JPH07247012A - Pneumatic floating up device - Google Patents

Abstract

PURPOSE:To dissolve an unstable floating up state being due to the minute level difference of a floor part and its undulation, and an eccentric or unsufficient load. CONSTITUTION:Since force acting on a diaphragm 16 is composed as the load force W of a material body to which attracting force generated between a floor part 14 and a magnet 19 is added, the expansion of the diaphragm 16 becomes stable to facilitate the stable floating up of the diaphragm 16 for improving the holding stability of the material body.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pneumatic levitation device that uses air pressure to levitate various objects such as heavy objects, and more particularly to a pneumatic levitation device that enables the levitated object to levitate stably. Levitation device.

[0002]

2. Description of the Related Art Conventionally, forklifts and cranes have been the main means for transporting heavy objects. In recent years, however, compressed air as shown in FIG. 5, which is based on the same principle as a hovercraft, has been used to transport objects. Pneumatic levitation device to levitate was put to practical use and used as a levitation device for heavy objects,
Alternatively, it has been studied to use it for a levitation device for ground tests of space structures and robots (for example, a simulated experiment in a weightless state).

A pneumatic levitation device will be described below with reference to FIG.

In FIG. 5, reference numeral 1 denotes a pneumatic levitation device slidably arranged on a floor 2, and the pneumatic levitation device 1
Is a load W of various objects such as heavy objects made of metal
A disk-shaped pad 3 to which is added, and a disk-shaped holding member 5 made of, for example, a metal plate, which is fixed on the bottom surface of the pad 3 by a bending process to hold the peripheral edge of a diaphragm 4 described later, and A space S is formed between the holding member 5 and the holding member 5 along the outer circumference of the bottom surface of the holding member 5, that is, the outer circumference of the bottom surface of the pad 3, and an exhaust hole 4a is provided at a predetermined position. A disc-shaped diaphragm 4 made of a flexible material, and a mounting plate 6 that holds the central part of the diaphragm 4 and attaches the diaphragm 4 to the pad 3 with screws (not shown) via the holding member 5. Further, the pad 3 and the holding member 5 are respectively formed with injection ports 3a and 5a for injecting the compressed air A into the space S.

The operation of the pneumatic levitation device 1 having the above structure is as follows.

That is, when the compressed air A is injected into the space S through the injection port 3a, the diaphragm 4 temporarily comes into close contact with the floor 2 and expands, and then lifts the object like an air cylinder. The diaphragm 4 continues to expand and lift as the internal pressure in the diaphragm 4 increases. And (pressure in diaphragm 4) × (diaphragm 4
Reaches the point where the effective area of the object is equal to the downward load W of the object. At this time, the bottom surface of the diaphragm 4 and the floor
The contact between the two is interrupted, and the compressed air A is ejected from the exhaust hole 4a to form a thin escape route for the air around the contact surface between the diaphragm 4 and the floor 2. The air film (air film) G formed on the escape path allows the object to be levitated and allows the object to be transported with low friction.

[0007]

However, in the pneumatic levitation device 1 described above, when there is a step or undulation in the floor 2 as shown in FIG. 6 (a), the lower surface of the diaphragm 4 and the floor 2 And the air film G'formed on the diaphragm 4 facing the lower part of the floor 2 and the air film G formed on the diaphragm 4 facing the non-lower part of the floor 2. Therefore, there is a problem that the air film is out of balance and the compressed air A leaks from the air film G ', which prevents stable floating.

Further, as shown in FIG. 6B, the pad 3
If the load W applied from the upper surface of the eccentric is eccentric, the lower surface of the diaphragm 4 with the smaller load will be in the same state as the surface facing the lower part of the floor 2 in FIG. The device 1 has a problem that it cannot perform stable levitation.

Further, when the load W is too small with respect to the size of the diaphragm 4, the expansion of the diaphragm 4 is insufficient and the leakage of the compressed air A increases, so that the air film G is formed. Becomes unstable, and the pneumatic levitation device 1 has a problem that stable levitation cannot be performed.

