JPH07240658A - Surface acoustic wave device - Google Patents

Surface acoustic wave device

Info

Publication number
JPH07240658A
JPH07240658A JP5485994A JP5485994A JPH07240658A JP H07240658 A JPH07240658 A JP H07240658A JP 5485994 A JP5485994 A JP 5485994A JP 5485994 A JP5485994 A JP 5485994A JP H07240658 A JPH07240658 A JP H07240658A
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
reflector
opposed
bus bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5485994A
Other languages
Japanese (ja)
Inventor
Hiroyuki Amano
宏之 天野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP5485994A priority Critical patent/JPH07240658A/en
Publication of JPH07240658A publication Critical patent/JPH07240658A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To suppress the ripple within a pass band by groove mode spurious wave to minimum and to improve insertion loss by making the surface opposed to the bus bar opposed to a reflector have a specified angle. CONSTITUTION:Bus bars 1a and 1b opposed to the reflector formed on the surface of a piezoelectric substrate are disposed in a wedge shape so as to avoid mutural parallel of the both bus bars with an angle of alpha for the line in the longitudinal direction and in the vertical direction of the electrode of each reflector, and a wedge electrode is disposed between these opposed bus bars at prescribed space. When these disposals are performed, the horizontal mode surface acoustic wave reflected on the bus bar is reflected in the direction shifted by 2.alpha from an advancing route and does not attain the opposed bus bar even if the surface acoustic wave of the horizontal mode is generated. As a result, a standing wave is not generated. Therefore, the generation of the spurious wave of the horizontal mode can be prevented.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電極構造を変えて特性
を改善した弾性表面波デバイスに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface acoustic wave device having improved characteristics by changing an electrode structure.

【0002】[0002]

【従来の技術】従来から、トランスデューサ及び反射器
の対向するバスバーの間隔は、一般的に使用周波数の波
長λの整数倍が使用されていた。
2. Description of the Related Art Conventionally, an interval between facing bus bars of a transducer and a reflector is generally an integral multiple of a wavelength λ of a used frequency.

【0003】[0003]

【発明が解決しようとする課題】しかし、従来技術の方
法では、反射器の対向するバスバーの間隔が、一般的に
使用周波数の波長λの整数倍であるために、横モードの
弾性表面波の定在波がたつこと等により、横モードの弾
性表面波によるスプリアスが発生するために、フイルタ
の通過帯域内にリップルが発生し、またフィルタの挿入
損失が増大するという課題があった。
However, in the method of the prior art, since the distance between the opposing bus bars of the reflector is generally an integral multiple of the wavelength λ of the used frequency, the surface acoustic wave of the transverse mode is not generated. Since standing waves are generated and spurious due to the surface acoustic wave in the transverse mode is generated, ripples are generated in the pass band of the filter and the insertion loss of the filter is increased.

【0005】[0005]

【課題を解決するための手段】前記課題を解決するため
には、反射器の対向するバスバーの対向する面に角度α
を持たせることによって、反射器の対向するバスバーの
面で反射した横モードの弾性表面波が、対向する反射器
のバスバーに到達しない様にすることにより、対向する
反射器のバスバー相互間に定在波がたつことを防止する
ことで、前記課題が解決された。
In order to solve the above-mentioned problems, the angle .alpha.
The surface acoustic wave of the transverse mode reflected by the surface of the opposing bus bar of the reflector is prevented from reaching the bus bar of the opposing reflector by setting the constant distance between the bus bars of the opposing reflector. The above problems have been solved by preventing the occurrence of standing waves.

