JPH07234307A - Production of reflection mirror - Google Patents

Production of reflection mirror

Info

Publication number
JPH07234307A
JPH07234307A JP4967694A JP4967694A JPH07234307A JP H07234307 A JPH07234307 A JP H07234307A JP 4967694 A JP4967694 A JP 4967694A JP 4967694 A JP4967694 A JP 4967694A JP H07234307 A JPH07234307 A JP H07234307A
Authority
JP
Japan
Prior art keywords
film
substrate
laminate
reflecting mirror
reflective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4967694A
Other languages
Japanese (ja)
Inventor
Haruo Tomono
晴夫 友野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP4967694A priority Critical patent/JPH07234307A/en
Publication of JPH07234307A publication Critical patent/JPH07234307A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To reduce the cost of a reflection mirror by using a plastic film in place of a mold plate made of glass, etc. CONSTITUTION:A film laminate 10 of the reflection films is produced by forming a metallic film 2 on the surface 1a of the plastic film 1 having high surface accuracy. This laminate 10 of the reflection films is pressed to a base plate 4 dropped thereon with an adhesive 3 and to transfer the metallic film 2 onto the base plate 4, by which the reflection mirror 20 is obtd. Since the plastic film 1 is soft, easy to handle and inexpensive, the production cost of the reflection mirror 20 is drastically reduced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、カメラ、複写機、レー
ザプリンタ等の光学機器に用いる反射鏡の製造方法に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a reflecting mirror used in optical devices such as cameras, copying machines and laser printers.

【0002】[0002]

【従来の技術】カメラ、複写機、レーザプリンタ等の光
学機器に用いる反射鏡は極めて高い表面精度(表面粗さ
精度)を必要とするため、従来、図7の(a)〜(e)
に示す方法で製造するのが一般的であった。
2. Description of the Related Art Reflecting mirrors used in optical devices such as cameras, copying machines and laser printers require extremely high surface accuracy (surface roughness accuracy).
It was generally manufactured by the method shown in.

【0003】まず、図7の(a)で示すように、高い表
面精度を有するガラス板等の型板101の表面にアルミ
ニウム、銅等の金属膜102を蒸着し、(b)に示すよ
うに接着剤103を滴下した基板104の表面に型板1
01を押しつけて、(c)に示すように金属膜102を
基板104の表面に接着し、接着剤103の硬化後に
(d)に示すように型板101を剥して(e)に示すよ
うに基板104とその表面に転写された金属膜102か
らなる反射鏡100を得る(特開昭50−155243
号公報、特開昭61−102601号公報参照)。
First, as shown in FIG. 7A, a metal film 102 of aluminum, copper or the like is vapor-deposited on the surface of a template 101 such as a glass plate having a high surface precision, and as shown in FIG. The template 1 is placed on the surface of the substrate 104 on which the adhesive 103 is dropped.
01 is pressed to bond the metal film 102 to the surface of the substrate 104 as shown in (c), and after the adhesive 103 is cured, the template 101 is peeled off as shown in (d) and as shown in (e). A reflecting mirror 100 including a substrate 104 and a metal film 102 transferred to the surface thereof is obtained (Japanese Patent Laid-Open No. 50-155243).
Japanese Patent Laid-Open No. 61-102601).

【0004】すなわち、まず、蒸着室内に型板を搬入し
て金属膜を成膜し、金属膜を被着させた型板を蒸着室か
ら取出して所定の基板に転写することによって反射鏡を
製造するのが一般的であった。
That is, first, a reflecting mirror is manufactured by carrying a template into a vapor deposition chamber to form a metal film, taking out the template having the metal film deposited thereon, and transferring it to a predetermined substrate. It was common to do.

【0005】[0005]

【発明が解決しようとする課題】しかしながら上記従来
の技術によれば、まず、ガラス板等の型板はその表面を
高い表面精度に仕上げる工程が複雑でそのために製造コ
ストが高く、また、高重量でしかも割れやすいために蒸
着室に対する搬出入時の取扱いを慎重にしなければなら
ず、このために作業が煩雑で時間がかかるうえに、金属
膜を基板に接着したうえで型板を剥すときにも変形した
り割れたりする傾向がある。
However, according to the above-mentioned prior art, first, a template such as a glass plate is complicated in the process of finishing its surface with high surface precision, which results in high manufacturing cost and high weight. Moreover, since it is fragile, it must be handled with care when carrying it in and out of the vapor deposition chamber, which makes the work complicated and time consuming, and also when peeling the template after adhering the metal film to the substrate. Also has a tendency to deform and crack.

