JP2005137079A - Electrostatic actuator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electrostatic actuator movable in an arbitrary direction by drive electrodes disposed in a matrix state and suitable for a mass production without loss of a power. <P>SOLUTION: In the electrostatic actuator, a sheet-like moving element 2 is laid on a stator 4, and the moving element 2 is moved by a drive force by the interaction of a charge induced on the moving element 2 and a charge on the matrix-like drive electrode of the stator 4. A positive potential is applied from a positive power source circuit 14 to a drive electrode circuit 6 and a selecting electrode circuit 8, and a negative potential is applied from a positive power source circuit 16 to a driving electrode circuit 12 and a selecting electrode circuit 10, and the positive and negative potentials applied to the drive electrode are controlled by a control circuit 18. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an electrostatic actuator, and more particularly to an electrostatic actuator capable of moving a moving element on a two-dimensional plane.

  In recent years, along with the advancement of semiconductor technology, efforts have been made to realize a significantly small micromachine by semiconductor manufacturing technology, and mechanical electrical elements such as microactuators have attracted attention. With such an element, a small and highly accurate mechanism part can be realized, and the productivity can be greatly improved by using a semiconductor process. As an application field of such an actuator, its application to an automatic focusing mechanism of a robot or a digital camera is attracting attention.

  At present, electromagnetic actuators are often used in driving parts including robots.

  However, in the case of an electromagnetic actuator, since a magnet, a coil, a reduction gear, etc. are used, there exists a tendency for a weight to become large. In particular, the weight ratio with respect to the driving force increases as the size decreases, and it becomes difficult to achieve both weight and driving force. On the other hand, in the case of an electrostatic actuator, even if the size is reduced, the driving force does not decrease and the weight is reduced. Further, since a flexible substrate material can be used, a flexible actuator can be manufactured. For this reason, various configurations have been proposed for the electrostatic actuator.

  For example, using a stator in which a number of elongated strip electrodes are arranged as drive electrodes on a flat plate made of an insulator, and a mover in which a resistance layer is formed on one surface of a film-like insulator sheet, the stator There has been proposed an electrostatic actuator that moves a moving element in one direction by controlling a voltage to be applied to a strip electrode disposed inside (for example, Patent Document 1).

  In addition, a stator and a mover, which are arranged on a flat plate made of an insulator as a drive electrode with a number of elongated strip electrodes, are opposed to each other, and an alternating voltage is applied to these drive electrodes. Thus, an electrostatic actuator that moves the mover in one direction has also been proposed (for example, Patent Document 2).

Furthermore, the drive electrode is made by weaving a large number of orthogonal strip electrodes, and a movable plate and a stator that are filled with an insulator around the drive electrode are opposed to each other, and an alternating voltage is applied to each. Therefore, a configuration has been proposed in which the mover is moved two-dimensionally on the stator (for example, Patent Document 3).
JP-A-2-285978 Japanese Unexamined Patent Publication No. 6-78566 Japanese Patent Laid-Open No. 7-274542

  However, in the first example and the second example described above, the movable element is configured to be movable only in a one-dimensional direction perpendicular to the drive electrode made of a long and thin strip electrode, and the freedom of movement is limited. There was a problem. Further, in the third example, the drive electrodes are manufactured by weaving the strip-shaped electrodes orthogonal to each other, so that the area of the drive electrodes on the two-dimensional plane is reduced. In addition, since it is relatively difficult to finish the woven individual electrode surfaces into a uniform plane, it is difficult to make a uniform gap between the stator and the mover. As a result, although it is possible to drive in the two-dimensional direction, there is a problem that the driving force cannot be increased. Furthermore, in the third example, the mover can be moved in a two-dimensional direction on the stator plane, but it cannot be moved in any other direction.

  Further, in a configuration in which a strip electrode is formed as a drive electrode on a conventional insulator, a large stray capacitance is generated between the electrodes due to the long routing of the drive electrode, and a signal is continuously passed over the entire length of the strip drive electrode. Therefore, big power is necessary. Furthermore, in the above example, there is a problem that it is relatively difficult to reduce the size.

  The present invention has been made in order to solve the above-described problem. The movable element can be moved in an arbitrary direction on a two-dimensional plane, and the stray capacitance due to the driving electrode can be reduced. An object is to realize an electrostatic actuator capable of obtaining a high driving force.

  In order to solve the problems as described above, the electrostatic actuator of the present invention includes a plurality of stator driving electrodes arranged in a matrix on the insulating layer surface of the stator substrate having at least an insulating layer on the surface, A set of stator switching elements formed on the surface of the stator substrate and connected to the stator drive electrodes; a stator selection electrode line and a stator drive electrode line connected to each of the stator switching elements; And a stator substrate that faces the stator drive electrode of the stator, is movably disposed on the stator, and has an insulating layer formed on at least the surface facing the stator. A stator selecting electrode circuit and a stator driving electrode circuit for driving a moving element, a set of stator switching elements, and a stator selecting electrode circuit and a stator driving electrode. A structure in which the stator switching element is selectively driven by a path, and a predetermined voltage is applied to a stator drive electrode connected to the stator switching element to move the mover two-dimensionally on the stator surface. Consists of.

  According to such a configuration, the movable element can be moved in an arbitrary direction on the two-dimensional plane of the stator. If the stator switching element is constituted by, for example, a transistor, the distance from the drain electrode to the drive electrode of each transistor can be made extremely short. An actuator can be realized.

  In addition, a plurality of stator drive electrodes arranged on the stator substrate of the electrostatic actuator of the present invention includes a surface on which a stator switching element, a stator selection electrode line, and a stator drive electrode line are formed. May be arranged on different surfaces, and the stator switching element and the stator drive electrode may be connected via a through electrode formed on the stator substrate.

  With such a configuration, since the drive electrode can be formed on a flat surface of the substrate, a flat drive electrode surface can be easily formed with respect to the surface of the moving element facing each other. As a result, the gap can be made uniform and narrow, so that the driving force can be increased.

  The electrostatic actuator of the present invention is formed on a stator substrate surface having a plurality of stator drive electrodes arranged in a matrix on the insulating layer surface of the stator substrate having an insulating layer on at least the surface. A stator comprising a set of stator switching elements connected to the stator drive electrodes, a stator selection electrode line and a stator drive electrode line connected to each of the stator switching elements, and at least A plurality of mover drive electrodes arranged in a matrix on the surface of an insulating layer of a mover substrate having an insulating layer on the surface, and a set of electrodes formed on the surface of the mover substrate and connected to the mover drive electrode A moving element comprising a moving element switching element, a moving element selecting electrode line and a moving element driving electrode line connected to each of the moving element switching elements, and a stator switching element A stator selecting electrode circuit and a stator driving electrode circuit for driving the moving element switching element, and a moving element selecting electrode circuit and a moving element driving electrode circuit, respectively. And the stator drive electrode of the stator are arranged to face each other, and the stator switching is performed by the stator selection electrode circuit and the stator drive electrode circuit, and the mover selection electrode circuit and the mover drive electrode circuit. By selectively driving the element and the moving element switching element, and applying a predetermined voltage to the stator driving electrode and the moving element driving electrode respectively connected to the stator switching element and the moving element switching element, It may be configured to move two-dimensionally on the stator surface.

  According to such a configuration, voltages applied to the respective drive electrodes of the stator and the mover can be independently applied, so that the mover moves or rotates in the two-dimensional x and y directions. It is possible to further increase the driving force in the movement including.

  Further, the plurality of stator drive electrodes arranged on the stator substrate of the electrostatic actuator is different from the surface on which the stator switching element, the stator selection electrode line, and the stator drive electrode line are formed. It is good also as a structure which is arrange | positioned on the surface and the stator switching element and the stator drive electrode are connected through the penetration electrode formed in the board | substrate for stators.

  According to such a configuration, since the drive electrodes arranged in a matrix form can be formed on the flat surface of the stator substrate, the surface of the stator facing the mover can be a flat surface. For this reason, a uniform and narrow gap can be obtained, and the driving force can be increased.

  Further, the plurality of moving element driving electrodes arranged on the moving element substrate of the electrostatic actuator is different from the surface on which the moving element switching element, the moving element selecting electrode line, and the moving element driving electrode line are formed. It is good also as a structure which is arrange | positioned on the surface and the movable element switching element and the movable element drive electrode are connected through the penetration electrode formed in the board | substrate for movable elements.

  According to such a configuration, since the moving element driving electrodes arranged in a matrix on the flat surface of the moving element substrate can be formed, the surface of the moving element facing the stator can be a flat surface. For this reason, the gap can be made more uniform and narrow, and the driving force can be further increased.

  The electrostatic actuator according to the present invention includes a stator coupling body in which a plurality of stators are connected at predetermined positions and at predetermined intervals, and a plurality of moving elements at predetermined positions and at predetermined intervals. It is good also as a structure which has the mover coupling body formed by connecting and arrange | positions a stator and a mover alternately. According to such a configuration, an electrostatic actuator that can move in an arbitrary direction and has a large driving force can be realized.

  Further, the stator substrate of the electrostatic actuator of the present invention may be constituted by a single crystal silicon substrate on which an insulating layer is formed, and the stator switching element may be constituted by a transistor formed on the single crystal silicon substrate. According to such a configuration, the stator switching element can be manufactured with a high yield by using semiconductor technology, and it can be easily miniaturized.

  Further, the stator substrate of the electrostatic actuator of the present invention may be made of an insulating material, and the stator switching element may be made of a thin film transistor formed on the stator substrate. According to such a configuration, various substrates can be used, and the degree of freedom in substrate selection can be increased. Note that the thin film transistor constituting the stator switching element can be manufactured using, for example, polycrystalline silicon or single crystal silicon crystallized by laser irradiation.

  Furthermore, the stator substrate for the electrostatic actuator of the present invention may be made of an insulating organic material. According to such a configuration, it becomes possible to make a stator substrate made of an organic material and having flexibility, and the mover can be made flexible by using an organic material that has flexibility as well. The electrostatic actuator which has can be implement | achieved.