【0006】[0006]

【実施例】【Example】

(実施例1)図1に本発明の第1の実施例の電極パター
ンを示す。図1の実施例は圧電基板の表面に形成された
反射器の対向するバスバー1a、1bは、それぞれ反射
器電極の長手方向と直角の方向の線に対してαなる角度
をもって両バスバーは相互に平行になることを避けて、
くさび状に配置され、この対向するバスバー相互間に所
定の間隔で櫛型電極が配置されている。この様にする
と、横モードの表面弾性波が発生しても、バスバーで反
射した横モード表面弾性波は進行してきた経路より2・
αだけずれた方向に反射され、対向するバスバーには到
達しない。このため定在波はたたず、従って横モードの
スプリアスの発生が防止できる。
(Embodiment 1) FIG. 1 shows an electrode pattern of a first embodiment of the present invention. In the embodiment shown in FIG. 1, the opposing bus bars 1a and 1b of the reflector formed on the surface of the piezoelectric substrate are arranged such that the two bus bars are at an angle of α with respect to a line in a direction perpendicular to the longitudinal direction of the reflector electrode. Avoid being parallel,
The electrodes are arranged in a wedge shape, and the comb-shaped electrodes are arranged at predetermined intervals between the opposing bus bars. By doing so, even if a transverse mode surface acoustic wave is generated, the transverse mode surface acoustic wave reflected by the bus bar is 2
It is reflected in a direction shifted by α and does not reach the opposing bus bar. Therefore, no standing wave is generated, and therefore spurious in the transverse mode can be prevented.

【0007】(実施例2)図2に本発明の第2の実施例
の電極パターンを示す。図2(a)の実施例は圧電基板
の表面に形成された反射器の対向するバスバー2a、2
bは、それぞれ相互に並行して配置されていて、この対
向するバスバー相互間に所定の間隔で櫛型電極が配置さ
れている。図2(b)に図2(a)のスリット拡大図を
示す。スリットの左右の寸法をそれぞれL1、L2とすれ
ば、L1<L2の関係は対向するバスバーの平行線とスリ
ットのバスバーと接する線となす交叉角がα度と一致す
る様に選定する。この様にすると、第1の実施例と同様
に横モードの表面弾性波が発生しても、バスバーで反射
した横モード表面弾性波は進行してきた経路より2・α
だけずれた方向に反射され、対向するバスバーには到達
しない。このため定在波はたたず、従って横モードスプ
リアスの発生が防止できる。
(Embodiment 2) FIG. 2 shows an electrode pattern according to a second embodiment of the present invention. In the embodiment shown in FIG. 2A, the opposing bus bars 2a, 2a of the reflector formed on the surface of the piezoelectric substrate are shown.
b are arranged in parallel with each other, and comb-shaped electrodes are arranged at predetermined intervals between the opposing bus bars. FIG. 2B shows an enlarged view of the slit shown in FIG. If the left and right dimensions of the slit are L 1 and L 2 , respectively, the relationship of L 1 <L 2 is selected so that the intersection angle between the parallel line of the opposing bus bar and the line in contact with the bus bar of the slit matches α degrees. To do. In this way, even if a transverse mode surface acoustic wave is generated as in the first embodiment, the transverse mode surface acoustic wave reflected by the bus bar is 2..alpha.
It is reflected in a direction shifted by just the distance and does not reach the opposite bus bar. For this reason, no standing wave is generated, so that the occurrence of transverse mode spurious can be prevented.

【0008】なお、αは下記の式で示される。 α=傾斜角±5° 例えば、水晶でSTカットの基板材質の場合、パワーフ
ロー角は約10度である。従って、α=10±5°=5
〜15°となる。他の圧電基板の場合、傾斜角は異なる
が、αが±5度の範囲で有れば十分良好な特性が得られ
ることがわかった。図3は、弾性表面波デバイスの通過
帯域内のリップル特性とα角度の関係を示すグラフであ
る。図4は、弾性表面波デバイスの挿入損失特性とα角
度の関係を示すグラフである。α角度を変化させた場
合、通過帯域内のリップルの最小値と、挿入損失の最小
値はほぼ一致し、いずれも基板のパワーフロー角±5°
に一致している。
Note that α is represented by the following equation. α = tilt angle ± 5 ° For example, in the case of a substrate material of ST cut made of quartz, the power flow angle is about 10 degrees. Therefore, α = 10 ± 5 ° = 5
It becomes ~ 15 °. It was found that in the case of other piezoelectric substrates, although the tilt angle is different, if α is in the range of ± 5 degrees, sufficiently good characteristics can be obtained. FIG. 3 is a graph showing the relationship between the ripple characteristic in the pass band of the surface acoustic wave device and the α angle. FIG. 4 is a graph showing the relationship between the insertion loss characteristic of the surface acoustic wave device and the α angle. When the α angle is changed, the minimum value of the ripple in the pass band and the minimum value of the insertion loss are almost the same, and the power flow angle of the board is ± 5 ° in both cases.
Is consistent with.

