JPH07253302A - Thickness measuring apparatus for sheetlike material - Google Patents

Thickness measuring apparatus for sheetlike material

Info

Publication number
JPH07253302A
JPH07253302A JP4558994A JP4558994A JPH07253302A JP H07253302 A JPH07253302 A JP H07253302A JP 4558994 A JP4558994 A JP 4558994A JP 4558994 A JP4558994 A JP 4558994A JP H07253302 A JPH07253302 A JP H07253302A
Authority
JP
Japan
Prior art keywords
air
sheet
tank cap
valve
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4558994A
Other languages
Japanese (ja)
Inventor
Yutaka Saito
豊 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP4558994A priority Critical patent/JPH07253302A/en
Publication of JPH07253302A publication Critical patent/JPH07253302A/en
Pending legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Controlling Sheets Or Webs (AREA)

Abstract

PURPOSE:To prevent breakage during the measuring of the thickness of a thin sheet by arranging a flow regulating valve between a three-way changeover valve and a tank cap to act as resistor of an flow rate of air in the introduction thereof and as non-resistor in the discharging thereof. CONSTITUTION:A flow regulating valve 30 is so arranged between a three-way solenoid valve 12 and a tank cap 2 to have an air flow choking mechanism E and a one-way passage mechanism F which is adapted to close to the flow of air from one way and pose no resistance to the flow of air from the opposite way. In the measurement of the thickness of a sheetlike matter (paper) C thick relatively (about 40-50mum), the mechanism E is opened fully to accelerate the speed of a conductor target 7 when contacting the paper C, for example, to 0.1sec. By the contrary, in the measurement of the thickness (about 20mum) thin relatively, the mechanism E is throttled to slow the lowering speed of the target 7 to about 0.5sec. by regulating the amount of the air flowing into the cap 2. When the paper C is separated from the target 7, the solenoid valve 12 is turned OFF to make the air in the cap 2 flow out to the discharge side (k) of the valve 12 from the mechanism F.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は,シート状物質の厚さを
オンラインで測定する装置に関し,比較的厚いシートか
ら比較的薄いシートの厚さを測定する場合の,主として
薄いシートに対する破損防止を図ったシート状物質の厚
さ測定装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring the thickness of a sheet material on-line, and for preventing the damage to a thin sheet mainly when measuring the thickness of a relatively thick sheet to a relatively thin sheet. The present invention relates to a thickness measuring device for a sheet material.

【0002】[0002]

【従来の技術】図2は,タンクキャップ内に空気を導入
してターゲットをシート(例えば紙)に接触させる構成
の従来装置の断面図である。図中,Aは上側の検出ヘッ
ドで,ベース1上にタンク・キャップ2が取り付けられ
ており,タンクキャップ2内にはベローズ5により気密
にシールされたシャフト6がシートCに対して垂直に配
置されている。シャフト6にはコイル状のばね8が巻回
され,一端(シートに接する側)はベース1を貫通する
と共に導体ターゲット7が取付けられている。
2. Description of the Related Art FIG. 2 is a sectional view of a conventional apparatus having a structure in which air is introduced into a tank cap to bring a target into contact with a sheet (eg, paper). In the figure, A is an upper detection head, in which a tank cap 2 is mounted on a base 1, and a shaft 6 hermetically sealed by a bellows 5 is arranged perpendicularly to a sheet C in the tank cap 2. Has been done. A coil-shaped spring 8 is wound around the shaft 6, and one end (the side in contact with the sheet) penetrates the base 1 and a conductor target 7 is attached.

【0003】タンクキャップ2内には空気源(図示せ
ず)から減圧弁11および3方電磁弁12を介して所定
の空気圧が導入される。14はタンクキャップ2内の空
気圧を検出し電気信号に変換する空電変換器であり,ダ
ーゲット7とシートとの接触圧を監視している。
A predetermined air pressure is introduced into the tank cap 2 from an air source (not shown) through the pressure reducing valve 11 and the three-way solenoid valve 12. Reference numeral 14 is an air-electric converter that detects the air pressure in the tank cap 2 and converts it into an electric signal, and monitors the contact pressure between the target 7 and the seat.

