JPH07266596A - Manufacture of thermal head - Google Patents

Manufacture of thermal head

Info

Publication number
JPH07266596A
JPH07266596A JP6344694A JP6344694A JPH07266596A JP H07266596 A JPH07266596 A JP H07266596A JP 6344694 A JP6344694 A JP 6344694A JP 6344694 A JP6344694 A JP 6344694A JP H07266596 A JPH07266596 A JP H07266596A
Authority
JP
Japan
Prior art keywords
heat
reinforcing electrode
insulating substrate
heat storage
thermal head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6344694A
Other languages
Japanese (ja)
Inventor
Toshiaki Michihiro
利昭 道廣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP6344694A priority Critical patent/JPH07266596A/en
Publication of JPH07266596A publication Critical patent/JPH07266596A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a method for manufacturing a thermal head by which the thickness of a heat accumulation layer can be easily controlled and a small- size thermal head suited for high printing speed can be manufactured. CONSTITUTION:A thermal head is manufactured by a step to adhere a band-like reinforcing electrode 4 and a band-like glass member 5 at a specified interval and almost in parallel, along one side of a square electric insulating substrate 1, on its upper surface, step to form a heat accumulation layer 2 by filling a space between the reinforcing electrode 4 and the glass member 5 with a heat-resistant resin, and a step to bond thermal resistors 3, an individual electroconductive layer 6a connected to one end of the thermal resistor 3 and a common electroconductive layer 6b connected to the other end of the thermal resistor 3 and the reinforcing electrode 4, on the surface of the heat acumulation layer 2. Thus the thickness of a heat-resistant resin is maintained to be constant, and therefore, the heat accumulation layer 2 can be formed to a specified thickness.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ワードプロセッサやフ
ァクシミリ等のプリンタ機構に組み込まれるサーマルヘ
ッドの製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a thermal head incorporated in a printer mechanism such as a word processor and a facsimile.

【0002】[0002]

【従来技術】従来、ワードプロセッサ等のプリンタ機構
に組み込まれるサーマルヘッドは、図4(a)(b)に
示す如く、アルミナセラミックス等から成る電気絶縁性
基板11の上面に、上部に窒化タンタル等から成る複数
個の発熱抵抗体13が被着された耐熱性樹脂製の蓄熱層
12と金属材料から成る補強電極14とを被着させると
ともに、前記発熱抵抗体13上に、該発熱抵抗体13を
駆動用IC17に接続する個別導電層16aと補強電極
14に電気的に接続される共通導電層16bとを夫々被
着させた構造を有しており、前記個別導電層16aと共
通導電層16bとの間に駆動用IC17の駆動に伴い所
定の電力を印加し、発熱抵抗体13を選択的にジュール
発熱させるとともに、該発熱した熱をインクリボンや感
熱紙等の感熱記録媒体に伝導させ、インクリボンのイン
クを記録紙に転写し、或いは感熱紙を発色させて所定の
印字画像を形成することによりサーマルヘッドとして機
能する。尚、感熱記録媒体にインクリボンを用いる場
合、インクリボンは、その上に記録紙を重ねた状態で発
熱抵抗体13上を走行し、電気絶縁性基板11の端部ま
で達したところで記録紙と引き剥がされる。
2. Description of the Related Art Conventionally, as shown in FIGS. 4A and 4B, a thermal head incorporated in a printer mechanism such as a word processor is provided on an upper surface of an electrically insulating substrate 11 made of alumina ceramics or the like, and is made of tantalum nitride or the like on the upper portion. The heat storage layer 12 made of a heat-resistant resin having a plurality of heating resistors 13 formed thereon and the reinforcing electrode 14 made of a metal material are attached, and the heating resistors 13 are provided on the heating resistor 13. It has a structure in which an individual conductive layer 16a connected to the driving IC 17 and a common conductive layer 16b electrically connected to the reinforcing electrode 14 are adhered to each other, and the individual conductive layer 16a and the common conductive layer 16b are formed. Predetermined electric power is applied in accordance with the driving of the driving IC 17 to selectively cause the heating resistor 13 to generate Joule heat, and the generated heat is recorded on an ink ribbon or thermal paper. Body is conducted to transfer the ink of the ink ribbon to the recording paper, or by coloring the thermal paper serves as a thermal head by forming a predetermined printing images. When an ink ribbon is used as the heat-sensitive recording medium, the ink ribbon runs on the heating resistor 13 in a state where the recording paper is superposed on the ink ribbon, and when the ink ribbon reaches the end of the electrically insulating substrate 11, Torn off.

【0003】また前記蓄熱層12は、発熱抵抗体13の
発した熱を効率良く蓄熱しサーマルヘッドの熱応答特性
を極めて良好になすためのものであり、低熱伝導性(熱
伝導率:0.1〜0.9W/m・k)の耐熱性樹脂、例
えば、ポリイミド樹脂等によって形成されている。
Further, the heat storage layer 12 is for efficiently storing the heat generated by the heating resistor 13 to make the thermal response characteristics of the thermal head excellent, and has a low thermal conductivity (heat conductivity: 0. It is formed of a heat resistant resin of 1 to 0.9 W / m · k, for example, a polyimide resin or the like.

【0004】更に前記補強電極14は、共通導電層16
bに大電流が流される際、共通導電層16bで電圧降下
が発生するのを有効に防止するためのものであり、金、
銀、銅等の金属材料により形成されている。
Further, the reinforcing electrode 14 includes a common conductive layer 16
It is for effectively preventing a voltage drop from occurring in the common conductive layer 16b when a large current is applied to b.
It is formed of a metal material such as silver or copper.

【0005】かかる従来のサーマルヘッドは通常、以下
の方法によって製作される。
Such a conventional thermal head is usually manufactured by the following method.