【0006】すなわち、型板自体が高価であるうえに取
扱いが困難で反射鏡の製造工程を自動化したり製造時間
を短縮するうえでの大きな障害となり、反射鏡の低コス
ト化を妨げていた。
That is, since the template itself is expensive and difficult to handle, it becomes a major obstacle in automating the manufacturing process of the reflecting mirror and shortening the manufacturing time, which hinders the cost reduction of the reflecting mirror.

【0007】本発明は、上記従来の技術の有する問題点
に鑑みてなされたものであり、材料費を低減し製造時間
の短縮や製造工程の自動化を促進することで反射鏡の製
造コストを大幅に低減できる反射鏡の製造方法を提供す
ることを目的とするものである。
The present invention has been made in view of the problems of the above-mentioned prior art, and significantly reduces the manufacturing cost of the reflecting mirror by reducing the material cost, shortening the manufacturing time, and promoting the automation of the manufacturing process. It is an object of the present invention to provide a method for manufacturing a reflecting mirror that can be reduced to a minimum.

【0008】[0008]

【課題を解決するための手段】上記の目的を達成するた
め本発明の反射鏡の製造方法は、プラスチックフィルム
の表面に反射膜を成膜して反射膜フィルム積層体を製作
する工程と、製作された反射膜フィルム積層体の反射膜
を基板に転写する工程を有することを特徴とする。
In order to achieve the above object, a method of manufacturing a reflecting mirror according to the present invention comprises a step of forming a reflecting film on a surface of a plastic film to manufacture a reflecting film laminate, and The method further comprises the step of transferring the reflective film of the laminated reflective film film laminate to a substrate.

【0009】また、プラスチックフィルムの表面に反射
膜を成膜して反射膜フィルム積層体を製作し該反射膜フ
ィルム積層体を巻取る工程と、巻取られた反射膜フィル
ム積層体を巻きもどす工程と、巻きもどされた反射膜フ
ィルム積層体の反射膜を基板に転写する工程を有するこ
とを特徴とする。
Further, a step of forming a reflection film on the surface of the plastic film to produce a reflection film film laminate, winding the reflection film film laminate, and a step of rewinding the wound reflection film film laminate. And a step of transferring the unwound reflective film of the reflective film laminate to the substrate.

【0010】プラスチックフィルムの表面粗さRmax
が0.05μm以下であるとよい。
Surface roughness Rmax of plastic film
Is preferably 0.05 μm or less.

【0011】また、反射膜フィルム積層体の反射膜を接
着剤を介して基板に転写するとよい。
The reflective film of the reflective film laminate may be transferred to the substrate via an adhesive.

【0012】また、反射膜フィルム積層体の反射膜を基
板に転写するときに、高い表面精度を有する押圧部材を
前記反射膜フィルム積層体に当てがうとよい。
Further, when the reflection film of the reflection film laminate is transferred to the substrate, it is preferable to apply a pressing member having high surface accuracy to the reflection film laminate.

【0013】また、反射膜フィルム積層体の反射膜を基
板に転写するときに、前記反射膜フィルム積層体にテン
ションをかけるとよい。
Further, when the reflection film of the reflection film laminate is transferred to the substrate, it is preferable to apply tension to the reflection film laminate.

【0014】また、反射膜フィルム積層体の反射膜を複
数の基板に逐次または同時に転写するとよい。
Further, the reflection film of the reflection film laminate may be transferred onto a plurality of substrates successively or simultaneously.

【0015】[0015]

【作用】プラスチックフィルムは軽量で柔軟性があるた
めに割れる心配もなく取扱いが極めて容易であり、加え
て、高い表面精度(表面粗さ精度)を得るのも容易であ
りかつ材料費も安い。その結果、材料費の削減および製
造時間の短縮や製造工程の自動化を促進して反射鏡の製
造コストを大幅に低減できる。
Since the plastic film is lightweight and flexible, it is easy to handle without fear of cracking, and in addition, it is easy to obtain high surface accuracy (surface roughness accuracy) and the material cost is low. As a result, the material cost can be reduced, the manufacturing time can be shortened, the manufacturing process can be automated, and the manufacturing cost of the reflecting mirror can be significantly reduced.