  Furthermore, the movable body substrate of the electrostatic actuator of the present invention may be composed of a single crystal silicon substrate on which an insulating layer is formed, and the movable element switching element may be composed of a transistor formed on the single crystal silicon substrate. According to such a configuration, the moving element switching element can be manufactured with a high yield by using a semiconductor technique, and can be easily miniaturized.

  Furthermore, the moving element substrate of the electrostatic actuator of the present invention may be made of an insulating material, and the moving element switching element may be a thin film transistor formed on the moving element substrate. According to such a configuration, various substrates can be used, and the degree of freedom in substrate selection can be increased. Note that the transistor having a thin film structure that forms the mover switching element can be manufactured using, for example, polycrystalline silicon or single crystal silicon crystallized by laser irradiation.

  Furthermore, the moving element substrate of the electrostatic actuator of the present invention may be made of an insulating organic material. According to such a configuration, it is possible to make a movable substrate for an organic material that is flexible, and the stator can be made flexible by using an organic material that is also flexible. The electrostatic actuator which has can be implement | achieved.

  Furthermore, the transistor of the electrostatic actuator of the present invention may include an organic material. According to such a configuration, the transistor can be manufactured using a material containing an organic semiconductor, and can be easily manufactured on a stator substrate or a mover substrate made of an organic material with high productivity.

  Furthermore, the stator switching element of the electrostatic actuator of the present invention may have a configuration in which a plurality of transistors are arranged in series, and with such a configuration, a high breakdown voltage can be achieved.

  Furthermore, the moving element switching element of the electrostatic actuator of the present invention may have a configuration in which a plurality of transistors are arranged in series. With such a configuration, a high breakdown voltage can be achieved.

  Furthermore, the set of stator switching elements connected to the stator drive electrodes of the electrostatic actuator of the present invention may be composed of n-type and p-type transistors, respectively. According to such a configuration, a positive or negative potential can be selectively applied to each stator driving electrode, and the movable element on the stator is driven in an arbitrary direction by the stator driving electrodes arranged in a matrix. Can be made.

  Furthermore, the set of mover switching elements connected to the mover drive electrode of the electrostatic actuator of the present invention may be composed of n-type and p-type transistors, respectively. According to such a configuration, a positive or negative potential can be selectively applied to each moving element driving electrode, and the driving force of the moving element on the stator can be further increased by moving element driving electrodes arranged in a matrix. can do.

  Furthermore, the electrostatic actuator of the present invention may be configured such that one of the stator and the mover has a cylindrical shape or a columnar shape, and the other has a cylindrical shape arranged concentrically with respect to the one. Good. According to such a configuration, rotation around the axis of the cylinder or column and movement in the axial direction are possible, and a small electrostatic actuator having a large degree of freedom in the movement direction can be realized.

  The electrostatic actuator of the present invention can move the moving element in an arbitrary direction on the two-dimensional plane of the stator. In addition, if the stator switching element is formed of, for example, a transistor, the distance from the drain electrode of each transistor to the stator drive electrode can be configured to be extremely short. Excellent electrostatic actuator can be realized. Further, if a switching element and a drive electrode are provided on both the stator and the mover, the driving force can be further increased.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
FIG. 1 is a block diagram showing the overall configuration of the electrostatic actuator according to the first embodiment of the present invention. The details will be described later with reference to FIG. 2 and subsequent drawings, but a sheet-like moving element 2 is placed on the stator 4, and the charges induced on the moving element 2 and the matrix of the stator 4 are arranged. The moving element 2 is driven by the driving force generated by the interaction with the charges generated on the plurality of stator driving electrodes. It is integral with the stator 4 for driving in the left-right direction of the paper, that is, the direction indicated by the arrow 20 (hereinafter referred to as the x direction) and in the vertical direction of the paper, ie, the direction indicated by the arrow 22 (hereinafter referred to as the y direction). The stator selection electrode circuits 8 and 10 and the stator drive electrode circuits 6 and 12 provided in close proximity to each other are used. At that time, a positive potential is applied from the positive power supply circuit 14 to the stator driving electrode circuit 6 and the stator selecting electrode circuit 8, and a negative potential is applied from the negative power supply circuit 16 to the stator driving electrode circuit 12 and the stator selecting electrode circuit 10. A potential is applied. This positive potential or negative potential is applied to each of two stator switching elements (not shown) connected to a stator drive electrode (not shown). Further, the control circuit 18 is connected to the positive power supply circuit 14 and the negative power supply circuit 16 and controls the potentials of the plurality of stator drive electrodes arranged in a matrix as described above.

  FIG. 2 is a sectional view taken along line x1-x1 in FIG. The operation principle of the mover 2 moving on the stator 4 will be described with reference to FIGS. 2 (a), 2 (b), 2 (c), and 2 (d).

  FIG. 2A shows charges for moving the movable element 2 in the right direction on the stator driving electrodes 38, 40, 42, and 44 arranged in the x direction among the stator driving electrodes arranged in a matrix. A step of guiding the motor onto the movable body 2 is shown. Note that the stator drive electrodes 38, 40, 42, and 44 are in a state of being substantially formed in a line by connecting blocks having the same potential in the y direction as described later.

  Unit blocks are formed in a matrix on the stator substrate 24, and two stator switching elements 28 and 32 are provided in the unit block. These units have an insulating layer 36 on the stator drive electrodes 38. Connected through. Each of the stator switching elements 28 and 32 includes a stator driving electrode line 26 and a stator selection electrode line (not shown), a stator driving electrode line 30 and a stator selection electrode line (not shown), respectively. (Not shown). Further, in each of the blocks, two stator switching elements are similarly connected in the stator drive electrodes 40, 42, and 44, respectively. An insulating layer 34 that functions as a protective film and a lubricating film is formed on the plurality of stator drive electrodes. With this configuration, a positive potential can be selectively applied to the stator drive electrode 38 using the stator switching element 28 and a negative potential can be selectively applied to the stator drive electrode 38 using the stator switching element 32.

  On the other hand, for example, a polyethylene terephthalate sheet-like mover substrate 48 and the mover 2 on which the conductive thin film 46 is formed are placed on the stator 4 via a gap 58. In addition, as the conductive thin film 46, a resistive film in which a conductive material such as carbon black or metal particles is dispersed in a polymer material such as polyurethane or epoxy is effective. In the gap 58, it is effective to interpose a fluorine-based organic lubricant on the surfaces of the stator 4 and the mover 2 facing each other. In order to prevent adsorption of the stator surface and the mover surface, minute unevenness may be provided on one or both surfaces. In addition, it is preferable to interpose a fluorine insulating liquid such as perfluorocarbon because not only the lubricity but also the insulation is improved. On the other hand, spherical particles such as glass and Teflon (R) may be enclosed between the stator 4 and the mover 2 to provide a function of preventing lubrication and adsorption of both. In addition to polyethylene terephthalate, an organic material that can be formed into a sheet shape such as polyethylene naphthalate or polyimide, a ceramic material, or the like can also be used as the sheet-like moving member substrate 48.

  First, a positive potential is applied to the stator drive electrode 38, a negative potential is applied to the stator drive electrode 42, and no potential is applied to the other electrodes. In this state, an electric field is generated in the direction from the stator driving electrode 38 to the stator driving electrode 42 through the conductive thin film 46 described above. As a result, charges are induced in the dielectric near the interface between the conductive thin film 46 and the movable substrate 48, and negative charges 52 and positive charges 56 are generated. In this state, the positive charge 50 generated on the stator driving electrode 38 and the negative charge 52 of the moving element 2, and the negative charge 54 on the stator driving electrode 42 and the positive charge 56 on the moving element 2 attract each other. Thus, the movable element 2 is stopped by receiving a force in the directions of arrows 60 and 62, respectively.

  Next, FIG. 2B shows a step of moving the mover 2 in the right direction. A positive potential is applied to the stator drive electrode 40 and a negative potential is applied to the stator drive electrode 44. No potential is applied to the other stator drive electrodes 38 and 42. In this way, the negative charge 52 receives a force in the direction indicated by the arrow 68 by the positive charge 64 generated on the stator drive electrode 40, and the positive charge 56 receives a repulsive force in the direction indicated by the arrow 70. Further, the positive charge 56 is attracted in the direction of the arrow 72 by the negative charge 66 on the stator drive electrode, and as a whole, the movable element 2 is driven in the right direction as indicated by the arrow 74.

  FIG. 2C shows a state in which the moving element 2 has moved by one pitch. In this state, the moving element 2 stops by receiving forces in the directions indicated by arrows 76 and 78 by the attractive force acting between the negative charge 52 and the positive charge 64, and between the positive charge 56 and the negative charge 66, respectively. Since the negative charges 52 and the positive charges 56 induced on the moving element 2 are easily attenuated, in this state, the stator driving electrode 40 has a positive potential necessary for the induction of charges, and the stator driving electrode 44 has a negative potential. By applying a potential, the negative charge 52 and the positive charge 56 are re-induced to the same part on the moving element 2 again. At that time, no potential is applied to the stator drive electrodes 38 and 42. FIG. 2D shows a step of moving the movable element 2 to the left side using the negative charge 52 and the positive charge 56 that are re-inducted. A positive potential is applied to the stator drive electrode 38, a negative potential is applied to the stator drive electrode 42, and charges generated on the movable element 2 are negligible. The other stator drive electrodes 40 and 44 are applied to the stator drive electrodes 40 and 44, respectively. Do not apply potential. As a result, the negative charge 52 on the mover 2 is attracted by the positive charge 80 generated on the stator drive electrode 38 and repelled by the negative charge 82 generated on the stator drive electrode 42 in the direction of the arrow 84. A force is applied in the direction of arrow 86. Further, the positive charge 56 is drawn by the charge 82 and receives a force in the direction of the arrow 88. Accordingly, the movable element 2 is driven in the left direction indicated by the arrow 90 as a whole. The moving element 2 is moved by sequentially repeating the above operations. As described above, in order to change the polarity of the stator drive electrode corresponding to the intermediate position between the positive and negative charges induced on the movable element 2, it can move freely in the left-right direction. The reinduction timing is determined by the charge decay time, and is not necessarily performed for each step. In addition, since the moving direction is determined by changing the polarity of the stator driving electrode of the stator 4 or by changing the polarity of the charge induced on the moving member 2, the moving direction of the stator driving electrode of the stator 4 is determined. The potential scan can be performed as it is, and can also be moved in the left-right direction by changing the polarity of the induced charge. Also, in the above, a repeating array of negative, zero and positive (positive, zero, and negative is the same) in the x direction is used as the electric charge array of the movable element 2, but a repeating array of positive, negative and zero or negative, An array of positive and zero repetitions can also be used.