【0006】(1)先ずアルミナセラミックス製の電気
絶縁性基板11を準備し、(2)次に前記電気絶縁性基
板11の上面に、所定の金属ペースト(例えば銀ペース
ト)を厚膜手法(例えばスクリーン印刷法)によって電
気絶縁性基板11の一辺に沿って帯状に塗布するととも
に、これを約600℃の温度で焼成することにより補強
電極14を形成し、(3)次に前記補強電極14が形成
された電気絶縁性基板11上面の所定領域にポリイミド
樹脂となるワニスを補強電極14と略平行に所定厚み、
所定幅をもって塗布するとともに、これを約400℃の
温度で熱硬化させることにより蓄熱層12を形成し、
(4)次に前記蓄熱層12上に、窒化タンタル等から成
る発熱抵抗体13とアルミニウム等から成る個別導電層
16a及び共通導電層16bとを薄膜形成技術(例えば
スパッタリング法)、フォトリソグラフィー技術によっ
て被着形成し、(5)最後に駆動用IC17を個別導電
層16aにフェイスダウンボンディング法等を採用し半
田接合することによって駆動用IC17を個別導電層1
6aに接続し、これによってサーマルヘッドが完成す
る。
(1) First, an electrically insulating substrate 11 made of alumina ceramics is prepared. (2) Next, a predetermined metal paste (eg, silver paste) is applied to the upper surface of the electrically insulating substrate 11 by a thick film method (eg, The reinforcing electrode 14 is formed by applying it in a strip shape along one side of the electrically insulating substrate 11 by a screen printing method and baking it at a temperature of about 600 ° C. (3) Next, the reinforcing electrode 14 is A varnish made of a polyimide resin is provided in a predetermined region on the upper surface of the formed electrically insulating substrate 11 in a predetermined thickness substantially in parallel with the reinforcing electrode 14,
The heat storage layer 12 is formed by applying it with a predetermined width and thermally curing it at a temperature of about 400 ° C.
(4) Next, the heat generating resistor 13 made of tantalum nitride and the individual conductive layers 16a and the common conductive layer 16b made of aluminum or the like are formed on the heat storage layer 12 by a thin film forming technique (for example, a sputtering method) or a photolithography technique. (5) Finally, the driving IC 17 is attached to the individual conductive layer 16a by soldering using a face-down bonding method or the like, so that the driving IC 17 is attached to the individual conductive layer 1a.
6a, which completes the thermal head.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、この従
来のサーマルヘッドの製造方法においては、蓄熱層12
を形成するにあたって電気絶縁性基板11の上面にポリ
イミド樹脂となるワニスを塗布した際、室温等の変化に
伴いワニスの温度が上昇すると、ワニスの粘度が大幅に
低下する。この結果、電気絶縁性基板11上に塗布され
たワニスは幅方向に広がるとともに、その厚みが薄くな
ってしまい、所望の蓄熱特性を有した所定厚みの蓄熱層
12を形成することができなくなる欠点を有している。
However, in this conventional method of manufacturing a thermal head, the heat storage layer 12 is used.
When a varnish serving as a polyimide resin is applied to the upper surface of the electrically insulating substrate 11 to form the varnish, the viscosity of the varnish decreases significantly if the temperature of the varnish rises with a change in room temperature or the like. As a result, the varnish applied on the electrically insulating substrate 11 spreads in the width direction and its thickness becomes thin, so that the heat storage layer 12 having desired heat storage characteristics and having a predetermined thickness cannot be formed. have.

【0008】また一方、図5(a)(b)に示す如く、
電気絶縁性基板21上面の補強電極24と駆動用IC2
7との間にガラス製の枠材28を被着させるとともに、
該枠材28内にポリイミド樹脂を充填させて蓄熱層22
を形成することが提案されており、かかる製法によれ
ば、ポリイミド樹脂となるワニスが幅方向に広がろうと
するのを枠材28が規制するため、蓄熱層22はその厚
みがワニスの塗布直後と略等しい所定の厚みと成る。
On the other hand, as shown in FIGS. 5 (a) and 5 (b),
Reinforcing electrode 24 on the upper surface of electrically insulating substrate 21 and driving IC 2
A frame member 28 made of glass is attached between the
The heat storage layer 22 is formed by filling the frame material 28 with a polyimide resin.
According to such a manufacturing method, since the frame material 28 restricts the varnish, which is a polyimide resin, from trying to spread in the width direction, the heat storage layer 22 has a thickness immediately after the application of the varnish. And a predetermined thickness approximately equal to.

【0009】しかしながら、電気絶縁性基板21上面の
補強電極24と駆動用IC27との間にガラス製の枠材
28を被着させるとともに、該枠材28内にポリイミド
樹脂を充填させて蓄熱層22を形成する場合、電気絶縁
性基板21上面の補強電極24と駆動用IC27との間
に、幅2mm程度の蓄熱層22が形成される大きな枠材
28を配するための広い領域を設けておく必要があり、
このためサーマルヘッドが大型化してしまうという欠点
を有している。
However, a frame member 28 made of glass is adhered between the reinforcing electrode 24 on the upper surface of the electrically insulating substrate 21 and the driving IC 27, and the frame member 28 is filled with a polyimide resin to form the heat storage layer 22. In the case of forming a large area, a large area for arranging a large frame member 28 in which the heat storage layer 22 having a width of about 2 mm is formed is provided between the reinforcing electrode 24 on the upper surface of the electrically insulating substrate 21 and the driving IC 27. Must be,
Therefore, there is a drawback that the thermal head becomes large.

