JP3070084B2 - Polishing method of optical glass - Google Patents

Polishing method of optical glass

Info

Publication number
JP3070084B2
JP3070084B2 JP2259267A JP25926790A JP3070084B2 JP 3070084 B2 JP3070084 B2 JP 3070084B2 JP 2259267 A JP2259267 A JP 2259267A JP 25926790 A JP25926790 A JP 25926790A JP 3070084 B2 JP3070084 B2 JP 3070084B2
Authority
JP
Japan
Prior art keywords
polishing
optical glass
attached
polished
dish
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2259267A
Other languages
Japanese (ja)
Other versions
JPH04141357A (en
Inventor
泰宏 秋山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP2259267A priority Critical patent/JP3070084B2/en
Publication of JPH04141357A publication Critical patent/JPH04141357A/en
Application granted granted Critical
Publication of JP3070084B2 publication Critical patent/JP3070084B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、両面をピッチ研磨する光学ガラスの研磨方
法に関し、特にレーザミラー等の平行度,偏心度が高精
度な光学ガラスの研磨方法に関する。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for polishing an optical glass in which both sides are pitch-polished, and more particularly to a method for polishing an optical glass having a high degree of parallelism and eccentricity of a laser mirror or the like. .

〔従来の技術〕[Conventional technology]

従来、両面をピッチ研磨する光学ガラスの研磨方法
は、まず光学ガラスを貼付研磨皿に貼付ロウを用いて接
着固定し、光学ガラスの片面を研磨材を用いて研磨し、
その後、第6図に示すように貼付研磨皿から光学ガラス
13を個々に取外して、その研磨された片面13aを上向き
にして吸付皿12上に個々に並べ、複数の光学ガラス13を
別の貼付研磨皿14に貼付ロウ15により接着固定した後、
残る片面を研磨していた。
Conventionally, the optical glass polishing method of polishing both sides pitch, the optical glass is first adhered and fixed using a wax attached to a polishing dish, and one side of the optical glass is polished using an abrasive,
Then, as shown in FIG.
13 are individually removed, the polished one side 13a is arranged on the suction tray 12 with the one side 13a facing upward, and a plurality of optical glasses 13 are bonded and fixed to another bonding polishing plate 14 by a bonding wax 15,
The other side was polished.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

この従来の研磨方法では、片面研磨後、光学ガラスを
1個1個ずつ貼付研磨皿から取外し、その研磨面に傷が
付かないように取扱いに注意しながら洗浄しなければな
らず、また、研磨皿から一度取外すため、貼付研磨皿の
貼付位置による角度,肉厚の違いが生じてしまうため、
平行度,偏心度の精度を上げることが困難であった。
In this conventional polishing method, after one-side polishing, the optical glass must be removed one by one from the polishing dish and carefully washed so as not to scratch the polished surface. Since it is once removed from the plate, the difference in the angle and wall thickness depending on the position of the attached polishing plate will occur.
It was difficult to improve the accuracy of the parallelism and eccentricity.

また、光学ガラスを個々に剥がして再度光学ガラスの
貼付けを行うために時間がかかり、かつ、工程が多いた
めに、人為的な取扱い傷が増えるという問題点があっ
た。
In addition, there is a problem in that it takes time to peel off the optical glass individually and attach the optical glass again, and there are many steps, so that there is a problem that artificial handling scratches increase.

本発明の目的は研磨工程を短縮した光学ガラスの研磨
方法を提供することにある。
An object of the present invention is to provide a method for polishing optical glass in which the polishing step is shortened.