【0004】Bは下側の検出ヘッドで,ベース20にボ
デイ21が取り付けられている。ベース20に設けられ
た開口22の周縁にはダイアフラム23が取り付けら
れ,このダイアフラム23の中心開口部分にはセンサ・
コイル24を収納する収納容器25が取り付けられてい
る。26はシリンダーで電磁弁27により空気を導入し
シャフト28を介して収納容器25を所定の基準面とな
るように配置する。29はセンサ・コイルの変位を電圧
に変換する変位電圧変換器である。
A lower detection head B has a body 21 mounted on a base 20. A diaphragm 23 is attached to the periphery of an opening 22 provided in the base 20, and a sensor and a sensor are provided at the central opening of the diaphragm 23.
A storage container 25 that stores the coil 24 is attached. Numeral 26 is a cylinder which introduces air by an electromagnetic valve 27 and arranges the storage container 25 so as to have a predetermined reference surface via a shaft 28. Reference numeral 29 is a displacement voltage converter for converting the displacement of the sensor coil into a voltage.

【0005】このような構成で,シートCが矢印D1
向に送給される場合,上側の検出ヘッドA並びに下側の
検出ヘッドBはフレーム上のガイド(図示せず)に従い
シートCの幅方向(紙面に対し垂直方向)に往復駆動さ
れる。厚さの測定は,シートCを検出ヘッドAとBの間
に挟み,3方電磁弁12を介してタンク・キャップ2に
空気を供給して内圧を高める。
With such a structure, when the sheet C is fed in the direction of the arrow D 1 , the upper detection head A and the lower detection head B follow the guide (not shown) on the frame and the width of the sheet C. It is reciprocally driven in the direction (perpendicular to the paper surface). To measure the thickness, the sheet C is sandwiched between the detection heads A and B, and air is supplied to the tank cap 2 via the three-way solenoid valve 12 to increase the internal pressure.

【0006】その結果ベローズ5がばね8の力に抗して
下方に縮み,シャフト6の先端に固定されたターゲット
4をシートCを介してセンサ・コイル24に近づける。
なお,センサ・コイル24が固定された収納容器25は
シリンダー26により上方へ移動するが,図示しない機
械的ストッパによりベース20に対して所定の位置に固
定され,シートCの厚さ測定の基準面となる。
As a result, the bellows 5 contracts downward against the force of the spring 8 and brings the target 4 fixed to the tip of the shaft 6 closer to the sensor coil 24 via the sheet C.
The storage container 25 to which the sensor coil 24 is fixed is moved upward by the cylinder 26, but is fixed at a predetermined position with respect to the base 20 by a mechanical stopper (not shown), and serves as a reference plane for measuring the thickness of the sheet C. Becomes

【0007】下側の検出ヘッドB中のセンサ・コイル2
4には高周波電流が流されており,磁束が生成されてい
る。センサ・コイル24に対向して配置されたターゲッ
ト7は良導体であり,この部分に渦電流が発生し,この
渦電流によりセンサ・コイル24の磁束が減少しコイル
・インピーダンスが変化する。このインピーダンス変化
はターゲット7とセンサ・コイル24間の距離に比例し
ており,この距離がシートCの厚さとなるため,前記イ
ンピーダンスの変化をブリッジ回路等(図示せず)によ
り検出すればシートCの厚さをオンラインで測定するこ
とが出来る。
Sensor coil 2 in the lower detection head B
A high-frequency current is passed through 4 and a magnetic flux is generated. The target 7 arranged so as to face the sensor coil 24 is a good conductor, and an eddy current is generated in this portion. The eddy current reduces the magnetic flux of the sensor coil 24 and changes the coil impedance. This impedance change is proportional to the distance between the target 7 and the sensor coil 24, and this distance becomes the thickness of the sheet C. Therefore, if the impedance change is detected by a bridge circuit or the like (not shown), the sheet C is detected. Thickness can be measured online.