【0010】また電気絶縁性基板21上面の補強電極2
4と駆動用IC27との間に枠材28を被着させるとと
もに、該枠材28内に蓄熱層22を形成する場合、記録
紙を重ねたインクリボンに熱を伝導させる発熱抵抗体2
3と、インクリボンから記録紙を引き剥がす電気絶縁性
基板21の端部との間の距離R1が長くなってしまうた
め、記録紙及びインクリボンを発熱抵抗体23上から電
気絶縁性基板21の端部まで短時間で搬送して両者を素
早く引き剥がすことができず、特に高速印字を行う場合
には、発熱抵抗体23の発した熱によって一旦記録紙に
転写されたインクが再びインクリボンに転写される逆転
写現象が発生し、印字品質が劣化する欠点が誘発され
る。
Further, the reinforcing electrode 2 on the upper surface of the electrically insulating substrate 21.
When the frame member 28 is adhered between the driving IC 27 and the driving IC 27 and the heat storage layer 22 is formed in the frame member 28, the heat generating resistor 2 that conducts heat to the ink ribbon on which the recording papers are stacked.
3 and the end portion of the electrically insulating substrate 21 that peels the recording paper from the ink ribbon, the distance R1 becomes long, so that the recording paper and the ink ribbon are removed from the heating resistor 23 on the electrically insulating substrate 21. The ink that has once been transferred to the recording paper due to the heat generated by the heating resistor 23 cannot be peeled off quickly by conveying it to the end portion in a short time and the high speed printing can be performed on the ink ribbon again. A reverse transfer phenomenon occurs in which the image is transferred, which causes a defect that print quality is deteriorated.

【0011】[0011]

【発明の目的】本発明は上記欠点に鑑み案出されたもの
で、その目的は、蓄熱層の厚みを容易に制御し、かつ、
高速印字に供する小型のサーマルヘッドを製作すること
が可能なサーマルヘッドの製造方法を提供することにあ
る。
SUMMARY OF THE INVENTION The present invention has been devised in view of the above-mentioned drawbacks, and an object thereof is to easily control the thickness of a heat storage layer, and
It is an object of the present invention to provide a method of manufacturing a thermal head capable of manufacturing a small thermal head for high speed printing.

【0012】[0012]

【課題を解決するための手段】本発明のサーマルヘッド
の製造方法は、四角形状を成す電気絶縁性基板の上面
で、該基板の一辺に沿って帯状の補強電極と、帯状のガ
ラス部材とを間に所定の間隔をもって略平行に被着させ
る工程と、前記補強電極とガラス部材との間に耐熱性樹
脂を充填して蓄熱層を形成する工程と、前記蓄熱層上
に、複数個の発熱抵抗体と、該発熱抵抗体の一端に接続
される個別導電層と、前記発熱抵抗体の他端と補強電極
の両方に接続される共通導電層とを被着させる工程とを
含むことを特徴とする。
According to the method of manufacturing a thermal head of the present invention, a strip-shaped reinforcing electrode and a strip-shaped glass member are provided along one side of the substrate on the upper surface of a square-shaped electrically insulating substrate. A step of applying the heat-resistant resin between the reinforcing electrode and the glass member to form a heat storage layer, and a step of applying a plurality of heat generations on the heat storage layer. A step of depositing a resistor, an individual conductive layer connected to one end of the heating resistor, and a common conductive layer connected to both the other end of the heating resistor and the reinforcing electrode. And

【0013】[0013]

【実施例】以下、本発明の実施例を添付図面に基づいて
説明する。
Embodiments of the present invention will be described below with reference to the accompanying drawings.

【0014】図1(a)は本発明の製造方法によって製
作したサーマルヘッドの斜視図、図1(b)は図1
(a)のX−X線断面図であり、1は電気絶縁性基板、
2は蓄熱層、3は発熱抵抗体、4は補強電極、5はガラ
ス部材、6aは個別導電層、6bは共通導電層、7は駆
動用IC、8は保護膜である。
FIG. 1A is a perspective view of a thermal head manufactured by the manufacturing method of the present invention, and FIG. 1B is FIG.
It is the XX sectional view of (a), 1 is an electrically insulating substrate,
2 is a heat storage layer, 3 is a heating resistor, 4 is a reinforcing electrode, 5 is a glass member, 6a is an individual conductive layer, 6b is a common conductive layer, 7 is a driving IC, and 8 is a protective film.

【0015】前記電気絶縁性基板1は四角形状を成すと
ともにアルミナセラミックス等の電気絶縁性材料から成
っており、その上面で発熱抵抗体3等を支持する作用を
為す。
The electrically insulating substrate 1 has a rectangular shape and is made of an electrically insulating material such as alumina ceramics, and has an upper surface for supporting the heating resistor 3 and the like.

【0016】また前記電気絶縁性基板1の上面には、
金、銀、銅等の金属材料から成る補強電極4が、例え
ば、30μmの厚みに被着されている。
On the upper surface of the electrically insulating substrate 1,
A reinforcing electrode 4 made of a metal material such as gold, silver or copper is deposited to a thickness of 30 μm, for example.

【0017】前記補強電極4は電気絶縁性基板1の一辺
に沿って配されるとともにその両端より該基板1の一辺
と直交する方向に導出されており、後述する共通導電層
6bに電気的に接続されることによって共通導電層6b
に大電流が流される際に共通導電層6bで電圧降下が発
生するのを有効に防止する作用を為す。
The reinforcing electrode 4 is arranged along one side of the electrically insulating substrate 1 and is led out from both ends in a direction orthogonal to the one side of the substrate 1 and electrically connected to a common conductive layer 6b described later. By being connected, the common conductive layer 6b
This effectively prevents a voltage drop from occurring in the common conductive layer 6b when a large current is applied to the common conductive layer 6b.

【0018】また前記電気絶縁性基板1の上面には、前
記電気絶縁性基板1の一辺と略平行で、かつ補強電極4
より所定距離(例えば、2mm)離れた位置に、外側面
5aを傾斜させたガラス部材5が前記補強電極4と略等
しい30μmの厚みをもって帯状に被着されている。
The upper surface of the electrically insulating substrate 1 is substantially parallel to one side of the electrically insulating substrate 1 and the reinforcing electrode 4 is provided.
A glass member 5 having a slanted outer surface 5a is attached in a strip shape with a thickness of 30 μm, which is substantially equal to that of the reinforcing electrode 4, at a position separated by a predetermined distance (for example, 2 mm).

