JPH07274542A - Two-dimensional electrostatic actuator - Google Patents

Abstract

PURPOSE:To realize movement in the two-dimensional direction by arraying electrodes in the two-dimensional directions on the same surface in the electrodes arranged in two dimensions in a woven manner and reducing the sizes of the stator and the rotor. CONSTITUTION:A stator 1 with woven-shaped fixed electrodes disposed between insulating films and consisting of mutually crossing first insulating electrode wires 5 and second insulating electrode wires 6 and a rotor 7 placed on the stator 1 are provided, mobile electric fields are generated around the woven- shaped fixed electrodes by applying alternating voltage to the woven-shaped fixed electrodes, and the rotor 7 is moved by coulomb's force.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic actuator, and more particularly to a two-dimensional electrostatic actuator used in home appliances, industrial machines, toys, optical devices and inspection devices.

[0002]

2. Description of the Related Art Conventionally, the inventors of the present application have already proposed that
The multiple-phase (three-phase) linear electrodes generate a Coulomb force by supplying multiple-phase (three-phase alternating current) to the stator formed in the dielectric, and move the movable member having the movable sheet or the movable plate. The electrostatic actuator to be driven is Japanese Patent Application No. 4-225551.
It has been proposed as an issue.

Further, the present inventors have already proposed a carrying device having an electrostatic actuator in which a stator and a mover are opposed to each other and driven by Coulomb force, as disclosed in Japanese Patent Application No. 4-95.
Proposed as No. 475.

[0004]

However, in the conventional device described above, the moving direction of the mover of the actuator is uniaxial (X direction), and two-dimensional (X / Y direction) movement having a greater degree of freedom is not possible. Not achieved. These are largely related to the structure of the stator electrode. Currently, stator electrodes are made on flexible substrates. According to this manufacturing method, the electrodes for one-dimensional driving can have the same electrode installation surface, but when forming a two-dimensional electrode, the electrodes are laminated in two layers with an insulating film sandwiched therebetween.

In this case, the distance (gap) from the surface of the stator to the electrode is the difference between the electrode thickness and the insulating film in the case of one layer or two layers. In the electrostatic actuator, the gap from the electrode to the mover has a great influence on the driving force generated in the mover.Therefore, when the gap is different between layers, the Coulomb force of the electrode in the lower layer becomes smaller and The same electric field cannot be generated, and the same driving force cannot be obtained in the two-dimensional direction.

Further, when the electrode has a two-layer structure, the weight of one film for insulating the layers increases, and the total weight of the stator increases, which causes a decrease in the acceleration of the mover.
In order to solve the above-mentioned problems, the present invention is a two-dimensionally arranged electrode in a woven shape, in which electrodes in the two-dimensional direction are arranged in the same plane, and the stator and the mover are made compact and the two-dimensional direction is made. It is an object of the present invention to provide a two-dimensional electrostatic actuator that realizes movement to the.

[0007]

In order to achieve the above-mentioned object, the present invention is a two-dimensional electrostatic actuator, wherein a first insulated electrode wire and a second insulated electrode wire arranged between insulating films and crossing each other are provided. A stator having a woven fixed electrode composed of an insulated electrode wire and a mover mounted on the stator are provided, and by applying an alternating voltage to the woven fixed electrode, the periphery of the fixed electrode is provided. A moving electric field is generated to move the mover by Coulomb force.

[0008]

According to the present invention, as described above, the stator having the woven fixed electrode which is arranged between the insulating films and is composed of the first insulating electrode wire and the second insulating electrode wire intersecting each other is provided. A movable element is mounted on the stator, an alternating voltage is applied to the woven fixed electrode, a moving electric field is generated around the fixed electrode, and the movable element can be moved by Coulomb force. it can.

Further, since the insulated electrode wires which are orthogonal to each other are arranged so as to be intertwined with each other, the electrodes in the X direction and the Y direction can be placed on the same plane, and a compact two-dimensional electrostatic actuator can be constructed. Furthermore, by providing an insulating electrode wire for the stator and an insulating electrode wire for the mover and applying an alternating voltage to both insulating electrode wires, the driving force is large,
It is possible to configure a compact two-dimensional electrostatic actuator having a large force density.

[0010]

Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is a perspective view of a two-dimensional electrostatic actuator showing a first embodiment of the present invention, FIG. 2 is a sectional view of the two-dimensional electrostatic actuator, and FIG. 3 is an exploded perspective view of a stator of the two-dimensional electrostatic actuator. FIG. 4 is a perspective view of a fixed electrode of the stator, and FIG. 5 is a plan view of a fixed electrode of the stator.