【0008】[0008]

【発明が解決しようとする課題】ところで,上記構成の
測定装置は非測定状態に於いてはターゲット7はばね8
により上方に引き上げられておりシートCとの間隔は5
〜6mm程度となっている。そして例えば40〜50μ
m程度の紙厚を測定する場合にはターゲット7との接触
圧は数十gとなるように減圧弁11の圧力が調整されて
いる。その場合3方電磁弁12を開にしたときにベロー
ズ5が縮みターゲット7が紙に接触するまでの速さは
0.1秒程度である。
By the way, in the measuring device having the above-described structure, the target 7 is the spring 8 in the non-measuring state.
It is pulled up by and the distance from the sheet C is 5
It is about 6 mm. And, for example, 40 to 50 μ
When measuring a paper thickness of about m, the pressure of the pressure reducing valve 11 is adjusted so that the contact pressure with the target 7 is several tens of g. In that case, when the three-way solenoid valve 12 is opened, the speed until the bellows 5 contracts and the target 7 comes into contact with the paper is about 0.1 seconds.

【0009】次に同じ装置を用いて薄いシート(例えば
コンデンサー作製に用いる20μm程度の紙)を測定し
ようとする場合,紙厚が薄いので紙に接触するターゲッ
トの速度が速いと紙が破損するという問題があった。本
発明はかかる従来例の欠点に鑑がみてなされたものであ
り,その目的は,シートに接触するときのターゲットの
速度を制限すことにより,特に薄いシートの厚さを測定
する場合にシートが破損する恐れのないシート状物質の
厚さ測定装置を提供することにある。
Next, when trying to measure a thin sheet (for example, a paper of about 20 μm used for making a capacitor) by using the same device, the paper is thin, so that the paper is damaged if the speed of the target in contact with the paper is high. There was a problem. The present invention has been made in view of the drawbacks of the conventional example, and an object thereof is to limit the speed of a target at the time of contact with a sheet, thereby making it possible to reduce the thickness of a thin sheet. An object of the present invention is to provide a device for measuring the thickness of a sheet-like material which is not likely to be damaged.

【0010】[0010]

【課題を解決するための手段】上記課題を解決するため
に本発明は,シート状物質を挟んで対向して配置された
一対の検出ヘッドと,該一対の検出ヘッドの一方の側の
検出ヘッドに設けられたセンサ・コイルと,前記一対の
検出ヘッドの他方の側の検出ヘッドに設けられたタンク
キャップ及び該タンクキャップ内に配置され空気圧によ
り前記シート状物質側に駆動される導体ターゲットと,
前記タンクキャップ内に空気を導入する減圧弁及び3方
切換弁と,前記導体ターゲットが前記シート状物質側に
接触しそのシートの厚さに関連して変化する前記センサ
・コイルのインピーダンスの変化から前記シート状物質
の厚さを測定するようにした装置において,前記3方切
換弁とタンクキャップの間に空気がタンクキャップに導
入されるときは空気流量の抵抗体となり,タンクキャッ
プから空気を抜くときは非抵抗体となる流量調節弁を配
置したことを特徴とするものである。
In order to solve the above-mentioned problems, the present invention is directed to a pair of detection heads arranged to face each other with a sheet-like substance interposed therebetween, and a detection head on one side of the pair of detection heads. A sensor coil, a tank cap provided on the other detection head of the pair of detection heads, and a conductor target arranged in the tank cap and driven to the sheet-like substance side by air pressure,
From a pressure reducing valve for introducing air into the tank cap and a three-way switching valve, and a change in the impedance of the sensor coil that changes in relation to the thickness of the sheet when the conductor target comes into contact with the sheet-like substance side. In a device for measuring the thickness of the sheet-like substance, when air is introduced into the tank cap between the three-way switching valve and the tank cap, it serves as a resistor for the air flow rate and removes air from the tank cap. In this case, a flow control valve that is a non-resistor is arranged.

【0011】[0011]

【作用】空気がタンクキャップに導入されるときは流量
調節弁が空気流量の抵抗体となるのでタンクキャップ内
への空気流入量が制限され,ターゲットが紙に接触する
までの速度が遅くなる。流量調節弁はタンクキャップか
ら空気を抜くときは非抵抗体となるので速く離脱する。
When the air is introduced into the tank cap, the flow rate control valve acts as a resistor for the air flow rate, so that the amount of air flowing into the tank cap is limited, and the speed at which the target contacts the paper becomes slow. When the air is removed from the tank cap, the flow rate control valve becomes a non-resistor, so it quickly separates.

