JPH07273517A - Microwave circuit device - Google Patents

Abstract

PURPOSE:To simply adjust a gap between an upper face of a resonator and an earth metal with high precision by finely adjusting a gap of a dielectric resonator with respect to a ground conductor or a moving conductor arranged opposite to an integrated circuit substrate of a microwave integrated circuit or a millimeter wave integrated circuit including the dielectric resonator by means of a piezoelectric expansion/contraction body. CONSTITUTION:A dielectric resonator 2 of a millimeter wave circuit device is mounted on a circuit substrate 1 of a microwave integrated circuit (MIC) or a microwave monolithic integrated circuit (MMIC) while being coupled with a line being a component of a resonator circuit in the integrated circuit and the surrounding of the resonator 2 and the substrate 1 is surrounded by a grounded metallic case 3. A lower part 31 of the metallic case 3 is referred to as a 1st ground metal and an upper part 32 of the metallic case 3 is referred to as a 2nd ground metal. A subcarrier 4 on which the MIC or MMIC is mounted is placed on the metallic part 31. A hole with a diameter larger than that of the resonator 2 is open to the metallic part 32, a moving cylinder with gold plating applied thereto is inserted to the hole and fitted opposite to the resonator 2. A support part 12 is bonded to the metallic part 32 of the case 2 via an electrode 14 and the piezoelectric expansion/contraction body 13. A voltage is applied between the electrode 14 and the metallic part 32 to finely adjust a gap between the resonator 2 and the cylinder 11 by the piezoelectric expansion/contraction body 13.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microwave or millimeter wave circuit device such as an oscillator using a dielectric resonator.

[0002]

2. Description of the Related Art Conventionally, a dielectric resonator is mounted on a microwave or millimeter wave oscillator to stabilize the oscillation frequency and reduce phase noise. A configuration example of such a circuit device is shown in FIG. As shown in the figure, in this millimeter wave circuit device 201, a line which forms a resonance circuit in this integrated circuit is coupled on a circuit board 21 of a microwave integrated circuit (MIC) or a microwave monolithic integrated circuit (MMIC). The dielectric resonator 22 is mounted on the dielectric resonator 22 and the periphery thereof is surrounded by a grounded metal case 23, and an adjusting screw 25 is provided above the dielectric resonator 22 to adjust the distance from the upper surface of the resonator. By doing so, the oscillation frequency can be changed and adjusted. In the above,
Reference numeral 24 is a subcarrier (electric conductor) for mounting the MIC or MMIC.

[0003]

However, particularly when the millimeter wave band oscillator has the above-mentioned configuration, when the cylindrical TE01δ fundamental mode is used as the dielectric resonator 22, the height thereof is 1 mm. The resonator 22
The distance between the upper surface of the machine and the adjusting screw 25 must be adjusted within a range of about 1/10 or less, and such an adjustment is technically extremely difficult, including processing accuracy. There was a point. The present invention has been made to solve the above problems, and provides a microwave circuit device that can easily and accurately adjust the distance between the upper surface of the dielectric resonator and the ground metal for frequency adjustment. With the goal.

[0004]

In order to solve the above-mentioned problems, a microwave circuit device according to a first invention of the present application is a dielectric resonance on a substrate on which a microwave integrated circuit or a millimeter wave integrated circuit is formed. A microwave circuit device in which a container is mounted and a ground conductor is provided on at least the back surface side of the substrate, the microwave circuit device having a holding portion protruding above the ground conductor, penetrating while contacting the ground conductor, and vertically A piezoelectric expandable body provided between the holding portion and the grounding conductor by providing a movable conductor so as to be movable in any direction, and facing the grounding conductor or the moving conductor above the dielectric resonator. Is configured to electrically adjust the distance between the upper surface of the dielectric resonator and the ground conductor or the movable conductor. Further, in the microwave circuit device according to the second invention of the present application, the dielectric resonator is mounted on the substrate on which the microwave integrated circuit or the millimeter wave integrated circuit is formed,
In a microwave circuit device in which a first grounding conductor is provided on the back surface side of the substrate and a second grounding conductor is provided above the dielectric resonator, a holding portion protruding above the second grounding conductor. And a movable electric conductor that penetrates the second ground electric conductor while contacting the second ground electric conductor and is movable in the up-and-down direction, and is provided between the holding portion and the second ground electric conductor by a piezoelectric stretchable body. The distance between the upper surface of the dielectric resonator and the movable conductor is electrically adjusted. A microwave circuit device according to a third invention of the present application has a dielectric resonator mounted on a substrate on which a microwave integrated circuit or a millimeter wave integrated circuit is formed, and a first ground electrode on the back surface side of the substrate. A microwave circuit device in which a conductor is provided and a second ground conductor is provided above the dielectric resonator, wherein the microwave circuit device has a holding portion projecting above the first ground conductor and at the first ground conductor. A movable electric conductor is provided so as to be in contact therewith and movably in the up-down direction, and a piezoelectric expansion member provided between the holding portion and the first ground electric conductor causes the upper surface of the dielectric resonator and the second electric resonator to move. It is configured to electrically adjust the distance to the ground conductor.