〔課題を解決するための手段〕[Means for solving the problem]

前記目的を達成するため、本発明に係る光学ガラスの
研磨方法においては、第1の研磨工程と、移替工程と、
第2の研磨工程とを有し、光学ガラスを片面ずつ研磨す
る光学ガラスの研磨方法であって、 第1の研磨工程は、光学ガラスを第1の貼付研磨皿に
貼付ロウで接着固定して該光学ガラスの片面を研磨する
工程であり、 移替工程は、光学ガラスを第1の貼付研磨皿に接着固
定した状態のまま光学ガラスの研磨された片面を第2の
貼付研磨皿に貼付ロウにより接着固定し、第1の貼付研
磨皿から光学ガラスを剥離する工程であり、 第2の研磨工程は、第2の貼付研磨皿に接着固定され
た光学ガラスの研磨されていない他面を研磨するもので
ある。
In order to achieve the above object, in the method for polishing an optical glass according to the present invention, a first polishing step, a transfer step,
And a second polishing step, wherein the optical glass is polished one side at a time. The first polishing step is to fix the optical glass to a first pasting polishing plate with an adhesive wax. The transfer step is a step of polishing one side of the optical glass while adhering and fixing the optical glass to the first bonded polishing dish to a second bonded polishing dish. Is a step of peeling off the optical glass from the first attached polishing dish, and the second polishing step is a step of polishing the other unpolished surface of the optical glass adhered and fixed to the second attached polishing dish. Is what you do.

〔作用〕[Action]

複数の光学ガラスを貼付研磨皿に接着固定したまま別
の貼付研磨皿に接着固定し、一方の貼付研磨皿を光学ガ
ラスから剥離した後に、次の研磨工程を実施する。した
がって、光学ガラスを個々に剥がして別の貼付研磨皿に
移替える工程が省略されることとなる。
While the plurality of optical glasses are adhered and fixed to the attached polishing plate, they are adhered and fixed to another attached polishing plate, and one of the attached polishing plates is peeled off from the optical glass, and then the next polishing step is performed. Therefore, the step of individually peeling off the optical glass and transferring it to another affixed polishing dish is omitted.

〔実施例〕〔Example〕

以下、本発明の実施例を図により説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(実施例1) 第1図,第2図は、本発明の実施例1を説明するため
の断面図である。
First Embodiment FIGS. 1 and 2 are cross-sectional views for explaining a first embodiment of the present invention.

本実施例は、平行平板状の光学ガラスを研磨する場合
に適用したものである。すなわち、 図において、複数の光学ガラス1を貼付研磨皿4の平
坦面4aに貼 付ロウ2aにより貼付け、光学ガラス1の片面1aを研磨材
を用いて研磨する。
The present embodiment is applied to a case where a parallel plate-shaped optical glass is polished. That is, in the drawing, a plurality of optical glasses 1 are attached to a flat surface 4a of an attaching polishing plate 4 with an attaching wax 2a, and one side 1a of the optical glass 1 is polished using an abrasive.

片面研磨終了後、第1図に示すように複数の光学ガラ
ス1を第1の貼付研磨皿4に貼付たまま、光学ガラス1
の研磨された片面1aを上に向けてセットする。一方、第
2の貼付研磨皿3の下面平坦面3aに貼付ロウ2bを塗布
し、第1の貼付研磨皿4と第2の貼付研磨皿3とを平行
な姿勢関係に保ち、第2の貼付研磨皿3の下面平坦面3a
に塗布された貼付ロウ2bを、第1の貼付研磨皿4上の光
学ガラス1の研磨された片面1aに押当てて、光学ガラス
1の片面1aを第2の貼付研磨皿3の下面平坦面3aに貼付
ロウ2bにより貼付ける。この状態では、光学ガラス1の
両面がそれぞれ貼付研磨皿3,4に貼付けられている。
After the one-side polishing is completed, the optical glass 1 is kept affixed to the first affixing polishing dish 4 as shown in FIG.
Is set with the polished single side 1a facing upward. On the other hand, an adhesive wax 2b is applied to the lower flat surface 3a of the second adhesive polishing dish 3, and the first adhesive polishing dish 4 and the second adhesive polishing dish 3 are maintained in a parallel posture relationship, and the second adhesive polishing dish 3 Lower flat surface 3a of polishing dish 3
Is pressed against the polished one side 1a of the optical glass 1 on the first pasting and polishing dish 4, and the one side 1a of the optical glass 1 is flat on the lower surface of the second pasting and polishing dish 3. Affix to 3a with the wax 2b. In this state, both surfaces of the optical glass 1 are attached to the attached polishing plates 3 and 4, respectively.