【0016】プラスチックフィルムの表面に反射膜を成
膜して反射膜フィルム積層体を製作し該反射膜フィルム
積層体を巻取る工程と、巻取られた反射膜フィルム積層
体を巻きもどす工程と、巻きもどされた反射膜フィルム
積層体の反射膜を基板に転写する工程を有すれば、反射
膜フィルム積層体を巻取りながら反射膜を連続的に成膜
することで大面積の反射膜を成膜できる。また、大面積
の反射膜を複数の基板に同時にあるいは逐次連続的に転
写することで反射鏡の大量生産が容易である。その結
果、反射鏡の製造コストを一層低減できる。
A step of forming a reflective film on the surface of a plastic film to produce a reflective film film laminate and winding the reflective film laminate, and a step of rewinding the wound reflective film laminate. If there is a step of transferring the reflection film of the rewound reflection film film laminate to the substrate, a large-area reflection film can be formed by continuously forming the reflection film while winding the reflection film film laminate. Can be a membrane. Further, by mass-reflecting a large-area reflecting film onto a plurality of substrates simultaneously or successively, it is easy to mass-produce the reflecting mirror. As a result, the manufacturing cost of the reflecting mirror can be further reduced.

【0017】[0017]

【実施例】本発明の実施例を図面に基づいて説明する。Embodiments of the present invention will be described with reference to the drawings.

【0018】図1の(a)〜(f)は第1実施例によっ
て反射鏡を製造する工程を説明するもので、まず、図1
の(a)に示すように厚さ5〜200μmでその表面1
aの表面粗さがRmax0.05μm以下のプラスチッ
クフィルム1を用意する。プラスチックフィルム1の材
料はポリエステル、ポリプロピレン、ポリアミド、ポリ
エチレン、ポリカーボネート、ポリイミド、ポリ塩化ビ
ニル等いかなるプラスチック材料でもよいが、製造する
反射鏡の反射率を高めるためにはプラスチック材料に含
まれる無機フィラー等の含有量は少ない方が望ましい。
特に、無機フィラー等の含有量がゼロであれば、プラス
チックフィルム1の光沢が充分で表面粗さを前述のよう
に0.05μm以下にするのも容易である。
FIGS. 1A to 1F illustrate a process of manufacturing a reflecting mirror according to the first embodiment. First, FIG.
As shown in (a) of FIG.
A plastic film 1 having a surface roughness a of Rmax of 0.05 μm or less is prepared. The material of the plastic film 1 may be any plastic material such as polyester, polypropylene, polyamide, polyethylene, polycarbonate, polyimide, polyvinyl chloride, etc. However, in order to increase the reflectance of the reflecting mirror to be manufactured, an inorganic filler such as an inorganic filler contained in the plastic material may be used. The lower the content, the better.
In particular, when the content of the inorganic filler or the like is zero, the plastic film 1 has sufficient gloss and it is easy to set the surface roughness to 0.05 μm or less as described above.

【0019】また、プラスチックフィルム1には後述す
るようにある程度の引張り強度が必要であるため、2軸
延伸法等によって引張り強度を向上させたものが望まし
い。さらに、プラスチックフィルム1の表面1aには後
述するようにフッ素系やシリコーン系の公知の離型剤を
塗布しておくのが望ましい。離型剤の厚さはプラスチッ
クフィルム1の表面1aの表面精度(表面粗さ精度)を
損わないように1μm以下、できれば0.1μm以下で
あるのが望ましく、これを塗布する方法は、ロールコー
ト法、スプレーコート法、印刷法等いかなる方法でもよ
い。
Since the plastic film 1 needs to have a certain degree of tensile strength as described later, it is desirable that the plastic film 1 has an improved tensile strength by a biaxial stretching method or the like. Further, it is desirable to apply a known release agent of fluorine type or silicone type to the surface 1a of the plastic film 1 as described later. The thickness of the release agent is preferably 1 μm or less, preferably 0.1 μm or less so as not to impair the surface accuracy (surface roughness accuracy) of the surface 1a of the plastic film 1. The method for applying this is roll Any method such as a coating method, a spray coating method and a printing method may be used.

【0020】次に、図1の(b)に示すように、プラス
チックフィルム1の表面1aに公知の方法で反射膜であ
る金属膜2を成膜して反射膜フィルム積層体10を製作
する。金属膜2の材料は、アルミニウム、銅、銀、金、
ニッケル、クロム等であり、その成膜方法は、蒸着、ス
パッタリング等の真空蒸着法あるいはメッキ法等いかな
る方法でもよい。また、金属膜2の膜厚は、ピンホール
等の欠陥がなくて所望の反射率を得られる程度、例えば
20〜200nm程度であればよい。
Next, as shown in FIG. 1 (b), a metal film 2 which is a reflection film is formed on the surface 1a of the plastic film 1 by a known method to manufacture a reflection film laminate 10. The material of the metal film 2 is aluminum, copper, silver, gold,
The film forming method is nickel, chromium, or the like, and any method such as a vacuum deposition method such as vapor deposition or sputtering or a plating method may be used. The film thickness of the metal film 2 may be such that a desired reflectance can be obtained without defects such as pinholes, for example, about 20 to 200 nm.