【0019】更に前記ガラス部材5はその両端が補強電
極4に接触しており、補強電極4とガラス部材5との
間、即ち、補強電極4とガラス部材5とで構成される枠
材の内部には、幅2mmの蓄熱層2が補強電極4、ガラ
ス部材5と略等しい30μmの厚みをもって充填されて
いる。
Further, both ends of the glass member 5 are in contact with the reinforcing electrode 4, and between the reinforcing electrode 4 and the glass member 5, that is, inside the frame member composed of the reinforcing electrode 4 and the glass member 5. The heat storage layer 2 having a width of 2 mm is filled with a thickness of 30 μm, which is substantially equal to the reinforcing electrode 4 and the glass member 5.

【0020】前記蓄熱層2は、低熱伝導性(熱伝導率:
0.1〜0.9W/m・k)を有する耐熱性樹脂、例え
ば、ポリイミド樹脂から成っており、発熱抵抗体3の発
する熱を蓄積してサーマルヘッドの熱応答特性を良好に
保つ作用を為す。
The heat storage layer 2 has a low heat conductivity (heat conductivity:
It is made of a heat-resistant resin having 0.1 to 0.9 W / m · k), for example, a polyimide resin, and has the function of accumulating the heat generated by the heating resistor 3 to keep the thermal response characteristics of the thermal head good. Do

【0021】また前記蓄熱層2の上面には、窒化タンタ
ル等から成る複数個の発熱抵抗体3が被着配列されてお
り、該各発熱抵抗体3の一端には、発熱抵抗体3を駆動
用IC7に接続する個別導電層4が個別に接続され、各
発熱抵抗体3の他端には、前記補強電極4に接続された
共通導電層5が共通に接続されている。
A plurality of heating resistors 3 made of tantalum nitride or the like are deposited and arranged on the upper surface of the heat storage layer 2. One end of each heating resistor 3 drives the heating resistor 3. The individual conductive layers 4 connected to the ICs 7 are individually connected, and the other end of each heating resistor 3 is commonly connected to the common conductive layer 5 connected to the reinforcing electrode 4.

【0022】前記発熱抵抗体3は例えば窒化タンタル等
から成っており、それ自体が所定の電気抵抗率を有して
いるため、個別導電層4及び共通導電層5を介して所定
の電力が印加されるとジュール発熱を起こし、印字画像
を形成するのに必要な所定の温度、例えば200℃乃至
350℃の温度に発熱する。
Since the heating resistor 3 is made of, for example, tantalum nitride or the like and has a predetermined electric resistivity, a predetermined electric power is applied through the individual conductive layer 4 and the common conductive layer 5. Then, Joule heat is generated, and heat is generated at a predetermined temperature necessary for forming a printed image, for example, a temperature of 200 ° C to 350 ° C.

【0023】また前記発熱抵抗体3の両端に接続される
個別導電層4及び共通導電層5はアルミニウム等の金属
から成っており、該個別導電層4及び共通導電層5は発
熱抵抗体3にジュール発熱を起こさせるために必要な所
定の電力を印加する作用を為す。
The individual conductive layer 4 and the common conductive layer 5 connected to both ends of the heating resistor 3 are made of metal such as aluminum, and the individual conductive layer 4 and the common conductive layer 5 are connected to the heating resistor 3. It has a function of applying a predetermined electric power necessary for causing Joule heat generation.

【0024】更に前記個別導電層6aには駆動用IC7
が、例えば、フェイスダウンボンディング法によって半
田等のロウ材を介して接続されており、該駆動用IC7
は外部より入力される印字信号に基づいて発熱抵抗体3
を選択的に発熱制御する作用を為す。
Further, a driving IC 7 is formed on the individual conductive layer 6a.
Are connected via a brazing material such as solder by a face-down bonding method.
Is a heating resistor 3 based on a print signal input from the outside.
To selectively control heat generation.

【0025】また更に前記発熱抵抗体3等は、窒化珪
素、サイアロン等から成る保護膜8によって覆われてお
り、該保護膜8は大気中に含まれる水分等の接触による
酸化腐食や感熱記録媒体の摺接による摩耗から発熱抵抗
体3を保護する作用を為す。
Further, the heating resistor 3 and the like are covered with a protective film 8 made of silicon nitride, sialon or the like, and the protective film 8 is oxidized and corroded by contact of moisture contained in the atmosphere or a heat-sensitive recording medium. The heating resistor 3 is protected from abrasion caused by sliding contact with the heating resistor 3.

【0026】かくして上述したサーマルヘッドは、個別
導電層6aと共通導電層6bとの間に駆動用IC7の駆
動に伴って所定の電力を印加し、発熱抵抗体3を選択的
にジュール発熱させるとともに、該発熱した熱を感熱記
録媒体に伝導させ、インクリボンのインクを記録紙に転
写し、或いは感熱紙を発色させて所定の印字画像を形成
することによってサーマルヘッドとして機能する。
Thus, in the above-mentioned thermal head, a predetermined electric power is applied between the individual conductive layer 6a and the common conductive layer 6b as the driving IC 7 is driven, and the heating resistor 3 is selectively heated by Joule heat. The heat generated is conducted to the thermal recording medium, the ink of the ink ribbon is transferred to the recording paper, or the thermal paper is colored to form a predetermined print image, thereby functioning as a thermal head.

【0027】次に上述したサーマルヘッドの製造方法
を、図2(a)〜(c)を用いて説明する。
Next, a method of manufacturing the above-mentioned thermal head will be described with reference to FIGS.

【0028】(1)先ず、アルミナセラミックス等から
成る四角形状の電気絶縁性基板1を準備する。
(1) First, a square electric insulating substrate 1 made of alumina ceramics or the like is prepared.