【0012】[0012]

【実施例】以下,図面を用いて詳しく説明する。図1は
本発明実施例の要部説明図であり,図中,図2と同一部
分は同一記号を付しここでの重複説明は省略する。図に
おいて,図2に示す従来例と異なる点は3方電磁弁12
とタンクキャップ2の間に流量調節弁30を設けたこと
である。この流量調節弁30は空気流量絞り機構Eと,
一方からの流れに対しては閉となり逆方向からの流れに
対しては空気抵抗のない一方通行機構Fを有している。
Embodiments will be described in detail below with reference to the drawings. 1 is an explanatory view of a main part of an embodiment of the present invention. In the figure, the same parts as those in FIG. In the figure, the difference from the conventional example shown in FIG.
The flow control valve 30 is provided between the tank cap 2 and the tank cap 2. The flow rate control valve 30 includes an air flow rate restricting mechanism E,
It has a one-way mechanism F that is closed to the flow from one side and has no air resistance to the flow from the opposite direction.

【0013】上記の構成において紙厚が比較的厚い(4
0〜50μm)場合は絞り機構Eを全開にしておき,タ
ーゲットが紙に接触する速度を従来通り(例えば0.1
秒)としておく。次に比較的薄い紙厚(20μm程度)
の場合は絞り機構を絞ってタンクキャップ2内に流入す
る空気量を制限する。また,ターゲットを紙から離脱さ
せる場合は3方電磁弁12をオフにするとタンク2内の
空気は一方通行機構F側を通って3方電磁弁12の排出
側(矢印k方向)に流出する。なお,本発明者が市販の
流量調節弁により実験した結果ではターゲットの降下速
度を0.5秒程度に遅くすることにより良好な結果が得
られた。
In the above construction, the paper thickness is relatively thick (4
In the case of 0 to 50 μm), the diaphragm mechanism E is fully opened, and the speed at which the target comes into contact with the paper is kept as usual (for example, 0.1
Seconds). Next relatively thin paper thickness (about 20 μm)
In the case of, the throttle mechanism is throttled to limit the amount of air flowing into the tank cap 2. When the target is removed from the paper, the three-way solenoid valve 12 is turned off, and the air in the tank 2 passes through the one-way mechanism F side and flows out to the discharge side (direction of arrow k) of the three-way solenoid valve 12. As a result of an experiment conducted by the present inventor using a commercially available flow rate control valve, good results were obtained by slowing down the target descending speed to about 0.5 seconds.

【0014】[0014]

【発明の効果】以上実施例とともに具体的に説明したよ
うに本発明によれば,シート状物質の厚さを測定するよ
うにした装置において,3方切換弁とタンクキャップの
間に空気がタンクキャップに導入されるときは空気流量
の抵抗体となり,タンクキャップから空気を抜くときは
非抵抗体となる流量調節弁を配置したので紙厚に応じて
ターゲットの降下速度を制限することが可能となり,接
触時の紙の破損のないシート状物質の厚さ測定装置を実
現することができる。
As described above in detail with reference to the embodiments, according to the present invention, in a device for measuring the thickness of a sheet-like substance, air is stored between the three-way switching valve and the tank cap. Since a flow control valve that functions as a resistor for air flow when introduced into the cap and a non-resistor when removing air from the tank cap, it is possible to limit the descent speed of the target according to the paper thickness. , It is possible to realize a device for measuring the thickness of a sheet-like substance that does not damage the paper at the time of contact.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のシート状物質の厚さ測定装置の一実施
例を示す要部断面構成図である。
FIG. 1 is a cross-sectional configuration diagram of essential parts showing an embodiment of a thickness measuring device for a sheet-like substance of the present invention.