【0009】[0009]

【発明の効果】本発明により、反射器の対向するバスバ
ーの対向する面に角度αを持たせることによって、反射
器の対向するバスバーの面で反射した横モードの弾性表
面波が、対向する反射器のバスバーに到達しない様にす
ることにより、対向する反射器のバスバー相互間に定在
波がたつことを防止することで、対向するそれぞれの一
対のバスバーの間に横モードの弾性表面波の定在波がた
つことを防止出来るため、横モードスプリアスによる通
過帯域内リップルを最小限に抑え挿入損失を改善するこ
とができるという効果がある。
EFFECTS OF THE INVENTION According to the present invention, by providing the facing surfaces of the opposing busbars of the reflector with an angle α, the transverse mode surface acoustic waves reflected on the facing surfaces of the busbars of the reflector are reflected by the opposing surfaces. By preventing the standing waves from reaching the busbars of the reflectors by preventing them from reaching the busbars of the opposing reflectors, the surface acoustic wave in the transverse mode is generated between the pair of opposing busbars. Since standing waves can be prevented from waving, there is an effect that ripples in the pass band due to transverse mode spurious can be minimized and insertion loss can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】図1は、本発明の反射器の対向する一対のバス
バーをそれぞれα度傾けた例を示す平面図である。
FIG. 1 is a plan view showing an example in which a pair of opposing bus bars of a reflector of the present invention are inclined by α degrees.

【図2】図2(a)は、本発明の反射器の対向する一対
のバスバーのスリットの面をそれぞれα度傾けた例を示
す平面図である。図2(b)は、図2(a)の拡大図で
ある。
FIG. 2 (a) is a plan view showing an example in which the surfaces of the slits of a pair of opposing bus bars of the reflector of the present invention are inclined by α degrees. FIG. 2B is an enlarged view of FIG.

【図3】図3は、α角度とリップルの関係を示すグラフ
である。
FIG. 3 is a graph showing a relationship between α angle and ripple.

【図4】図4は、α角度と挿入損失の関係を示すグラフ
である。
FIG. 4 is a graph showing the relationship between α angle and insertion loss.

【符号の説明】[Explanation of symbols]