【0029】前記電気絶縁性基板1は、アルミナ、シリ
カ、マグネシア等のセラミックス原料粉末に適当な有機
溶剤、溶媒を添加混合して泥漿状と成すとともにこれを
従来周知のドクターブレード法やカレンダーロール法等
を採用することによってセラミックグリーンシートを形
成し、しかる後、前記セラミックグリーンシートを所定
の四角形状に打ち抜き加工するとともに高温で焼成する
ことによって製作される。
The electrically insulating substrate 1 is formed into a sludge form by adding and mixing an appropriate organic solvent or solvent to a ceramic raw material powder such as alumina, silica, magnesia, etc., and the same is formed by a conventionally known doctor blade method or calender roll method. Etc. are used to form a ceramic green sheet, and thereafter, the ceramic green sheet is punched into a predetermined rectangular shape and is fired at a high temperature.

【0030】(2)次に図2(a)に示す如く、前記電
気絶縁性基板1の上面に、該基板1の一辺より例えば、
3.0mm離れた位置に前記一辺と略平行に外側面5a
が傾斜されたガラス部材5を帯状に被着形成する。
(2) Next, as shown in FIG. 2A, on the upper surface of the electrically insulating substrate 1, from one side of the substrate 1, for example,
Outside surface 5a at a position separated by 3.0 mm and substantially parallel to the one side.
The glass member 5 in which is inclined is adhered and formed in a strip shape.

【0031】前記ガラス部材5は、ガラス粉末に適用な
有機溶剤、溶媒を添加混合して得た所定のガラスペース
トをスクリーン印刷法等の厚膜手法によって電気絶縁性
基板1上面の一辺より3.0mm離れた位置に所定厚み
(例えば、30μm)、所定幅(例えば、1.5mm)
に塗布するとともに、これを約800℃の温度で焼成す
ることによって電気絶縁性基板1の上面に被着形成され
る。
The glass member 5 is prepared by adding an organic solvent suitable for glass powder, and a predetermined glass paste obtained by adding and mixing a solvent, from one side of the upper surface of the electrically insulating substrate 1 by a thick film method such as screen printing. A predetermined thickness (for example, 30 μm) and a predetermined width (for example, 1.5 mm) at positions 0 mm apart
And is baked at a temperature of about 800 ° C. to be deposited on the upper surface of the electrically insulating substrate 1.

【0032】尚、前記ガラスペーストは、室温等の変化
によってその温度が10℃程度上昇しても、粘度はあま
り変化しないため、ガラス部材5を電気絶縁性基板1上
に被着形成する際にガラスペーストの粘度低下によって
ガラスペーストの厚みが薄くなることは殆どなく、ガラ
ス部材5を所定厚み、所定幅に形成することができる。
The viscosity of the glass paste does not change so much even if the temperature rises by about 10 ° C. due to a change in room temperature or the like. Therefore, when the glass member 5 is adhered and formed on the electrically insulating substrate 1. The thickness of the glass paste rarely becomes thin due to the decrease in the viscosity of the glass paste, and the glass member 5 can be formed to have a predetermined thickness and a predetermined width.

【0033】(3)次に前記電気絶縁性基板1の上面
に、該基板1の一辺に沿って配されるとともにこの両端
より前記一辺と直交する方向に導出される補強電極4
を、該導出部が前記ガラス部材5の両端と接するように
形成する。
(3) Next, the reinforcing electrode 4 is provided on the upper surface of the electrically insulating substrate 1 along one side of the substrate 1 and is led out from both ends in a direction orthogonal to the one side.
Is formed so that the lead-out portion is in contact with both ends of the glass member 5.

【0034】前記補強電極4は、電気絶縁性基板1上面
の所定領域に、金、銀、銅等の金属粉末に適当な有機溶
剤、有機溶媒を添加混合して得た金属ペーストをスクリ
ーン印刷法等の厚膜手法を採用し約30μmの厚みに塗
布するとともに、これを約600℃の温度で焼成するこ
とによって電気絶縁性基板1の上面に被着される。
The reinforcing electrode 4 is formed by screen-printing a metal paste obtained by adding and mixing an appropriate organic solvent and an organic solvent to a metal powder of gold, silver, copper or the like in a predetermined region on the upper surface of the electrically insulating substrate 1. It is applied to the upper surface of the electrically insulating substrate 1 by applying a thick film technique such as the above to a thickness of about 30 μm and baking it at a temperature of about 600 ° C.

【0035】尚、この場合、補強電極4をガラス部材5
と実質的に同一の高さに形成しておけば、補強電極4と
ガラス部材5との間に形成される蓄熱層2の表面が平坦
になるため、印字に際して蓄熱層2上の発熱抵抗体3を
感熱記録媒体に良好に密着させることができるようにな
り、サーマルヘッドの熱効率を高くなすことが可能とな
る。従って補強電極4をガラス部材5と実質的に同一の
高さに形成しておくことが好ましい。
In this case, the reinforcing electrode 4 is replaced by the glass member 5
If the heat storage layer 2 is formed substantially at the same height as that of the heat storage layer 2, the surface of the heat storage layer 2 formed between the reinforcing electrode 4 and the glass member 5 becomes flat. 3 can be closely attached to the thermal recording medium, and the thermal efficiency of the thermal head can be increased. Therefore, it is preferable to form the reinforcing electrode 4 at substantially the same height as the glass member 5.