[0005]

According to the present invention having the above-mentioned structure, the distance between the dielectric resonator and the ground conductor or the movable conductor opposed to the microwave integrated circuit or millimeter wave integrated circuit substrate including the dielectric resonator is set to be piezoelectric. It can be finely adjusted electrically by changing the dimensions of the stretchable body. Therefore, the above interval adjustment can be performed easily and with high accuracy.

[0006]

Embodiments of the present invention will be described below with reference to the drawings. The millimeter wave circuit device 10 according to the first embodiment of the present invention.
1 is shown in FIG. As shown in FIG. 1, the millimeter-wave circuit device 101 first includes a microwave integrated circuit (MI).
C) or microwave monolithic integrated circuit (MMI
The dielectric resonator 2 is mounted on the circuit board 1 of C) by being coupled to the line forming the resonance circuit in the integrated circuit 1.
The surrounding is surrounded by a grounded metal case 3. The lower part 31 of the metal case 3 is a first ground metal part, and the upper part 32 of the metal case 3 is a second ground metal part. 4 is the above MIC
Alternatively, it is a subcarrier (electric conductor) for mounting the MMIC 1 and is placed on the first ground metal part 31.

Then, instead of the adjusting screw 25 in the conventional millimeter wave circuit device 201 shown in FIG. 4, the second ground metal portion 32 which is the ground metal case 3 above the dielectric resonator 2 is provided.
A hole having a size larger than the diameter of the resonator 2 is opened in the hole, and a gold-plated movable cylinder 11 is inserted into this hole and attached so as to face the dielectric resonator 2. The movable column 11 is provided with a holding portion 12 made of an insulating material such as a quartz plate so as to project above the second ground metal portion 32 of the metal case 3. The holding portion 12 includes an electrode 14 and a piezoelectric stretchable body 13.
It is adhered to the second ground metal part 32 of the metal case 3 via.

The electrode 14 is one electrode for expanding and contracting the piezoelectric expansion and contraction body 13, and the other electrode uses the second ground metal portion 32 of the metal case 3. The piezoelectric expander 13 is PZT, that is, Pb (Zr, Ti) O.
_{When 3} or the like is used and a voltage is applied between the electrode 14 and the second ground metal part 32 of the metal case 3, the piezoelectric expandable body 13 expands and contracts according to the voltage. This piezoelectric stretchable body 1
Along with the expansion / contraction operation of 3, the movable column 11 slightly fluctuates in the vertical direction in FIG. 1, whereby fine adjustment of the distance between the dielectric resonator 2 and the movable column 11 becomes possible. In the above, the piezoelectric expandable body 13 constitutes a kind of actuator.

Next, FIG. 2 shows the configuration of a millimeter wave circuit device 102 which is a second embodiment of the present invention. As shown in FIG. 2, the millimeter-wave circuit device 102 includes a microwave integrated circuit (MIC) or a microwave monolithic integrated circuit (MMIC) on a circuit board 1A.
A metal case 3 in which a dielectric resonator 2A is mounted by being coupled to a line forming a resonance circuit in the inside, and the periphery thereof is grounded.
Surround with A. The lower part 31A of the metal case 3A is a first ground metal part and the upper part 32A of the metal case 3A is a second ground metal part. 4A is the above MIC or MMIC1A
Is a sub-carrier (electric conductor) for mounting the above, and is placed on the above-mentioned first ground metal part 31A.

