JPH07249859A - Cooling device of reflowed board - Google Patents

Cooling device of reflowed board

Info

Publication number
JPH07249859A
JPH07249859A JP3877094A JP3877094A JPH07249859A JP H07249859 A JPH07249859 A JP H07249859A JP 3877094 A JP3877094 A JP 3877094A JP 3877094 A JP3877094 A JP 3877094A JP H07249859 A JPH07249859 A JP H07249859A
Authority
JP
Japan
Prior art keywords
cooling
air
substrate
conveyor
fan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3877094A
Other languages
Japanese (ja)
Other versions
JP3367739B2 (en
Inventor
Fumihiro Yamashita
文弘 山下
Hiroshi Takei
洋 武井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamura Corp
Original Assignee
Tamura Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamura Corp filed Critical Tamura Corp
Priority to JP03877094A priority Critical patent/JP3367739B2/en
Publication of JPH07249859A publication Critical patent/JPH07249859A/en
Application granted granted Critical
Publication of JP3367739B2 publication Critical patent/JP3367739B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To improve a cooling device of a reflowed board in cooling efficiency by a method wherein sirocco fans are arranged so as to make their suction openings confront each other at the lower parts of vertical cooling coils through the intermediary of a space under a conveyer, and fan casings are provided to guide flows of air induced by the fans to the air outlets of the casings which confront each other at the upper part of the cooling coils. CONSTITUTION:When a flow of air heated passing through a substrate P is sucked into the suction opening 16 of a sirocco fan 15 passing through the lower part 13a of a vertical cooling coil 13 via a space below a conveyer 12, a flow of air of comparatively high temperature is cooled down by the cooling coil 13 to a flow of air of lower temperature. A flow of cold air discharged out from the circumferential face of the sirocco fan 15 is collected by a fan casing 17, guided to an upper air outlet 19 cooling the casing 17, and discharged out into a space above the conveyer 12 through the upper part 13b of the vertical cooling coil 13, when the flow of air is cooled down again by the vertical cooling coil 13 and straightened by fins 14. By this setup, a cooling device of this constitution can be improved in cooling efficiency.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、窒素リフロー装置また
はエアリフロー装置等のリフロー炉体内によりリフロー
はんだ付け処理された高温の基板を冷却するためのリフ
ロー済基板の冷却装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reflowed substrate cooling device for cooling a high temperature substrate which has been reflow-soldered in a reflow furnace such as a nitrogen reflow device or an air reflow device.

【0002】[0002]

【従来の技術】図4に示されるように、従来のリフロー
済基板冷却装置は、冷却室本体1内に基板搬送コンベヤ
2が挿入され、冷却室本体1の上部にファン3およびフ
ァン駆動モータ4が設けられ、基板搬送コンベヤ2の上
側および下側に水平に冷却コイル5が配置されたもので
ある。
2. Description of the Related Art As shown in FIG. 4, in a conventional reflowed substrate cooling device, a substrate transfer conveyor 2 is inserted into a cooling chamber body 1, and a fan 3 and a fan drive motor 4 are provided above the cooling chamber body 1. Is provided, and the cooling coils 5 are horizontally arranged above and below the substrate transport conveyor 2.

【0003】そして、冷却室本体1内でファン3により
発生した風は、冷却コイル5で冷却されて冷風となり循
環または撹拌されている。この冷却装置の前段に位置す
るリフロー装置でのはんだ付け処理により高温となった
部品実装プリント配線基板(以下、単に基板Pという)
を、コンベヤ2により冷却室本体1内に搬入すると、そ
の冷風により基板Pが冷却される。
The air generated by the fan 3 in the cooling chamber body 1 is cooled by the cooling coil 5 to become cold air, which is circulated or stirred. A component-mounted printed wiring board (hereinafter, simply referred to as a board P) that has been heated to a high temperature by a soldering process in a reflow device located in the preceding stage of the cooling device.
When is carried into the cooling chamber body 1 by the conveyor 2, the substrate P is cooled by the cold air.