【0036】またこの場合、補強電極4の導出部がガラ
ス部材5の両端と接するように形成されているため、電
気絶縁性基板1の上面には補強電極4とガラス部材5と
から成る枠材が形成されることとなり、補強電極4とガ
ラス部材5との間に蓄熱層2を形成する際には、この枠
材内に必要最小限の耐熱性樹脂を充填させるだけで蓄熱
層2を形成することができるようになる。従って耐熱性
樹脂の使用量を少なく抑え、製品としてのサーマルヘッ
ドを安価になすことが可能となる。
Further, in this case, since the lead-out portion of the reinforcing electrode 4 is formed so as to be in contact with both ends of the glass member 5, the frame member composed of the reinforcing electrode 4 and the glass member 5 is formed on the upper surface of the electrically insulating substrate 1. Therefore, when the heat storage layer 2 is formed between the reinforcing electrode 4 and the glass member 5, the heat storage layer 2 is formed only by filling the frame material with the necessary minimum heat resistant resin. You will be able to. Therefore, it becomes possible to reduce the amount of heat-resistant resin used and to make the thermal head as a product inexpensive.

【0037】(4)次に前記電気絶縁性基板1の上面に
被着された補強電極4とガラス部材5との間にポリイミ
ド樹脂を充填し、補強電極4、ガラス部材5と略等しい
厚みの蓄熱層2を形成する。
(4) Next, a polyimide resin is filled between the reinforcing electrode 4 attached to the upper surface of the electrically insulating substrate 1 and the glass member 5 so that the reinforcing electrode 4 and the glass member 5 have substantially the same thickness. The heat storage layer 2 is formed.

【0038】前記蓄熱層2は、ポリイミド樹脂となるワ
ニスを電気絶縁性基板1上面の補強電極4とガラス部材
5との間に、補強電極4、ガラス部材5の高さと略等し
い厚みとなるまでディスペンサ等を用いて充填し、しか
る後、該充填したワニスを約400℃の温度で熱硬化さ
せ、ポリイミド樹脂と成すことによって形成される。
The heat storage layer 2 has a thickness of the varnish made of polyimide resin between the reinforcing electrode 4 and the glass member 5 on the upper surface of the electrically insulating substrate 1 until the thickness becomes substantially equal to the height of the reinforcing electrode 4 and the glass member 5. It is formed by filling it with a dispenser or the like, and then thermosetting the filled varnish at a temperature of about 400 ° C. to form a polyimide resin.

【0039】この場合、蓄熱層2は、補強電極4とガラ
ス部材5との間にワニスを充填させることによって形成
されるため、電気絶縁性基板1上に塗布されるワニスの
温度が室温等の変化により上昇しワニスの粘度が大幅に
低下しても、塗布されたワニスが幅方向に広がろうとす
るのを補強電極4及びガラス部材5が規制する。これに
よりワニスの厚みは一定に維持されるようになり、蓄熱
層2を所定の厚みに形成することができるようになる。
In this case, since the heat storage layer 2 is formed by filling the varnish between the reinforcing electrode 4 and the glass member 5, the temperature of the varnish applied on the electrically insulating substrate 1 is room temperature or the like. Even if the viscosity of the varnish rises due to the change and the viscosity of the varnish decreases significantly, the reinforcing electrode 4 and the glass member 5 prevent the applied varnish from spreading in the width direction. As a result, the thickness of the varnish is kept constant, and the heat storage layer 2 can be formed to have a predetermined thickness.

【0040】また前記蓄熱層2は補強電極4とガラス部
材5との間にポリイミド樹脂を充填することによって形
成されることから、幅2mm程度の蓄熱層2を形成する
ための大きな枠材等は一切不要となるとともに、蓄熱層
2を補強電極4に接して配することができるようにな
る。従ってサーマルヘッドを小型化することが可能とな
る。
Since the heat storage layer 2 is formed by filling a polyimide resin between the reinforcing electrode 4 and the glass member 5, a large frame material for forming the heat storage layer 2 having a width of about 2 mm is not required. It becomes unnecessary at all, and the heat storage layer 2 can be arranged in contact with the reinforcing electrode 4. Therefore, the thermal head can be downsized.

【0041】更に前記蓄熱層2は補強電極4に接して配
されることから、発熱抵抗体3と電気絶縁性基板1の端
部との間の距離R2を短くなすことができる。これによ
り、記録紙及びインクリボンを発熱抵抗体3上から電気
絶縁性基板1の端部まで短時間で搬送して両者を素早く
引き剥がすことができるようになり、高速印字を行う場
合であっても、発熱抵抗体3の発した熱によって一旦記
録紙に転写されたインクが再びインクリボンに転写され
る逆転写現象を皆無として高品質の印字画像を形成する
ことが可能となる。
Further, since the heat storage layer 2 is arranged in contact with the reinforcing electrode 4, the distance R2 between the heating resistor 3 and the end of the electrically insulating substrate 1 can be shortened. As a result, the recording paper and the ink ribbon can be conveyed from above the heat generating resistor 3 to the end of the electrically insulating substrate 1 in a short time and both of them can be quickly peeled off. Also, it is possible to form a high-quality printed image without the reverse transfer phenomenon in which the ink once transferred to the recording paper is again transferred to the ink ribbon by the heat generated by the heating resistor 3.

【0042】(5)次に前記蓄熱層2上に窒化タンタル
等から成る発熱抵抗体3と、アルミニウム等から成る個
別導電層4及び共通導電層5と、窒化珪素、サイアロン
等から成る保護層7とを被着形成する。
(5) Next, the heating resistor 3 made of tantalum nitride or the like, the individual conductive layer 4 and the common conductive layer 5 made of aluminum or the like, and the protective layer 7 made of silicon nitride, sialon or the like are formed on the heat storage layer 2. And are deposited.