The present invention has been made in view of the above circumstances, and is a pneumatic type capable of eliminating an unstable floating state due to a minute step or undulation on the floor, an eccentric load, or a lack of load. An object is to provide a levitation device.

[0011]

In order to achieve the above object, the present invention provides a pneumatic levitation device slidably disposed on a floor made of a magnetically attractable material, in which a load of an object is applied. A disk-shaped pad to which is added, a space is formed along the outer periphery of the bottom surface of the pad, and an exhaust hole is provided to expand by injecting compressed air into the space and the exhaust hole. A diaphragm that forms an air film between the floor and the floor by the compressed air ejected from the diaphragm, and a diaphragm that floats the object, and is disposed on either the diaphragm or the bottom surface of the pad and between the pad and the floor. And a magnet which acts on the diaphragm by generating a magnetic attraction force and using the attraction force as a load.

The pneumatic levitation device of the present invention is characterized in that the magnet is a permanent magnet, an electromagnet, or a combination thereof.

Further, the pneumatic levitation device of the present invention is characterized in that a magnet is arranged in the center of the bottom surface of the pad.

Further, the pneumatic levitation device of the present invention is characterized in that the diaphragm is provided with a sheet-shaped magnet.

Further, the pneumatic levitation device of the present invention is characterized in that a magnet is arranged at the peripheral portion of the pad.

Further, the pneumatic levitation device of the present invention is characterized in that the compressed air is supplied by compressed air supply means capable of controlling the flow rate.

Further, according to the present invention, in a pneumatic levitation device slidably arranged on a floor, a disk-shaped pad to which a load of an object is applied and a plurality of space portions along the outer periphery of the bottom surface of the pad. Is formed and divided, and an exhaust hole is provided for each divided part to expand by injecting compressed air into the space portion, and compressed air ejected from the exhaust hole is provided between the divided portion and the floor portion. A plurality of diaphragms for forming an air film and floating the object.

Further, the pneumatic levitation device of the present invention is characterized in that a plurality of load sensors for detecting the load applied to each of the divided diaphragms are provided.

Further, the pneumatic levitation device of the present invention is characterized in that a plurality of flow rate control units for controlling the flow rate of the compressed air supplied to each space based on the detection outputs of the plurality of load sensors are provided. To do.

[0020]

In the pneumatic levitation device of the present invention, the attraction force generated between the floor and the magnet acts as a load, so that the force applied to the diaphragm is the load load of the object plus the attraction force. As a result, the expansion of the diaphragm becomes stable, and the diaphragm can be stably floated, so that the holding stability of the object is improved.

Further, in the pneumatic levitation device of the present invention, since the electromagnet is used as the magnet, the suction force can be controlled by the electromagnet, and various floor surfaces of the floor can be dealt with.

Further, in the pneumatic levitation device of the present invention, since the magnet is arranged in the center of the bottom surface of the pad, it is possible to stabilize the levitation state of the diaphragm with a simple structure.

Further, in the pneumatic levitation device of the present invention, since the sheet-like magnet is arranged on the diaphragm, the followability to a minute step or undulation on the floor is improved, and the levitation state of the diaphragm is stabilized. Is possible.

Further, in the pneumatic levitation apparatus of the present invention, the magnets are arranged at the peripheral edge of the pad, so that the floating state of the diaphragm can be stabilized with a simple structure.

Further, in the pneumatic levitation device of the present invention, the expansion amount of the diaphragm can be controlled corresponding to various floor surfaces of the floor by controlling the flow rate of the compressed air from the compressed air supply means. The floating state of is stabilized.

Further, since the pneumatic levitation device of the present invention has a structure in which a plurality of diaphragms are divided and arranged on the bottom surface of the pad, the load applied to each diaphragm is detected when an eccentric load is applied, The flow rate of the compressed air can be controlled according to the detected load, and the floating state of the diaphragm is stabilized.

Further, since the pneumatic levitation device of the present invention is provided with a plurality of load sensors for detecting the load applied to each of the divided diaphragms, when the eccentric load is applied, each load sensor is By detecting the load applied to the diaphragm, it becomes possible to control the flow rate of the compressed air based on the detected load, and the floating state of the diaphragm is stabilized.