【0021】次に、図1の(c)に示すように、接着剤
3を滴下した基板4に反射膜フィルム積層体10を押し
つけて、図1の(d)に示すように反射膜フィルム積層
体10の金属膜2を基板4に接着する。接着剤3はエポ
キシ系接着剤、シリコーン系接着剤、ウレタン系接着
剤、フェノール系接着剤、アクリル系接着剤、ホットメ
ルト接着剤、クロロプレン系接着剤、ニトリルゴム系接
着剤等のなかから反射鏡を使用する環境や必要強度に応
じて選択する。また、接着剤3の量は金属膜2を基板4
に接着したときの厚さが10〜500μm、できれば2
0〜100μm程度になるように制御すると、接着剤の
硬化収縮による表面精度の転写不良のおそれがない。
Next, as shown in FIG. 1C, the reflective film laminated body 10 is pressed against the substrate 4 on which the adhesive 3 is dropped, and the reflective film laminated as shown in FIG. 1D. The metal film 2 of the body 10 is adhered to the substrate 4. The adhesive 3 is a reflection mirror made of an epoxy adhesive, a silicone adhesive, a urethane adhesive, a phenol adhesive, an acrylic adhesive, a hot melt adhesive, a chloroprene adhesive, a nitrile rubber adhesive, or the like. Select according to the environment in which it is used and the required strength. In addition, the amount of the adhesive 3 is the same as that of the metal film 2 on the substrate 4
The thickness when adhered to is 10 to 500 μm, preferably 2
When the thickness is controlled so as to be about 0 to 100 μm, there is no risk of transfer failure of surface accuracy due to curing shrinkage of the adhesive.

【0022】さらに、基板4の材料は金属、プラスチッ
ク、ガラスその他反射鏡の用途に応じて選定され、その
形状も平板に限らず、図2に示すように曲面状の表面1
4aを有するもの、あるいは図3に示すように、断面V
字型等の溝を形成する表面24aを有するものでもかま
わない。また、接着剤3を硬化させる方法は、加熱、常
温放置あるいは基板が透明であれば紫外線照射によるも
の等公知の方法を採用する。
Further, the material of the substrate 4 is selected according to the use of metal, plastic, glass or other reflecting mirror, and the shape thereof is not limited to a flat plate, and the curved surface 1 as shown in FIG.
4a, or as shown in FIG.
It may have a surface 24a forming a groove such as a letter shape. As a method of curing the adhesive 3, a known method such as heating, leaving at room temperature, or irradiating with ultraviolet rays if the substrate is transparent is adopted.

【0023】最後に図1の(e)に示すように公知の離
型具を用いてプラスチックフィルム1を剥して、基板4
とこれに転写された金属膜2からなる反射鏡20を得
る。続いて必要であれば、金属膜2の表面2aに増反射
膜やキズ防止のための透明なハードコートを設ける。
Finally, as shown in FIG. 1 (e), the plastic film 1 is peeled off using a known release tool, and the substrate 4 is removed.
Then, the reflecting mirror 20 composed of the metal film 2 transferred to the above is obtained. Subsequently, if necessary, the surface 2a of the metal film 2 is provided with a reflection enhancing film and a transparent hard coat for preventing scratches.

【0024】本実施例によれば、ガラス板等の型板を用
いる場合に比べて、プラスチックフィルム1が極めて軽
量であり割れる心配もないために、金属膜2を成膜する
ときの取扱いも簡単でその作業に消費する時間も少なく
てすむ。また、プラスチックフィルム1はすぐれた柔軟
性を有するため、金属膜2を基板4へ転写したうえでプ
ラスチックフィルム1を剥す作業が容易であり、ガラス
製の型板等のように永久変形したり割れたりするおそれ
もない。加えて、寸法の大きいプラスチックフィルム1
に金属膜2を成膜したうえで、これを、複数の基板に逐
次あるいは同時に転写することも容易である。さらに
は、プラスチックフィルム1は材料費の点でもガラス製
の型板等よりはるかに安価であるから、材料費と製造工
程の両面から反射鏡の製造コストを大幅に削減できる。
According to this embodiment, the plastic film 1 is extremely light and does not have a risk of cracking as compared with the case where a template such as a glass plate is used. Therefore, the metal film 2 can be easily handled. Therefore, the time spent for the work is small. Moreover, since the plastic film 1 has excellent flexibility, it is easy to peel off the plastic film 1 after transferring the metal film 2 to the substrate 4, and the plastic film 1 is permanently deformed or cracked like a glass template. There is no fear of it. In addition, large-sized plastic film 1
It is also easy to form the metal film 2 on the substrate and transfer it to a plurality of substrates sequentially or simultaneously. Furthermore, since the plastic film 1 is much cheaper than the glass template in terms of material cost, the manufacturing cost of the reflecting mirror can be greatly reduced in terms of both material cost and manufacturing process.