  FIG. 3 is a diagram showing a configuration in which a plurality of stator drive electrodes e11 to e66 of the stator 4 are arranged in a matrix. In the present embodiment, the stator drive electrodes e11 to e66 are formed of 36 blocks. The number of the stator drive electrodes e11 to e66 arranged in the matrix shown in the figure is limited for explanation, and does not limit the present invention.

  As the stator switching element, each block is provided with two transistors Tr1 and Tr2, and the respective drain electrodes are connected to the stator drive electrodes e11 to e66. The stator driving electrode lines a1, a2, a3, a4, a5, and a6 are connected to the stator driving electrode circuit 6, and the source electrodes of the transistors Tr1 in the blocks are respectively connected to the stator driving electrode lines a1 to a6. It is connected to the.

  The stator selection electrode lines b1, b2, b3, b4, b5, and b6 are connected to the stator selection electrode circuit 8, and the gate electrode of the transistor Tr1 in each block is respectively the stator selection electrode lines b1 to b6. It is connected to the. For example, in a block surrounded by a circle 100, the source electrode of the transistor Tr1 is connected to the stator driving electrode line a1 at the connection point 94, and the gate electrode is connected to the stator selection electrode line b1 at the connection point 92.

  On the other hand, the stator drive electrode lines c1, c2, c3, c4, c5, and c6 are connected to the stator drive electrode circuit 12, and the source electrode of the transistor Tr2 in each block is the stator drive electrode lines c1 to c6. Connected to. Further, the stator selection electrode lines d1, d2, d3, d4, d5, and d6 are connected to the stator selection electrode circuit 10, and the gate electrodes of the transistors Tr2 in each block are connected to the stator selection electrode lines d1 to d6. It is connected to the. For example, in a block surrounded by a circle 100, the source electrode of the transistor Tr2 is connected to the stator driving electrode line c1 at the connection point 98, and the gate electrode is connected to the stator selection electrode line d1 at the connection point 96.

  The stator driving electrode circuit 6 and the stator selection electrode circuit 8 are turned on-off from the stator driving electrode lines a1 to a6 and the stator selection electrode lines b1 to b6 connected thereto, respectively. The positive voltage is applied. On the other hand, the stator drive electrode lines c1 to c6 and the stator select electrode lines d1 to d6 connected to the stator drive electrode circuit 12 and the stator select electrode circuit 10 respectively are negative for on-off. Is applied.

  The operation of the matrix-shaped stator drive electrode configured as described above will be described. For example, in order to set the stator drive electrode e11 in the block surrounded by the circle 100 to a positive potential, the stator drive electrode line a1 is turned on, the stator selection electrode line b1 is turned on, and the transistor Tr1 is turned on. And On the other hand, either the stator driving electrode line c1 to which the source electrode of the transistor Tr2 is connected or the stator selection electrode line d1 to which the gate electrode is connected is turned off to turn off the transistor Tr2.

  In order to set the stator drive electrode e11 to a negative potential, the stator drive electrode line c1 is turned on, the stator selection electrode line d1 is turned on, and the Tr2 is turned on. On the other hand, either the stator driving electrode line a1 to which the source electrode of the transistor Tr1 is connected or the stator selection electrode line b1 to which the gate electrode is connected is turned off, so that Tr1 is turned off. This operation is arranged in a matrix by selecting a state where a positive or negative potential is applied or a state where no potential is applied in all blocks provided with stator drive electrodes arranged on the matrix. Each of the stator driving electrodes thus formed can be selected to have an arbitrary potential arrangement.

  FIG. 4 shows the operation of the stator drive electrodes on the matrix when moving in the left-right direction (x direction) on the paper surface. FIG. 4 (a) is a diagram illustrating when the charge corresponding to FIG. FIG. 2B shows the operating state of the stator drive electrode corresponding to FIG.

  In FIG. 4A, first, a positive potential is applied to all of the stator selection electrode lines b1 to b6 connected to the stator selection electrode circuit 8 to turn them on, and the positive induction pulse voltage 102 is applied. Apply by overlapping. Further, among the stator driving electrode lines a1 to a6 connected to the stator driving electrode circuit 6, a positive potential is applied to a1 and a5 to turn them on. Further, a negative potential is applied to all of the stator selection electrode lines d1 to d6 connected to the stator selection electrode circuit 10 to turn them on, and the negative induction pulse voltage 104 is applied in a superimposed manner. Further, a negative potential is applied only to c3 among the stator driving electrode lines c1 to c6 connected to the stator driving electrode circuit 12 to turn it on. Thereby, the rows of e11, e21, e31, e41, e51, e61 corresponding to the stator driving electrode 38 in FIG. 2 and the stator driving electrodes e15, e25, e35, e45 (not shown in FIG. 2). , E55, e65 are positive potentials capable of inducing charges in the movable element 2. Further, the row of the stator drive electrodes e13, e23, e33, e43, e53, e63 corresponding to the stator drive electrode 42 in FIG. 2 has a negative potential that can be induced to the mover. As described above, it is possible to induce charge on the movable element 2 in the negative, zero, and positive arrangements corresponding to FIG.

  FIG. 4B corresponds to the operation state of the drive electrode in FIG. A positive potential is applied to all of the stator selection electrode lines b1 to b6 connected to the stator selection electrode circuit 8 to turn it on. Further, among the stator driving electrode lines a1 to a6 connected to the stator driving electrode circuit 6, a positive potential is applied to a2 and a6 to turn them on. Further, a negative potential is applied to all of the stator selection electrode lines d1 to d6 connected to the stator selection electrode circuit 10 to turn them on. Further, a negative potential is applied only to c4 among the stator driving electrode lines c1 to c6 connected to the stator driving electrode circuit 12 to turn it on. Thereby, the rows of e12, e22, e32, e42, e52, e62 corresponding to the stator drive electrode 40 in FIG. 2 and the stator drive electrodes e16, e26, e36, e46 (not shown in FIG. 2). , E56, e66 are positive potentials. Further, the row of the stator drive electrodes e14, e24, e34, e44, e54, e64 corresponding to the stator drive electrode 44 in FIG. 2 has a negative potential. As a result, a rightward force acts on the moving element 2.

  To move sequentially to the right side, for example, in terms of time, the rows of the stator drive electrodes e11, e21, e31, e41, e51, e61 are changed from off → negative → off → positive, and the stator drive electrodes e12, e22. , E32, e42, e52, and e62 are repeatedly changed from positive → off → negative → off → positive. In addition, the moving element 2 can be moved by changing the potential in the same manner with respect to the other rows arranged in a matrix. That is, in order to move in the right direction, the stator drive electrodes e11 to e61 are turned off, the stator drive electrodes e12 to e62 are made positive, the stator drive electrodes e13 to e63 are turned off, and the stator drive electrodes e14 to e14 are turned on. The potential is shifted to the right by one block in time so that e64 is negative, and the stator drive electrodes e11 to e61 are negative and the stator drive electrodes e12 to e62 are off and fixed in the next one-pitch offset state. What is necessary is just to apply to each row | line | column sequentially so that the child drive electrode e13-e63 may be set to positive and the stator drive electrode e14-e64 may be turned off.

  In order to move in the left direction, for example, the rows of the stator drive electrodes e11, e21, e31, e41, e51, e61 are changed from off → positive → off → negative, and the drive electrodes e12, e22, e32, e42, For the columns e52 and e62, iteratively changing from positive to off to negative to off to positive, and the moving element can be moved by repeating in the same manner for the columns arranged in a matrix. By applying in this way, the movable element 2 can be moved freely in the x direction.

  FIG. 5 shows the operation of the stator drive electrodes on the matrix when moving in the vertical direction (y direction) on the paper surface. FIG. 5 (a) shows the charge induction, and FIG. 5 (b) shows the drive fixed. The operation state of the child drive electrode is shown.

  In FIG. 5A, first, a positive potential is applied to only b1 and b5 among the stator selection electrode lines b1 to b6 connected to the stator selection electrode circuit 8 so as to be in the on state, thereby positive induction. A pulse voltage for use 102 is applied in a superimposed manner. Further, a positive potential is applied to all of the stator drive electrode lines a1 to a6 connected to the stator drive electrode circuit 6 to turn them on. Further, among the stator selection electrode lines d1 to d6 connected to the stator selection electrode circuit 10, a negative potential is applied only to d3 to turn it on, and the negative induction pulse voltage 104 is superimposed and applied. To do. Further, a negative potential is applied to all of the stator drive electrode lines c1 to c6 connected to the stator drive electrode circuit 12 to turn it on. As a result, the rows of the stator drive electrodes e11, e12, e13, e14, e15, e16 and the rows of the stator drive electrodes e15, e52, e53, e54, e55, e56 can positively induce charges on the mover 2. It becomes a potential. In addition, the rows of the stator drive electrodes e31, e32, e33, e34, e35, e36 have a negative potential capable of inducing charges in the movable element 2. As described above, repeated charges of negative, zero, and positive arrangement can be induced on the movable element 2.

