JP5309753B2 - controller - Google Patents

Description

  The present invention belongs to the technical field of electrostatic actuators. In particular, the present invention relates to a controller for an electrostatic actuator capable of rotating a moving sheet as well as linearly moving the moving sheet along the surface of a driving sheet.

As a form of the electrostatic actuator, an invention of a thin electrostatic actuator using a film is known (Patent Document 1). In this electrostatic actuator, a stator is laminated on a surface of a glass epoxy substrate by strip-like electrodes (for example, 100 pieces with an interval of 1.27 mm), an epoxy resin applied thereon, and the epoxy resin. Film (for example, a PET film having a thickness of 0.1 mm). In addition, the mover is coated with an antistatic agent on a film-like insulator layer (for example, a PET film having a thickness of 0.1 mm) and a high resistance layer (for example, a PET film having a thickness of 0.1 mm, and has a surface resistance of 10 ¹² to 10 ¹⁶ Ω / □).
This conventional electrostatic actuator includes three electrode groups including a first electrode group, a second electrode group, and a third electrode group embedded in an insulator constituting the stator. For these electrode groups (first electrode group, second electrode group, third electrode group), (+ V, −V, 0) → (−V, + V, −V) → (0, + V) , -V)-> (-V, -V, + V)-> (-V, 0, + V)-> (+ V, -V, -V)-> (+ V, -V, 0) as a cycle Then, the mover can continue to move.
JP-A-2-285978

  In such an electrostatic actuator, when the position restriction is not performed with respect to the movement of the moving sheet, the moving sheet is displaced and cannot repeat the reproducible movement. For example, the left and right positions of the moving sheet are shifted while the moving sheet is moved back and forth, and the moving sheet is rotated and inclined. The conventional controller that operates the movement of the electrostatic actuator only operates the linear movement of the moving sheet. That is, there is a problem that there is no method other than a combination of linear movements when performing various movements. Therefore, there is a problem that a complicated operation by an operator is required when various movements are made to the moving sheet, or when a moving movement is corrected when the moving sheet is displaced.

  The present invention has been made to solve the above problems. The purpose is to provide an electrostatic actuator controller that is intuitive, easy to understand, and that can easily perform delicate operations.

The controller according to claim 1 of the present invention is a controller for an electrostatic actuator capable of moving the moving sheet in the left-right direction, moving in the up-down direction, and rotating, and moving the sheet in the right direction by pressing the right side. Move the moving sheet in the left direction by pressing the left button, move the moving sheet in the upward direction by pressing the upper side, move the moving sheet in the downward direction by pressing the lower side, and move the moving sheet in the upper right direction by pressing the upper right side. A cross switch for generating a straight command signal that moves the moving sheet in the lower right direction by pressing the lower right, moves the moving sheet in the upper left direction by pressing the upper left, and moves the moving sheet in the lower left direction by pressing the lower left. Rotate the moving sheet clockwise by pressing the cross switch while pressing, and rotate the moving sheet counterclockwise by pressing the cross switch to the left. A pushbutton switch A for generating the command signal, the controller comprising a press the moving program 1 by upper push the cross switch is activated when the are, moved by the upper right push of the cross switch on when pressing program 2 is activated and the movement program 3 is activated by pressing the cross switch to the right when pressed, the movement program 4 is activated by pressing the lower right button of the cross switch when being pressed, and The movement program 5 is activated by pressing down, the movement program 6 is activated by pressing the lower left button of the cross switch when pressed, and the movement program 7 is activated by pressing the left button of the cross switch when pressed. Generates a movement command signal for starting the movement program 8 by pressing the upper left of the cross switch. It is obtained so as to include a because of the push button switch B.