【0025】なお、図4の(a)に示すように接着剤3
を滴下した基板4の表面に反射膜フィルム積層体10の
金属膜2を接着するとき、反射膜フィルム積層体10に
高い表面精度を有する高剛性の押圧部材であるブロック
板5を当てがい、これを図4の(b)に示すように反射
膜フィルム積層体10とともに基板4に押圧すれば、基
板4に転写される金属膜2の表面精度を大幅に向上させ
ることが容易である。特に、図2および図3に示すよう
な曲面状の基板14や溝形の基板24の場合はこれらの
表面14a,24aの逆形状を有するブロック板を当て
がうことが不可欠である。
As shown in FIG. 4A, the adhesive 3
When the metal film 2 of the reflective film laminate 10 is adhered to the surface of the substrate 4 onto which the liquid crystal has been dropped, a block plate 5 which is a highly rigid pressing member having high surface accuracy is applied to the reflective film laminate 10, and 4 is pressed against the substrate 4 together with the reflective film laminate 10 as shown in FIG. 4B, it is easy to significantly improve the surface accuracy of the metal film 2 transferred to the substrate 4. In particular, in the case of the curved substrate 14 and the grooved substrate 24 as shown in FIGS. 2 and 3, it is essential to apply a block plate having an inverted shape of the surfaces 14a and 24a.

【0026】また、ブロック板5とともに、あるいはこ
れを用いる替わりに、図5の(a)に示すように、反射
膜フィルム積層体10の両端を一対のクランプ6a,6
bに保持させ、両クランプ6a,6bを互に逆向きに移
動させることで反射膜フィルム積層体10に所定の軸方
向のテンションをかけてもよい。また、クランプ6a,
6bの替わりに、図5の(b)に示すように、複数の押
圧ロール7a,7bを用いて反射膜フィルム積層体10
にテンションをかけてもよい。なお、クランプ6a,6
bと同様のクランプを用いて前記軸方向に直交する軸方
向のテンションを付加するとより一層効果的であること
はいうまでもない。
In addition to the block plate 5 or instead of using the block plate 5, as shown in FIG. 5 (a), a pair of clamps 6a, 6 are provided at both ends of the reflection film laminate 10.
Alternatively, a predetermined axial tension may be applied to the reflective film laminated body 10 by holding the clamp 6b and moving the clamps 6a and 6b in opposite directions. In addition, the clamp 6a,
Instead of 6b, as shown in FIG. 5 (b), a plurality of pressure rolls 7a and 7b are used to form the reflection film laminate 10
You may apply tension to. The clamps 6a, 6
Needless to say, it is even more effective to apply tension in the axial direction orthogonal to the axial direction using a clamp similar to b.

【0027】さらには、図6に示すように、長尺のプラ
スチックフィルム41の表面全体に反射膜である金属膜
42を成膜して長尺の反射膜フィルム積層体40を製作
し、これを供給ロール48aに巻取ったうえで巻取ロー
ル48bと複数の押圧ロール48cとコンベア49を有
する連続転写装置に搬送し、巻取ロール48bによって
反射膜フィルム積層体40を供給ロール48aから連続
的に巻きもどしながら、コンベア49によって連続的に
供給される複数の基板44のそれぞれの表面に接着剤4
3を滴下し、これに反射膜フィルム積層体40を各押圧
ロール48cによって押圧し、反射膜フィルム積層体4
0の金属膜42を各基板44の表面に転写すれば、各反
射鏡50の製造時間が一層大幅に短縮できるうえに、装
置の自動化や高速化が促進できる。
Further, as shown in FIG. 6, a metal film 42, which is a reflection film, is formed on the entire surface of a long plastic film 41 to produce a long reflection film laminate 40, which is manufactured. After being wound on the supply roll 48a, it is conveyed to a continuous transfer device having a winding roll 48b, a plurality of pressing rolls 48c and a conveyor 49, and the reflection film laminate 40 is continuously fed from the supply roll 48a by the winding roll 48b. While unwinding, the adhesive 4 is applied to each surface of the plurality of substrates 44 continuously supplied by the conveyor 49.
3 was dropped, and the reflection film laminate 40 was pressed by the pressing rolls 48c to the reflection film laminate 4
If the 0 metal film 42 is transferred to the surface of each substrate 44, the manufacturing time of each reflecting mirror 50 can be further shortened, and the automation and speedup of the apparatus can be promoted.