  In FIG. 5B, a positive potential is applied only to b2 and b6 among the stator selection electrode lines b1 to b6 connected to the stator selection electrode circuit 8 to turn it on. Further, a positive potential is applied to all of the stator drive electrode lines a1 to a6 connected to the stator drive electrode circuit 6 to turn them on. Further, among the stator selection electrode lines d1 to d6 connected to the stator selection electrode circuit 10, a negative potential is applied only to d4 to turn it on. Further, a negative potential is applied to all of the stator drive electrode lines c1 to c6 connected to the stator drive electrode circuit 12 to turn it on. As a result, the rows of the stator drive electrodes e21, e22, e23, e24, e25, e26 and the rows of the stator drive electrodes e61, e62, e63, e64, e65, e66 have a positive potential. In addition, the rows of the stator drive electrodes e41, e42, e43, e44, e45, e46 are at a negative potential. As a result, a downward force on the paper surface acts on the movable element 2.

  In order to move it downward sequentially, for example, in terms of time, the rows of the drive electrodes e11, e12, e13, e14, e15, e16 are changed from off → negative → off → positive to drive electrodes e21, e22, e23, e24. , E25, and e26, the repetition of changing from positive → off → negative → off → positive is executed. In addition, the moving element 2 can be moved by repeating in the same manner for other rows arranged in a matrix. That is, in the row direction, potentials that repeat downward, negative, off, and positive may be applied to the drive electrodes in each row while shifting by one block in time.

  Further, in order to move the mover 2 upward, for example, the rows of the stator drive electrodes e11, e12, e13, e14, e15, and e16 change from off → positive → off → negative. The rows of e22, e23, e24, e25, and e26 execute an iteration of changing from positive → off → negative → off → positive. Further, the same repetition may be performed for other rows arranged in a matrix. Thereby, the mover 2 can be freely moved in the y direction.

  The drive method for moving the mover 2 in the x direction and the y direction has been described above. However, since the stator switching element is provided in each block, a potential is independently applied to the stator drive electrode of each block. It can be applied.

  FIG. 6 shows a coordinate system for rotationally moving around a designated O point (x0, y0). That is, the stator driving electrodes are expressed in a matrix coordinate system, and are calculated and controlled by the control circuit 18 shown in FIG. It can be rotated around a point.

  The points shown on the straight lines A, B, C, D, E, F, G, and H drawn radially at the center of the point O (x0, y0) are the center points of the stator drive electrodes in each block. Show. The coordinates of the block through which the straight lines A, B, C, D, E, F, G and H pass are shown in (Table 1). Based on these coordinates, the control circuit 18 in FIG. 1 controls the positive power supply circuit 14, the negative power supply circuit 16, the drive electrode circuits 6 and 12, and the selection electrode circuits 8 and 10. As a result, the potentials of the drive electrodes of the blocks at the respective points through which the straight lines A, B, C, D, E, F, G, and H pass are respectively off, negative, off, positive, off, and negative as shown in FIG. By sequentially changing the potential to off, the charge can be induced on the stator 4 and the mover 2 on the stator 4 can be rotated in the same manner as the movement in the x and y directions described above.

  The charge induction for applying rotation, the method of applying a potential, and the like are the same as the methods described for driving in the x direction and y direction, and a specific description thereof will be omitted.

  In order to further increase the number of stator drive electrodes, it may be inserted between each of the straight lines A, B, C, D, E, F, G, and H as a straight line J. Thereby, a rotational movement can be made smoother.

  Next, the structure of each block will be described with reference to FIGS. 7A, 7B, 8A, and 8B.

  FIG. 7A is a plan view of a block surrounded by a circle 100 in FIG. FIG. 7B is an equivalent circuit diagram showing a connection state of transistors that are stator switching elements. 8A and 8B are cross-sectional views taken along lines x2-x2 and x3-x3 in FIG. 7A, respectively.

  A transistor (Tr1) 124, which is a stator switching element, is formed on the stator substrate 24. The source electrode 108 is connected to the stator drive electrode line a1, and the gate electrode 106 is a stator selection electrode. It is connected to the line b1. Further, the drain electrode 110 of the transistor 124 is connected to the stator drive electrode 122 through the via hole 118. The stator driving electrode is described as e11 in FIG. 3, but will be described as 122 in the following description.

  On the other hand, a transistor (Tr2) 126, which is also a stator switching element, is formed on the stator substrate 24. The source electrode 114 is connected to the stator drive electrode line c1, and the gate electrode 112 is fixed. It is connected to the child selection electrode line d1. Further, the drain electrode 116 is connected to the drive electrode 122 through the via hole 120.

  The transistor 124 and the transistor 126 are formed as an n-type transistor and a p-type transistor, and are configured such that a positive potential and a negative potential are applied to the stator drive electrode 122, respectively.

FIG. 8A is a cross-sectional view in which a p-type silicon single crystal substrate is used as the stator substrate 24 and an n-type MOS field effect transistor is formed as the transistor 124 on the substrate. Using a semiconductor manufacturing technique such as ion implantation or photolithography, an n ⁺ source 134 and an n ⁺ drain 140 are formed on a p-type silicon single crystal substrate, an interlayer insulating film 130, a gate insulating film 136 and a gate 138 are formed. A gate electrode 106, a source electrode 108, and a drain electrode 110 are formed.

On the other hand, FIG. 8B is a cross-sectional view in which a p-type MOS field effect transistor is formed as the transistor 126. Similarly, using a semiconductor manufacturing technique such as ion implantation or photolithography, an n well 152 is formed, a p ⁺ source 154 and a p ⁺ drain 146 are formed, and an interlayer insulating film 130, a gate insulating film 150, and a gate 148 are formed. After that, the gate electrode 112, the source electrode 114, and the drain electrode 116 are formed.

Further, as shown in FIG. 8A, the stator driving electrode line a1 is formed so as to be connected to the source electrode. The stator driving electrode line a1 is formed on the interlayer insulating film 144 in the region shown in FIG. 8A, the stator driving electrode line c1 is formed on the interlayer insulating film 130 and connected to the source electrode 114 in FIG. 8B. Next, as shown in FIGS. 8A and 8B, an interlayer insulating film 142 such as SiO ₂ is formed.

Note that an aluminum film may be processed into a predetermined shape for each electrode of the transistor by using a photolithography technique. In addition, a metal thin film of tantalum, chromium, titanium, aluminum, copper, gold, silver, or the like can be used for the wiring of the stator driving electrode line and the stator selection electrode line. In addition, n ⁺ source and n ⁺ drain, n well ionizes elements in group V such as arsenic, phosphorus and antimony, and p ⁺ source and p ⁺ drain ionize elements in group III such as boron by ion implantation. Is formed.

  Subsequently, an insulating layer 36 made of a resin such as polyurethane or epoxy is applied and planarized. Thereafter, a metal thin film is formed and processed into a predetermined shape as the stator driving electrode 122 using a photolithographic technique. As the metal thin film, copper, aluminum, gold, silver, chromium, titanium, or the like can be used. Furthermore, indium tin oxide (IT0) can also be used. Further, via holes 118 and 120 are formed up to the surfaces of the drain electrodes 110 and 116 of each transistor, and a metal film such as gold, silver, copper, and aluminum is formed by sputtering, and the stator driving electrode 122 and the drain electrodes 110 and 116 are formed. Are electrically connected. Thereafter, an insulating layer 34 made of an organic resin such as an epoxy resin is provided by a coating method.

  In order to provide an organic lubricating layer in the gap 58 shown in FIG. 2 on the insulating layer 34, for example, insulating fine particles such as titanium dioxide, a resin such as polyurethane and vinyl chloride, and a fluorine-based organic lubricant are kneaded with a solvent. Thus, an insulating layer coated with a composite paint in which a fluorine-based organic lubricant is adsorbed on the surface of the insulating fine particles is used. As a result, the organic lubricant can be constantly oozed out on the upper surface of the insulating layer 34, and irregularities can be formed on the surface of the insulating layer 34 by the fine particles. By configuring in this way, the mover 2 placed on the stator 4 can be easily moved. Further, a method of applying a fluorine-based organic lubricant on the insulating layer 34, or glass beads or a fluorine-based liquid may be enclosed in the gap 58. Although the p-type semiconductor silicon substrate is used in the above, p-type and n-type switching elements can be formed integrally on the n-type semiconductor single crystal silicon substrate as well.

  As described above, the present invention integrally integrates n-type and p-type transistors that selectively apply a positive potential and a negative potential to the stator driving electrodes arranged in a matrix on the same substrate. Since it can be formed easily, it is extremely mass-productive. Further, since the distance from the drain electrode to the stator drive electrode of each transistor can be configured to be extremely short, there is an advantage that there is almost no stray capacitance due to routing between the electrodes and there is little power loss.

(Second Embodiment)
In the electrostatic actuator according to the second embodiment of the present invention, the switching element to be driven is a transistor using a polysilicon thin film formed on a substrate made of an insulating material, and the stator used for the stator The difference from the first embodiment is that the glass substrate is used as the glass substrate. For this reason, the transistor structure formed on this glass substrate will be described, and the description of the rest will be omitted. In addition, the same reference numerals are given to elements common to the first embodiment.

  FIG. 9A shows a plan view of one block of the stator in the second embodiment. FIG. 9B and FIG. 9C show cross-sectional views taken along lines x2-x2 and x3-x3 in FIG. 9A, respectively. In this embodiment, since a glass substrate is used as the stator substrate, the stator substrate will be described as a glass substrate 158 below. As transistors as the stator switching elements, an n-type polysilicon field effect transistor 198 and a p-type polysilicon field effect transistor 200 are used, respectively.

  In FIG. 9A, a source electrode 172 of a transistor 198 which is a stator switching element formed integrally on a glass substrate 158 is connected to a stator driving electrode line a1, and a gate electrode 176 is used for selecting a stator. It is connected to the electrode line b1. Further, the drain electrode of the transistor 198 is connected to the stator drive electrode 122 through the via hole 118.

  On the other hand, the source electrode 190 of the transistor 200 integrally formed on the glass substrate 158 is connected to the stator driving electrode line c1, and the gate electrode 188 is connected to the stator selecting electrode line d1. Further, the drain electrode 192 is connected to the stator drive electrode 122 through the via hole 120. The transistor 198 and the transistor 200 are formed as an n-type transistor and a p-type transistor, and are configured such that a positive potential and a negative potential are applied to the stator drive electrode 122, respectively.