Then, instead of the adjusting screw 25 in the conventional millimeter wave circuit device 201 shown in FIG. 4, the diameter of the resonator 2A is provided in the second ground metal portion 32A which is the ground metal case 3A above the dielectric resonator 2A. A hole having a larger size is opened, a movable column 11A plated with gold is inserted into this hole, and it is attached so as to face the dielectric resonator 2A. At the upper part of the movable column 11A, a holding part 12A is provided integrally with the movable column 11A so as to project onto the second ground metal part 32A of the metal case 3A. This holder 12
A is an insulating spacer 15, an electrode 14A, and a piezoelectric stretchable body 13.
It is adhered to the second ground metal part 32A of the metal case 3A via A.

The electrode 14A is one electrode for expanding and contracting the piezoelectric expandable body 13A, and the other electrode uses the second ground metal portion 32A of the metal case 3A.
As the piezoelectric stretchable body 13A, as in the first embodiment, P
ZT, that is, Pb (Zr, Ti) O ₃ or the like is used,
The electrode 14A and the second ground metal part 3 of the metal case 3A.
When a voltage is applied to 2A, the piezoelectric expandable body 13A expands and contracts according to the voltage. With the expansion / contraction operation of the piezoelectric expandable body 13A, the movable column 11A slightly fluctuates in the vertical direction in FIG. 2, whereby the dielectric resonator 2A and movable column 1
It is possible to finely adjust the interval between the 1A and the 1A. In the above, the piezoelectric expandable body 13A constitutes a kind of actuator.

In the first and second embodiments, the first ground metal parts 31, 31A of the metal cases 3, 3A are used.
Corresponds to the first ground conductor, and is the second of the metal cases 3 and 3A.
The ground metal parts 32 and 32A correspond to the second ground conductor. The movable columns 11 and 11A correspond to movable electric conductors.

Next, FIG. 3 shows a configuration of a millimeter wave circuit device 103 which is a third embodiment of the present invention. As shown in FIG. 3, the millimeter-wave circuit device 103 includes a microwave integrated circuit (MIC) or a microwave monolithic integrated circuit (MMIC) on a circuit board 1B.
A dielectric resonator 2B is mounted by coupling with a line forming a resonance circuit inside, and this MIC or MMIC 1B is fixed to a subcarrier (electric conductor) 4B, and the periphery thereof is surrounded by a grounded metal case 3B. There is. Metal case 3B
The lower part 31B is a first ground metal part and the upper part 32B of the metal case 3B is a second ground metal part.

On the upper portion of the subcarrier 4B, a holding portion 12B is provided integrally with the subcarrier 4B so as to project onto the first ground metal portion 31B of the metal case 3B. The holding portion 12B is bonded to the first ground metal portion 31B of the metal case 3B via the insulating spacer 15A, the electrode 14B, and the piezoelectric stretchable body 13B. Further, the dielectric resonator 2B is attached so as to face the second ground metal part 32B of the metal case 3B.

The electrode 14B is one electrode for expanding and contracting the piezoelectric expandable body 13B, and the other electrode uses the first ground metal part 31B of the metal case 3B. As the piezoelectric stretchable body 13B, similar to the first or second embodiment, PZT, that is, Pb (Zr, Ti).
O ₃ or the like is used, and the above electrode 14B and metal case 3 are used.
When a voltage is applied between the first ground metal part 31B of B and
The piezoelectric expandable body 13B expands and contracts according to the voltage. With the expansion / contraction operation of the piezoelectric expander / contractor 13B, the subcarrier 4B slightly fluctuates in the vertical direction in FIG. Fine adjustment of is possible. In the above, the piezoelectric stretchable body 13B constitutes a kind of actuator.

In the third embodiment, the convex portion 17 is provided on the lower portion of the subcarrier 4B so as to contact with the first ground metal portion 31B of the metal case 3B and ground. Further, the oscillation output is taken out from the microstrip line-waveguide conversion unit 16 of FIG. 3, and is configured so as not to hinder the movement of the subcarrier 4B.

In the third embodiment, the metal case 3B is used.
The first ground metal part 31B of 1 corresponds to the first ground conductor, and the second ground metal part 32B of the metal case 3B corresponds to the second ground conductor. The subcarrier 4B corresponds to a movable conductor.

In the first to third embodiments, the first ground metal parts 31, 31A and 31B of the metal case are used.
The second ground metal parts 32, 32A and 32B correspond to ground conductors. The movable columns 11 and 11A and the subcarrier 4B correspond to movable conductors.

The present invention is not limited to the above embodiment. The above-mentioned embodiment is an exemplification, has substantially the same configuration as the technical idea described in the scope of the claims of the present invention, and has any similar effect to the present invention. It is included in the technical scope of the invention.