次に、第2図に示すように、第1の貼付研磨皿4の貼
付ロウ2aを、0℃以下に冷却された冷媒液5、例えばメ
タノールに浸漬し、貼付ロウ2aを光学ガラス1の研磨さ
れていない片面1aから剥離させる。これにより、光学ガ
ラス1は、第1の貼付研磨皿4から第2の貼付研磨皿3
に移替えられ、研磨されていない片面1bが露出すること
となる。
Next, as shown in FIG. 2, the adhesive wax 2a of the first adhesive polishing dish 4 is immersed in a coolant liquid 5 cooled to 0 ° C. or lower, for example, methanol, and the adhesive wax 2a is polished for the optical glass 1. It is peeled off from the one side 1a which is not performed. As a result, the optical glass 1 is moved from the first attached polishing dish 4 to the second attached polishing dish 3
And the unpolished one side 1b is exposed.

次いで、光学ガラス1を第2の貼付研磨皿3に貼付け
たまま、光学ガラス1の残りの片面1bを研磨材により研
磨する。この場合、光学ガラス1の片面1bに貼付いてい
る貼付ロウ2aは、その片面1bを研磨する際に削られてし
まうため、洗浄する必要はない。
Next, the other side 1b of the optical glass 1 is polished with an abrasive while the optical glass 1 is adhered to the second attaching polishing plate 3. In this case, the attached wax 2a attached to the one surface 1b of the optical glass 1 is shaved when the one surface 1b is polished, and thus does not need to be washed.

本実施例によれば、複数の光学ガラス1を個々に剥が
して移替えることなく、一の貼付研磨皿に貼付けられた
まま別の貼付研磨皿に貼付けて同時に移替えるため、光
学ガラスの貼付位置に誤差が生じることがなく、貼付位
置の誤差による角度,肉厚の違いを低減でき、かつ平行
度を高精度に仕上げることが可能となる。
According to this embodiment, a plurality of optical glasses 1 are not individually peeled and transferred, but are attached to one attached polishing dish and attached to another attached polishing dish and transferred simultaneously. No error occurs, and a difference in angle and thickness due to an error in the attaching position can be reduced, and the parallelism can be finished with high accuracy.

(実施例2) 第3図,第4図は本発明の実施例2を説明するための
断面図である。
Embodiment 2 FIGS. 3 and 4 are cross-sectional views for explaining Embodiment 2 of the present invention.

本実施例は、片面が凸状で、反対の片面が凹状である
弯曲状光学ガラスを研磨する場合に適用したものであ
る。すなわち、 図において、弯曲状光学ガラス6を第1の貼付研磨皿
9の凸状弯曲面9aに貼付ロウ7aにより貼付け、光学ガラ
ス6の片面6aを凸状に研磨する。
The present embodiment is applied to a case where a curved optical glass having one surface convex and the other surface concave is polished. That is, in the figure, the curved optical glass 6 is adhered to the convex curved surface 9a of the first attaching / polishing dish 9 by the attaching wax 7a, and one side 6a of the optical glass 6 is polished in a convex shape.