【図2】従来装置の要部断面構成図である。 A 上側の検出ヘッド B 下側の検出ヘッド C シート状物質 1,20 ベース 2 タンク・キャップ 5 ベローズ 6 シャフト 7 ターゲット 11 減圧弁 12 3方電磁弁 24 センサコイル 25 収納容器 30 流量調節弁FIG. 2 is a cross-sectional configuration diagram of a main part of a conventional device. A Upper detection head B Lower detection head C Sheet material 1,20 Base 2 Tank cap 5 Bellows 6 Shaft 7 Target 11 Pressure reducing valve 12 3-way solenoid valve 24 Sensor coil 25 Storage container 30 Flow control valve

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 シート状物質を挟んで対向して配置され
た一対の検出ヘッドと,該一対の検出ヘッドの一方の側
の検出ヘッドに設けられたセンサ・コイルと,前記一対
の検出ヘッドの他方の側の検出ヘッドに設けられたタン
クキャップ及び該タンクキャップ内に配置され空気圧に
より前記シート状物質側に駆動される導体ターゲット
と,前記タンクキャップ内に空気を導入する減圧弁及び
3方切換弁と,前記導体ターゲットが前記シート状物質
側に接触しそのシートの厚さに関連して変化する前記セ
ンサ・コイルのインピーダンスの変化から前記シート状
物質の厚さを測定するようにした装置において,前記3
方切換弁とタンクキャップの間に空気がタンクキャップ
に導入されるときは空気流量の抵抗体となり,タンクキ
ャップから空気を抜くときは非抵抗体となる流量調節弁
を配置したことを特徴とするシート状物質の厚さ測定装
置。
1. A pair of detection heads arranged to face each other with a sheet-like substance interposed therebetween, a sensor coil provided on the detection head on one side of the pair of detection heads, and a pair of the detection heads. A tank cap provided on the detection head on the other side, a conductor target arranged in the tank cap and driven to the sheet-like substance side by air pressure, a pressure reducing valve for introducing air into the tank cap, and a three-way switching A valve and an apparatus adapted to measure the thickness of the sheet-like material from a change in impedance of the sensor coil, which is brought into contact with the sheet-like material side of the valve and changes in relation to the thickness of the sheet. , Said 3
It is characterized by arranging a flow control valve between the one-way switching valve and the tank cap that functions as an air flow resistance element when air is introduced into the tank cap and a non-resistance element when bleeding air from the tank cap. Sheet thickness measuring device.
JP4558994A 1994-03-16 1994-03-16 Thickness measuring apparatus for sheetlike material Pending JPH07253302A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4558994A JPH07253302A (en) 1994-03-16 1994-03-16 Thickness measuring apparatus for sheetlike material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4558994A JPH07253302A (en) 1994-03-16 1994-03-16 Thickness measuring apparatus for sheetlike material

Publications (1)

Publication Number Publication Date
JPH07253302A true JPH07253302A (en) 1995-10-03

Family

ID=12723545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4558994A Pending JPH07253302A (en) 1994-03-16 1994-03-16 Thickness measuring apparatus for sheetlike material

Country Status (1)

Country Link
JP (1) JPH07253302A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6531242B1 (en) 1998-01-16 2003-03-11 Toyo Kohan, Ltd. Enclosed cell and sealer
JP2007139769A (en) * 2005-11-14 2007-06-07 Immobilien Ges Helmut Fischer Gmbh & Co Kg Probe especially for measuring thickness of membrane
CN104980604A (en) * 2014-04-09 2015-10-14 致伸科技股份有限公司 Automatic paper-advance device
JP2015189581A (en) * 2014-03-28 2015-11-02 致伸科技股▲ふん▼有限公司 automatic document feeder

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6531242B1 (en) 1998-01-16 2003-03-11 Toyo Kohan, Ltd. Enclosed cell and sealer
JP2007139769A (en) * 2005-11-14 2007-06-07 Immobilien Ges Helmut Fischer Gmbh & Co Kg Probe especially for measuring thickness of membrane
JP2015189581A (en) * 2014-03-28 2015-11-02 致伸科技股▲ふん▼有限公司 automatic document feeder
CN104980604A (en) * 2014-04-09 2015-10-14 致伸科技股份有限公司 Automatic paper-advance device

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