According to the controller of the first aspect of the present invention, there is provided a controller for an electrostatic actuator capable of moving the moving sheet in the left-right direction, moving in the up-down direction, and rotating the right direction by pressing the right side. Move the moving sheet, move the moving sheet left by pressing left, move the moving sheet upward by pressing upward, move the moving sheet downward by pressing down, move the sheet upward by pressing right To move the moving sheet in the lower right direction by pressing the lower right button, moving the moving sheet in the upper left direction by pressing the upper left button, and a cross for generating a straight command signal that moves the moving sheet in the lower left direction by pressing the lower left button. When the switch is pressed, the moving sheet is rotated clockwise by pressing the cross switch to the right. When the switch is pressed, the moving sheet is rotated counterclockwise by pressing the cross switch to the left. That a push-button switch A for generating the rotation instruction signal, the controller having a said mobile program 1 by upper push the cross switch is activated when pressing the push button switch B, press the pushbutton B When the push switch B is pressed, the movement program 2 is started. When the push button switch B is pressed, the movement program 3 is started when the push switch B is pressed. When the push button switch B is pressed, the movement program 2 is started. When the cross switch is pressed to the right, the movement program 4 is activated. When the push button switch B is pressed, the movement program 5 is activated by pressing the cross switch downward. When the push button switch B is pressed, the movement program 4 is activated. When move program 6 is activated by pressing the lower left and pushbutton switch B is pressed The start moving program 7 by the left push the cross switch, the moving the left upper pressing the arrow switch program 8 move command signal for starting is generated when pressing the pushbutton B. That is, it is possible to accurately and easily perform an operation of selecting and executing one of eight types of movement patterns of a moving sheet prepared in advance as a movement program.

Next, embodiments of the present invention will be described with reference to the drawings. An explanatory diagram of the configuration of the controller of the present invention is shown in FIG. An example of the configuration of the controller of the present invention is shown in FIG. 2 as a block diagram. 1 and 2, 1 is a driving sheet, 2 is a moving sheet, 3 is a right-angle driving sheet, 11 is a first driving area, 12 is a second driving area, 100 is a controller, 101 is a cross switch, and 102 is a push button. Button switches A and 103 are push button switches B, 104 is a control unit, 105 is a first power supply unit, 106 is a second power supply unit, and 107 is a third power supply unit.
The portions of the driving sheet 1, the moving sheet 2, and the right-angle driving sheet 3 show an example of the configuration of the electrostatic actuator to which the controller of the present invention is applied. The electrostatic actuator is an electrostatic actuator capable of moving the moving sheet in the left-right direction, moving in the up-down direction, and rotating. Details of this electrostatic actuator will be described later.

  The controller 100 is a controller that performs an output for driving the moving sheet 2 to move in that mode by performing an input instructing the mode of movement of the moving sheet 2 in the electrostatic actuator. Therefore, in the example shown in FIGS. 1 and 2, the controller 100 includes a plurality of switches for an operator to input instructions, a control unit that performs a control calculation based on the inputs, and generates an operation signal, the operation signal And a plurality of power supply units for supplying electric power for driving the movable sheet 2 to the electrostatic actuator. That is, the controller 100 includes a cross switch 101, a push button switch A102, a push button switch B103, a control unit 104, a first power supply unit 105, a second power supply unit 106, and a third power supply unit 107.

The cross switch 101 is a switch that has a cross-shaped instruction input unit and allows an operator to input instructions in four directions (up, down, left, and right) and four oblique directions therebetween. As the cross switch 101, for example, there are provided four switches that turn on (ON) only when pressed up, down, left, and right, and return to off (OFF), that is, an upper switch, a lower switch, a left switch, and a right switch. Depending on the structure of the part, it is not possible to input instructions simultaneously at the top and bottom, and it is not possible to input instructions simultaneously at the left and right, but use a switch that can input instructions in any combination of either the top and bottom be able to.
When the cross switch 101 is pushed upward, only the upper switch is turned on. When the cross switch 101 is pushed down, only the lower switch is turned on. When the cross switch 101 is pushed right, only the right switch is turned on. When the cross switch 101 is pushed left, the left switch is turned on. Only turn on. Also, when the cross switch 101 is pressed to the upper right, only the right switch and the upper switch are turned on. When the cross switch 101 is pressed to the lower right, only the right switch and the lower switch are turned on. When the cross switch 101 is pressed to the left, only the left switch and the upper switch are turned on. When the cross switch 101 is pressed to the lower left, only the left switch and the lower switch are turned on.

  In the controller of the present invention, the cross switch 101 moves the moving sheet in the right direction by pressing the right button, moves the moving sheet in the left direction by pressing the left button, moves the moving sheet in the upward direction by pressing the upper button, and moves the moving sheet downward. To move the moving sheet downward, press the upper right to move the moving sheet to the upper right, press the lower right to move the moving sheet to the lower right, move the moving sheet to the lower left by pressing the lower left, and press the upper left Is a cross switch for generating a rectilinear command signal for moving the moving sheet in the upper left direction.