【0004】前段のリフロー装置では、基板Pに塗布さ
れたソルダペースト中から発生したフラックスガスがリ
フロー炉体内に満ちているので、このフラックスガスが
リフロー炉体と連続的に設置された冷却室本体1内にも
侵入する。
In the former reflow apparatus, since the flux gas generated from the solder paste applied to the substrate P is filled in the reflow furnace body, this flux gas is continuously placed in the cooling chamber body. It also penetrates into 1.

【0005】[0005]

【発明が解決しようとする課題】冷却室本体1内のフラ
ックスガスは冷却コイル5に接触すると凝縮されて液化
するが、その冷却コイル5を基板搬送コンベヤ2の上下
に配置しているため、上側の冷却コイル5にて液化され
たフラックスが基板P上にたれ落ちるという問題があ
る。
The flux gas in the cooling chamber body 1 is condensed and liquefied when it comes into contact with the cooling coil 5, but since the cooling coil 5 is arranged above and below the substrate transfer conveyor 2, There is a problem that the liquefied flux in the cooling coil 5 of FIG.

【0006】また、基板上の冷却コイル5は冷風にとっ
て一種の障害物となり、基板に吹付けられる冷風の風速
を下げるため、その分冷却効果を低下させる問題があ
る。
Further, the cooling coil 5 on the substrate becomes a kind of obstacle for the cold air and lowers the wind speed of the cold air blown on the substrate, so that there is a problem that the cooling effect is reduced accordingly.

【0007】さらに、冷却コイル5および冷却室本体1
の内壁面で液化したフラックスは冷却室本体1の底面部
にたれ落ちて溜るが、このフラックスの回収処理は容易
でなく、清掃等のメンテナンスを困難にしている問題が
ある。
Further, the cooling coil 5 and the cooling chamber body 1
The liquefied flux on the inner wall surface of the chamber hangs down and collects on the bottom surface of the cooling chamber body 1. However, this flux recovery process is not easy and maintenance such as cleaning is difficult.

【0008】本発明は、このような点に鑑みなされたも
ので、冷却コイルなどで液化するフラックスを基板にか
からないように回収できるとともに、冷却効果の向上を
図れる構造のリフロー済基板冷却装置を提供することを
目的とするものである。
The present invention has been made in view of the above circumstances, and provides a reflowed substrate cooling device having a structure capable of collecting flux that is liquefied by a cooling coil so as not to be applied to the substrate and improving the cooling effect. The purpose is to do.

【0009】[0009]

【課題を解決するための手段】請求項1に記載の発明
は、リフロー装置によりリフローはんだ付け処理された
高温の基板を、冷却室本体内で循環される冷風により冷
却するためのリフロー済基板の冷却装置において、基板
を搬送するコンベヤの少なくとも一側にて縦方向に配置
された立形冷却コイルと、コンベヤの下方空間に対し前
記立形冷却コイルの下部の反対側にて吸込口を対向させ
たシロッコファンと、このシロッコファンにて発生した
風をコンベヤの上方空間に連なる立形冷却コイルの上部
に対面する吹出口まで案内するファンケーシングとを具
備した構成に特徴を有するリフロー済基板の冷却装置で
ある。
According to a first aspect of the present invention, there is provided a reflowed substrate for cooling a high temperature substrate, which has been subjected to a reflow soldering process by a reflow device, by cold air circulated in a cooling chamber body. In the cooling device, a vertical cooling coil vertically arranged on at least one side of a conveyor that conveys a substrate and a suction port on the lower side of the vertical cooling coil on the opposite side to the space below the conveyor. Cooling of reflowed substrate characterized by a sirocco fan and a fan casing that guides the wind generated by this sirocco fan to the outlet facing the upper part of the vertical cooling coil connected to the space above the conveyor It is a device.

【0010】請求項2に記載の発明は、請求項1記載の
リフロー済基板の冷却装置において、コンベヤの上側に
冷風増速ノズルが設けられた構成である。
According to a second aspect of the present invention, in the apparatus for cooling a reflowed substrate according to the first aspect, a cool air accelerating nozzle is provided above the conveyor.