Further, the pneumatic levitation device of the present invention has a plurality of flow rate control units for controlling the flow rate of the compressed air supplied to each space based on the detection outputs of the plurality of load sensors. When an eccentric load is applied, the flow rate control unit controls the flow rate of the compressed air based on the detection output of the load sensor, which improves the responsiveness to the eccentric load and stabilizes the floating state of the diaphragm. It will be possible.

[0029]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a pneumatic levitation device according to a first embodiment of the present invention, FIG. 2 is a diagram showing a first other embodiment of the first embodiment of the present invention, and FIG. The figure which shows the structure and FIG.2 (b) is a figure which shows the followability with respect to a minute level | step difference and swell of a floor part, FIG.3 is a figure which shows the 2nd other Example of the 1st Example of this invention, FIG. 4 is a diagram showing a second embodiment of the present invention.

In FIG. 1, reference numeral 11 denotes a pneumatic pressure slidably disposed on a floor portion 14 in which a floor material 13 having sufficient flatness is laid on a steel sheet material 12 which is magnetically attracted. The pneumatic levitation device 11 is a disk-shaped levitation device 11, which is made of metal or the like and has a disk-shaped pad 15 to which a load load W of various objects such as heavy objects is applied, and which is arranged on the bottom surface of the pad 15 and will be described later. A peripheral member of the diaphragm 16 is fixed and held by bending, for example, a disc-shaped holding member 17 made of sheet metal,
A space S is formed between the holding member 17 and the holding member 17 along the outer circumference of the bottom surface of the pad 15, that is, the outer circumference of the bottom surface of the pad 15, and an exhaust hole 16a is provided at a predetermined position. Disk-shaped diaphragm made of various flexible materials
16 and the central portion of the diaphragm 16 are pressed down, and the diaphragm is attached by a screw (not shown) via the holding member 17.
Mounting plate 18 for mounting 16 to pad 15, and mounting plate
From the magnet 19 which is attached to 18 and which is a permanent magnet such as ferrite, alnico, or rare earth cobalt, which generates an attractive force F acting between the steel plate material 12 and the apparent load load is (W + F). The pad 15 and the holding member 17 are configured.
Injection ports 15a and 17a for injecting the compressed air A supplied from the air compressor 20 as the compressed air supply means are formed in the space S, respectively.

As a method of fixing the diaphragm 16 to the holding member 17, a method of directly fixing the peripheral edge of the diaphragm 16 by a bending process, or a method of preliminarily fixing an adhesive between the peripheral edge of the diaphragm 16 and the holding member 17 is used. After bonding, there is a method of fixing by bending, and the latter method is a preferable fixing method because the prevention of air leakage from the peripheral portion of the diaphragm 4 is enhanced. This also applies to the first and second other embodiments of the first embodiment of the present invention, which will be described later, and the second embodiment of the present invention.

Next, the operation of the pneumatic levitation device 11 having the above construction will be described.

When the compressed air A is injected from the air compressor 20 into the space S through the inlets 15a and 17a, the diaphragm 16 is temporarily brought into close contact with the floor 14 to expand, and then, like the air cylinder. Lift the object on the pad 15. As the internal pressure in diaphragm 16 increases, diaphragm 16 continues to expand and lift. At this time, since the magnet 19 having an apparent load of (W + F) is attached to the mounting plate 18, the load applied to the pad 15 becomes larger than the actual load W of the object, and the expansion of the diaphragm 16 is reduced. The way is stable. And (diaphragm 16
When the internal pressure) × (effective area of the diaphragm 16) reaches a point where the apparent downward load of the object becomes equal to (W + F), the contact between the lower surface of the diaphragm 16 and the floor 14 is interrupted, and the exhaust hole 16a Compressed air A is jetted from the air, and a thin escape path for air is formed around the contact surface between the diaphragm 16 and the floor 14. The air film (air film) G formed on the escape path allows the object to be levitated and allows the object to be transported with low friction. The thickness of the air film G is usually set to 0.08 to 0.13 mm.

