JPH07273499A - Panel holding device - Google Patents

Panel holding device

Info

Publication number
JPH07273499A
JPH07273499A JP6061628A JP6162894A JPH07273499A JP H07273499 A JPH07273499 A JP H07273499A JP 6061628 A JP6061628 A JP 6061628A JP 6162894 A JP6162894 A JP 6162894A JP H07273499 A JPH07273499 A JP H07273499A
Authority
JP
Japan
Prior art keywords
panel
suction pad
holding device
suction
radial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6061628A
Other languages
Japanese (ja)
Inventor
Nobuhiko Muraoka
信彦 村岡
Shinji Kanayama
真司 金山
Shinzo Eguchi
信三 江口
Masaru Ichihara
勝 市原
Shuichi Hirata
修一 平田
Nobuhisa Watanabe
展久 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6061628A priority Critical patent/JPH07273499A/en
Priority to US08/413,441 priority patent/US5854745A/en
Priority to CN95103177A priority patent/CN1066907C/en
Publication of JPH07273499A publication Critical patent/JPH07273499A/en
Priority to CN00122671.1A priority patent/CN1199548C/en
Priority to CNB00122672XA priority patent/CN1174667C/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To reliably hold a panel without generating a positional error and distortion in the panel. CONSTITUTION:In a panel holding device 1 in which a suction pad 3 is provided on a panel setting surface 2 with a recess made in the upper surface of the suction pad 3 and connected to a vacuum source to form a pressure-reduced space closed by a panel set thereon, the recess of the suction pad 3 is formed by grooves, such as, radial grooves 5 having a width smaller than a value obtained by dividing the area of an upper surface aperture by 1.5 times the diameter or the maximum side length of the suction pad 3.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、液晶パネルやプリント
基板などの各種パネルを吸着して保持するパネル保持装
置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a panel holding device for adsorbing and holding various panels such as liquid crystal panels and printed circuit boards.

【0002】[0002]

【従来の技術】例えば、液晶パネルの製造工程におい
て、液晶パネルを構成するガラスパネルに液晶パネルを
駆動するIC部品を実装する際には、ガラスパネルを保
持装置で保持して所定位置に位置決めし、その位置を認
識しておき、所定位置に供給されたIC部品を実装ヘッ
ドにて吸着し、実装位置に向けて搬送する途中でIC部
品の吸着位置を認識し、ガラスパネルのIC部品の実装
位置に対してIC部品を正確に位置決めして実装してい
る。
2. Description of the Related Art For example, in the process of manufacturing a liquid crystal panel, when an IC component for driving the liquid crystal panel is mounted on the glass panel constituting the liquid crystal panel, the glass panel is held by a holding device and positioned at a predetermined position. , The position is recognized, the mounting head sucks the IC component supplied to the predetermined position, and the IC component suction position is recognized while the IC component is being conveyed toward the mounting position, and the IC component is mounted on the glass panel. The IC components are accurately positioned and mounted with respect to the position.

【0003】図5を参照して従来のガラスパネルに対す
るIC部品の実装装置について説明すると、10は液晶
パネルを構成するガラスパネルであり、パネル保持装置
11にて所定位置に位置決めされる。12は位置決めさ
れたガラスパネル10におけるIC部品を実装すべき辺
を下方から支持して加圧力を受けるステージである。
A conventional device for mounting IC components on a glass panel will be described with reference to FIG. 5. Reference numeral 10 denotes a glass panel which constitutes a liquid crystal panel and is positioned at a predetermined position by a panel holding device 11. Reference numeral 12 is a stage for supporting the side of the positioned glass panel 10 where the IC component is to be mounted from below and receiving a pressing force.

【0004】13は、パネル保持装置11の後部に配設
されたIC部品の供給手段であり、所定の供給位置にI
C部品14を供給する。15はロボット部16にて3軸
方向に移動可能な実装ヘッドであり、IC部品14を供
給位置で吸着し、ガラスパネル10のIC部品実装位置
に搬送して実装する。実装ヘッド15にはIC部品14
を吸着し、実装位置で加圧するツール17が設けられる
とともに、IC部品14の吸着前認識及びガラスパネル
10の位置を認識するための認識カメラ18と照明手段
19が設けられている。20は供給手段13とステージ
12の間の配設された認識カメラ、21はその周囲に配
設されたリング照明手段であり、吸着したIC部品14
の吸着位置を高精度に認識する。
Reference numeral 13 denotes an IC component supply means disposed at the rear portion of the panel holding device 11, which is I at a predetermined supply position.
Supply the C component 14. Reference numeral 15 denotes a mounting head that is movable in three axis directions by the robot unit 16 and sucks the IC component 14 at the supply position and conveys the IC component 14 to the IC component mounting position on the glass panel 10 for mounting. The mounting head 15 has an IC component 14
A tool 17 for sucking and pressing at a mounting position is provided, and a recognition camera 18 and a lighting unit 19 for recognizing the IC component 14 before suction and recognizing the position of the glass panel 10 are provided. Reference numeral 20 is a recognition camera provided between the supply means 13 and the stage 12, and 21 is a ring illumination means provided around the recognition camera.
Accurately recognize the suction position of.

【0005】このような実装装置においてガラスパネル
10を保持するパネル保持装置11としては、図6に示
すように、パネル載置面22の角部近傍の4箇所に配設
した吸着パッド23にてガラスパネル10を吸着して保
持するようにしたものが知られている。その吸着パッド
23としては、平面形状円形で、その外周部に適当幅の
パネル接触面23aを残して円形の比較的浅い凹部25
を形成し、その中央位置に真空源に接続された吸引口2
4を開口したものが一般的に用いられており、パネル載
置面22にガラスパネル10を載置すると各吸着パッド
23のパネル接触面23aに接触して支持されるととも
に、このガラスパネル10にて凹部25の上面開口が閉
鎖され、吸引口24から真空排気することによって凹部
25が減圧空間となり、ガラスパネル10が吸着パッド
23に吸着されて保持される。
As a panel holding device 11 for holding the glass panel 10 in such a mounting apparatus, as shown in FIG. 6, suction pads 23 are provided at four locations near the corners of the panel mounting surface 22. It is known that the glass panel 10 is adsorbed and held. The suction pad 23 has a circular shape in a plan view, and has a relatively shallow recess 25 having a circular shape, leaving a panel contact surface 23a having an appropriate width on its outer peripheral portion.
And a suction port 2 connected to a vacuum source at its center position
An opening 4 is generally used, and when the glass panel 10 is mounted on the panel mounting surface 22, it is brought into contact with and supported by the panel contact surface 23a of each suction pad 23. The upper surface opening of the recess 25 is closed, and the recess 25 becomes a decompressed space by vacuum exhausting from the suction port 24, and the glass panel 10 is held by being sucked by the suction pad 23.

【0006】[0006]

【発明が解決しようとする課題】ところが、ガラスパネ
ル10を位置ずれを生じることがないように確実に吸着
保持するために減圧空間の圧力を低くすると、その吸着
力によってガラスパネル10の円形の凹部25に臨んで
いる部分に凹部25内に向けて大きな曲げ応力が作用
し、図3(a)に示すように、凹部25内に向けて歪み
を生じることになり、このガラスパネル10を用いた液
晶パネルに品質不良を来す恐れがあるという問題があっ
た。
However, when the pressure in the decompression space is lowered in order to securely hold the glass panel 10 by suction so that the glass panel 10 is not displaced, the circular concave portion of the glass panel 10 is generated by the suction force. A large bending stress acts on the portion facing 25 toward the inside of the recess 25, and as shown in FIG. 3A, distortion occurs toward the inside of the recess 25. There is a problem that the liquid crystal panel may have poor quality.

【0007】このような問題は、液晶パネルの場合に限
らず、精細化の著しいプリント基板や各種電子回路基板
に対する実装や加工時の基板の保持においても生じる。
Such a problem occurs not only in the case of a liquid crystal panel, but also in mounting on a printed circuit board or various electronic circuit boards which are remarkably miniaturized or holding the board during processing.

【0008】本発明は、上記従来の問題点に鑑み、パネ
ルを位置ずれを生じる恐れなく確実に保持できるととも
にパネルに歪みを殆ど生じないパネル保持装置を提供す
ることを目的とする。
In view of the above-mentioned conventional problems, it is an object of the present invention to provide a panel holding device which can hold the panel securely without fear of positional displacement and which hardly causes distortion in the panel.

【0009】[0009]

【課題を解決するための手段】本発明のパネル保持装置
は、パネル載置面に吸着パッドを配設し、その吸着パッ
ドの上面に真空源に接続された凹部を形成して載置され
たパネルにて閉鎖された減圧空間を形成するようにした
パネル保持装置において、吸着パッドの凹部を、その上
面開口面積を吸着パッドの径又は最大辺長の略1.5倍
で除した値より小さい幅の溝状凹部にて構成したことを
特徴とする。
In the panel holding device of the present invention, a suction pad is disposed on the panel mounting surface, and a recess connected to a vacuum source is formed on the upper surface of the suction pad and mounted. In a panel holding device configured to form a depressurized space closed by a panel, the concave portion of the suction pad is smaller than a value obtained by dividing the upper opening area of the depression pad by the diameter of the suction pad or about 1.5 times the maximum side length. It is characterized in that it is constituted by a groove-shaped recess having a width.

【0010】好適には、吸着パッドの中央部に真空源に
接続された吸引口を形成し、吸着パッドの凹部を、吸引
口部分から放射状に延出した3本以上の放射状凹溝にて
形成し、さらに吸着パッドの凹部を、放射状凹溝とそれ
に連続して形成した円弧状凹溝の組合せにて形成する。
Preferably, a suction port connected to a vacuum source is formed in the central portion of the suction pad, and the recess of the suction pad is formed by three or more radial concave grooves radially extending from the suction port portion. Then, the concave portion of the suction pad is formed by a combination of the radial concave groove and the arcuate concave groove formed continuously from the radial concave groove.

【0011】[0011]

【作用】吸着パッドの上面に形成する凹部の上面開口面
積はパネルを保持するのに必要な吸着力を真空圧で除し
て決定される所与条件であるが、本発明の上記構成にお
いてはその上面開口面積を吸着パッドの径又は最大辺長
の略1.5倍で除した値より小さい幅の溝状凹部にて構
成しているので、吸着力によりパネルの上面開口に臨む
部分に曲げ荷重が作用しても、円形や矩形の凹部を形成
した場合と異なって、上面開口縁間隔が小さいので曲げ
応力及び歪みが小さくなり、パネルの変形による品質不
良発生の恐れを無くすことができる。また、吸着パッド
とパネルの接触面が溝状凹部の周囲に広い面積で形成さ
れるので、大きな摩擦力が確実に得られ、パネルの位置
ずれを確実に防止した状態で保持できる。
The opening area of the upper surface of the concave portion formed on the upper surface of the suction pad is a given condition determined by dividing the suction force required to hold the panel by the vacuum pressure. Since it is composed of a groove-shaped recess with a width smaller than the value obtained by dividing the opening area of the top surface by the diameter of the suction pad or approximately 1.5 times the maximum side length, it is bent to the portion facing the top opening of the panel by the suction force. Even when a load is applied, unlike the case where a circular or rectangular recess is formed, the upper opening edge spacing is small, so bending stress and strain are small, and the risk of quality defects due to panel deformation can be eliminated. Further, since the contact surface between the suction pad and the panel is formed in a wide area around the groove-shaped recess, a large frictional force can be surely obtained, and the panel can be held in a state in which displacement is surely prevented.

【0012】また、溝状凹部の形状は任意に設計するこ
とができるが、吸着パッドの中央部に吸引口を形成して
そこから放射状凹溝を形成すると、パネルの位置ずれに
対する摩擦力があらゆる方向に有効に作用し、パネルの
位置ずれ防止効果が大きい。
Further, the shape of the groove-shaped recess can be designed arbitrarily, but if a suction port is formed in the central portion of the suction pad and a radial recessed groove is formed from the suction port, the frictional force against the displacement of the panel will be reduced. It effectively works in the direction and has a great effect of preventing the positional displacement of the panel.

【0013】さらに、この放射状凹溝に円弧状凹溝を組
合わせると、吸着パッドの大きさを大きくすることなく
必要な上面開口面積を確保できるとともに上記作用効果
を確保することができる。
Further, by combining the radial concave groove with the circular concave groove, it is possible to secure a necessary upper surface opening area without increasing the size of the suction pad and to secure the above-mentioned operation and effect.

【0014】[0014]

【実施例】以下、本発明の一実施例について図1〜図3
を参照しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to FIGS.
Will be described with reference to.

【0015】図1、図2において、1はパネル保持装
置、1aはそのパネル載置板である。
In FIGS. 1 and 2, 1 is a panel holding device, and 1a is its panel mounting plate.

【0016】パネル載置板1aには、上面のパネル載置
面2の四隅の近傍部に平面形状円形の吸着パッド3が配
設されている。各吸着パッド3の上面には、その中央部
に真空源(図示せず)に接続された吸引口4が形成さ
れ、この吸引口4から放射状に4本の放射状凹溝5が形
成されている。この放射状凹溝5の全長は、吸着パッド
3の直径の略1.5〜2倍程度あり、したがって放射状
凹溝5の幅は、所与条件として与えられるガラスパネル
10を確実に保持するのに必要な凹溝5の上面開口面積
をこの放射状凹溝5の全長で除した値に設定されてい
る。
On the panel mounting plate 1a, suction pads 3 each having a circular planar shape are arranged near the four corners of the panel mounting surface 2 on the upper surface. A suction port 4 connected to a vacuum source (not shown) is formed on the upper surface of each suction pad 3, and four radial recessed grooves 5 are radially formed from the suction port 4. . The total length of the radial groove 5 is approximately 1.5 to 2 times the diameter of the suction pad 3, and therefore the width of the radial groove 5 is sufficient to securely hold the glass panel 10 given as a given condition. It is set to a value obtained by dividing the required opening area of the upper surface of the concave groove 5 by the total length of the radial groove 5.

【0017】以上の構成において、ガラスパネル10を
パネル保持装置1のパネル載置面2上に載置して放射状
凹溝5内を吸引口4を介して図示しない真空源に接続し
て真空吸引すると、載置されたガラスパネル10にて放
射状凹溝5の上面開口が閉鎖されて減圧空間が形成さ
れ、ガラスパネル10は吸着パッド3にて吸着固定され
て保持される。その際、吸着パッド3の上面に形成され
た放射状凹溝5は、図3(a)に示すような円形や矩形
の凹部を形成した場合と異なって、図3(b)に示すよ
うにその幅が狭いので、吸着力によりガラスパネル10
の上面開口に臨む部分に曲げ荷重が作用しても、開口縁
間のスパンが短いため曲げ応力及び歪みは小さくなり、
ガラスパネル10の変形による品質不良発生の恐れを無
くすことができる。
In the above construction, the glass panel 10 is mounted on the panel mounting surface 2 of the panel holding device 1 and the inside of the radial concave groove 5 is connected to a vacuum source (not shown) through the suction port 4 for vacuum suction. Then, the upper surface opening of the radial concave groove 5 is closed in the mounted glass panel 10 to form a decompressed space, and the glass panel 10 is held by being sucked and fixed by the suction pad 3. At that time, as shown in FIG. 3B, the radial groove 5 formed on the upper surface of the suction pad 3 is different from the case where a circular or rectangular recess is formed as shown in FIG. Since the width is narrow, the glass panel 10 is attracted by the suction force.
Even if a bending load is applied to the part facing the upper surface opening, the bending stress and strain are small due to the short span between the opening edges,
It is possible to eliminate the risk of quality defects due to deformation of the glass panel 10.

【0018】また、吸着パッド3とガラスパネル10の
接触面が放射状凹溝5の周囲に広い面積で形成されてい
るので、大きな摩擦力が確実に得られ、ガラスパネル1
0の位置ずれを確実に防止した状態で保持できる。更
に、放射状凹溝5は吸着パッド3の中央部から放射状に
形成されているので、ガラスパネル10の位置ずれに対
する摩擦力があらゆる方向に有効に作用し、ガラスパネ
ル10の位置ずれ防止効果が高い。
Further, since the contact surface between the suction pad 3 and the glass panel 10 is formed in a wide area around the radial concave groove 5, a large friction force can be surely obtained and the glass panel 1
It can be held in a state in which the position shift of 0 is surely prevented. Further, since the radial concave grooves 5 are formed radially from the central portion of the suction pad 3, the frictional force against the displacement of the glass panel 10 effectively acts in all directions, and the displacement prevention effect of the glass panel 10 is high. .

【0019】尚、上記図示例では吸着パッド3の中央部
から放射状に4本の放射状凹溝5を形成した例を示した
が、溝幅をあまり大きくしなくても必要な開口面積が確
保できる場合には3本でもよく、逆に5本以上でもよ
い。
In the illustrated example, the four radial concave grooves 5 are formed radially from the central portion of the suction pad 3, but the required opening area can be secured without increasing the groove width too much. In this case, the number may be three, or conversely five or more.

【0020】次に、本発明の他の実施例について、図4
を参照しながら説明する。図4(a)〜(d)には、本
実施例の種々の構成例を示しているが、それらに共通す
る本実施例の特徴は、放射状凹溝5に円弧状凹溝6を組
合わせた点にある。即ち、図4(a)は各放射状凹溝5
の先端から同一方向に円弧状凹溝6を連続して形成した
ものであり、図4(b)は各放射状凹溝5の先端に連続
して形成する円弧状凹溝6を円環状に連続させて円環凹
溝7としたものであり、図4(c)は直径方向の一対の
放射状凹溝5については先端部からそれぞれ略半円の円
弧状凹溝6aを連続して形成し、他の直径方向の一対の
放射状凹溝5については中間部からそれぞれ略半円の円
弧状凹溝6bを連続して形成したものであり、図4
(d)は図4(c)の半円状の円弧状凹溝6a、6bを
円環状に連続させて円環凹溝7a、7bとしたものであ
る。なお、放射状凹溝5と円弧状凹溝6、6a、6bの
組合せはこれら以外に任意に設計することができる。
Next, another embodiment of the present invention will be described with reference to FIG.
Will be described with reference to. 4 (a) to 4 (d) show various structural examples of this embodiment, the common feature of these embodiments is that the radial concave groove 5 and the arcuate concave groove 6 are combined. There is a point. That is, FIG. 4A shows each radial groove 5
4 (b), the arcuate groove 6 is continuously formed in the same direction from the tip of each of the radial grooves 5, and FIG. 4 (b) shows that the arcuate groove 6 formed continuously at the tip of each radial groove 5 is annularly continuous. 4 (c) is a circular annular groove 7, and in FIG. 4 (c), a pair of diametrical radial grooves 5 are formed by continuously forming arc-shaped grooves 6a each having a substantially semi-circular shape from the tip. The other pair of radial concave grooves 5 in the diametrical direction is formed by continuously forming arcuate concave grooves 6b each having a substantially semicircular shape from the intermediate portion.
(D) is a circular annular groove 7a, 7b formed by connecting the semicircular arcuate groove 6a, 6b of FIG. 4 (c) in an annular shape. The combination of the radial concave groove 5 and the circular concave groove 6, 6a, 6b can be designed arbitrarily other than these.

【0021】この実施例によると、放射状凹溝5と円弧
状凹溝6、6a、6bを組み合わせているので、吸着パ
ッド3の大きさを大きくすることなく必要な上面開口面
積を確保できるとともに上記作用効果を確保することが
できる。
According to this embodiment, since the radial concave grooves 5 and the circular arc concave grooves 6, 6a, 6b are combined, the necessary upper surface opening area can be secured without increasing the size of the suction pad 3 and The effect can be secured.

【0022】さらに、上記実施例は吸着パッド3の形状
が円形のものを例示したが、方形などの形状であっても
よい。また、上記実施例はすべて吸着パッド3の上面に
放射状凹溝5を形成した例を示したが、本発明は吸着パ
ッド3上面に形成する凹部を、その上面開口面積を吸着
パッド3の径又は最大辺長の略1.5倍で除した値より
小さい幅の溝状凹部にて構成することを特徴とするもの
であり、溝状凹部の形状・配置は任意に設計することが
できる。
Further, although the suction pad 3 has a circular shape in the above embodiment, it may have a rectangular shape. Further, in all of the above-described embodiments, the radial concave grooves 5 are formed on the upper surface of the suction pad 3, but the present invention defines the concave portion formed on the upper surface of the suction pad 3 as the opening area of the upper surface or the diameter of the suction pad 3. It is characterized in that it is constituted by a groove-shaped recess having a width smaller than a value obtained by dividing the maximum side length by about 1.5 times, and the shape and arrangement of the groove-shaped recess can be arbitrarily designed.

【0023】[0023]

【発明の効果】本発明のパネル保持装置によれば、以上
の説明から明らかなように、吸着パッドの上面に形成す
る凹部を、その上面開口面積を吸着パッドの径又は最大
辺長の略1.5倍で除した値より小さい幅の溝状凹部に
て構成しているので、吸着力によりパネルの上面開口に
臨む部分に曲げ荷重が作用しても、上面開口縁間隔が小
さいために曲げ応力及び歪みを小さくでき、パネルの変
形による品質不良発生の恐れを無くすことができ、また
吸着パッドとパネルの接触面が溝状凹部の周囲に広い面
積で形成されるので、大きな摩擦力が確実に得られ、パ
ネルの位置ずれを確実に防止した状態で保持できるとい
う効果を発揮する。
According to the panel holding device of the present invention, as is apparent from the above description, the concave portion formed on the upper surface of the suction pad has an opening area of the upper surface which is approximately 1 of the suction pad diameter or the maximum side length. Since the groove-shaped recess has a width smaller than the value divided by 5 times, even if a bending load is applied to the portion facing the top opening of the panel due to the suction force, the gap between the top opening edges is small The stress and strain can be reduced, the risk of quality defects due to panel deformation can be eliminated, and since the contact surface between the suction pad and the panel is formed in a wide area around the groove-shaped recess, a large friction force can be secured. It is possible to obtain the effect that the position of the panel can be surely prevented and the state can be maintained.

【0024】また、吸着パッドの中央部に吸引口を形成
してそこから放射状凹溝を形成することにより、パネル
の位置ずれに対する摩擦力があらゆる方向に有効に作用
し、高い位置ずれ防止効果が得られる。
Further, by forming the suction port in the central portion of the suction pad and forming the radial recessed groove from the suction port, the frictional force against the position shift of the panel effectively acts in all directions, and a high position shift prevention effect is obtained. can get.

【0025】さらに、放射状凹溝に円弧状凹溝を組合わ
せると、吸着パッドの大きさを大きくすることなく必要
な上面開口面積を確保できるとともに上記作用効果を確
保することができる。
Furthermore, if the radial concave groove is combined with the circular arc concave groove, the required upper surface opening area can be secured and the above-mentioned function and effect can be secured without increasing the size of the suction pad.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のパネル保持装置の一実施例におけるパ
ネル載置板の斜視図である。
FIG. 1 is a perspective view of a panel mounting plate in an embodiment of a panel holding device of the present invention.

【図2】同実施例の吸着パッドの拡大斜視図である。FIG. 2 is an enlarged perspective view of a suction pad of the same embodiment.

【図3】従来例と実施例を比較して示したパネル吸着状
態の断面図である。
FIG. 3 is a cross-sectional view of a panel suction state comparing a conventional example and an example.

【図4】本発明のパネル保持装置の他の実施例における
吸着パッドの各構成例の平面図である。
FIG. 4 is a plan view of each configuration example of a suction pad in another embodiment of the panel holding device of the present invention.

【図5】パネル保持装置を備えたIC部品実装装置の要
部の斜視図である。
FIG. 5 is a perspective view of a main part of an IC component mounting apparatus including a panel holding device.

【図6】従来例のパネル保持装置の斜視図である。FIG. 6 is a perspective view of a conventional panel holding device.

【符号の説明】[Explanation of symbols]

1 パネル保持装置 2 パネル載置面 3 吸着パッド 4 吸引口 5 放射状凹溝 6 円弧状凹溝 6a 円弧状凹溝 6b 円弧状凹溝 DESCRIPTION OF SYMBOLS 1 Panel holding device 2 Panel mounting surface 3 Suction pad 4 Suction port 5 Radial concave groove 6 Arc-shaped concave groove 6a Arc-shaped concave groove 6b Arc-shaped concave groove

フロントページの続き (72)発明者 市原 勝 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 平田 修一 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 渡辺 展久 大阪府門真市大字門真1006番地 松下電器 産業株式会社内Front Page Continuation (72) Inventor Masaru Ichihara 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Inventor Shuichi Hirata 1006 Kadoma, Kadoma City, Osaka Prefecture (72) Invention Nobuhisa Watanabe 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 パネル載置面に吸着パッドを配設し、そ
の吸着パッドの上面に真空源に接続された凹部を形成し
て載置されたパネルにて閉鎖された減圧空間を形成する
ようにしたパネル保持装置において、吸着パッドの凹部
を、その上面開口面積を吸着パッドの径又は最大辺長の
略1.5倍で除した値より小さい幅の凹溝にて構成した
ことを特徴とするパネル保持装置。
1. A suction pad is disposed on a panel mounting surface, and a concave portion connected to a vacuum source is formed on an upper surface of the suction pad to form a depressurized space closed by the mounted panel. In the panel holding device described above, the concave portion of the suction pad is constituted by a concave groove having a width smaller than a value obtained by dividing the upper opening area of the suction pad by the diameter of the suction pad or approximately 1.5 times the maximum side length. Panel holding device.
【請求項2】 吸着パッドの中央部に真空源に接続され
た吸引口を形成し、吸着パッドの凹部を、吸引口部分か
ら放射状に延出した3本以上の放射状凹溝にて形成した
ことを特徴とする請求項1記載のパネル保持装置。
2. A suction port connected to a vacuum source is formed in the center of the suction pad, and the recess of the suction pad is formed by three or more radial recessed grooves radially extending from the suction port. The panel holding device according to claim 1, wherein:
【請求項3】 吸着パッドの凹部を、放射状凹溝と、そ
れに連続して形成した円弧状凹溝の組合わせにて形成し
たことを特徴とする請求項2記載のパネル保持装置。
3. The panel holding device according to claim 2, wherein the concave portion of the suction pad is formed by a combination of a radial concave groove and an arcuate concave groove formed continuously from the radial concave groove.
JP6061628A 1994-03-30 1994-03-30 Panel holding device Pending JPH07273499A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP6061628A JPH07273499A (en) 1994-03-30 1994-03-30 Panel holding device
US08/413,441 US5854745A (en) 1994-03-30 1995-03-30 Method and apparatus for mounting electronic component
CN95103177A CN1066907C (en) 1994-03-30 1995-03-30 Method and apparatus for assembling of electronic unit
CN00122671.1A CN1199548C (en) 1994-03-30 2000-08-09 Assembling method for electronic element
CNB00122672XA CN1174667C (en) 1994-03-30 2000-08-09 Assembling device for electronic element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6061628A JPH07273499A (en) 1994-03-30 1994-03-30 Panel holding device

Publications (1)

Publication Number Publication Date
JPH07273499A true JPH07273499A (en) 1995-10-20

Family

ID=13176648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6061628A Pending JPH07273499A (en) 1994-03-30 1994-03-30 Panel holding device

Country Status (1)

Country Link
JP (1) JPH07273499A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1117397A (en) * 1997-06-23 1999-01-22 Matsushita Electric Ind Co Ltd Lower reception device of workpiece
WO2001058233A1 (en) * 2000-01-31 2001-08-09 Shibaura Mechatronics Corporation Method and apparatus for mounting electronic device
JP2006024797A (en) * 2004-07-08 2006-01-26 Matsushita Electric Ind Co Ltd Part packaging apparatus
CN108364903A (en) * 2017-01-27 2018-08-03 苏斯微技术光刻有限公司 Adsorbent equipment, end effector and its manufacturing method for end effector

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1117397A (en) * 1997-06-23 1999-01-22 Matsushita Electric Ind Co Ltd Lower reception device of workpiece
WO2001058233A1 (en) * 2000-01-31 2001-08-09 Shibaura Mechatronics Corporation Method and apparatus for mounting electronic device
US6631557B2 (en) 2000-01-31 2003-10-14 Shibaura Mechatronics Corporation Method and apparatus for mounting electronic device
KR100664777B1 (en) * 2000-01-31 2007-01-04 시바우라 메카트로닉스 가부시키가이샤 Method and apparatus for mounting electronic device
KR100713276B1 (en) * 2000-01-31 2007-05-04 시바우라 메카트로닉스 가부시키가이샤 Apparatus for mounting electronic device
JP2006024797A (en) * 2004-07-08 2006-01-26 Matsushita Electric Ind Co Ltd Part packaging apparatus
JP4555008B2 (en) * 2004-07-08 2010-09-29 パナソニック株式会社 Component mounting equipment
CN108364903A (en) * 2017-01-27 2018-08-03 苏斯微技术光刻有限公司 Adsorbent equipment, end effector and its manufacturing method for end effector
KR20180088598A (en) * 2017-01-27 2018-08-06 수스 마이크로텍 리소그라피 게엠바하 Suction apparatus for an end effector, end effector for holding substrates and method of producing an end effector
JP2018157194A (en) * 2017-01-27 2018-10-04 ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングSuss MicroTec Lithography GmbH End effector suction device, substrate holding end effector, and end effector manufacturing method

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