【0011】請求項3に記載の発明は、請求項1記載の
リフロー済基板の冷却装置において、冷却室本体の底面
部に傾斜が設けられ、この底面部の最低レベル箇所にフ
ラックス回収容器が外部より着脱自在に設けられた構成
である。
According to a third aspect of the present invention, in the apparatus for cooling a reflowed substrate according to the first aspect, a bottom portion of the cooling chamber body is provided with an inclination, and a flux collecting container is externally provided at a lowest level portion of the bottom portion. This is a configuration that is more detachably provided.

【0012】[0012]

【作用】請求項1に記載の発明は、コンベヤの下方空間
から立形冷却コイルの下部を通してシロッコファンの吸
込口に風を吸込むことで、加熱後の高温基板により温度
上昇した風を冷却し、さらに、このシロッコファンの周
面より吐出された冷風をファンケーシングにより立形冷
却コイルの上部に対面する吹出口まで案内し、立形冷却
コイルの上部を通してコンベヤの上方空間に吐出するこ
とで再度冷却する。この冷風は冷却室本体内を下降しな
がらコンベヤにより搬送中の基板を冷却してコンベヤの
下方空間へと循環する。この冷風中に含まれていて立形
冷却コイルおよびファンケーシング内壁面にて液化され
たフラックスは、それらに沿って冷却室本体の底面部ま
で自重で流れ落ちる。
According to the invention described in claim 1, by sucking air from the space below the conveyor through the lower part of the vertical cooling coil to the suction port of the sirocco fan, the heated high temperature substrate cools the heated air. Furthermore, the cool air discharged from the peripheral surface of this sirocco fan is guided to the air outlet facing the upper part of the vertical cooling coil by the fan casing, and is discharged to the space above the conveyor through the upper part of the vertical cooling coil to cool it again. To do. The cool air descends in the cooling chamber body, cools the substrate being conveyed by the conveyor, and circulates to the space below the conveyor. The flux contained in the cold air and liquefied on the vertical cooling coil and the inner wall surface of the fan casing flows down to the bottom portion of the cooling chamber main body by its own weight.

【0013】請求項2に記載の発明は、冷風増速ノズル
により冷風を増速して基板に吹付けることにより冷却効
果を高める。
According to the second aspect of the present invention, the cooling effect is enhanced by accelerating the cold air by the cold air accelerating nozzle and blowing it onto the substrate.

【0014】請求項3に記載の発明は、立形冷却コイル
やファンケーシング内壁面に沿って冷却室本体の底面部
に自重落下したフラックスを、さらに冷却室本体の底面
部の傾斜によりフラックス回収容器まで自重で移動させ
て回収する。このフラックス回収容器を取外して内部の
フラックスを処理する。
According to the third aspect of the present invention, the flux that has dropped by gravity along the inner wall surface of the vertical cooling coil or the fan casing to the bottom portion of the cooling chamber body is further inclined due to the inclination of the bottom portion of the cooling chamber body. Move it by its own weight until it is collected. The flux recovery container is removed and the internal flux is processed.

【0015】[0015]

【実施例】以下、本発明を図1乃至図3に示される実施
例を参照して詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the embodiments shown in FIGS.

【0016】図1および図2は本発明の一実施例を示
し、図1において、冷却室本体11内に基板Pを搬送する
基板搬送コンベヤ12が挿入され、このコンベヤ12の左右
両側にて縦方向に偏平状の立形冷却コイル13が配置され
ている。この冷却コイル13には熱吸収用のフィン14が多
数設けられている。このフィン14は風を整流する機能も
有する。
1 and 2 show an embodiment of the present invention. In FIG. 1, a substrate transfer conveyor 12 for transferring a substrate P is inserted in a cooling chamber body 11, and the conveyor 12 is vertically mounted on both left and right sides. A vertical cooling coil 13 having a flat shape is arranged in the direction. The cooling coil 13 is provided with many fins 14 for absorbing heat. The fins 14 also have a function of rectifying the wind.

【0017】コンベヤ12の下方空間に対し前記立形冷却
コイル13の下部13a を介して反対側に、遠心式ファンの
一種であるシロッコファン15が配置され、その吸込口16
が対向されている。
A sirocco fan 15, which is a type of centrifugal fan, is arranged on the opposite side of the space below the conveyor 12 via the lower portion 13a of the vertical cooling coil 13 and its suction port 16
Are facing each other.