FIG. 9B shows a cross-sectional view of an n-type polysilicon field effect transistor 198 formed on a glass substrate. A diffusion prevention layer 196 that prevents intrusion of impurities from the glass is formed on the glass substrate 158. For example, a silicon dioxide (SiO ₂ ) film can be used as the diffusion preventing layer 196. A polysilicon film is formed on the diffusion prevention layer 196. The polysilicon film can be formed by, for example, a laser annealing method in which an amorphous silicon film is formed and laser light is irradiated.

Next, an n ⁺ -type polysilicon source 170, an n ⁺ -type polysilicon drain 164, and a polysilicon channel region 166 are processed and formed on the polysilicon film that is a semiconductor by using a semiconductor manufacturing technique such as ion implantation or photolithography. To do. Further, an interlayer insulating film 160, a gate insulating film 168, a gate electrode 176, a source electrode 172, and a drain electrode 174 are formed.

On the other hand, FIG. 9C shows a p-type polysilicon field effect transistor 200 formed on a glass substrate 158. Similarly, a p ⁺ -type polysilicon source 182, a p ⁺ -type polysilicon drain 186 and a polysilicon channel region 184 are formed on the glass substrate 158 using a semiconductor manufacturing technique such as ion implantation or photolithography, and an interlayer insulating film 160, a gate insulating film 194, a gate electrode 188, a source electrode 190, and a drain electrode 192 are formed. Note that dopants to polysilicon forming the source, drain, and channel regions of the n ⁺ and p ⁺ type transistors are appropriately implanted by an ion implantation method, as described in the first embodiment.

  Further, the stator driving electrode line a1 is formed directly on the source electrode 172 in FIG. 9B and on the diffusion prevention layer 196 in FIG. 9C. Further, the stator driving electrode line c1 is formed directly on the diffusion prevention layer 196 in FIG. 9B and directly on the source electrode 190 in FIG. 9C. Next, as shown in FIGS. 9B and 9C, an interlayer insulating film 142 for protecting these transistors is formed.

  Since the subsequent manufacturing steps are the same as those in the first embodiment, description thereof will be omitted. Note that as the glass substrate 158, it is preferable to use an alkali-free glass substrate in which impurities are hardly deposited on the glass surface. As the alkali-free glass, borosilicate glass, alumino / borosilicate glass, quartz glass and the like are desirable.

  The formation of the polysilicon transistor can be manufactured at a temperature of 600 ° C. or lower, and is not limited to the glass substrate used in this embodiment mode. For example, a stator substrate made of an organic material can be used.

(Third embodiment)
The electrostatic actuator according to the third embodiment of the present invention uses an organic transistor made of an organic material as a stator switching element connected to the stator drive electrode, and the stator drive electrode facing the mover has The difference from the first embodiment is that the organic transistor is disposed on a surface opposite to the surface on which the organic transistor is formed and a resin substrate is used as the stator substrate. Therefore, a description will be mainly given of differences from the electrostatic actuator according to the first embodiment. The same elements as those in the first embodiment are denoted by the same reference numerals.

  Fig.10 (a) is a top view about 1 block of the stator of this Embodiment. Moreover, FIG.10 (b) and FIG.10 (c) show sectional drawing along the x2-x2 line | wire and x3-x3 line | wire in Fig.10 (a), respectively.

  In the electrostatic actuator of the present embodiment, a resin substrate is used as the stator substrate. Hereinafter, the fixing substrate will be described as the resin substrate 214. As the resin substrate 214, a sheet made of a resin material such as polyethylene terephthalate, polyethylene naphthalate, or polyimide can be used. The source 204 of the transistor 202, which is a stator switching element formed on the resin substrate 214, is directly connected to the stator driving electrode line a1, the gate electrode 208 is connected to the stator selection electrode line b1, and the drain 212 is the drain electrode. 216 is connected to the stator drive electrode 122 through the through electrode 218.

  On the other hand, the source 224 of the transistor 234 formed on the resin substrate 214 is directly connected to the stator drive electrode line c1, the gate electrode 228 is connected to the stator selection electrode line d1, and the drain 232 is a through electrode by the drain electrode 216. 236 is connected to the stator drive electrode 122. Note that the transistor 202 and the transistor 234 are formed as an n-type transistor and a p-type transistor, and are configured to apply a positive potential and a negative potential to the stator drive electrode 122, respectively.

  FIG. 10B shows a cross-sectional configuration diagram of the resin substrate 214 including the n-type organic field effect transistor 202 formed on the resin substrate 214. A through hole is formed in the resin substrate 214 in advance, and a metal thin film 220 is formed inside the resin substrate 214 by electroless plating or the like, and a through electrode 218 is formed by filling a conductive metal or a conductive resin material. ing. The through electrode 218 is formed by, for example, irradiating an electron beam or a laser to form a through hole, using copper, gold, aluminum, silver, or the like as the metal thin film 220, and using silver paste, gold paste, Palladium pace or copper paste or the like can be used. Furthermore, there is no particular limitation on the shape or the like as long as the electrodes formed on the upper and lower surfaces can be electrically connected by the through electrode 218 without being filled with a conductive resin material or the like.

  Further, a stator drive electrode 122 connected to the through electrode 218 is formed on the back surface side. The stator drive electrode 122 can be produced by forming a film of copper by vapor deposition or the like, and performing etching with predetermined photolithography.

Further, on the surface of the resin substrate 214, for example, a source 204 and a drain 212 made of a polythiophene resin of a semiconductor material into which an n-type dopant molecule is introduced are formed by using a screen printing method. Alkali metal, alkylammonium, tetrakisdimethylaminoethylene, metallocenes, aromatic amines and the like are effective as the n-type dopant molecule, and a predetermined amount may be mixed in the printing paste. Then, an organic semiconductor layer 210 is formed using a semiconductor material such as polythiophene resin, and a gate insulating film 206 is formed using polyvinyl phenol or the like. Further, a gate electrode 208, stator driving electrode lines a1 and c1, and a drain electrode 216 are formed. The source 204 and the stator drive electrode electrode line a1 are electrically connected, and the drain 212 and the drain electrode 216 are also electrically connected. Further, the drain electrode 216 and the stator drive electrode 122 are electrically connected through the through electrode 218. Thereafter, an interlayer insulating film 142 is formed, and an insulating layer 36 made of polyurethane resin, epoxy resin, or the like is formed. The interlayer insulating film 142 can be formed by, for example, a silicon dioxide (SiO ₂ ) film by vapor deposition, sputtering, or a coating method.

  FIG. 10C shows a cross-sectional configuration diagram of the resin substrate 214 including the p-type organic field effect transistor 234 formed on the resin substrate 214. As in the case of the n-type organic field effect transistor 202, a through electrode 236 is formed on the resin substrate 214. Further, for example, a source 224 and a drain 232 made of a polythiophene-based resin of a semiconductor material into which p-type dopant molecules are introduced are formed on the surface of the resin substrate 214 using a screen printing method. As the p-type dopant molecule, a halogen molecule, a Lewis acid, a transition metal compound, or the like is effective, and a predetermined amount may be mixed into the printing paste. Then, an organic semiconductor layer 230 is formed using an organic semiconductor material such as a polythiophene resin, and a gate insulating film 226 is further formed using polyvinylphenol or the like. Further, a gate electrode 228, stator driving electrode lines a1 and c1, and a drain electrode 238 are formed.

  The source 224 and the stator drive electrode line c1 are electrically connected, and the drain 232 and the drain electrode 238 are also electrically connected. Further, the drain electrode 238 is electrically connected to the stator drive electrode 122 via the through electrode 236. The formation of the interlayer insulating film 142 and the insulating layer 36 is the same as described above.

  An insulating layer 222 is formed on the stator drive electrode 122. Since the surface of the insulating layer 222 faces the moving element 2, the insulating layer 222 is configured in the same manner as the material of the insulating layer 34 in the first embodiment in consideration of the lubricity of both.

  The material for the stator driving electrode lines a1 and c1, the gate electrodes 208 and 228, and the drain electrodes 216 and 238 is not only a conductive resin but also a metal material such as tantalum, chromium, titanium, gold, silver, and aluminum. Can be formed by vapor deposition or sputtering.

As described above, in the electrostatic actuator according to the present embodiment, both surfaces of the resin substrate 214 are effectively used, a switching element and a wiring for driving it are formed on one surface, and the other surface is formed. A stator driving electrode 122 is formed, and drain electrodes 216 and 238 of a transistor as a switching element are connected to the stator driving electrode 122 via through electrodes 218 and 236, respectively. This configuration can be easily manufactured by using a stator substrate made of an insulating material. However, even if the semiconductor substrate as in the case of the electrostatic actuator of the first embodiment is used, if an insulating film such as a silicon dioxide (SiO ₂ ) film is formed on the inner surface after the through hole is formed, The structure of the electrostatic actuator of the present embodiment can be realized by the same method. Note that a nitride film or an organic resin film can also be used as the insulating film.

  As described above, in the electrostatic actuator according to the present embodiment, only the stator drive electrode is formed on the other surface, so that the gap 58 with the surface of the opposing mover can be made uniform and narrow. The driving force can be further increased. Further, if a thin and flexible resin substrate is used, an electrostatic actuator having excellent flexibility can be realized.

  In the electrostatic actuator of the present embodiment, an organic transistor made of an organic material is manufactured on a resin substrate, but the present invention is not limited to this. For example, a polycrystalline silicon thin film or a single crystal silicon thin film may be formed over a resin substrate, and a transistor may be manufactured using the polycrystalline silicon thin film or the single crystal silicon thin film.

(Fourth embodiment)
In the electrostatic actuator according to the fourth embodiment of the present invention, a configuration in which a large number of n-type MOS field effect transistors and p-type MOS field effect transistors are respectively connected in series as the stator switching element is the first embodiment. This is a different point from the electrostatic actuator. By connecting in series in this way, it is possible to increase the breakdown voltage as the stator switching prevention. Differences from the electrostatic actuator of the first embodiment will be mainly described. In addition, the same code | symbol is attached | subjected to the same element as the electrostatic actuator of 1st Embodiment.