As described above, since the magnet 19 having an apparent load of (W + F) is attached to the mounting plate 18, the load applied to the pad 15 is larger than the actual load W of the object. As a result, the manner of expansion of the diaphragm 16 becomes more stable than the manner of expansion of the conventional diaphragm 4 shown in FIG. 5, and the stability of holding the object by the pad 15 is improved. In particular, it is possible to solve the problem in the case where the load W is too small with respect to the size of the diaphragm 16 which has been a conventional problem.

In the first embodiment of the present invention, the holding member 17 is formed by bending the peripheral edge of the diaphragm 16.
After being fixed and held on the
Although the pad 16 is attached to the pad 15, the holding member 17 is not always necessary.
After adhering the peripheral edge of 16 to the peripheral edge of pad 15 with an adhesive, a pressing member that presses the adhesive from the upper surface of diaphragm 16 to pad 15 side is fixed to pad 15 with a screw or the like and held, and then the mounting plate The diaphragm 16 may be directly attached to the pad 15 by 18, and the same effect can be obtained. This also applies to the first and second other embodiments of the first embodiment of the present invention, which will be described later, and the second embodiment of the present invention.

Next, another embodiment of the first embodiment of the present invention will be described.

FIG. 2 is a view showing a first other embodiment of the first embodiment of the present invention. A magnet attached to the mounting plate 18 in the first embodiment of the present invention shown in FIG. The sheet-shaped magnet 21 is replaced in place of the sheet-shaped magnet 21, and the sheet-shaped magnet 21 is adhered to the inner surface of the diaphragm 16 facing the floor portion 14 by an adhesive, and the sheet-shaped magnet 21 is used for the steel sheet material 12 A suction force F acting between the and is generated, and the apparent load is (W + F). Sheet magnet
The parts other than 21 are the same as the configuration of FIG. 1, and the same parts are denoted by the same reference numerals.

FIG. 2A is a view showing a state in which the floor 14 is flat, and the operation of the pneumatic levitation device 11 at this time is shown in FIG.
The operation is similar to that of the first embodiment shown in FIG.
The expansion of 16 is more stable than the expansion of the conventional diaphragm 4 shown in FIG. 5, and it has the effect of improving the holding stability of the object by the pad 15.

FIG. 2B is a view showing a state in which there is a minute step or undulation on the floor portion 14, and the most characteristic operation of the first and second embodiments of the first embodiment of the present invention. -It is a figure which shows an effect. That is, even when the floor 14 has a minute step or undulation, the sheet-shaped magnet 21 disposed in the diaphragm 16 exerts a suction force on the diaphragm 16 so that the diaphragm 16 is always brought into close contact with the floor 14. Therefore, the adhesiveness of the diaphragm 16 to the floor portion 14 is maintained, the formation of the air film G is stabilized, the followability to a minute step or undulation of the floor portion 14 is improved, and the object on the pad 15 is stabilized. Can be held in a state.

FIG. 3 shows a second embodiment of the first embodiment of the present invention.
FIG. 7 is a view showing another embodiment of the present invention, in which the magnet 19 attached to the outer peripheral portion of the holding member 17 is replaced with the magnet 19 attached to the mounting plate 18 in the first embodiment of the present invention shown in FIG. 22 except that the portions other than the magnet 22 are the same as those in FIG. 1, and the same portions are denoted by the same reference numerals. The action and effect of the pneumatic levitation device 11 shown in FIG.
In the same manner as in the first embodiment shown in Fig. 5, the expansion method of the diaphragm 16 becomes more stable than that of the conventional diaphragm 4 shown in Fig. 5, and the pad has a simple structure.
15 has the effect of improving the stability of holding an object.

Next, a second embodiment of the present invention will be described with reference to FIG.

As shown in FIGS. 4 (a) and 4 (b), the pneumatic levitation device 31 is slidably disposed on the floor 32, and the pneumatic levitation device 31 includes a disc made of metal. A disk-shaped holding member 35 made of, for example, a sheet metal, which fixes and holds a peripheral edge of a diaphragm 34 described later by bending is provided on the bottom surface of the pad 33 having a circular shape.