【0043】前記発熱抵抗体3、個別導電層4及び共通
導電層5は、先ず厚み0.01μm〜0.5μmの窒化
タンタル、厚み0.5μm〜2.0μmのアルミニウム
を薄膜形成技術(例えばスパッタリング法)によって電
気絶縁性基板1上に順次被着させ、次にフォトリソグラ
フィー技術によって前記窒化タンタル及びアルミニウム
を一部エッチング除去し、発熱抵抗体3、個別導電層4
及び共通導電層5を所定パターンに加工することによっ
て形成される。
For the heating resistor 3, the individual conductive layers 4 and the common conductive layer 5, first, tantalum nitride having a thickness of 0.01 μm to 0.5 μm and aluminum having a thickness of 0.5 μm to 2.0 μm are formed by a thin film forming technique (for example, sputtering). Method), and the tantalum nitride and aluminum are partially etched away by a photolithography technique to form a heating resistor 3 and an individual conductive layer 4.
And the common conductive layer 5 is processed into a predetermined pattern.

【0044】尚、この場合、前記個別導電層4は、蓄熱
層2の上面から、傾斜されたガラス部材5の外側面5a
を経て電気絶縁性基板1の上面に被着されるため、上記
のように個別導電層4をスパッタリング法等の薄膜形成
技術によって形成しても、個別導電層4が蓄熱層2の上
面と電気絶縁性基板1の上面との間の段差によって断線
したり、或いは導電抵抗を高くなしたりすることはな
い。
In this case, the individual conductive layer 4 has the outer surface 5a of the glass member 5 inclined from the upper surface of the heat storage layer 2.
Since it is deposited on the upper surface of the electrically insulative substrate 1 through the above, even if the individual conductive layer 4 is formed by the thin film forming technique such as the sputtering method as described above, the individual conductive layer 4 is electrically connected to the upper surface of the heat storage layer 2. There is no disconnection or increase in the conductive resistance due to the step between the upper surface of the insulating substrate 1.

【0045】また保護膜8は、前記発熱抵抗体3等の上
面に窒化珪素をスパッタリング法等によって被着させる
ことによって発熱抵抗体3等を覆うように形成される。
The protective film 8 is formed so as to cover the heating resistor 3 and the like by depositing silicon nitride on the upper surface of the heating resistor 3 and the like by a sputtering method or the like.

【0046】(6)次に前記個別導電層6aに駆動用I
C7を接続する。
(6) Next, a driving I is formed on the individual conductive layer 6a.
Connect C7.

【0047】前記駆動用IC7は、その下面に設けた半
田バンプが個別導電層6aと当接するようにして電気絶
縁性基板1上に載置し、しかる後、これを180〜23
0℃の温度で加熱し半田を溶融させることによって個別
導電層6aに接続され、これによってサーマルヘッドが
完成する。
The driving IC 7 is mounted on the electrically insulating substrate 1 so that the solder bumps provided on the lower surface of the driving IC 7 come into contact with the individual conductive layers 6a.
It is connected to the individual conductive layer 6a by heating at a temperature of 0 ° C. to melt the solder, thereby completing the thermal head.

【0048】尚、本発明は上記実施例に限定されるもの
ではなく、本発明の要旨を逸脱しない範囲において種々
の変更が可能であり、例えば、蓄熱層を形成するにあた
って補強電極とガラス部材とで構成される枠材内に耐熱
性樹脂となるワニスを充填する際、充填するワニスの量
を少し多めにしておけば、ワニスは表面張力によって断
面円弧状と成り、図3(a)に示す如く、蓄熱層2の頂
部を上方に突出させて形成することができる。この場
合、上記実施例と同様の効果を奏するのに加え、印字に
際して蓄熱層2上の発熱抵抗体3を感熱記録媒体に良好
に密着させることができるようになり、発熱抵抗体3の
発する熱を感熱記録媒体に良好に伝導させることができ
るようになる。
The present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the present invention. For example, in forming a heat storage layer, a reinforcing electrode and a glass member are used. When a varnish which is a heat-resistant resin is filled in the frame material constituted by, if the amount of the varnish to be filled is made a little larger, the varnish becomes arcuate in cross section due to the surface tension, as shown in FIG. As described above, the top portion of the heat storage layer 2 can be formed so as to project upward. In this case, in addition to the effects similar to those of the above-described embodiment, the heating resistor 3 on the heat storage layer 2 can be brought into good contact with the thermal recording medium during printing, and the heat generated by the heating resistor 3 is generated. Can be satisfactorily conducted to the thermal recording medium.

【0049】また上述の如く、補強電極とガラス部材と
で構成される枠材内に耐熱性樹脂となるワニスを少し多
めに充填した後、電気絶縁性基板を所定角度だけ傾斜さ
せた状態でワニスを乾燥させれば、図3(b)に示す如
く、上方に突出される蓄熱層2の頂部を電気絶縁性基板
1の端部側に傾かせて形成することができる。この場
合、上記実施例と同様の効果を奏するのに加え、電気絶
縁性基板1の端部と発熱抵抗体3との間の距離R3は更
に短くなるため、印字の際にインクリボンと記録紙とを
より素早く引き剥がすことができるようになる。
Further, as described above, after a little more varnish which is a heat resistant resin is filled in the frame material composed of the reinforcing electrode and the glass member, the varnish is tilted at a predetermined angle to the electrically insulating substrate. 3B is dried, the top portion of the heat storage layer 2 protruding upward can be formed so as to be inclined toward the end portion side of the electrically insulating substrate 1, as shown in FIG. 3B. In this case, in addition to the effect similar to that of the above-described embodiment, the distance R3 between the end of the electrically insulating substrate 1 and the heating resistor 3 is further shortened, so that the ink ribbon and the recording paper can be printed. And will be able to be peeled off more quickly.