As shown in these figures, a stator 1 of a two-dimensional electrostatic actuator has a first insulating film 2 on the lower surface and a second insulating film 3 on the upper surface, and has a predetermined equal interval in the X direction. A woven fixed electrode 4 composed of a first insulated electrode wire 5 which is arranged in the Y direction and a second insulated electrode wire 6 which is arranged in the Y direction intersecting with the first insulated electrode wire 5 and having a predetermined equal interval, in other words, A fixed electrode formed of an insulating fixed electrode wire having a shape in which weft yarns and warp yarns are braided,
And the second insulating film 2 are closely arranged.

Here, as the insulated electrode wires 5 and 6, as shown in FIG. 4, conductive wires 5a and 6a on which insulating coatings 5b and 6b are formed are used. In this way, a plurality of insulated electrode wires are braided in parallel and at equal intervals and orthogonal to each other, and the material of the conductive wires 5a and 6a is copper,
Gold, silver, aluminum, nichrome, stainless steel, and conductive polymers are used. As the insulating coatings 5b and 6b, polyimide, polyimide amide, polyethylene, polyurethane, vinyl chloride or the like is used. Insulating film is polyethylene, polypropylene, polyimide, etc. 1
A material having a surface resistivity of 0 ¹⁵ Ω / □ or more is selected.

The insulated electrode wires are arranged in a plurality of phases,
Alternating voltage is applied. In FIG. 5, the X-side and Y-side insulated electrode wires 5 and 6 are wired in three phases. These have a fixed electrode 4 in which a first insulated electrode wire 5 (equal-spaced in the X direction) and a second insulated electrode wire 6 (equally-spaced in the Y direction) are braided, on which, As shown in FIGS. 1 and 2, the insulator layer 8 / resistor layer 9 (for example, 10 ¹² to 10 ¹⁶
Ω / □) or an insulator layer / resistor layer / insulator layer is placed on the mover 7.

Therefore, when an alternating voltage is applied to the X-side three-phase wirings A, B, C, the mover 7 is driven in the X direction.
When the alternating voltage is applied to the Y-side three-phase wirings D, E, F, the mover 7 is driven in the Y direction. That is, the mover 7 can be a so-called two-dimensional electrostatic actuator that can be driven not only in the X direction but also in the Y direction.

An insulating film (cover film)
As 2 and 3, for example, a PET (polyethylene terephthalate) film having a thickness of 5 μm is used, and the woven fixed electrode 4 is sandwiched between the insulating films 2 and 3 via an adhesive, and an epoxy resin (Plastic cast made by Nisiri) is used. It was tightly fixed and integrated to obtain a stator 1. Also, insulating films 2 and 3
As the material, polymer materials such as methacrylic resin, polyester resin, polypropylene resin and polyethylene resin, engineering plastics, and inorganic materials having high surface resistivity can be used.

FIG. 6 is a perspective view of a two-dimensional electrostatic actuator showing a second embodiment of the present invention, FIG. 7 is a sectional view of the two-dimensional electrostatic actuator, and FIG. FIG. 3 is a perspective view in which an insulating film is made transparent on a lower surface and an upper surface in order to do so. As shown in these figures, 11 is a stator, and a mover 21 is mounted on this stator 11.

Similar to FIGS. 3 and 4, the stator 11 is provided with a first insulating film 12 on the lower surface and a second insulating film 13 on the upper surface, and is arranged in the X direction at a predetermined equal interval. A woven fixed electrode 14 composed of one insulated electrode wire 15 and a second insulated electrode wire 16 which intersects with the first insulated electrode wire 15 and is arranged in the Y direction at predetermined intervals, in other words, a weft thread and a warp thread. A fixed electrode formed of an insulative fixed electrode wire having a braided shape is closely arranged between the first insulating film 12 and the second insulating film 13.

Like the stator 11, the mover 21 has a first insulating film 22 on the lower surface and a second insulating film 2 on the upper surface.
3 is provided, and a first insulated electrode wire 25 is provided in the X direction and has a predetermined equal spacing, and a second insulated electrode wire 26 is provided in the Y direction having a predetermined equal spacing and intersecting with the first insulated electrode wire 25. A woven movable electrode 24 made of, in other words, a movable electrode formed by an insulating electrode wire having a shape in which a weft yarn and a warp yarn are braided is closely arranged between the first insulating film 22 and the second insulating film 23. .

As shown in FIG. 9, the woven fixed electrode 14 of the two-dimensional electrostatic actuator having the above-described structure has an R phase (sinωt) and an S phase [sinωt + (2π /
3)], the T phase [sinωt + (4π / 3)] is A, B,
It is applied to the C, D, E, and F lines. As shown in FIG. 9, the movable electrode 24 also has an R phase (sin ωt), an S phase [sin ωt + (2π / 3)], and a T phase [sin ωt +].
(4π / 3)] is applied to the G, H, I, J, K, L lines. Then, the mover 21 can be moved in the direction shown in FIG.