【0028】次に本実施例の具体例を説明する。Next, a specific example of this embodiment will be described.

【0029】第1具体例 厚さ25μmのポリエステルフィルム(市販のもの)の
表面に膜厚略150nmのアルミニウムの金属膜を真空
蒸着した。次いで、25×90mmの平面部分を有する
L字形プレス曲げ鋼板にエポキシ系接着剤(セメダイン
製1565)約300mgを滴下したうえで、前記金属
膜を蒸着したポリエステルフィルムを押しつけて金属膜
を転写し、60℃で3時間加熱して接着剤を硬化させた
のちに、ポリエステルフィルムのみを剥して平面反射鏡
を作製した。該平面反射鏡の反射率を調べたところ、波
長450nmと700nmにおける反射率はそれぞれ6
8%、72%であり、また、45℃−90%の高温高湿
槽に500時間放置する耐環境テストを行った後も反射
率が低下することなく、高性能でしかも信頼性にすぐれ
た反射鏡であることが判明した。
First Example A metal film of aluminum having a thickness of about 150 nm was vacuum-deposited on the surface of a polyester film (commercially available) having a thickness of 25 μm. Next, about 300 mg of an epoxy adhesive (1565 made by Cemedine) was dropped on an L-shaped press-bending steel plate having a flat portion of 25 × 90 mm, and then the polyester film deposited with the metal film was pressed to transfer the metal film, After heating the adhesive at 60 ° C. for 3 hours to cure the adhesive, only the polyester film was peeled off to produce a flat reflecting mirror. When the reflectance of the plane reflecting mirror was examined, the reflectance at wavelengths of 450 nm and 700 nm was 6 respectively.
It is 8% and 72%, and even after the environment resistance test of leaving it in a high temperature and high humidity chamber of 45 ° C-90% for 500 hours, the reflectance does not decrease, and it has high performance and excellent reliability. It turned out to be a reflector.

【0030】第2具体例 第1具体例と同様のポリエステルフィルムに同様の金属
膜を成膜し、これを同様の鋼板に転写するときに、表面
を光学研磨した25×90×30(高さ)mmの青板ガ
ラスのブロック板をポリエステルフィルムの裏面に当て
がった。得られた平面反射鏡の反射率を調べたところ、
波長450nmと70nmにおける反射率はそれぞれ7
2%、76%であり、ブロック板を用いることで反射率
が大幅向上することが実証された。なお、前述と同様の
耐環境テスト後も反射率の低下は認められなかった。
Second Specific Example When a similar metal film was formed on the same polyester film as the first specific example and transferred to a similar steel plate, the surface was optically polished to 25 × 90 × 30 (height). ) Mm blue glazing block was applied to the back of the polyester film. When the reflectance of the obtained flat reflecting mirror was examined,
The reflectance at wavelengths of 450 nm and 70 nm is 7 each
It was 2% and 76%, respectively, and it was proved that the reflectance was significantly improved by using the block plate. No decrease in reflectance was observed even after the same environment resistance test as described above.

【0031】第3具体例 厚さ15μmのポリプロピレンフィルム(市販のもの)
の表面に膜厚略100nmの銅の金属膜を真空蒸着し
た。次いで、50×50mmの平面部を有する厚さ3m
mのアクリル板にエポキシ系接着剤(住友3M製DP1
00)約180mgを滴下したうえで、前記金属膜を蒸
着したポリプロピレンフィルムを押しつけて金属膜を転
写し、常温で30分放置して接着剤を硬化させたのちに
ポリプロピレンフィルムのみを剥して平面反射鏡を作製
した。該平面反射鏡に波長780nmの半導体レーザ光
を照射して反射率を調べたところ、反射率は70%であ
り、また、前述と同様の耐環境テスト後も反射率が低下
することなく、高性能で信頼性のすぐれた反射鏡である
ことが判明した。
Third Embodiment Polypropylene film having a thickness of 15 μm (commercially available)
A copper metal film having a thickness of about 100 nm was vacuum-deposited on the surface of the. Next, a thickness of 3 m with a flat portion of 50 × 50 mm
m acrylic board with epoxy adhesive (Sumitomo 3M DP1
00) After dropping about 180 mg, press the polypropylene film on which the metal film is deposited to transfer the metal film, leave it at room temperature for 30 minutes to cure the adhesive, and then peel off only the polypropylene film to perform plane reflection I made a mirror. When the reflectivity was examined by irradiating the plane reflecting mirror with a semiconductor laser beam having a wavelength of 780 nm, the reflectivity was 70%, and the reflectivity did not decrease even after the environment resistance test similar to that described above. It turned out to be a reflector with excellent performance and reliability.

【0032】[0032]

【発明の効果】本発明は上述のように構成されているの
で、以下に記載するような効果を奏する。
Since the present invention is constructed as described above, it has the following effects.

【0033】材料費を低減しかつ製造時間の短縮や製造
工程の自動化を促進することで、反射鏡の製造コストを
大幅に低減できる。
By reducing the material cost, shortening the manufacturing time, and promoting automation of the manufacturing process, the manufacturing cost of the reflecting mirror can be significantly reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】一実施例による反射鏡の製造工程を示すもの
で、(a)は金属膜を成膜する前のプラスチックフィル
ム、(b)は金属膜をプラスチックフィルムに成膜して
反射膜フィルム積層体を得た状態、(c)は接着剤を滴
下した基板とこれに押しつける前の反射膜フィルム積層
体、(d)は基板に反射膜フィルム積層体を押しつけた
状態、(e)はプラスチックフィルムを剥すところ、
(f)は得られた反射鏡をそれぞれ示す模式断面図であ
る。
1A and 1B show a manufacturing process of a reflecting mirror according to an embodiment, in which FIG. 1A is a plastic film before a metal film is formed, and FIG. 1B is a reflective film in which a metal film is formed on a plastic film. A state in which a laminated body is obtained, (c) a substrate on which an adhesive is dropped and a reflective film laminated body before being pressed against the substrate, (d) a state in which the reflective film laminated body is pressed against the substrate, and (e) is plastic When peeling the film,
(F) is a schematic cross-sectional view showing each of the obtained reflecting mirrors.

【図2】反射鏡の基板が曲面状の表面を有する場合を示
す斜視図である。
FIG. 2 is a perspective view showing a case where a substrate of a reflecting mirror has a curved surface.

【図3】反射鏡の基板が溝形の表面を有する場合を示す
斜視図である。
FIG. 3 is a perspective view showing a case where the substrate of the reflecting mirror has a groove-shaped surface.

【図4】反射膜フィルム積層体を基板に押しつけるとき
にブロック板を用いる場合を示すもので、(a)は反射
膜フィルム積層体を基板に押しつける前、(b)は反射
膜フィルム積層体を基板に押しつけた状態をそれぞれ示
す模式断面図である。
FIG. 4 shows a case where a block plate is used to press the reflection film laminate to the substrate, (a) before pressing the reflection film laminate to the substrate, and (b) showing the reflection film laminate. It is a schematic cross section which respectively shows the state pressed on the board | substrate.

【図5】反射膜フィルム積層体を基板に押しつけるとき
にクランプまたは押圧ロールによって反射膜フィルム積
層体にテンションをかける場合を示すもので、(a)は
クランプを用いる場合、(b)は押圧ロールを用いる場
合をそれぞれ示す模式断面図である。
FIG. 5 shows a case where a tension is applied to a reflective film laminate by a clamp or a pressing roll when the reflective film laminate is pressed against a substrate, where (a) is a clamp and (b) is a press roll. 3A and 3B are schematic cross-sectional views each showing a case of using.

【図6】複数の基板に連続的に金属膜を転写する連続転
写装置を説明する説明図である。
FIG. 6 is an explanatory diagram illustrating a continuous transfer device that continuously transfers a metal film to a plurality of substrates.

【図7】従来例による反射鏡の製造工程を示すもので、
(a)は型板に金属膜を成膜した状態、(b)は接着剤
を滴下した基板とこれに押しつける前の型板、(c)は
基板に型板を押しつけた状態、(d)は型板を剥すとこ
ろ、(e)は得られた反射鏡をそれぞれ示す模式断面図
である。
FIG. 7 shows a manufacturing process of a conventional reflecting mirror,
(A) is a state in which a metal film is formed on the template, (b) is a substrate on which an adhesive is dropped and the template before pressing it, (c) is a state in which the template is pressed against the substrate, (d) FIG. 3E is a schematic cross-sectional view showing the reflecting mirror obtained when the template is peeled off.