【0050】[0050]

【発明の効果】本発明のサーマルヘッドの製造方法によ
れば、蓄熱層が、補強電極とガラス部材との間に耐熱性
樹脂を充填することによって形成されることから、電気
絶縁性基板上に塗布される耐熱性樹脂の温度が室温等の
変化により上昇し耐熱性樹脂の粘度が大幅に低下して
も、塗布された耐熱性樹脂が幅方向に広がろうとするの
を補強電極及びガラス部材が規制する。これにより耐熱
性樹脂の厚みは一定に維持され、蓄熱層を所定の厚みに
形成することができるようになる。
According to the method of manufacturing a thermal head of the present invention, since the heat storage layer is formed by filling the heat-resistant resin between the reinforcing electrode and the glass member, the heat storage layer is formed on the electrically insulating substrate. Even if the temperature of the applied heat-resistant resin rises due to changes in room temperature and the like, and the viscosity of the heat-resistant resin decreases significantly, the applied heat-resistant resin will try to spread in the width direction. Regulated. Thereby, the thickness of the heat resistant resin is maintained constant, and the heat storage layer can be formed to have a predetermined thickness.

【0051】また本発明のサーマルヘッドの製造方法に
よれば、蓄熱層が、補強電極とガラス部材との間にポリ
イミド樹脂を充填することによって形成されることか
ら、所定幅の蓄熱層を形成するための大きな枠材等は一
切不要になるとともに、蓄熱層を補強電極に接して配す
ることができるようになり、これによってサーマルヘッ
ドの小型化が可能となる。
Further, according to the method of manufacturing the thermal head of the present invention, the heat storage layer is formed by filling the polyimide resin between the reinforcing electrode and the glass member, so that the heat storage layer having a predetermined width is formed. A large frame material for the purpose is not necessary at all, and the heat storage layer can be arranged in contact with the reinforcing electrode, which enables downsizing of the thermal head.

【0052】更に本発明のサーマルヘッドの製造方法に
よれば、蓄熱層を補強電極に接して配することができる
ため、発熱抵抗体と電気絶縁性基板の端部との間の距離
を短くすることができる。これにより、記録紙及びイン
クリボンを発熱抵抗体上から電気絶縁性基板の端部まで
短時間で搬送して両者を素早く引き剥がすことができる
ようになり、高速印字を行う場合であっても、インクの
逆転写現象を皆無として高い品質の印字画像を形成する
ことが可能となる。
Further, according to the method of manufacturing a thermal head of the present invention, the heat storage layer can be disposed in contact with the reinforcing electrode, so that the distance between the heating resistor and the end of the electrically insulating substrate is shortened. be able to. This makes it possible to convey the recording paper and the ink ribbon from the heating resistor to the end of the electrically insulating substrate in a short time and quickly peel them off, and even when performing high-speed printing, It is possible to form a high-quality printed image by eliminating the reverse transfer phenomenon of ink.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)は本発明の製造方法の一実施例により製
作したサーマルヘッドの斜視図、(b)は(a)のX−
X線断面図である。
FIG. 1A is a perspective view of a thermal head manufactured by an embodiment of the manufacturing method of the present invention, and FIG.
It is an X-ray sectional view.

【図2】(a)〜(c)は本発明にかかる製造工程を示
す斜視図である。
2A to 2C are perspective views showing a manufacturing process according to the present invention.

【図3】(a)及び(b)は本発明の製造方法の他の実
施例により製作したサーマルヘッドの断面図である。
3A and 3B are cross-sectional views of a thermal head manufactured according to another embodiment of the manufacturing method of the present invention.

【図4】(a)は従来のサーマルヘッドの斜視図、
(b)は(a)のY−Y線断面図である。
FIG. 4A is a perspective view of a conventional thermal head,
(B) is a YY line sectional view of (a).

【図5】(a)は従来のサーマルヘッドの斜視図、
(b)は(a)のZ−Z線断面図である。
FIG. 5A is a perspective view of a conventional thermal head,
(B) is a ZZ line sectional view of (a).

【符号の説明】[Explanation of symbols]

1・・・電気絶縁性基板 2・・・蓄熱層 3・・・発熱抵抗体 4・・・補強電極 5・・・ガラス部材 6a・・・個別導電層 6b・・・共通導電層 7・・・駆動用IC 8・・・保護膜 DESCRIPTION OF SYMBOLS 1 ... Electrically insulating substrate 2 ... Heat storage layer 3 ... Heating resistor 4 ... Reinforcing electrode 5 ... Glass member 6a ... Individual conductive layer 6b ... Common conductive layer 7 ...・ Drive IC 8 ・ ・ ・ Protective film

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】四角形状を成す電気絶縁性基板の上面で、
該基板の一辺に沿って帯状の補強電極と、帯状のガラス
部材とを間に所定の間隔をもって略平行に被着させる工
程と、 前記補強電極とガラス部材との間に耐熱性樹脂を充填し
て蓄熱層を形成する工程と、 前記蓄熱層上に、複数個の発熱抵抗体と、該発熱抵抗体
の一端に接続される個別導電層と、前記発熱抵抗体の他
端と補強電極の両方に接続される共通導電層とを被着さ
せる工程とを含むことを特徴とするサーマルヘッドの製
造方法。
1. An upper surface of an electrically insulating substrate having a rectangular shape,
A step of depositing a strip-shaped reinforcing electrode and a strip-shaped glass member along one side of the substrate in a substantially parallel manner with a predetermined gap therebetween, and filling a heat-resistant resin between the reinforcing electrode and the glass member. Forming a heat storage layer on the heat storage layer, a plurality of heating resistors, an individual conductive layer connected to one end of the heating resistor, the other end of the heating resistor and a reinforcing electrode A step of depositing a common conductive layer connected to the thermal head.
JP6344694A 1994-03-31 1994-03-31 Manufacture of thermal head Pending JPH07266596A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6344694A JPH07266596A (en) 1994-03-31 1994-03-31 Manufacture of thermal head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6344694A JPH07266596A (en) 1994-03-31 1994-03-31 Manufacture of thermal head

Publications (1)

Publication Number Publication Date
JPH07266596A true JPH07266596A (en) 1995-10-17

Family

ID=13229490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6344694A Pending JPH07266596A (en) 1994-03-31 1994-03-31 Manufacture of thermal head

Country Status (1)

Country Link
JP (1) JPH07266596A (en)

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