【0018】このシロッコファン15およびシロッコファ
ン15にて発生した風を上方へ案内するファンケーシング
17は冷却室本体11の左右両側面部に設けられている。こ
の冷却室本体11と別体に形成されたファンケーシング17
は、シロッコファン15の送風効率を高めるために必要で
ある。
This sirocco fan 15 and a fan casing for guiding the wind generated by the sirocco fan 15 upward
17 are provided on both left and right side surfaces of the cooling chamber body 11. A fan casing 17 formed separately from the cooling chamber body 11
Is necessary to increase the blowing efficiency of the sirocco fan 15.

【0019】このファンケーシング17の外側面にファン
駆動モータ18が設けられている。このファン駆動モータ
18の回転数を調整することにより、冷却室本体11内で循
環される風の風量を調整する。
A fan drive motor 18 is provided on the outer surface of the fan casing 17. This fan drive motor
By adjusting the number of rotations of 18, the air volume of the air circulated in the cooling chamber body 11 is adjusted.

【0020】ファンケーシング17の上部には吹出口19が
設けられ、この吹出口19は立形冷却コイル13の上部13b
に対面し、この立形冷却コイル13の上部13b を経てコン
ベヤ12の上方空間に連なっている。
An air outlet 19 is provided on the upper part of the fan casing 17, and the air outlet 19 is an upper portion 13b of the vertical cooling coil 13.
And is connected to the space above the conveyor 12 via the upper portion 13b of the vertical cooling coil 13.

【0021】基板搬送コンベヤ12の上側には冷風増速ノ
ズル21が設けられている。この冷風増速ノズル21は、図
2に示されるように通風開口22を有する枠部材23の下部
内に、多数の逆V形部材24を基板搬送方向に所定間隔を
介して配列することにより、各逆V形部材24の間に冷風
噴出口25を設けたものであり、各逆V形部材24は、図1
に示されるようにコンベヤ12の最大調整幅に対応できる
ように長尺に形成されている。
A cool air accelerating nozzle 21 is provided above the substrate carrying conveyor 12. This cold air accelerating nozzle 21 has a large number of inverted V-shaped members 24 arranged in the lower portion of a frame member 23 having a ventilation opening 22 as shown in FIG. A cold air outlet 25 is provided between each inverted V-shaped member 24, and each inverted V-shaped member 24 is shown in FIG.
As shown in FIG. 3, it is formed to be long so that it can accommodate the maximum adjustment width of the conveyor 12.

【0022】また、図1に示されるように、冷却室本体
11の底面部11a には中央より左右両側に向かって下降す
る傾斜が設けられ、この傾斜底面部11a の最低レベル部
(左右両側部)にフラックス回収口31が設けられ、この
フラックス回収口31にフラックス回収容器32が外部より
着脱自在に嵌着されている。
Further, as shown in FIG. 1, the cooling chamber body
The bottom surface 11a of 11 is provided with a slope descending from the center toward both left and right sides, and a flux recovery port 31 is provided at the lowest level part (left and right side parts) of this sloped bottom surface part 11a. The flux collection container 32 is detachably fitted from the outside.

【0023】次に、この実施例の作用を説明すると、こ
の冷却装置の前段に位置するリフロー装置でのリフロー
はんだ付け処理により高温となった基板Pを、コンベヤ
12により冷却室本体11内に搬入し、冷却室本体11内で循
環される冷風によりリフロー済基板Pを冷却する。
Next, the operation of this embodiment will be described. The substrate P, which has been heated to a high temperature by the reflow soldering process in the reflow device positioned in front of the cooling device, is conveyed by the conveyor.
The reflowed substrate P is carried into the cooling chamber body 11 by 12 and cooled by the cool air circulated in the cooling chamber body 11.