The push button switch A102 has a push button type instruction input unit and is turned on (ON) only while the button is being pushed, and is turned off (OFF) when released.
In the controller of the present invention, the push button switch A102 rotates the moving sheet clockwise by pressing the cross switch 101 when pressed, and moves counterclockwise by pressing the cross switch 101 left when pressed. This is a pushbutton switch for generating a rotation command signal for rotating the sheet.

The push button switch B103 has a push button type instruction input unit and is turned on (ON) only while the button is pressed, and returns to off (OFF) when released.
In the controller of the present invention, the push button switch B103 is activated when the movement program 1 is activated by pressing the cross switch 101 when pressed, and the movement program 2 is activated by pressing the upper right position of the cross switch 101 when pressed. When the cross switch 101 is pressed, the movement program 3 is started. When the cross switch 101 is pressed, the movement program 4 is started when the cross switch 101 is pressed to the right. When the cross switch 101 is pressed, the movement program 5 is started. Is activated, the movement program 6 is activated by pressing the cross switch 101 to the lower left, and the movement program 7 is activated by pressing the cross switch 101 to the left. Generates a movement command signal that starts the movement program 8 It is a push-button switch of the order.

As shown in FIG. 2, the control unit 104 inputs each on / off signal generated by an instruction input to each of the cross switch 101, the push button switch A 102, and the push button switch B 103. This on / off signal can be grouped into a straight command signal, a rotation command signal, and a movement command signal by a combination of on / off. A signal belonging to the group of straight-ahead command signals is a signal for driving the movable seat 2 in a specific straight-ahead direction determined by a combination of on and off. A signal belonging to the group of rotation command signals is a signal for driving the movable seat 2 in a specific rotation direction determined by a combination of on and off. A signal belonging to the group of movement command signals is a signal for driving the movable seat 2 by a specific movement program determined by a combination of on and off.
Based on these signals, the control unit 104 performs a control calculation and generates an operation signal. The operation signal is output to three power supply units that supply power for driving the movable sheet 2 to the electrostatic actuator, that is, the first power supply unit 105, the second power supply unit 106, and the third power supply unit 107. As the control unit 104, a data processing device such as a microcomputer or a PLC (Programmable Logic Controller) can be used. Details of the control calculation performed by the control unit 104 will be described later.

The first power supply unit 105, the second power supply unit 106, and the third power supply unit 107 receive operation signals output from the control unit 104 and supply power for driving the movable seat 2. That is, the power supply unit operates under the control of the control unit 104. An example of the configuration of the power supply unit in the electrostatic actuator of the present invention is shown in FIG. In FIG. 3, 201 is an input device, 202 is a controller, 203 is a high voltage power supply, 204 is a decoder, and 205 is a switch, and these constitute a power supply unit.
The input unit 201 is a part that inputs a signal for instructing a control mode and outputs the signal to the controller 202. That is, it is a part having a role of an interface, a buffer and the like. The signal includes UP, DOWN, START, STOP, and SPEED. UP is a command signal for moving the moving sheet 2 up and down, and DOWN is a command signal for moving the moving sheet 2 down. Further, START is a command signal for starting the power supply of the high voltage power supply, and STOP is a command signal for stopping the power supply of the high voltage power supply. SPEED is a command signal for determining a frequency in three-phase alternating current.

The controller 202 is a controller that outputs an operation signal for operating the high-voltage power supply 203 and the decoder 204 based on a command signal input from the input device 201.
The high voltage power supply 203 is a power supply that outputs a positive high voltage and a negative high voltage with respect to the ground. The high voltage power supply 203 can change the output voltage at the plus high voltage and the minus high voltage based on the operation signal output from the controller 202. The output voltage range is, for example, 200 to 2000 volts (V).
The decoder 204 combines the operation signal output from the controller 202 into a switching signal for operating the switching unit 205.
The switch 205 switches the output of the high-voltage power supply 203 according to a switch signal that the decoder 204 combines. The output obtained by the switching is, for example, (1) three-phase forward traveling wave, (2) three-phase backward traveling wave, (3) all three outputs plus high voltage, and (4) all three outputs minus High voltage, (5) All three outputs are either ground (0 voltage).