For example, in the above embodiment, the metal cases 3, 3A, 3B and the movable columns 11, 1 plated with gold are used.
Although the example using 1A and the subcarriers 4, 4A and 4B has been described, the present invention is not limited to these and may be any electrically good conductor (electric conductor).

Further, in the third embodiment, the dielectric resonator 2B has the second ground metal portion 32 on the upper portion of the metal case 3B.
Although the example configured to face B has been described,
The present invention is not limited to this, and the substrate 1B and the subcarrier 4B may be extended to the right side of FIG. 3 so that the dielectric resonator 2B faces the first ground metal part 31B below the metal case 3B.

In the above embodiment, the millimeter wave circuit device has been described as an example, but the present invention can be applied without any problem even in the microwave range.

[0023]

As described above, according to the present invention having the above-described structure, the ground conductor or the movable conductor opposed to the microwave integrated circuit or the millimeter wave integrated circuit substrate including the dielectric resonator is provided. The distance between the dielectric resonators can be finely adjusted electrically by changing the size of the piezoelectric stretchable body. Therefore, the above-mentioned interval adjustment can be performed easily and with high precision, mass production of microwave circuit devices and millimeter wave circuit devices,
It has an advantage that it can greatly contribute to the expansion of applications to communication systems.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a millimeter wave circuit device that is a first embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of a millimeter wave circuit device which is a second embodiment of the present invention.

FIG. 3 is a diagram showing a configuration of a millimeter wave circuit device which is a third embodiment of the present invention.

FIG. 4 is a diagram showing a configuration of a conventional millimeter wave circuit device.

[Explanation of symbols]

 1, 1A, 1B Integrated circuit board 2, 2A, 2B Dielectric resonator 3, 3A, 3B Metal case 4, 4A, 4B Sub carrier 11, 11A Movable cylinder 12, 12A, 12B Holding part 13, 13A, 13B Piezoelectric expansion and contraction Body 14, 14A, 14B Electrode 15, 15A Insulation spacer 16 Microstrip line-waveguide conversion part 17 Convex part 21 Integrated circuit board 22 Dielectric resonator 23 Metal case 24 Subcarrier 25 Adjustment screw 31, 31A, 31B 1st Ground metal part 32, 32A, 32B Second ground metal part 101-103, 201 Millimeter wave circuit device

Claims (3)

[Claims] 1. A microwave circuit device in which a dielectric resonator is mounted on a substrate on which a microwave integrated circuit or a millimeter wave integrated circuit is formed, and a ground conductor is provided at least on the back surface side of the substrate, A movable electric conductor having a holding portion protruding above the ground electric conductor, penetrating while being in contact with the ground electric conductor, and movable in the up and down direction, and the ground electric conductor or the movable electric conductor above the dielectric resonator. The distance between the upper surface of the dielectric resonator and the ground conductor or the movable conductor is electrically adjusted by a piezoelectric expansion member provided between the holding portion and the ground conductor, with electric conductors facing each other. A microwave circuit device characterized by: 2. A dielectric resonator is mounted on a substrate on which a microwave integrated circuit or a millimeter wave integrated circuit is formed, a first ground conductor is provided on the back surface side of the substrate, and a dielectric resonator of the dielectric resonator is provided. In a microwave circuit device in which a second ground conductor is provided above, a microwave circuit device has a holding portion that projects above the second ground conductor, penetrates while contacting the second ground conductor, and is vertically movable. A movable conductor, and a piezoelectric expansion member provided between the holding portion and the second ground conductor electrically adjusts a distance between the upper surface of the dielectric resonator and the movable conductor. Microwave circuit device characterized by. 3. A dielectric resonator is mounted on a substrate on which a microwave integrated circuit or a millimeter wave integrated circuit is formed, a first ground conductor is provided on the back surface side of the substrate, and a dielectric resonator of the dielectric resonator is provided. In a microwave circuit device in which a second ground conductor is provided above, a microwave circuit device has a holding portion projecting above the first ground conductor, penetrates while contacting the first ground conductor, and is vertically movable. A movable electric conductor is provided on the electric conductor, and the distance between the upper surface of the dielectric resonator and the second ground electric conductor is electrically adjusted by the piezoelectric expansion member provided between the holding portion and the first ground electric conductor. A microwave circuit device characterized by: