JPH0726840Y2 - 集束イオンビーム装置のガス導入装置 - Google Patents
集束イオンビーム装置のガス導入装置Info
- Publication number
- JPH0726840Y2 JPH0726840Y2 JP9338588U JP9338588U JPH0726840Y2 JP H0726840 Y2 JPH0726840 Y2 JP H0726840Y2 JP 9338588 U JP9338588 U JP 9338588U JP 9338588 U JP9338588 U JP 9338588U JP H0726840 Y2 JPH0726840 Y2 JP H0726840Y2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- gas
- nozzle
- gas introduction
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 title claims description 24
- 238000004891 communication Methods 0.000 claims description 10
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 150000002736 metal compounds Chemical class 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9338588U JPH0726840Y2 (ja) | 1988-07-13 | 1988-07-13 | 集束イオンビーム装置のガス導入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9338588U JPH0726840Y2 (ja) | 1988-07-13 | 1988-07-13 | 集束イオンビーム装置のガス導入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0215725U JPH0215725U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-01-31 |
| JPH0726840Y2 true JPH0726840Y2 (ja) | 1995-06-14 |
Family
ID=31317841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9338588U Expired - Lifetime JPH0726840Y2 (ja) | 1988-07-13 | 1988-07-13 | 集束イオンビーム装置のガス導入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726840Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1988
- 1988-07-13 JP JP9338588U patent/JPH0726840Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0215725U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-01-31 |
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