JPH0724774Y2 - 集束イオンビーム装置用ガス導入機構 - Google Patents

集束イオンビーム装置用ガス導入機構

Info

Publication number
JPH0724774Y2
JPH0724774Y2 JP1989088248U JP8824889U JPH0724774Y2 JP H0724774 Y2 JPH0724774 Y2 JP H0724774Y2 JP 1989088248 U JP1989088248 U JP 1989088248U JP 8824889 U JP8824889 U JP 8824889U JP H0724774 Y2 JPH0724774 Y2 JP H0724774Y2
Authority
JP
Japan
Prior art keywords
nozzle
gas introduction
gas
ion beam
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989088248U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0326960U (cg-RX-API-DMAC7.html
Inventor
誠 玉井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1989088248U priority Critical patent/JPH0724774Y2/ja
Publication of JPH0326960U publication Critical patent/JPH0326960U/ja
Application granted granted Critical
Publication of JPH0724774Y2 publication Critical patent/JPH0724774Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989088248U 1989-07-27 1989-07-27 集束イオンビーム装置用ガス導入機構 Expired - Lifetime JPH0724774Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989088248U JPH0724774Y2 (ja) 1989-07-27 1989-07-27 集束イオンビーム装置用ガス導入機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989088248U JPH0724774Y2 (ja) 1989-07-27 1989-07-27 集束イオンビーム装置用ガス導入機構

Publications (2)

Publication Number Publication Date
JPH0326960U JPH0326960U (cg-RX-API-DMAC7.html) 1991-03-19
JPH0724774Y2 true JPH0724774Y2 (ja) 1995-06-05

Family

ID=31637872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989088248U Expired - Lifetime JPH0724774Y2 (ja) 1989-07-27 1989-07-27 集束イオンビーム装置用ガス導入機構

Country Status (1)

Country Link
JP (1) JPH0724774Y2 (cg-RX-API-DMAC7.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4521338Y1 (cg-RX-API-DMAC7.html) * 1969-02-03 1970-08-25

Also Published As

Publication number Publication date
JPH0326960U (cg-RX-API-DMAC7.html) 1991-03-19

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