片面研磨終了後、第3図に示すように光学ガラス6を
第1の貼付研磨皿9に貼付けたまま、光学ガラス6の研
磨された片面6aを上に向けてセットする。一方、第2の
貼付研磨皿8の凹状下面弯曲面8aに貼付ロウ7bを塗布
し、第1の貼付研磨皿9と第2の貼付研磨皿8との凹凸
弯曲面9a,8aの曲率中心を一致させて両弯曲面8a,9aを平
行な姿勢関係に保ち、第2の貼付研磨皿8の凹状下面弯
曲面8aに塗布された貼付ロウ7bを、第1の貼付研磨皿9
上の光学ガラス6の研磨された片面6aに押当てて、光学
ガラス6の片面6aを第2の貼付研磨皿8の凹状下面弯曲
面8aに貼付ロウ7bにより貼付ける。この状態では、光学
ガラス6の両面がそれぞれ貼付研磨皿8,9に貼付けられ
ている。
After the one-side polishing, the optical glass 6 is set with the polished one side 6a facing upward while the optical glass 6 is stuck on the first sticking polishing dish 9 as shown in FIG. On the other hand, an adhesive wax 7b is applied to the concave lower curved surface 8a of the second attached polishing dish 8, and the curvature centers of the uneven curved surfaces 9a, 8a of the first attached polishing dish 9 and the second attached polishing dish 8 are adjusted. The two curved surfaces 8a, 9a are kept in a parallel posture so as to be in parallel with each other, and the adhesive wax 7b applied to the concave lower curved surface 8a of the second adhesive polishing plate 8 is removed from the first adhesive polishing plate 9.
The upper surface 6a of the optical glass 6 is pressed against the polished one surface 6a, and the one surface 6a of the optical glass 6 is affixed to the concave lower curved surface 8a of the second affixing polishing dish 8 with an adhesive wax 7b. In this state, both surfaces of the optical glass 6 are attached to the attached polishing plates 8, 9, respectively.

次に、第4図に示すように、第1の貼付研磨皿9の貼
付ロウ7aを、0℃以下に冷却された冷媒液10、例えばメ
タノールに浸漬し、貼付ロウ7aを光学ガラス6の研磨さ
れていない片面6bから剥離させる。これにより、光学ガ
ラス6は、第1の貼付研磨皿9から第2の貼付研磨皿8
に移替えられ、研磨されていない片面6bが露出すること
となる。
Next, as shown in FIG. 4, the adhesive wax 7a of the first adhesive polishing dish 9 is immersed in a coolant liquid 10 cooled to 0 ° C. or less, for example, methanol, and the adhesive wax 7a is polished for the optical glass 6. It is peeled off from the one side 6b that has not been subjected to. As a result, the optical glass 6 is moved from the first bonded polishing dish 9 to the second bonded polishing dish 8.
And the unpolished one side 6b is exposed.

次いで、光学ガラス6を第2の貼付研磨皿8に貼付け
たまま、光学ガラス6の残りの片面6bを研磨材により研
磨する。この場合、光学ガラス6の片面6bに貼付いてい
る貼付ロウ7aは、その片面6bを研磨する際に削られてし
まうため、洗浄する必要はない。
Next, with the optical glass 6 still attached to the second attaching polishing dish 8, the remaining one surface 6b of the optical glass 6 is polished with an abrasive. In this case, the attached wax 7a attached to the one surface 6b of the optical glass 6 is shaved when the one surface 6b is polished, and thus does not need to be washed.

本実施例でも、実施例1と同様の効果を有する。 This embodiment also has the same effects as the first embodiment.

なお、実施例1において、貼付研磨皿同士を向き合せ
に配置する際、第5図に示すように高さ合せ治具11,11
を使用することにより、高精度に、かつ簡易に位置出し
を行うことができる。また、実施例2においても、貼付
研磨皿同士の向き合せ時に第5図に示す治具と類似した
治具を使用することにより、同様の効果を得ることがで
きる。
In addition, in Example 1, when arranging the attached polishing plates face to face, as shown in FIG.
By using, positioning can be performed with high accuracy and easily. Also in the second embodiment, the same effect can be obtained by using a jig similar to the jig shown in FIG. 5 when facing the attached polishing plates.

〔発明の効果〕〔The invention's effect〕

以上説明したように本発明によれば、複数の光学ガラ
スを個々に剥がして移替えることなく、同時に別の貼付
研磨皿に移替えるため、光学ガラスの取付位置に誤差が
生じることがなく、貼付位置の誤差による角度,肉厚の
違いを低減でき、かつ平行度,偏心度が高精度な光学ガ
ラスを得ることができる。さらに、研磨工程を短縮する
ことにより、加工時間を削減できるとともに、人為的な
取扱い傷を低減できる効果を有する。
As described above, according to the present invention, a plurality of optical glasses are not individually peeled and transferred, and simultaneously transferred to another bonded polishing plate, so that no error occurs in the mounting position of the optical glass, and the bonded glass is attached. It is possible to reduce the difference in angle and wall thickness due to the position error, and to obtain an optical glass with high parallelism and eccentricity. Further, by shortening the polishing step, it is possible to reduce the processing time and to reduce the number of artificial handling scratches.

【図面の簡単な説明】[Brief description of the drawings]

第1図は、本発明の実施例1を示す断面図、第2図は、
平行平板状光学ガラスの移替工程を示す断面図、第3図
は、本発明の実施例2を示す断面図、第4図は、弯曲状
光学ガラスの移替工程を示す断面図、第5図は、治具を
使用した平行平板状光学ガラスの移替工程を示す断面
図、第6図は、従来例を示す断面図である。 1,6……光学ガラス、2a,2b,7a,7b……貼付ロウ 3,4,8,9……貼付研磨皿、5,10……冷媒液
FIG. 1 is a sectional view showing a first embodiment of the present invention, and FIG.
FIG. 3 is a cross-sectional view showing a step of transferring a parallel plate-shaped optical glass, FIG. 3 is a cross-sectional view showing a second embodiment of the present invention, FIG. FIG. 6 is a cross-sectional view showing a step of transferring a parallel plate optical glass using a jig, and FIG. 6 is a cross-sectional view showing a conventional example. 1,6 ... optical glass, 2a, 2b, 7a, 7b ... sticking wax 3,4,8,9 ... sticking polishing dish, 5,10 ... refrigerant liquid

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】第1の研磨工程と、移替工程と、第2の研
磨工程とを有し、光学ガラスを片面ずつ研磨する光学ガ
ラスの研磨方法であって、 第1の研磨工程は、光学ガラスを第1の貼付研磨皿に貼
付ロウで接着固定して該光学ガラスの片面を研磨する工
程であり、 移替工程は、光学ガラスを第1の貼付研磨皿に接着固定
した状態のまま光学ガラスの研磨された片面を第2の貼
付研磨皿に貼付ロウにより接着固定し、第1の貼付研磨
皿から光学ガラスを剥離する工程であり、 第2の研磨工程は、第2の貼付研磨皿に接着固定された
光学ガラスの研磨されていない他面を研磨する工程であ
ることを特徴とする光学ガラスの研磨方法。
1. An optical glass polishing method for polishing an optical glass one surface at a time, comprising a first polishing step, a transfer step, and a second polishing step, wherein the first polishing step comprises: A step of polishing and fixing one side of the optical glass by bonding and fixing the optical glass to a first bonding and polishing plate with a bonding wax; and in the transfer step, the optical glass is bonded and fixed to the first bonding and polishing plate. One side of the polished optical glass is adhered and fixed to a second pasting and polishing dish with a wax, and the optical glass is peeled off from the first pasting and polishing dish. The second polishing step is a second pasting and polishing step. A method of polishing an optical glass, characterized by a step of polishing the other unpolished surface of the optical glass adhered and fixed to a plate.
JP2259267A 1990-09-28 1990-09-28 Polishing method of optical glass Expired - Fee Related JP3070084B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2259267A JP3070084B2 (en) 1990-09-28 1990-09-28 Polishing method of optical glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2259267A JP3070084B2 (en) 1990-09-28 1990-09-28 Polishing method of optical glass

Publications (2)

Publication Number Publication Date
JPH04141357A JPH04141357A (en) 1992-05-14
JP3070084B2 true JP3070084B2 (en) 2000-07-24

Family

ID=17331730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2259267A Expired - Fee Related JP3070084B2 (en) 1990-09-28 1990-09-28 Polishing method of optical glass

Country Status (1)

Country Link
JP (1) JP3070084B2 (en)

Also Published As

Publication number Publication date
JPH04141357A (en) 1992-05-14

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