【符号の説明】[Explanation of symbols]

1,41 プラスチックフィルム 2,42 金属膜 3,43 接着剤 4,14,24,44 基板 5 ブロック板 6a,6b クランプ 7a,7b,48c 押圧ロール 10,40 反射膜フィルム積層体 20,50 反射鏡 48a 供給ロール 48b 巻取ロール 49 コンベア 1,41 Plastic film 2,42 Metal film 3,43 Adhesive 4,14,24,44 Substrate 5 Block plate 6a, 6b Clamp 7a, 7b, 48c Pressure roll 10,40 Reflective film laminated body 20,50 Reflector 48a Supply roll 48b Winding roll 49 Conveyor

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 プラスチックフィルムの表面に反射膜を
成膜して反射膜フィルム積層体を製作する工程と、製作
された反射膜フィルム積層体の反射膜を基板に転写する
工程を有することを特徴とする反射鏡の製造方法。
1. A method comprising the steps of forming a reflective film on the surface of a plastic film to produce a reflective film laminate, and transferring the produced reflective film of the reflective film laminate to a substrate. And a method for manufacturing a reflecting mirror.
【請求項2】 プラスチックフィルムの表面に反射膜を
成膜して反射膜フィルム積層体を製作し該反射膜フィル
ム積層体を巻取る工程と、巻取られた反射膜フィルム積
層体を巻きもどす工程と、巻きもどされた反射膜フィル
ム積層体の反射膜を基板に転写する工程を有することを
特徴とする反射鏡の製造方法。
2. A step of forming a reflective film on the surface of a plastic film to produce a reflective film film laminate, winding the reflective film laminate, and a step of rewinding the wound reflective film laminate. And a step of transferring the rewound film of the unwound rewound film laminate to a substrate.
【請求項3】 プラスチックフィルムの表面粗さRma
xが0.05μm以下であることを特徴とする請求項1
または2記載の反射鏡の製造方法。
3. Surface roughness Rma of plastic film
2. x is 0.05 μm or less.
Alternatively, the method of manufacturing the reflecting mirror according to the item 2.
【請求項4】 反射膜フィルム積層体の反射膜を接着剤
を介して基板に転写することを特徴とする請求項1ない
し3いずれか1項記載の反射鏡の製造方法。
4. The method of manufacturing a reflecting mirror according to claim 1, wherein the reflecting film of the reflecting film film laminate is transferred onto a substrate via an adhesive.
【請求項5】 反射膜フィルム積層体の反射膜を基板に
転写するときに、高い表面精度を有する押圧部材を前記
反射膜フィルム積層体に当てがうことを特徴とする請求
項1ないし4いずれか1項記載の反射鏡の製造方法。
5. The pressing member having high surface accuracy is applied to the reflective film laminated body when transferring the reflective film of the reflective film laminated body to the substrate. A method for manufacturing a reflecting mirror according to item 1.
【請求項6】 反射膜フィルム積層体の反射膜を基板に
転写するときに、前記反射膜フィルム積層体にテンショ
ンをかけることを特徴とする請求項1ないし5いずれか
1項記載の反射鏡の製造方法。
6. The reflecting mirror according to claim 1, wherein tension is applied to the reflection film laminate when the reflection film of the reflection film laminate is transferred to a substrate. Production method.
【請求項7】 反射膜フィルム積層体の反射膜を複数の
基板に逐次または同時に転写することを特徴とする請求
項1ないし6いずれか1項記載の反射鏡の製造方法。
7. The method for producing a reflecting mirror according to claim 1, wherein the reflecting film of the reflecting film film laminate is transferred onto a plurality of substrates successively or simultaneously.
JP4967694A 1994-02-23 1994-02-23 Production of reflection mirror Pending JPH07234307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4967694A JPH07234307A (en) 1994-02-23 1994-02-23 Production of reflection mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4967694A JPH07234307A (en) 1994-02-23 1994-02-23 Production of reflection mirror

Publications (1)

Publication Number Publication Date
JPH07234307A true JPH07234307A (en) 1995-09-05

Family

ID=12837784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4967694A Pending JPH07234307A (en) 1994-02-23 1994-02-23 Production of reflection mirror

Country Status (1)

Country Link
JP (1) JPH07234307A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10148705A (en) * 1996-11-21 1998-06-02 Hitachi Chem Co Ltd Antifog treatment
JP2008304615A (en) * 2007-06-06 2008-12-18 Hitachi Cable Ltd Optical waveguide with mirror and method of manufacturing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10148705A (en) * 1996-11-21 1998-06-02 Hitachi Chem Co Ltd Antifog treatment
JP2008304615A (en) * 2007-06-06 2008-12-18 Hitachi Cable Ltd Optical waveguide with mirror and method of manufacturing the same

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