The diaphragm 34 is made of a flexible material such as rubber and is formed into a disc shape.
A plurality of divided diaphragms are arranged along the outer periphery of 35, for example, three individual diaphragms 34a, 34b, 34c (hereinafter collectively referred to as diaphragm 34) are equally arranged. A space S is formed in each of the three diaphragms 34 that are equally arranged and exhaust holes 36a, 36b, 36c, 36d, 36e, 36f (hereinafter collectively referred to as exhaust ports).
(Referred to as 36), and compressed air A is applied to each diaphragm 34.
Is injected into each space S through the injection ports 33a and 35a formed in the pad 33 and the holding member 35 corresponding to the above. When the compressed air A is injected into each space S, each diaphragm 34
Expands and forms an air film G with the floor 32 by the compressed air A ejected from the exhaust hole 36. The diaphragm 34 is formed by molding a flexible material such as a disc-shaped rubber by pre-processing with a die or the like in which the space portions S are arranged in three equal parts.

Further, 37 is a mounting plate having an arm portion extending from the disc-shaped central portion along the separation portion between the diaphragms 34, and this mounting plate 37 has the diaphragm 34 at the central portion and the arm portion. The diaphragm 34 is attached to the pad 33 with a screw (not shown) or the like through the pressing and holding member 35.

Further, on the upper surface of the pad 33, load detectors 38a, 38b, 38c (hereinafter collectively referred to as load detector 38) for detecting the load applied to each of the diaphragms 34, which are divided into three, are provided in the respective diaphragms. The load load value detected by the load detector 38 is installed corresponding to each of the plurality of controllers 39 for controlling the flow rate of the compressed air A supplied to the space S of each diaphragm 34 (in FIG. 2 are shown in the figure, but there are actually 3). Each controller 39 has a table showing a preset relationship between the load and the compressed air A so that the pedestal 40, that is, the pad 33 does not tilt even if the load is eccentrically applied. Air compressor (not shown) referring to the above table based on the applied load value
The flow rate of the compressed air A supplied from the above is controlled and supplied to the space S of each diaphragm 34.

Further, on the three load detectors 39, there are arranged disk-shaped pedestals 40 which are made of metal or the like and to which load loads W of various objects such as heavy objects are applied. The applied load W is transmitted to the pad 33 via the load detector 38, and is distributed to each diaphragm 34.

Next, the operation of the pneumatic levitation device 31 having the above structure will be described.

First, when the load load W is applied to the center position of the pedestal 40 (the position shown by the alternate long and short dash line in FIG. 4A), the load load W is divided into three equal parts by the load detector 38. The load applied to each diaphragm 34 via the pad 33 is 1
/ 3W. The controller 39 determines the flow rate of the compressed air A based on the load load value (1/3 W) input from the load detector 38, and the flow rate of the compressed air A determined by the controller 39 (the same flow rate of the compressed air A ) Is inlet 33
It is supplied to the space S of each diaphragm 34 via a and 35a.

The compressed air A is the space S of each diaphragm 34.
When inflated, each diaphragm 34 temporarily expands against the floor 32 and then lifts the object on the pad 15 like an air cylinder. The diaphragm 34 continues to expand and lift as the internal pressure in the diaphragm 34 increases. Then, it reaches a point where (pressure in all diaphragms 34) × (effective area of all diaphragms 4) becomes equal to the downward load W of the object. At this time, the contact between the lower surface of the diaphragm 34 and the floor portion 32 is interrupted, and the compressed air A is discharged from the exhaust hole 36.
Is ejected to form a thin escape route for air around the contact surface between each diaphragm 34 and the floor portion 32. The air film G formed on the escape path allows the object to be levitated and allows the object to be transported with low friction. The thickness of the air film G is usually set to 0.08 to 0.13 mm.