【0024】その際、基板Pを通過して温度上昇した風
が、コンベヤ12の下方空間から立形冷却コイル13の下部
13a を通ってシロッコファン15の吸込口16に吸込まれる
とき、比較的高温の風が立形冷却コイル13により冷却さ
れ、冷風となる。
At this time, the wind whose temperature has risen after passing through the substrate P is discharged from the space below the conveyor 12 to the lower portion of the vertical cooling coil 13.
When the air is sucked into the suction port 16 of the sirocco fan 15 through 13a, the relatively high temperature air is cooled by the vertical cooling coil 13 and becomes cold air.

【0025】シロッコファン15の周面より吐出された冷
風はファンケーシング17により集められ、このファンケ
ーシング17を冷却しながら上部の吹出口19まで案内さ
れ、立形冷却コイル13の上部13b を経てコンベヤ12の上
方空間に吐出する際に、この風は再度立形冷却コイル13
により冷却されるとともに、冷却コイル13のフィン14に
より整流される。
The cool air discharged from the peripheral surface of the sirocco fan 15 is collected by the fan casing 17, is guided to the upper air outlet 19 while cooling the fan casing 17, and passes through the upper portion 13b of the vertical cooling coil 13 to convey it. When it is discharged into the upper space of 12, this wind is regenerated by the vertical cooling coil 13
And is rectified by the fins 14 of the cooling coil 13.

【0026】このようにして冷却され整流された冷風
は、冷風室本体11内の上部に位置する冷風増速ノズル21
に入り、このノズル21により絞られて増速される。この
ようにして風速の上がった冷風は、コンベヤ12により搬
送中の基板上面に吹付けられ、この基板Pを効果的に冷
却してコンベヤ12の下方空間へと循環する。以上の繰返
しにより風を循環させて基板Pを冷却する。
The cold air thus cooled and rectified has a cold air accelerating nozzle 21 located in the upper part of the cold air chamber body 11.
Then, it is throttled by this nozzle 21 and the speed is increased. The cold air whose wind speed has increased in this way is blown onto the upper surface of the substrate being conveyed by the conveyor 12, effectively cooling this substrate P and circulating it to the space below the conveyor 12. By repeating the above, the air is circulated to cool the substrate P.

【0027】次に、リフロー炉体からこの冷却装置に送
られてくる基板Pは、冷却室本体11内に入るときにリフ
ロー炉体内の気体状フラックスを含有する不活性ガス
(窒素ガス)を冷却室本体11内に持込む。このフラック
ス含有ガスがシロッコファン15により立形冷却コイル13
の下部13a を経て吸込まれる段階でおよびファンケーシ
ング17内を上昇する段階で液化する。
Next, when the substrate P sent from the reflow furnace to this cooling device enters the cooling chamber body 11, it cools the inert gas (nitrogen gas) containing the gaseous flux in the reflow furnace. Bring it in the chamber body 11. This flux-containing gas is supplied to the vertical cooling coil 13 by the sirocco fan 15.
It is liquefied at the stage of being sucked through the lower portion 13a and at the stage of rising in the fan casing 17.

【0028】このように立形冷却コイル13およびファン
ケーシング17の内壁面にて液化されたフラックスは、そ
れらに沿って冷却室本体11の底面部11a まで自重で流れ
落ち、さらに底面部11a の傾斜によりフラックス回収容
器32まで自重で移動し、この容器内に回収される。この
フラックス回収容器32を定期的に取外して内部のフラッ
クスを処理する。
The flux thus liquefied on the inner wall surfaces of the vertical cooling coil 13 and the fan casing 17 flows down to the bottom surface portion 11a of the cooling chamber body 11 by its own weight, and the bottom surface portion 11a is inclined by the inclination of the bottom surface portion 11a. It moves to the flux collecting container 32 by its own weight and is collected in this container. The flux recovery container 32 is regularly removed to process the internal flux.

【0029】図2は、シロッコファン15を片側に2個ず
つ左右で計4個設けた例であるが、図3は、このシロッ
コファン15を片側に1個ずつ左右で計2個設けた例であ
り、基板Pのサイズに応じてこのような構成の変更を行
うとよい。
FIG. 2 shows an example in which two sirocco fans 15 are provided on each side, four on each side, while FIG. 3 shows an example in which one sirocco fan 15 is provided on each side, two in total. Therefore, it is advisable to change such a configuration according to the size of the substrate P.