Actually, not only in the case shown in FIG. 9, but also in a general XY stage, it is possible to move in a two-dimensional free direction. In this way, by applying an alternating voltage to both the insulated electrode wires of the stator and the mover, it is possible to obtain a compact two-dimensional electrostatic actuator having a large driving force and a large force density.

In each of the above embodiments, the three-phase AC voltage is used as the alternating voltage. However, the alternating voltage is not limited to this, and any step-like voltage may be used as long as it produces a Coulomb force for moving the powder. Alternating voltage of 3 phase AC voltage other than 3 phase may be used. For example, the waveform of the applied voltage is a rectangular wave,
It may have a triangular wave of a sine wave or other shapes. Further, it goes without saying that the mover can be used as a table on which a sample or the like is mounted, with the insulating film surface on the upper surface serving as a table surface.

The present invention is not limited to the above embodiments, and various modifications can be made based on the spirit of the present invention, and these modifications are not excluded from the scope of the present invention.

[0023]

As described in detail above, according to the present invention, by applying an alternating voltage to the first and second insulated electrode wires formed in a woven shape, the two-dimensional flexible directions can be obtained. It is possible to provide a two-dimensional electrostatic actuator capable of moving the mover. Further, since the insulated electrode wires that are orthogonal to each other are arranged so as to be intertwined with each other, the electrodes in the X direction and the Y direction can be installed on the same surface, and a compact two-dimensional electrostatic actuator can be configured.

Furthermore, by providing an insulating electrode wire for the stator and an insulating electrode wire for the mover, and applying an alternating voltage to both insulating electrode wires, a compact two-dimensional electrostatic with a large driving force and a large power density. An actuator can be configured.

[Brief description of drawings]

FIG. 1 is a perspective view of a two-dimensional electrostatic actuator showing a first embodiment of the present invention.

FIG. 2 is a sectional view of a two-dimensional electrostatic actuator showing a first embodiment of the present invention.

FIG. 3 is an exploded perspective view of a stator of the two-dimensional electrostatic actuator showing the first embodiment of the present invention.

FIG. 4 is a perspective view of a fixed electrode of the stator of the two-dimensional electrostatic actuator showing the first embodiment of the present invention.

FIG. 5 is a plan view of a fixed electrode of the stator of the two-dimensional electrostatic actuator showing the first embodiment of the present invention.

FIG. 6 is a perspective view of a two-dimensional electrostatic actuator showing a second embodiment of the present invention.

FIG. 7 is a sectional view of a two-dimensional electrostatic actuator showing a second embodiment of the present invention.

FIG. 8 is a perspective view in which an insulating film is transparent on a lower surface and an upper surface of the two-dimensional electrostatic actuator according to the second embodiment of the present invention in order to more easily understand the wiring of the insulating electrode wire.

FIG. 9 is a diagram showing a voltage application to an insulated electrode wire and a moving direction of a mover of a two-dimensional electrostatic actuator according to a second embodiment of the present invention.

FIG. 10 is a diagram showing a moving direction of a mover of a two-dimensional electrostatic actuator showing a second embodiment of the present invention.

[Explanation of symbols]

 1, 11 Stator 2, 12, 22 First insulating film 3, 13, 23 Second insulating film 4, 14 Woven fixed electrode 5, 15, 25 First insulating electrode wire 5a, 6a Conductor wire 5b, 6b Insulation coating 6,16,26 Second insulation electrode wire 7,21 Mover 8 Insulator layer 9 Resistor layer 24 Woven movable electrode

Claims (2)

[Claims] 1. A stator having (a) a woven fixed electrode, which is arranged between insulating films and has a first insulating electrode wire and a second insulating electrode wire intersecting each other, and (b) the fixing. (C) A moving electric field is generated around the fixed electrode by applying an alternating voltage to the woven fixed electrode, and the mover is moved by Coulomb force. 2-dimensional electrostatic actuator. 2. A stator having (a) a woven fixed electrode which is arranged between insulating films and has a first insulating electrode wire and a second insulating electrode wire which intersect with each other, and (b) the fixing. A movable element having a woven movable electrode that is placed on the child and has a first insulated electrode wire and a second insulated electrode wire that intersect with each other, and (c) the woven fixed electrode and the woven fabric. A two-dimensional electrostatic actuator in which a moving electric field is generated around the electrodes by applying an alternating voltage to the movable electrodes and the mover is moved by Coulomb force.