Subsequently, when the load W is eccentrically applied from the center position of the pedestal 40 by a distance x, for example, eccentrically to the center position of the diaphragm 34a, the load detector 38a.
The load load value detected at is larger than the load load value detected at the load detectors 38b and 38c. Based on these detected load values, the flow rate of the compressed air A supplied to the space S of each diaphragm 34 is determined according to the table held by the controller 39 so that the pedestal 40 and the pad 33 do not tilt. The flow rate of the compressed air A supplied to the space S of the diaphragm 34a is larger than the flow rate of the compressed air A supplied to the space S of the diaphragms 34b and 34c.

Diaphragm divided as described above
The load load W is eccentrically applied by the controller 39 controlling the flow rate of the compressed air A supplied to the space S corresponding to the load load value detected by the load detector 38 corresponding to 34. However, the floating state of each diaphragm 34 is stabilized, the pedestal 40 and the pad 33 are prevented from tilting, the responsiveness to the eccentric load is improved, and the object can be held in a stable state.

Although the magnet 19 is a permanent magnet in the first embodiment, the present invention is not limited to this, and the magnet 19 may be an electromagnet or a combination of a permanent magnet and an electromagnet.
By using an electromagnet, the strength of the attraction force F can be controlled, and various floor surfaces of the floor 14 can be dealt with.

Further, in the first embodiment, the compressed air A is supplied from the air compressor 20, but the air compressor 20 may be of a type in which the flow rate of the compressed air A can be controlled, and the compressed air from the air compressor 20 is used. By controlling the flow rate of the air A, the expansion amount of the diaphragm 16 can be controlled corresponding to various floor surfaces of the floor portion 14, and the floating state of the diaphragm 16 can be stabilized.

In the second embodiment, the diaphragm is used.
Although the number of divisions of 34 is set to 3, it is not limited to this, and the point is that a plurality of divisions of 2 or more is sufficient.

In the second embodiment, the diaphragm is used.
The 34 is made of a flexible material such as a disc-shaped rubber in a divided manner, but the invention is not limited to this, and each of the divided diaphragms 34 is individually formed by a mold or the like. You may do it.

In the second embodiment, the controller is used.
39 has a table and according to this table compressed air A
The flow rate of the pad 33 and the pedestal 40 is prevented from tilting, but the flow rate is not limited to this.
A flying height calculation unit that calculates the flying height of each diaphragm 34 according to the output of 38, or a displacement sensor is provided on the outer circumference of the pad 33, and an eccentric load is detected as a floating change of each diaphragm 34. Even if the flow rate of the compressed air A supplied to the space S of each diaphragm 34 is determined by the above, the same effect can be obtained.

Further, the present invention is not limited to the above embodiments, and it goes without saying that various modifications can be made without departing from the gist of the present invention.

[0058]

As described in detail above, according to the pneumatic levitation device of the present invention, the attractive force generated between the floor and the magnet acts as a load, so the force applied to the diaphragm is the load of the object. By applying a suction force to the load, the expansion of the diaphragm becomes stable, and the diaphragm can be stably floated, so that the holding stability of the object can be improved.

Further, in the present invention, since the electromagnet is used as the magnet, the attraction force can be controlled by the electromagnet, and various floor surfaces of the floor can be dealt with.

Further, according to the present invention, since the sheet-like magnet is arranged on the diaphragm, the followability to a minute step or undulation of the floor is improved, and the floating state of the diaphragm can be stabilized.

Further, according to the present invention, since the magnet is arranged at the central portion or the peripheral portion of the bottom surface of the pad, the floating state of the diaphragm can be stabilized with a simple structure.

Further, according to the present invention, by controlling the flow rate of the compressed air from the compressed air supply means, the expansion amount of the diaphragm can be controlled corresponding to various floor surfaces of the floor portion, and the floating state of the diaphragm can be stabilized. Can be converted.

Further, according to the present invention, since a plurality of diaphragms are divided and arranged on the bottom surface of the pad, even if an eccentric load is applied, the load applied to each diaphragm is detected and the detected load is applied. It is possible to control the flow rate of the compressed air in accordance with the above, and it is possible to stabilize the floating state of the diaphragm.

Further, according to the present invention, since the plurality of load sensors for detecting the load applied to each of the divided diaphragms are provided, when the eccentric load is applied, the load sensor detects the load applied to each diaphragm. As a result, the flow rate of the compressed air can be controlled based on the detected load, and the floating state of the diaphragm can be stabilized.