【0030】[0030]

【発明の効果】請求項1に記載の発明によれば、基板搬
送コンベヤの少なくとも一側にて縦方向に立形冷却コイ
ルを配置したから、この冷却コイルで液化されたフラッ
クスは基板上にたれ落ちるおそれがない。また、風はシ
ロッコファンの吸込口および吹出口で立形冷却コイルに
より効率良く冷却され、この風により高い冷却効果が得
られる。
According to the first aspect of the present invention, since the vertical cooling coil is vertically arranged on at least one side of the substrate transport conveyor, the flux liquefied by the cooling coil spills on the substrate. There is no danger of falling. Further, the wind is efficiently cooled by the vertical cooling coil at the suction port and the blowout port of the sirocco fan, and this wind provides a high cooling effect.

【0031】請求項2に記載の発明によれば、コンベヤ
上側の冷風増速ノズルにより冷風を増速して基板に吹付
けることができるから、冷却効果を高めることができ
る。
According to the second aspect of the present invention, the cooling air can be accelerated by the cooling air accelerating nozzle on the upper side of the conveyor and sprayed onto the substrate, so that the cooling effect can be enhanced.

【0032】請求項3に記載の発明によれば、立形冷却
コイルや冷却室本体の内壁面にて液化されたフラックス
を、それらに沿って冷却室本体の底面部へと、さらに底
面部の傾斜によりフラックス回収容器へと、フラックス
の自重により簡単に回収できるとともに、フラックス回
収容器を取外して回収フラックスを簡単に処理すること
ができ、メンテナンスを簡単に行うことができる。
According to the third aspect of the present invention, the flux liquefied on the vertical cooling coil or the inner wall surface of the cooling chamber body is guided along it to the bottom surface portion of the cooling chamber body, Due to the inclination, the flux can be easily collected into the flux collecting container by its own weight, and the collected flux can be easily processed by removing the flux collecting container, and the maintenance can be easily performed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るリフロー済基板冷却装置の一例を
示す幅方向の断面図である。
FIG. 1 is a cross-sectional view in a width direction showing an example of a reflowed substrate cooling device according to the present invention.

【図2】同上冷却装置の基板搬送方向の断面図である。FIG. 2 is a cross-sectional view of the same cooling device in the substrate transfer direction.

【図3】同上冷却装置の変形例を示す基板搬送方向の断
面図である。
FIG. 3 is a cross-sectional view in the substrate transport direction showing a modified example of the same cooling device.

【図4】従来のリフロー済基板の冷却装置を示す断面図
である。
FIG. 4 is a cross-sectional view showing a conventional cooling device for a reflowed substrate.

【符号の説明】[Explanation of symbols]

P 基板 11 冷却室本体 11a 底面部 12 コンベヤ 13 立形冷却コイル 13a 下部 13b 上部 15 シロッコファン 16 吸込口 17 ファンケーシング 19 吹出口 21 冷風増速ノズル 32 フラックス回収容器 P substrate 11 Cooling chamber body 11a Bottom part 12 Conveyor 13 Vertical cooling coil 13a Lower part 13b Upper part 15 Sirocco fan 16 Suction port 17 Fan casing 19 Blow-out port 21 Cold air accelerating nozzle 32 Flux recovery container

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 リフロー装置によりリフローはんだ付け
処理された高温の基板を、冷却室本体内で循環される冷
風により冷却するためのリフロー済基板の冷却装置にお
いて、 基板を搬送するコンベヤの少なくとも一側にて縦方向に
配置された立形冷却コイルと、 コンベヤの下方空間に対し前記立形冷却コイルの下部の
反対側にて吸込口を対向させたシロッコファンと、 このシロッコファンにて発生した風をコンベヤの上方空
間に連なる立形冷却コイルの上部に対面する吹出口まで
案内するファンケーシングとを具備したことを特徴とす
るリフロー済基板の冷却装置。
1. A reflowed substrate cooling device for cooling a high-temperature substrate, which has been reflow-soldered by a reflow device, with cold air circulated in a cooling chamber body, wherein at least one side of a conveyor that conveys the substrate. Vertically arranged cooling coils, a sirocco fan whose suction port faces the lower space of the vertical cooling coil on the opposite side to the space below the conveyor, and the wind generated by this sirocco fan. And a fan casing that guides the fan to an outlet facing the upper part of a vertical cooling coil that is continuous with the space above the conveyor.
【請求項2】 コンベヤの上側に冷風増速ノズルが設け
られたことを特徴とする請求項1記載のリフロー済基板
の冷却装置。
2. The cooling device for a reflowed substrate according to claim 1, wherein a cool air accelerating nozzle is provided on the upper side of the conveyor.
【請求項3】 冷却室本体の底面部に傾斜が設けられ、
この底面部の最低レベル箇所にフラックス回収容器が外
部より着脱自在に設けられたことを特徴とする請求項1
記載のリフロー済基板の冷却装置。
3. A slope is provided on the bottom surface of the cooling chamber body,
The flux collecting container is detachably provided from the outside at the lowest level portion of the bottom surface portion.
A cooling device for the reflowed substrate described.
JP03877094A 1994-03-09 1994-03-09 Cooling device for reflowed substrates Expired - Fee Related JP3367739B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03877094A JP3367739B2 (en) 1994-03-09 1994-03-09 Cooling device for reflowed substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03877094A JP3367739B2 (en) 1994-03-09 1994-03-09 Cooling device for reflowed substrates

Publications (2)

Publication Number Publication Date
JPH07249859A true JPH07249859A (en) 1995-09-26
JP3367739B2 JP3367739B2 (en) 2003-01-20

Family

ID=12534537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03877094A Expired - Fee Related JP3367739B2 (en) 1994-03-09 1994-03-09 Cooling device for reflowed substrates

Country Status (1)

Country Link
JP (1) JP3367739B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006106652A (en) * 2004-10-02 2006-04-20 Samsung Electronics Co Ltd Heat treatment apparatus and liquid crystal display panel cooling device used for the same
JP2008080404A (en) * 2007-11-05 2008-04-10 Senju Metal Ind Co Ltd Reflow furnace
JP2008272793A (en) * 2007-04-27 2008-11-13 Tamura Seisakusho Co Ltd Reflow device and method for removing flux
JP2010118387A (en) * 2008-11-11 2010-05-27 Tamura Seisakusho Co Ltd Cooler for reflowed substrate
JP2011121101A (en) * 2009-12-11 2011-06-23 Senju Metal Ind Co Ltd Reflow furnace
JP2011230143A (en) * 2010-04-26 2011-11-17 Senju Metal Ind Co Ltd Reflow furnace
ITMO20120091A1 (en) * 2012-04-05 2013-10-06 Tek Mak S R L COOLING SYSTEM
WO2013150488A1 (en) * 2012-04-05 2013-10-10 Tek-Mak S.R.L. Cooling apparatus

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006106652A (en) * 2004-10-02 2006-04-20 Samsung Electronics Co Ltd Heat treatment apparatus and liquid crystal display panel cooling device used for the same
US8194226B2 (en) 2004-10-02 2012-06-05 Samsung Electronics Co., Ltd. Device for cooling LCD panel and heat treatment apparatus having the same
JP2008272793A (en) * 2007-04-27 2008-11-13 Tamura Seisakusho Co Ltd Reflow device and method for removing flux
JP2008080404A (en) * 2007-11-05 2008-04-10 Senju Metal Ind Co Ltd Reflow furnace
JP2010118387A (en) * 2008-11-11 2010-05-27 Tamura Seisakusho Co Ltd Cooler for reflowed substrate
JP2011121101A (en) * 2009-12-11 2011-06-23 Senju Metal Ind Co Ltd Reflow furnace
JP2011230143A (en) * 2010-04-26 2011-11-17 Senju Metal Ind Co Ltd Reflow furnace
ITMO20120091A1 (en) * 2012-04-05 2013-10-06 Tek Mak S R L COOLING SYSTEM
WO2013150488A1 (en) * 2012-04-05 2013-10-10 Tek-Mak S.R.L. Cooling apparatus

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