JPH0723898Y2 - イオンビ−ム走査電圧発生装置 - Google Patents
イオンビ−ム走査電圧発生装置Info
- Publication number
- JPH0723898Y2 JPH0723898Y2 JP1580087U JP1580087U JPH0723898Y2 JP H0723898 Y2 JPH0723898 Y2 JP H0723898Y2 JP 1580087 U JP1580087 U JP 1580087U JP 1580087 U JP1580087 U JP 1580087U JP H0723898 Y2 JPH0723898 Y2 JP H0723898Y2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- horizontal
- vertical
- wave signal
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 title claims description 48
- 230000000630 rising effect Effects 0.000 claims description 33
- 230000001360 synchronised effect Effects 0.000 claims description 11
- 230000001133 acceleration Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 description 25
- 238000005468 ion implantation Methods 0.000 description 15
- 238000007493 shaping process Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1580087U JPH0723898Y2 (ja) | 1987-02-05 | 1987-02-05 | イオンビ−ム走査電圧発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1580087U JPH0723898Y2 (ja) | 1987-02-05 | 1987-02-05 | イオンビ−ム走査電圧発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63123049U JPS63123049U (enrdf_load_stackoverflow) | 1988-08-10 |
| JPH0723898Y2 true JPH0723898Y2 (ja) | 1995-05-31 |
Family
ID=30807068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1580087U Expired - Lifetime JPH0723898Y2 (ja) | 1987-02-05 | 1987-02-05 | イオンビ−ム走査電圧発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0723898Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-02-05 JP JP1580087U patent/JPH0723898Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63123049U (enrdf_load_stackoverflow) | 1988-08-10 |
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