  Fig.11 (a) shows the top view about 1 block of the stator of this Embodiment. FIG. 11B is a sectional view taken along line x2-x2 in FIG. 11A, and FIG. 11C similarly shows an equivalent circuit of the stator switching element for one block.

  In FIG. 11A, Tr1, Tr2,..., Trn n-type MOS field effect transistors stator switching element 256, and n p-type MOS field effect transistors fixed as well. A child switching element 258 is formed, these are connected in series, and the drain electrode at the final stage is electrically connected to the stator drive electrode 122 through a via hole.

  Since the p-type MOS field effect transistor has the same configuration as that of the n-type MOS field effect transistor, only the stator switching element 258 is described in FIG.

  First, it demonstrates in detail using Fig.11 (a) and FIG.11 (b). In this embodiment, a p-type single crystal silicon substrate is used as the stator substrate. Hereinafter, the stator substrate will be described as the silicon substrate 128. On this silicon substrate 128, n transistors of transistors Tr1 to Trn are formed. The source electrode 242 of the transistor Tr1 is electrically connected to the stator drive electrode line a1, and the gate electrode 240 is connected to the stator selection electrode line b1. The drain electrode 241 is connected to the source electrode 246 of the transistor Tr2. Further, the gate electrode 244 is connected to the stator selection electrode line b1, and the drain electrode 254 is connected to the source electrode (not shown) of the transistor Tr3. In this way, the source electrode 248 of the transistor Trn is similarly connected to the drain electrode (not shown) of Trn-1 which is the previous transistor. Similarly, the gate electrode 250 is connected to the stator selection electrode line b1. In this way, the stator switching element 256 is formed such that the drain electrode of each transistor and the source electrode of the subsequent transistor are connected in series. The drain electrode 252 of the final stage transistor Trn of the stator switching element 256 is electrically connected to the stator drive electrode 122 through the via hole 118. That is, as shown in FIG. 11C, the drain electrode and the source electrode of n n-type MOS field effect transistors are connected in series, and the n gate electrodes are commonly used for the stator selection electrode line b1. It is connected to the.

  With this configuration, for each of the transistors Tr1 to Trn, a voltage obtained by dividing the voltage applied as a whole by n is applied between the source and gate of each transistor. Therefore, the voltage that one transistor takes can be greatly reduced. That is, a stator switching element having a high breakdown voltage structure can be formed by using a plurality of relatively low breakdown voltage transistors.

  According to the electrostatic actuator of the present embodiment, a high voltage can be applied, so that the driving force can be further increased.

  Note that such a structure in which transistors are connected in series can be used not only for the electrostatic actuator of this embodiment but also for a polycrystalline silicon thin film, a single crystal silicon thin film, an organic transistor made of an organic material, or the like. .

(Fifth embodiment)
The electrostatic actuator according to the fifth embodiment of the present invention has a structure in which a plurality of drive electrodes arranged in a matrix form are formed on both the moving element and the stator, and these are opposed to each other. In this configuration, the movable element mounted on the stator is driven by the interaction between charges generated on the driving electrode of the stator.

  That is, the structure of the mover used in the electrostatic actuator of the present embodiment may be basically the same as that of the stator described in the first to fourth electrostatic actuators. The moving element and the stator configured as described above are configured with their respective drive electrodes facing each other. In the present embodiment, a configuration will be described in which a moving element having the same structure as that of the stator of the electrostatic actuator according to the first embodiment is used to face each other. Therefore, the description of the same configuration as that of the electrostatic actuator of the first embodiment is omitted, and a description is mainly given of a different configuration. The same elements as those of the electrostatic actuator of the first embodiment are denoted by the same reference numerals.

  FIG. 12 is a block diagram showing the overall configuration of the electrostatic actuator of the present embodiment. The mover 266 has the same configuration as that of the stator 4 in the electrostatic actuator according to the first embodiment, but the shape is smaller than that of the stator 4. The mover drive electrode (not shown) of the mover 266 and the stator drive electrode (not shown) of the stator 4 are arranged to face each other. A driving force is generated by the interaction between the electric charge generated in the moving element driving electrode of the moving element 266 and the electric charge generated in the stator driving electrode of the stator, and the moving element 266 is driven.

  The stator 4 is used for driving in the left-right direction of the paper, that is, the x direction indicated by the arrow 20 (hereinafter referred to as the x direction) and in the vertical direction of the paper, ie, the y direction indicated by the arrow 22 (hereinafter referred to as the y direction). And mover 266 by moving the stator driving electrode provided on the moving element 266 and the moving element driving electrode.

  Stator selection electrode circuits 8 and 10 and stator drive electrode circuits 6 and 12 provided integrally or close to the stator 4 are arranged. A positive potential is applied from the positive power supply circuit 14 to the stator driving electrode circuit 6 and the stator selection electrode circuit 8, and a negative potential is applied to the stator driving electrode circuit 12 and the stator selection electrode circuit 10 from the negative power supply circuit 16. Apply from. These positive potentials or negative potentials are respectively applied to two stator switching elements (not shown) connected to the stator drive electrodes.

  On the other hand, with respect to the mover 266, mover selection electrode circuits 270 and 272 and mover drive electrode circuits 268 and 274 provided integrally or close to the mover 266 are arranged. A positive potential is applied from the positive power supply circuit 260 to the mover drive electrode circuit 274 and the mover selection electrode circuit 270, and a negative potential is applied to the mover drive electrode circuit 268 and the mover selection electrode circuit 272. Apply from. These positive or negative potentials are respectively applied to two switching elements (not shown) connected to the slider drive electrode.

  Further, the positive power supply circuits 14 and 260 and the negative power supply circuits 16 and 262 are connected to a control circuit 264 that controls the potentials of a plurality of stator drive electrodes and mover drive electrodes arranged in a matrix. Yes.

  Next, FIG. 13 shows a cross-sectional view along the line x1-x1 of FIG. The operation principle of moving on the stator 4 will be described with reference to FIGS. 13 (a) to 13 (e). In FIG. 13A, a positive potential and a negative potential are applied to the stator drive electrodes 38 and 42 of the stator 4, respectively, and no potential is applied to the other stator drive electrodes 40 and 44. On the other hand, a negative potential and a positive potential are applied to the mover drive electrodes 276 and 284 of the mover 266, respectively, and no potential is applied to the mover drive electrodes 280 and 286. In this state, a positive charge 50 generated on the stator drive electrode 38 and a negative charge 278 on the mover drive electrode 276, a negative charge 54 on the stator drive electrode 42, and a positive charge 282 on the mover drive electrode Attracts each other, and the moving element 266 receives a force in the directions of arrows 302 and 304, respectively, and stops to be positioned.

  Next, FIG. 13B shows a step of moving the mover 2 in the right direction. The potential of each electrode of the mover 266 is maintained at the potential shown in FIG. 13A, and a positive potential is applied to the stator drive electrode 40 of the stator 4 and a negative potential is applied to the stator drive electrode 44. Apply. No potential is applied to the other stator drive electrodes 38 and 42. In this way, the negative charge 278 on the moving element driving electrode 276 is subjected to a force in the direction indicated by the arrow 306 by the attraction force due to the positive charge 64 generated on the stator driving electrode 40. On the other hand, the positive charge 282 on the slider drive electrode 284 receives a force in the direction indicated by the arrow 308 due to the repulsive force. Further, the positive charge 282 receives a force in the direction of the arrow 72 due to the negative charge 66 on the stator drive electrode 44. The moving element 266 is driven in the right direction as indicated by an arrow 74 as a whole by the sum of these forces.

  FIG. 13C shows a state where the potential of the stator drive electrode of the stator is changed while the potential of the mover drive electrode of the mover 266 is maintained at the moment when the mover 266 moves to the right by one pitch. . A negative potential and a positive potential are applied to the stator drive electrodes 38 and 42 of the stator 4, respectively, and no potential is applied to the other stator drive electrodes 40 and 44. On the other hand, the potential of the mover drive electrode of the mover maintains the previous state. That is, a negative potential and a positive potential are applied to the mover drive electrodes 276 and 284 of the mover 266, respectively, and no potential is applied to the mover drive electrodes 280 and 286. In this state, the moving element 2 is moved to the arrows 312, 316 by the repulsive force between the negative charge 288 and the negative charge 278, the repulsive force between the positive charge 290 and the positive charge 282, and the attractive force between the negative charge 278 and the positive charge 290, respectively. 314 receives force in the direction indicated by 314 and moves to the right indicated by arrow 74.

  In the case of the electrostatic actuator of the first embodiment, the electric charge on the moving element is attenuated, so that it is necessary to re-induct, but the electrostatic actuator of the present embodiment does not need to be re-inducted.

  FIG.13 (d) is a figure which shows the step moved to the left side from the state of Fig.13 (a). A negative potential is applied to the stator drive electrode 40, a positive potential is applied to the stator drive electrode 44, and no potential is applied to the other stator drive electrodes 38 and 42. As a result, the negative charge 278 of the mover drive electrode 276 is repelled by the negative charge 300 on the stator drive electrode 40 and pulled in the direction of the arrow 318, and the positive charge 282 on the mover drive electrode 284 is pulled by the negative charge 300. In the direction of the arrow 320, it is repelled by the positive charge 292 on the stator drive electrode 44 and driven in the direction of the arrow 322.

  FIG. 13E shows a state in which the potential of the stator drive electrode of the stator is changed at the moment when the mover 4 moves one pitch in the left direction. A negative potential and a positive potential are applied to the stator drive electrodes 38 and 42, respectively, but not applied to the stator drive electrodes 40 and 44. The positive charge 282 on the mover drive electrode 284 is attracted by the negative charge 296 on the stator drive electrode 38 and receives a repulsive force in the direction of the arrow 326 by the positive charge on the stator drive electrode 42, so that the arrow 90 As shown in FIG. Thus, the moving element moves in the x direction by sequentially scanning the electric potential of the stator driving electrode of the stator.