  The contents of the control calculation performed by the control unit 104 will be described. FIG. 4 shows a table indicating the instruction input in the controller 100, the direction of each drive performed by a plurality of drive sheets, and the drive direction as the total action of each drive. The column “controller” in FIG. 4 is a column indicating instruction inputs in the cross switch 101, the push button switch A, and the push button switch B of the controller 100, and the contents of each instruction input are “cross switch”, “A”, “ It is shown individually in the “B” column. In addition, the column of “driving sheet” in FIG. 4 includes the first driving region 11 (see FIG. 5) and the second driving region 12 (see FIG. 5) and the perpendicular driving sheet 3 (see FIG. 5) of the driving sheet 1 (see FIG. 5). 5)), the individual contents of each driving direction are shown in the columns "X1," "X2," and "Y." The “drive direction” column in FIG. 4 shows the drive direction as a combined action of the respective drive directions in the “drive sheet” column. When the moving sheet 2 exists between the first driving area 11 and the second driving area 12 and no other external force such as frictional force or gravity is applied, the driving direction in the “driving direction” column is It will coincide with the direction of movement.

For example, in FIG. In 1, the controller 100 is (cross switch, A, B) = (upper,-,-). At this time, in the cross switch, the control unit 104 inputs a signal indicating that only the upper switch is on, the push button switch A is off, and the push button switch B is off. When the control unit 104 performs the input, “STOP” indicating a stop as an operation signal to the first power supply unit 105 that supplies power to the first drive region 11 and a second power supply that supplies power to the second drive region 12. “STOP” indicating stop is generated as an operation signal for the unit 106, and “UP” indicating forward direction (corresponding to ON of the upper switch) is generated as an operation signal for the third power supply unit 107 that supplies power to the right-angle driving seat 3. Perform control calculations.
When the control unit 104 generates the power, the control unit 104 supplies “STOP” to the input device 201 of the first power source unit 105 that supplies power to the first drive region 11 and the second power source that supplies power to the second drive region 12. “STOP” is output to the input device 201 of the unit 106, and “UP” is output to the input device 201 of the third power supply unit 107 that supplies power to the right-angle driving sheet 3.
The first power supply unit 105 that has input “STOP” from the control unit 104 stops supplying power to the first drive region 11. In addition, the second power supply unit 106 that has input “STOP” from the control unit 104 stops the supply of power to the second drive region 12. The third power supply unit 107 that has input “UP” from the control unit 104 supplies power for moving the movable sheet 2 up to the right-angle driving sheet 3.

For example, in FIG. 4, the controller 100 has (cross switch, A, B) = (lower right, −, −). At this time, in the cross switch, the control unit 104 inputs a signal indicating that only the right switch and the lower switch are on, the push button switch A is off, and the push button switch B is off. When the control unit 104 performs the input, “UP” indicating the forward direction (corresponding to the right switch being turned on) is displayed as an operation signal for the first power supply unit 105 that supplies power to the first drive region 11, and the second drive region. "UP" indicating the forward direction (corresponding to turning on the right switch) as the operation signal for the second power supply unit 106 that supplies power to 12, and the operation signal for the third power supply unit 107 that supplies power to the right-angle drive seat 3 As a result, a control calculation for generating “DOWN” indicating the reverse direction (corresponding to turning on the lower switch) is performed.
When the control unit 104 generates the power, the control unit 104 supplies “UP” to the input device 201 of the first power supply unit 105 that supplies power to the first drive region 11, and the second power source that supplies power to the second drive region 12. “UP” is output to the input device 201 of the unit 106, and “DOWN” is output to the input device 201 of the third power supply unit 107 that supplies power to the right-angle driving sheet 3.
The first power supply unit 105 that has input “UP” from the control unit 104 supplies power for moving the movable seat 2 to the right with respect to the first drive region 11. In addition, the second power supply unit 106 that has input “UP” from the control unit 104 supplies power for moving the movable sheet 2 to the right with respect to the second drive region 12. The third power supply unit 107 that has received “DOWN” from the control unit 104 supplies power for moving the moving sheet 2 downward to the right-angle driving sheet 3.