Further, according to the present invention, since a plurality of flow rate control units for controlling the flow rate of the compressed air supplied to each space based on the detection outputs of the plurality of load sensors are provided, when an eccentric load is applied. Since the flow rate control unit controls the flow rate of the compressed air based on the detection output of the load sensor, the responsiveness to the eccentric load is improved and the floating state of the diaphragm can be stabilized.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a pneumatic levitation device according to a first embodiment of the present invention.

FIG. 2 is a view showing a first other embodiment of the first embodiment of the present invention, FIG. 2 (a) is a view showing its configuration, and FIG.
(B) is a figure which shows the followability with respect to a minute level | step difference and swell of a floor part.

FIG. 3 is a diagram showing a configuration of a second other example of the first exemplary embodiment of the present invention.

FIG. 4 is a diagram showing a second embodiment of the present invention, and FIG.
Is a diagram showing its configuration, and FIG. 4 (b) is a diagram showing a bottom surface.

FIG. 5 is a diagram showing a configuration of a conventional pneumatic levitation device.

FIG. 6 is a diagram showing a problem of a conventional pneumatic levitation device,
FIG. 6A is a diagram showing a relationship with a minute step or undulation of the floor, and FIG. 6B is a diagram showing a state when an eccentric load is applied.

[Explanation of symbols]

 11 ... Pneumatic levitation device 14 ... Floor 15 ... Pad 16 ... Diaphragm 16a ... Exhaust hole 19,22 ... Magnet 20 ... Air compressor (compressed air supply means) 21 ... Sheet magnet 31 ... Pneumatic levitation device 32 ... Floor Part 33 ... Pad 34, 34a, 34b, 34c ... Diaphragm 36, 36a, 36b, 36c, 36d, 36e, 36f ... Exhaust hole 38, 38a, 38b, 38c ... Load detector (load sensor) 39 ... Controller (flow control) Part) A ... compressed air S ... space part G ... air film (air film)

Claims (9)

[Claims] 1. A pneumatic levitation device slidably arranged on a floor made of a magnetically attractable material, wherein a disk-shaped pad to which a load of an object is applied and an outer circumference of a bottom surface of the pad are provided. Is formed to form a space and an exhaust hole is provided, and compressed air is injected into the space to expand the compressed air and an air film is formed between the compressed air ejected from the exhaust hole and the floor. A diaphragm that is formed to float the object, and a diaphragm is provided on either one of the diaphragm and the bottom surface of the pad to generate a magnetic attraction force between the pad and the floor, and the attraction force is used as a load for the diaphragm. A pneumatic levitation device, comprising: 2. The pneumatic levitation device according to claim 1, wherein the magnet is a permanent magnet, an electromagnet, or a combination thereof. 3. The pneumatic levitation device according to claim 1, wherein a magnet is arranged in the center of the bottom surface of the pad. 4. The pneumatic levitation device according to claim 1, wherein a sheet-like magnet is arranged on the diaphragm. 5. The pneumatic levitation device according to claim 1, wherein a magnet is arranged on a peripheral portion of the pad. 6. The pneumatic levitation apparatus according to claim 1, wherein the compressed air is supplied by compressed air supply means whose flow rate is controllable. 7. A pneumatic levitation apparatus slidably arranged on a floor, wherein a disk-shaped pad to which a load of an object is applied and a plurality of spaces are formed along the outer periphery of the bottom surface of the pad. Divided and provided with an exhaust hole for each divided part, it expands by injecting compressed air into the space and an air film is formed between the compressed air ejected from the exhaust hole and the floor. A pneumatic levitation device comprising: a plurality of diaphragms for levitating the object. 8. The pneumatic levitation device according to claim 5, further comprising a plurality of load sensors for detecting a load applied to each of the divided diaphragms. 9. The pneumatic levitation system according to claim 6, further comprising a plurality of flow rate control units for controlling the flow rate of the compressed air supplied to each space based on the detection outputs of the plurality of load sensors. apparatus.