  14 (a) and 14 (b) show the operating states of the potentials of the stator drive electrodes and the mover drive electrodes arranged in a matrix of the mover 266 and the stator 4, respectively, when moving in the x direction. Show. This state corresponds to the state shown in FIG. On the stator drive electrodes e11 to e66 arranged in a matrix of the stator 4 shown in FIG. 14B, the mover drive electrodes f11 to f11 arranged in a matrix of the mover 266 shown in FIG. If f66 is superimposed on a mirror surface object with reference to a horizontal line on the paper surface, the cross-sectional configuration of FIG. 13B is obtained. That is, for example, the stator drive electrode e11 of the stator 4 and the mover drive electrode f11 of the mover 266, the stator drive electrode e66 of the stator 4 and the mover drive electrode f66 of the mover 266 are overlapped, and the actuator is used. Constitute.

  In FIG. 14A, a negative potential is applied only to c11 and c55 among the mover drive electrode lines c11 to c66 connected to the mover drive electrode circuit 268 and connected to the mover selection electrode circuit 272. Negative power is applied to all of the movable element selection electrode lines d11 to d66 to turn them on. In addition, a positive potential is applied only to a33 among the mover drive electrode lines a11 to a66 connected to the mover drive electrode circuit 274, and the mover select electrode connected to the mover select electrode circuit 270. A positive potential is applied to all the lines b11 to b66 to turn them on.

  In this way, the row of mover drive electrodes f11, f21, f31, f41, f51, and f61 of the mover 266 and the row of mover drive electrodes f15, f25, f45, f55, and f65 have negative potentials. Note that the rows of the slider drive electrodes f11, f21, f31, f41, f51, and f61 correspond to the slider drive electrodes 276 in FIG. 13B, and the slider drive electrodes f15, f25, f45, f55, and f65. The column corresponds to the slider driving electrode 284 in FIG. Further, the row of the slider drive electrodes f13, f23, f33, f43, f53, and f63 has a positive potential, and these correspond to the slider drive electrode 284 in FIG.

  By maintaining the arrangement of the potentials of the mover drive electrodes of the mover 266 and changing the arrangement of the potentials of the stator drive electrodes of the stator 4 as follows, the mover 266 placed on the stator 4 is changed. It can be driven.

  The arrangement of the potentials of the stator drive electrodes arranged in a matrix of the stator 4 shown in FIG. 14B is arranged on all of the stator selection electrode lines b1 to b6 connected to the stator selection electrode circuit 8. Apply positive potential to turn on. Further, among the stator driving electrode lines a1 to a6 connected to the stator driving electrode circuit 6, a positive potential is applied to a2 and a6 to turn them on. Further, a negative potential is applied to all of the stator selection electrode lines d1 to d6 connected to the stator selection electrode circuit 10 to turn them on. Furthermore, a negative potential is applied only to c4 among the stator driving electrode lines c1 to c6 connected to the stator driving electrode circuit 12 to turn it on. Accordingly, a row of stator drive electrodes e12, e22, e32, e42, e52, e62 corresponding to the stator drive electrode 40 in FIG. 13B, and a stator drive electrode e16, not shown in FIG. The columns e26, e36, e46, e56, and e66 are positive potentials. In addition, the row of the stator drive electrodes e14, e24, e34, e44, e54, e64 corresponding to the stator drive electrode 44 in FIG. 13B has a negative potential. As a result, a rightward force acts on the moving element.

  In order to move sequentially to the right side, for example, in terms of time, the rows of the stator drive electrodes e11, e21, e31, e41, e51, e61 of the stator 4 are off → negative → off → positive, the stator drive electrode e12, In the columns e22, e32, e42, e52, and e62, positive, off, negative, off, and positive repetitions are performed, and the moving element is moved by repeating in the same manner with respect to the columns arranged in the other matrix. Can do. That is, for a local array of columns, it is only necessary to apply off, negative, off, and positive repetitive potentials to each column in the right direction while shifting each block by time.

  In order to move leftward, for example, the rows of the stator drive electrodes e11, e21, e31, e41, e51, e61 are off → positive → off → negative, and the stator drive electrodes e12, e22, e32, e42, e52. In the column e62, positive, off, negative, off, and positive repetitions are performed, and the moving element can be moved by repeating in the same manner with respect to the columns arranged in a matrix. That is, the movable element 266 can be freely moved in the x direction.

  In the above-described example, the potential of the stator drive electrode of the stator is scanned while the potential of the mover drive electrode of the mover is fixed, but the potential of the stator drive electrode of the stator is fixed, Even when the potential of the slider driving electrode of the slider is scanned, the slider can be moved in the same manner.

  Further, since the arrangement of the potentials of the driving electrodes of the stator and the moving element (arrangement of electric charges) can be controlled independently, the y-direction as described for the electrostatic actuator of the first embodiment by the combination thereof Thus, an electrostatic actuator having various functions can be realized.

  In the present embodiment, the example using the mover having the same configuration as the stator in the first embodiment has been described, but the present invention is not limited to this. For example, it is good also as a moving element which has the same structure as the structure of the stator used for the electrostatic actuator of 2nd Embodiment to 4th Embodiment.

  Note that the configuration of the gap between the stator and the mover may be the same as the method described in the first embodiment, and a description thereof will be omitted. In the electrostatic actuator of the first embodiment, the charge induced in the moving element decreases with time, whereas in the electrostatic actuator of the present embodiment, the moving element drive electrode has a charge independent of the stator. Therefore, an operation for reinducing the charge is not necessary. For this reason, it is not necessary to apply a high potential necessary for the induction of electric charges to each drive electrode, so that the design of each switching element is facilitated. Also, a low voltage power supply can be used, and power consumption can be greatly reduced.

(Sixth embodiment)
The electrostatic actuator according to the sixth embodiment of the present invention is characterized in that it has a multilayer structure using the combination of the stator and the mover in the first to fifth embodiments.

  FIG. 15A is a schematic perspective view of an electrostatic actuator having a multilayer structure. A plurality of moving elements 334 constitute a first connecting body 350 connected by a connecting portion 332 having a fulcrum 330 for transmitting a driving force. A plurality of stators 338 having stator drive electrodes 336 arranged in a matrix form a second connecting body 352 connected by a connecting portion 340 having a fulcrum 342. The first coupling body 350 and the second coupling body 352 have a distance d, and the stators 338 and the movable elements 334 are arranged alternately.

  By configuring in this way, the first connecting body 350 that is the moving body of the moving body is connected to the second connecting body 352 that is the connecting body of the stator, as indicated by arrows 344 and 346, respectively. Can move in the direction or y direction. Further, as indicated by an arrow 328, it can be rotated at an angle with respect to any designated position 348.

  The interval d is desirably set so that the adjacent stator 338 or the moving element 334 do not contact each other.

  In FIG. 15B, a third connecting body 362 is configured by using a plurality of moving elements 360 having moving element driving electrodes 354 arranged in a matrix, and the second connecting body 352 and the second connecting body 352 are connected to each other. 3 is a schematic perspective view of an electrostatic actuator in which the three coupling bodies 362 have an interval h, and the stators 338 and the movers 360 are alternately arranged. With such a configuration, the third coupling body 362 that is the movable body coupling body is connected to the second coupling body that is the coupling body of the stator, as indicated by arrows 344 and 346, respectively. Can move in the direction. Further, as indicated by an arrow 328, it can be rotated at an angle with respect to any designated position 348. The interval h is preferably set so that adjacent stators 338 or movers 360 do not contact each other.

  With such a multi-layer structure, the driving force for two-dimensional planar movement can be further increased.

  In the present embodiment, the case where the stator and the mover are plate-shaped has been described, but the present invention can be similarly applied to a case of a cylindrical shape as described later.

(Seventh embodiment)
Although the first to sixth embodiments have been described using the planar substrate, the present invention can be configured to be fitted using a columnar or cylindrical stator and a moving element.

  The electrostatic actuator according to the seventh embodiment of the present invention has a configuration in which a columnar or cylindrical stator and a cylindrical moving element are used and these are fitted concentrically. FIG. 16 is a schematic perspective view of a cylindrical electrostatic actuator. The stator 366 uses a columnar or cylindrical stator substrate, and stator drive electrodes arranged in a matrix on the circumferential surface in a direction parallel to and perpendicular to the central axis 380 of the column. 368 and a pair of stator switching elements (not shown) for applying a potential thereto are formed. The structure of the stator 366 may be the same as the structure described in the first embodiment, for example. However, since the stator substrate is cylindrical or columnar, it is necessary to form transistors and stator drive electrodes on the circumferential surface. In addition, the stator drive electrode line must be taken out from both ends of the cylindrical or columnar substrate in the same direction as the stator selection electrode line, and the stator drive electrode circuit is also used for stator selection. It is required to be arranged at the same position as the electrode circuit. In the present embodiment, electrode circuits 372 and 374 including a stator driving electrode circuit and a stator selection electrode circuit are formed.

  The mover 370 can be easily manufactured by using, for example, a flexible resin substrate and the same configuration as that of the mover of the first embodiment.

  With this configuration, when the stator drive electrode 368 disposed on the outer peripheral surface of the stator 366 is scanned with a potential in parallel with the central axis 380 of the cylinder, the mover 370 can be moved as indicated by an arrow 378. Rotate in the circumferential direction. Further, by scanning the stator drive electrode 368 in a direction orthogonal to the central axis of the cylinder 380, the movable element 370 moves in parallel with the central axis 380 of the cylinder as indicated by an arrow 364. Therefore, if the rotation is moved in the direction parallel to the central axis 380 of the cylinder, the movement shown by the arrow 376 can be set freely.

  In the present embodiment, the configuration of the electrostatic actuator of the first embodiment has been described as an example. However, the configuration of the electrostatic actuator of the second to sixth embodiments is also possible. . For example, when a matrix-like mover drive electrode is formed also on the mover side, the mover drive electrode needs to be disposed on the inner surface of the cylinder of the mover. For this reason, after forming the matrix-like slider driving electrode on the flexible flat substrate, the flexible slider is bent so that the matrix-like slider driving electrode is arranged on the inner surface of the cylinder. And both ends thereof are joined using an electron beam, laser light, an adhesive, or the like, so that a cylindrical moving element in which moving element switching elements and moving element drive electrodes are formed in a matrix is obtained. Thereby, the electrostatic actuator which has the drive electrode arrange | positioned in matrix form with both a stator and a movable element is realizable.