For example, in FIG. 11, the controller 100 is (cross switch, A, B) = (right, push, −). At this time, in the cross switch, the control unit 104 inputs a signal indicating that only the right switch is on, the push button switch A is on, and the push button switch B is off. When the control unit 104 performs the input, “DOWN” indicating the reverse direction (corresponding to the right switch being turned on) is displayed as an operation signal for the first power supply unit 105 that supplies power to the first drive region 11, and the second drive region. "UP" indicating the forward direction (corresponding to turning on the right switch) as the operation signal for the second power supply unit 106 that supplies power to 12, and the operation signal for the third power supply unit 107 that supplies power to the right-angle drive seat 3 As a result, a control calculation for generating “STOP” indicating a stop is performed. When the control unit 104 generates the power, the control unit 104 supplies “DOWN” to the input device 201 of the first power source unit 105 that supplies power to the first drive region 11 and the second power source that supplies power to the second drive region 12. “UP” is output to the input device 201 of the unit 106, and “STOP” is output to the input device 201 of the third power supply unit 107 that supplies power to the right-angle driving sheet 3.
The first power supply unit 105 that has input “DOWN” from the control unit 104 supplies power to the first drive region 11 to shift the moving sheet 2 to the left. In addition, the second power supply unit 106 that has input “UP” from the control unit 104 supplies power for moving the movable sheet 2 to the right with respect to the second drive region 12. The third power supply unit 107 that has input “STOP” from the control unit 104 stops the supply of power to the right-angle driving sheet 3.

For example, in FIG. In FIG. 17, the controller 100 is (cross switch, A, B) = (up,-, push). At this time, in the cross switch, the control unit 104 inputs a signal indicating that only the upper switch is on, the push button switch A is off, and the push button switch B is on. When the control unit 104 performs the input, the moving program 1 is activated. Similarly, in FIG. In 18, the controller 100 is (cross switch, A, B) = (upper right, −, pressed). At this time, in the cross switch, the control unit 104 inputs a signal indicating that only the right switch and the upper switch are on, the push button switch A is off, and the push button switch B is on. When the control unit 104 performs the input, the control unit 104 starts the movement program 2. Hereinafter, no. The operation of the control unit 104 after 19 is the same.
Note that the meaning of the portion of the table shown in FIG. 4 that has not been described above can be easily understood by referring to the above description, and thus the description thereof is omitted.

  The control unit 104 is a data processing device as described above, and performs data processing operations by using hardware and software thereof. The data processing apparatus includes a calculation unit, a storage unit, and the like. The movement programs 1 to 8 are programs stored in advance in the storage unit. The movement programs 1 to 8 are programs in which operation signals output from the control unit 104 to the respective power supply units are described with the passage of time as parameters, that is, drive patterns. In the controller of the present invention, an operation of selecting and executing one of eight types of driving patterns of a moving sheet prepared in advance as a moving program can be performed accurately and easily.

  The controller has been described above. Next, an electrostatic actuator to which the controller is applied will be described. An explanatory diagram of the configuration of the electrostatic actuator is shown in FIG. In FIG. 5, 1 is a driving sheet, 2 is a moving sheet, 3 is a right-angle driving sheet, 11 is a first driving area, and 12 is a second driving area. In FIG. 5, in order to make the configuration easy to understand, each component is shown as a perspective view. Actually, the driving sheet 1, the moving sheet 2, and the perpendicular driving sheet 3 are superposed in that order. The driving sheet 1 is a driving sheet that can rotate with respect to the moving sheet 2 and can be driven in the X direction in FIG. Further, the right-angle driving sheet 3 is a driving sheet capable of driving in the Y direction in FIG.

The driving sheet 1 is a sheet that drives the moving sheet 2 by generating an electrostatic force between the driving sheet 1 and the moving sheet 2 disposed to face the surface. The drive sheet 1 has at least two drive areas, a first drive area 11 and a second drive area 12. The configuration of the drive sheet 1 is shown in FIG. Also in FIG. 6, the same parts as those in the other figures are denoted by the same reference numerals. In the example shown in FIG. 6, the left side from the center portion of the drive sheet 1 is the first drive region 11, and the right side from the center portion of the drive sheet 1 is the second drive region 12.
In the first drive region 11 of the drive sheet 1, a plurality of electrode lines are arranged in parallel to each other in a direction along the facing surface, and the plurality of electrode lines are arranged in three systems according to the arrangement order. Three terminals (U1, V1, W1) are provided in an integrated connection. Similarly, in the second drive region 12 of the drive sheet 1, a plurality of electrode lines are arranged in parallel to each other in the direction along the facing surface, and the plurality of electrode lines are arranged in the order of arrangement. Accordingly, three systems of terminals (U2, V2, W2) are provided.

The drive directions of the first drive region 11 and the second drive region 12 of the drive sheet 1 are the same. Here, the drive directions are the same, meaning that the linear directions that do not distinguish the forward and reverse directions indicating the drive directions such as front and rear, up and down, left and right are the same, and the arrows that distinguish the forward and reverse directions. It does not mean that the directions are the same.
Further, the first drive region 11 and the second drive region 12 of the drive sheet 1 are juxtaposed in a direction perpendicular to the drive direction. That is, the arrangement direction of the first drive region 11 and the second drive region 12 and the drive direction are orthogonal to each other.
In addition, the first drive region 11 and the second drive region 12 of the drive sheet 1 can be driven independently. The three terminals (U1, V1, W1) formed in the first drive region 11 and the three terminals (U2, V2, W2) formed in the second drive region 12 are electrically connected to each other. It is an independent terminal that does not have. That is, an arbitrary voltage can be independently applied to each of the terminals (U1, V1, W1) and (U2, V2, W2). Therefore, a predetermined voltage is applied to the terminals (U1, V1, W1) for the predetermined driving of the moving sheet 2, and at the same time, another predetermined voltage is applied to the moving sheet 2 for another predetermined driving. Application can be made to the terminals (U2, V2, W2).
.

The right-angle driving sheet 3 is a driving sheet facing the surface opposite to the surface of the moving sheet 2 facing the driving sheet 1 and having a driving direction perpendicular to the driving direction of the driving sheet 1. That is, the right-angle driving sheet 3 is a driving sheet that can drive the moving sheet 2 in the Y direction in FIG. In the example shown in FIG. 5, the perpendicular driving sheet 3 does not perform driving for rotating the movable sheet 2. The right-angle driving sheet 3 does not have two driving areas like the driving sheet 1 but has only one driving area.
The right-angle drive sheet 3 is arranged so that a plurality of electrode lines are parallel to each other in a direction perpendicular to the drive direction, and the plurality of electrode lines are integrated and connected to a plurality of systems according to the arrangement order. A plurality of right-angle drive terminals, that is, terminals (U3, V3, W3) (not shown) are provided. The electrode configuration in the perpendicular drive sheet 3 is the electrode configuration already described with reference to FIG.

The electrode configuration in the first drive region 11 and the second drive region 12 of the drive sheet 1 and the perpendicular drive sheet 3 will be described. An example of the electrode line pattern in each drive region of the drive sheet is shown in FIG. In the drive sheet 1, the electrode lines arranged so that a plurality of lines are parallel to each other in the direction along the surface facing the moving sheet 2 exist in the central portion in the example of the pattern shown in FIG. 7. The left part and the right part sandwiching the central part are connection lines for connecting a plurality of electrode wires to terminals (U, V, W). The terminals (U, V, W), the coupling wires coupled to each of the terminals, and the electrode wires are conductive wires integrated in three systems, and the distinction between terminals, coupling wires, and electrode wires seems meaningless. Here, we distinguish in their roles. That is, the portion of the conductive wire that supplies power from the power supply unit is the terminal (U, V, W), and the portion of the conductive wire that couples the terminal (U, V, W) and the electrode wire to transmit power is connected. The part of the main conductive line on which the electrostatic force acts on the moving sheet 2 and the driving sheet 1 is an electrode line.
In FIG. 7, the U-phase coupling line coupled to the terminal U is disposed on the left side portion, and the W-phase coupling line coupled to the terminal W is disposed on the right side portion. Further, the U-phase coupling line and the W-phase coupling line are arranged on the surface of the drive seat 1. On the other hand, the V-phase coupling line coupled to the terminal V is disposed on the back surface of the driving sheet 1. In the example of the pattern shown in FIG. 7, the V-phase coupling line is divided into a left part and a right part. In order to arrange the V-phase electrode line coupled to the terminal V on the front surface, electrical connection is made from the V-phase coupled line disposed on the back surface to the V-phase coupled line disposed on the surface by a through hole, A pattern in which a V-phase coupling line and a V-phase electrode line arranged on the surface are coupled is used.

The electrostatic actuator drive sheet 1 and the right-angle drive sheet 3 of the present invention have, for example, a base material, electrodes (electrode wires, bonding wires, terminals, etc.), an insulator, a hard coat layer, and a lubricating layer laminated in order. It can be configured. Next, each of those configurations will be described.
A base material is a film used as a base material for maintaining the electrode shape of the electrode formed on the surface. As a stator base material, a plastic film having electrical insulation and heat resistance when soldered, for example, a PI (PolyImide) film, a PET (PolyEthyleneTerephthalate) film, a PAI (PolyAmideImide) film, or a plastic As another material that is not a film, a glass substrate, a glass epoxy substrate, a paper phenol substrate, a fluororesin substrate, a composite substrate, or the like can be used.

The electrode can be formed by a well-known method of forming a printed circuit. A copper-laminated film obtained by laminating a copper foil and a film or a substrate is used as a printed circuit material. An electrode and a stator base material are a copper foil part and a film part in the copper-coated film. The copper foil can be patterned by forming and etching an etching resist pattern on the copper foil surface of the copper-clad film. A strip-shaped electrode is formed on the surface of the stator base as a part of the patterned copper foil.
Moreover, when a transparent electrode is required as an electrode for transmitting a backlight or the like, the electrode can be formed by a known method for forming a transparent electrode. For example, using ITO (indium tin oxide) to form a film on a substrate by sputtering, vapor deposition, etc., and patterning by etching, or screen printing on an ITO paste as an ink and baking, etc. Can be obtained.

The insulator is an insulator that covers the exposed surface of the electrode. Naturally, the surface of the electrode attached to the stator base material is covered with the stator base material to ensure electrical insulation. The insulator is formed in close contact with the stator base and the surface of the electrode which are opposite to the surface. The insulator is not only for obtaining electrical insulation, but also increases the overall rigidity of the driving sheet 1 and the right-angle driving sheet 3 to reduce deformation, and the surface of the stator base that faces the moving base. It has a function to ensure the flatness of.
The hard coat layer is a hard coat layer for protecting against abrasion due to friction between the stator base and the movable base. The hard coat layer is formed on the surface of the substrate on the side where the substrate and the moving sheet 2 face each other. When the thickness of the base material is extremely reduced (for example, 20 μm or less), this hard coat layer is a constituent requirement that exhibits a particularly remarkable effect on the durability of the electrostatic actuator. As the hard coat layer, a known hard coat layer can be applied. For example, a hard coat layer formed by applying and curing a thermosetting resin, an ultraviolet curable resin, or the like on the film can be applied.
The lubrication layer is a lubrication layer provided between the surfaces where the stator and the mover face (contact) to reduce the frictional force generated between the mover and the mover. By providing the lubricating layer, driving efficiency, stability, and the like can be improved. A fluid can be used as the lubricating layer. For example, it is preferable to use an inert and electrically insulating liquid such as silicone oil or fluorine-based liquid (for example, Florinart (trademark)). Further, instead of slip resistance, beads having a diameter of about 20 μm having the same effect as the lubricating layer may be used as rolling resistance.

  The moving sheet 2 is arranged so that one surface thereof faces the surface of the driving sheet 1. The movable sheet 2 is disposed so that the other surface faces the surface of the right-angle driving sheet 3. The surface of the moving sheet 2 facing the first driving area of the driving sheet 1 obtains a driving force from the first driving area and moves relative to the driving sheet. Further, the surface of the moving sheet 2 facing the second driving area of the driving sheet 1 obtains a driving force from the second driving area and moves relative to the driving sheet 1. Further, the surface of the moving sheet 2 facing the right-angle driving sheet 3 obtains a driving force from the right-angle driving sheet 3 and moves relative to the right-angle driving sheet 3. That is, the moving sheet 2 moves by receiving the driving force of the first driving region and the driving force of the combination of the second driving region and the right angle driving sheet 3. As shown in an example in FIG. 5, the moving sheet 2 rotates clockwise when receiving a leftward driving force from the first driving region and receiving a rightward driving force from the second driving region. Conversely, the movable sheet 2 rotates clockwise when it receives a rightward driving force from the first driving region and a leftward driving force from the second driving region. Further, as shown in FIG. 5, the movable seat 2 receives a rightward driving force from the first driving region, and shifts to the right when receiving a rightward driving force from the second driving region. On the contrary, the movable sheet 2 receives a leftward driving force from the first driving region and shifts to the left when receiving a leftward driving force from the second driving region. Further, as shown in FIG. 5, when the movable sheet 2 receives an upward driving force from the right-angle direction driving sheet 3, the moving sheet 2 moves upward. Conversely, the moving sheet 2 moves downward when it receives a downward driving force from the right-angle driving sheet 3.

Such a movable sheet 2 can move relative to the drive sheet 1 by an electrostatic force acting between the movable sheet 2 and the drive sheet 1. The movement is performed by applying a voltage from the power supply unit (see FIG. 3) to the electrode wires 21 provided on the drive sheet 1. The voltage application mode can be changed by a control unit (not shown) controlling the power supply unit. And the rotation speed, rotation direction, movement speed, and movement direction of the movable sheet 2 can be changed according to the power supply mode.
The movable sheet 2 is disposed so that the surface thereof is movable so as to face the surface of the drive sheet 1, and an electric charge corresponding to the electrode potential of the drive sheet 1 is induced on the opposite surface. Then, an electrostatic force is generated between the induced charge and the electrode potential of the driving sheet 1, and the relative movement with respect to the driving sheet 1 is performed by the generated electrostatic force.

Thus, it is necessary to induce charges according to the electrode potential in the moving sheet 2. Accordingly, the moving sheet 2 is generally an insulating material (dielectric), such as polyester film, polypropylene film, polystyrene film, polyvinyl chloride, polyvinylidene chloride film, polyethylene film, polyamide film, polyimide film, and the like. The plastic film can be used. In addition, a composite material such as paper obtained by laminating (bonding) such an insulating material to the surface facing the driving sheet 2 can be used. The surface of the movable sheet 2 preferably has a surface resistivity of about 10 ¹² to 10 ¹⁵ Ω □. In this case, since weak electricity flows, the charge induced in the moving sheet 2 by the electrode line of the driving sheet 2 follows with a delay with respect to the instantaneous change of the voltage in the electrode line. Since such surface physical properties may be greatly influenced by the treatment of the material surface, the materials that can be used are not limited to the above, and the surface low efficiency may be optimized by a coating treatment.

It is explanatory drawing which shows the structure in the controller of this invention. It is a block diagram which shows an example of a structure in the controller of this invention. It is a figure which shows an example of a structure of the power supply part in the electrostatic actuator of this invention. It is a figure which shows as a table | surface the instruction | indication input in the controller of this invention, the direction of each drive which a some drive seat performs, and the drive direction as the total effect | action of each drive. It is explanatory drawing which shows the structure in the electrostatic actuator to which the controller of this invention is applied. It is a figure which shows the structure of the drive seat 1 in FIG. It is a figure which shows an example of the pattern of the electrode line in each drive area | region of a drive sheet.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Drive sheet 2 Moving sheet 3 Right angle direction drive sheet 11 1st drive area 12 2nd drive area 100 Controller 101 Cross switch 102 Pushbutton switch A
103 Pushbutton switch B
104 Control Unit 105 First Power Supply Unit 106 Second Power Supply Unit 107 Third Power Supply Unit 201 Input Device 202 Controller 203 High Voltage Power Supply 204 Decoder 205 Switcher

Claims (1)

A controller for an electrostatic actuator capable of moving the moving sheet in the left-right direction and moving and rotating in the up-down direction,
Pressing right moves the moving sheet, pressing left moves the moving sheet, pressing upward moves the moving sheet, pressing down moves the moving sheet, and pressing upper right. To move the moving sheet in the upper right direction, to move the moving sheet in the lower right direction by pressing the lower right button, to move the moving sheet in the upper left direction by pressing the upper left button, and to move the moving sheet in the lower left direction by pressing the lower left button A cross switch for generating
Push button for generating a rotation command signal for rotating the moving sheet clockwise by pressing the cross switch to the right while pressing, and rotating the moving sheet counterclockwise by pressing the cross switch to the left when pressing In the controller having the switch A, the movement program 1 is activated by pressing the cross switch upward when pressed, and the movement program 2 is activated by pressing the upper right position of the cross switch when pressed. When the cross switch is pressed to the right, the movement program 3 is started. When the cross switch is being pressed, the movement program 4 is started by being pressed to the right. When the button is being pressed, the movement program 5 is started by being pressed down. The movement program 6 is activated by pressing the lower left button of the cross switch when the button is pressed. There is provided a push button switch B for generating a movement command signal for starting the movement program 7 when the cross switch is pressed to the left and pressing the cross switch when the cross switch is pressed. A featured controller.