1a、1b バスバー 2a、2b バスバー 3 すだれ電極 1a, 1b Busbar 2a, 2b Busbar 3 Sudden electrode

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 圧電基板の表面に複数本の反射器電極が
平行に配置され、該反射器電極を相互に接続するバスバ
ーが、該反射器電極の両端部に一対配置された弾性表面
波デバイスにおいて、該バスバーは該反射器電極の長手
方向と直角な線(弾性表面波の進行方向)に対して、α
度傾斜していることを特徴とする弾性表面波デバイス。
1. A surface acoustic wave device in which a plurality of reflector electrodes are arranged in parallel on the surface of a piezoelectric substrate, and a pair of bus bars connecting the reflector electrodes to each other are arranged at both ends of the reflector electrodes. At, the bus bar is α with respect to a line (the traveling direction of the surface acoustic wave) perpendicular to the longitudinal direction of the reflector electrode.
A surface acoustic wave device characterized by being inclined at an angle.
【請求項2】 圧電基板の表面に複数本の反射器電極が
平行に配置され、該反射器電極を相互に接続するバスバ
ーが、該反射器電極の両端部に平行に配置された弾性表
面波デバイスにおいて、該バスバーのスリット面が該反
射器電極の長手方向と直角な線(弾性表面波の進行方
向)に対して、α度傾斜していることを特徴とする弾性
表面波デバイス。
2. A surface acoustic wave in which a plurality of reflector electrodes are arranged in parallel on a surface of a piezoelectric substrate, and bus bars connecting the reflector electrodes to each other are arranged in parallel to both ends of the reflector electrode. In the device, a surface acoustic wave device, wherein a slit surface of the bus bar is inclined by α degrees with respect to a line (a traveling direction of a surface acoustic wave) perpendicular to a longitudinal direction of the reflector electrode.
【請求項3】 該圧電基板がSTカットの水晶基板であ
り、α角を5〜15度としたことを特徴とする特許請求
の範囲第1項又は第2項記載の弾性表面波デバイス。
3. The surface acoustic wave device according to claim 1, wherein the piezoelectric substrate is an ST cut quartz substrate, and an α angle is 5 to 15 degrees.
JP5485994A 1994-03-01 1994-03-01 Surface acoustic wave device Pending JPH07240658A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5485994A JPH07240658A (en) 1994-03-01 1994-03-01 Surface acoustic wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5485994A JPH07240658A (en) 1994-03-01 1994-03-01 Surface acoustic wave device

Publications (1)

Publication Number Publication Date
JPH07240658A true JPH07240658A (en) 1995-09-12

Family

ID=12982322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5485994A Pending JPH07240658A (en) 1994-03-01 1994-03-01 Surface acoustic wave device

Country Status (1)

Country Link
JP (1) JPH07240658A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6346761B1 (en) * 1999-01-27 2002-02-12 Hitachi Denshi Kabushiki Kaisha Surface acoustic wave device capable of suppressing spurious response due to non-harmonic higher-order modes
EP1187324A2 (en) * 2000-09-06 2002-03-13 Hitachi, Ltd. Surface acoustic wave device
WO2010001534A1 (en) * 2008-07-04 2010-01-07 株式会社村田製作所 Elastic wave filter device
EP2226935A1 (en) * 2007-12-11 2010-09-08 Murata Manufacturing Co. Ltd. Surface acoustic wave device and duplexer
US8049583B2 (en) * 2008-03-10 2011-11-01 Taiyo Yuden Co., Ltd. Acoustic wave filter comprising a reflector having an oblique slit
US20120025931A1 (en) * 2009-04-07 2012-02-02 Murata Manufacturing Co., Ltd. Boundary acoustic wave resonator and ladder filter

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6346761B1 (en) * 1999-01-27 2002-02-12 Hitachi Denshi Kabushiki Kaisha Surface acoustic wave device capable of suppressing spurious response due to non-harmonic higher-order modes
EP1187324A2 (en) * 2000-09-06 2002-03-13 Hitachi, Ltd. Surface acoustic wave device
EP1187324A3 (en) * 2000-09-06 2009-03-11 Hitachi, Ltd. Surface acoustic wave device
EP2226935A1 (en) * 2007-12-11 2010-09-08 Murata Manufacturing Co. Ltd. Surface acoustic wave device and duplexer
EP2226935A4 (en) * 2007-12-11 2013-08-21 Murata Manufacturing Co Surface acoustic wave device and duplexer
US8049583B2 (en) * 2008-03-10 2011-11-01 Taiyo Yuden Co., Ltd. Acoustic wave filter comprising a reflector having an oblique slit
WO2010001534A1 (en) * 2008-07-04 2010-01-07 株式会社村田製作所 Elastic wave filter device
JPWO2010001534A1 (en) * 2008-07-04 2011-12-15 株式会社村田製作所 Elastic wave filter device
US20120025931A1 (en) * 2009-04-07 2012-02-02 Murata Manufacturing Co., Ltd. Boundary acoustic wave resonator and ladder filter
US8421560B2 (en) * 2009-04-07 2013-04-16 Murata Manufacturing Co., Ltd. Boundary acoustic wave resonator and ladder filter

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