  As described above, an electrostatic actuator that can rotate and move in the axial direction at the same time can be realized by using a columnar or cylindrical stator and a moving element that constitute a matrix-shaped drive electrode.

  The electrostatic actuator according to the present invention can move the moving element placed on the stator in any direction by using the drive electrodes arranged in a matrix, has low power loss, and is excellent in mass productivity. Therefore, the present invention can be applied to a field where focusing on a digital camera or a mobile phone camera or a minute drive is required by various devices.

The block diagram which shows the whole structure of the electrostatic actuator concerning the 1st Embodiment of this invention. Sectional drawing which shows the structure and operating principle of the electrostatic actuator in the embodiment The top view which shows the structure which has arranged the several stator drive electrode in the matrix form in the stator of the electrostatic actuator in the embodiment The top view which shows operation | movement of the stator drive electrode at the time of x direction movement about the electrostatic actuator in the embodiment The top view which shows operation | movement of the stator drive electrode at the time of a y-direction movement about the electrostatic actuator in the embodiment The figure which shows the coordinate system of the stator drive electrode for rotational movement about the electrostatic actuator in the embodiment In the stator of the electrostatic actuator in the same embodiment, a plan view and an equivalent circuit diagram of one block among them Sectional drawing of one block in the stator of the electrostatic actuator in the same embodiment In the stator of the electrostatic actuator concerning the 2nd Embodiment of this invention, the top view and sectional drawing of the 1 block In the stator of the electrostatic actuator concerning the 3rd Embodiment of this invention, the top view and sectional drawing of the 1 block In the stator of the electrostatic actuator concerning the 4th Embodiment of this invention, the top view of 1 block, sectional drawing, and an equivalent circuit schematic The block diagram which shows the whole structure of the electrostatic actuator concerning the 5th Embodiment of this invention. The figure which shows the cross-sectional structure of the electrostatic actuator concerning the embodiment, and its operation principle The top view which shows operation | movement of the stator drive electrode at the time of an x direction movement, and a mover drive electrode about the electrostatic actuator concerning the embodiment Schematic perspective view of an electrostatic actuator according to a sixth embodiment of the present invention. Schematic perspective view of an electrostatic actuator according to a seventh embodiment of the present invention

Explanation of symbols

2,266,334,360,370 Mover 4,338,366 Stator 6,12 Stator drive electrode circuit 8,10 Stator selection electrode circuit 14,260 Positive power supply circuit 16,262 Negative power supply circuit 18, 264 Control circuit 24 Stator board 26, 30, a1, a2, a3, a4, a5, a6, c1, c2, c3, c4, c5, c6 Stator drive electrode line 28, 32, 256, 258 Stator Switching element 34, 36, 222 Insulating layer 38, 40, 42, 44, e11 to e66, 336, 368 Stator drive electrode 46 Conductive film 48 Movable substrate 50, 56, 64, 80, 282, 290, 292 , 298 Positive charge 52,54,66,82,278,288,296,300 Negative charge 58 Gap 92,94,96,98 Connection point 100 yen 10 , 104 Inductive pulse voltage 106, 112, 176, 188, 208, 228, 240, 244, 250 Gate electrode 108, 114, 172, 190, 242, 246, 248 Source electrode 110, 116, 174, 192, 216 238, 241, 252, 254 Drain electrode 118, 120 Via hole 124, 126, 198, 200, 202, 234 Transistor 128 Silicon substrate 130, 142, 144, 160 Interlayer insulating film 134 n ⁺ source 136, 150, 168, 194 206, 226 Gate insulating film 138, 148 Gate 140 n ⁺ drain 142 Insulating film 146 p ⁺ drain 152 n well 154 p ⁺ source 158 glass substrate 164 n ⁺ type polysilicon drain 166 polysilicon channel region 17 0 n ⁺ type polysilicon source 182 p ⁺ type polysilicon source 184 polysilicon channel region 186 p ⁺ type polysilicon drain 196 Diffusion prevention layer 204, 224 source 210, 230 Organic semiconductor layer 212, 232 drain 214 Resin substrate 218, 236 Through-electrode 220 Metal thin film 270, 272 Mover selection power supply circuit 268, 274 Mover drive electrode circuit 276, 280, 284, 286, 354 Mover drive electrode b 1, b 2, b 3, b 4, b 5, b 6, d 1 d2, d3, d4, d5, d6 Stator selection electrode lines f11 to f66 Mover drive electrodes 330, 342 Support points 332, 340 Connection part 350 First connection body 352 Second connection body 362 Third connection body 372 374 electrode circuit

Claims (18)

A plurality of stator driving electrodes arranged in a matrix on the surface of the insulating layer of the stator substrate having an insulating layer at least on the surface; and formed on the surface of the stator substrate and connected to the stator driving electrode. A stator comprising a set of stator switching elements, and a stator selection electrode line and a stator drive electrode line connected to each of the stator switching elements;
A mover made of a mover substrate, which is opposed to the stator drive electrode of the stator and arranged to be movable on the stator, and has an insulating layer formed on at least a surface facing the stator,
A stator selecting electrode circuit and a stator driving electrode circuit for driving each of the set of stator switching elements,
The stator switching element is selectively driven by the stator selection electrode circuit and the stator drive electrode circuit, and a predetermined voltage is applied to the stator drive electrode connected to the stator switching element. In this way, the movable element is moved two-dimensionally on the stator surface. The plurality of stator drive electrodes arranged on the stator substrate are different from the surface on which the stator switching element, the stator selection electrode line, and the stator drive electrode line are formed. The electrostatic actuator according to claim 1, wherein the electrostatic switching actuator is configured such that the stator switching element and the stator driving electrode are connected via a through electrode formed on the stator substrate. . A plurality of stator driving electrodes arranged in a matrix on the surface of the insulating layer of the stator substrate having an insulating layer at least on the surface; and formed on the surface of the stator substrate and connected to the stator driving electrode. A stator comprising a set of stator switching elements, and a stator selection electrode line and a stator drive electrode line connected to each of the stator switching elements;
A plurality of mover drive electrodes arranged in a matrix on the surface of the insulating layer of the mover substrate having an insulating layer on at least the surface, and formed on the surface of the mover substrate and connected to the mover drive electrode A moving element comprising: a set of moving element switching elements; and a moving element selecting electrode line and a moving element driving electrode line connected to each of the moving element switching elements;
A stator selection electrode circuit and a stator drive electrode circuit for driving the stator switching element and the mover switching element, respectively, and a mover selection electrode circuit and a mover drive electrode circuit;
The mover drive electrode of the mover and the stator drive electrode of the stator are arranged to face each other,
The stator switching element and the moving element switching element are selectively selected by the stator selecting electrode circuit and the stator driving electrode circuit, and the moving element selecting electrode circuit and the moving element driving electrode circuit, respectively. And applying a predetermined voltage to the stator drive electrode and the mover drive electrode connected to the stator switching element and the mover switching element, respectively, thereby moving the mover on the stator surface. An electrostatic actuator characterized in that it is moved two-dimensionally. The plurality of stator drive electrodes arranged on the stator substrate are different from the surface on which the stator switching element, the stator selection electrode line, and the stator drive electrode line are formed. The electrostatic device according to claim 3, wherein the stator switching element and the stator drive electrode are connected via a through electrode formed on the stator substrate. Actuator. The plurality of moving element driving electrodes arranged on the moving element substrate are different from the surface on which the moving element switching element, the moving element selecting electrode line, and the moving element driving electrode line are formed. 5. The structure according to claim 3, wherein the movable element switching element and the movable element drive electrode are connected via a through electrode formed on the movable element substrate. The electrostatic actuator described. A stator coupling body in which a plurality of the stators are coupled at a predetermined position and at a predetermined interval, and a movable body coupling body in which a plurality of the movable elements are coupled at a predetermined position and at a predetermined interval. The electrostatic actuator according to claim 1, wherein the stator and the mover are alternately arranged. 7. The stator according to claim 1, wherein the stator substrate comprises a single crystal silicon substrate on which an insulating layer is formed, and the stator switching element comprises a transistor formed on the single crystal silicon substrate. The electrostatic actuator in any one. 7. The stator according to claim 1, wherein the stator substrate is made of an insulating material, and the stator switching element is made of a thin film transistor formed on the stator substrate. The electrostatic actuator described. The electrostatic actuator according to claim 8, wherein the stator substrate is made of an insulating organic material. 7. The mover substrate comprises a single crystal silicon substrate on which an insulating layer is formed, and the mover switching element comprises a transistor formed on the single crystal silicon substrate. The electrostatic actuator in any one. 7. The moving element substrate is made of an insulating material, and the moving element switching element is made of a thin film transistor formed on the moving element substrate. Electrostatic actuator. The electrostatic actuator according to claim 11, wherein the mover substrate is made of an insulating organic material. The electrostatic actuator according to claim 8, wherein the transistor includes an organic material. The electrostatic actuator according to claim 7, wherein the stator switching element has a configuration in which a plurality of transistors are arranged in series. The electrostatic actuator according to claim 10, wherein the moving element switching element has a configuration in which a plurality of transistors are arranged in series. The set of stator switching elements connected to the stator drive electrodes are each composed of an n-type transistor and a p-type transistor, and any one of claims 7, 8, 9, and 14 The electrostatic actuator described in 1. The set of mover switching elements connected to the mover drive electrode is composed of an n-type transistor and a p-type transistor, respectively, 16, 11, 12, or 15. The electrostatic actuator described in 1. The one of the stator and the moving element has a cylindrical shape or a columnar shape, and the other has a cylindrical shape arranged concentrically with respect to the one. The electrostatic actuator according to any one of 5.

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