory view of the tip portion of the cleaning device showing the embodiment of the present invention.

FIG. 3 is a perspective explanatory view showing another embodiment of the present invention.

[Explanation of symbols]

 10: Cleaning device 11: Inner pipe (cleaning liquid supply pipe) 12: Outer peripheral pipe (cleaning liquid recovery pipe) 13: Rubbing body 20: Carrying mechanism 21: Drive device 22: Rotating wheel 23: Support Shaft 24 X-axis rail 25 Wire 26 Feed screw 27 Carrier 30 Washer 50 Washer 51 Inner pipe (washing liquid supply pipe) 52 Outer pipe (washing liquid recovery) Pipe 53) Fixed arm 60 Carrying mechanism 61 Drive unit 62 X stage 63 Y stage 64 X axis rail 65 Y axis rail 66 Drive shaft 67 Drive unit 68 ... Drive shaft 70 ... Cleaning object a ... Inner tube inner diameter b ... Outer peripheral tube inner diameter c ... Step between inner tube and outer tube

Claims (1)

[Claims] 1. A cleaning device for cleaning a local surface such as a peripheral portion of an object to be cleaned, wherein the inner pipe supplies the cleaning liquid at a constant pressure, and the cleaning liquid is recovered with a recovery force larger than the cleaning liquid supply force of the inner pipe. A cleaning device comprising: a cleaning device including an outer peripheral pipe, and a carrier mechanism for relatively moving the surface to be cleaned of the cleaning target and the cleaning device in the XY directions in a contact state. .