JPH07233933A - Slurry density regulation equipment - Google Patents

Slurry density regulation equipment

Info

Publication number
JPH07233933A
JPH07233933A JP2798694A JP2798694A JPH07233933A JP H07233933 A JPH07233933 A JP H07233933A JP 2798694 A JP2798694 A JP 2798694A JP 2798694 A JP2798694 A JP 2798694A JP H07233933 A JPH07233933 A JP H07233933A
Authority
JP
Japan
Prior art keywords
slurry
differential pressure
concentration
air
control valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2798694A
Other languages
Japanese (ja)
Inventor
Hiromi Shimoda
博巳 下田
Shuzo Watanabe
修三 渡辺
Kenji Uehigashi
憲司 上東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP2798694A priority Critical patent/JPH07233933A/en
Publication of JPH07233933A publication Critical patent/JPH07233933A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To make the density of slurry be within a desired range by regulating the amount of addition by enlarging the opening of a control valve when a difference between air pressures in two detecting tubes being inserted into a slurry tank and made to differ in the height of the lower end is larger than a set value. CONSTITUTION:There is a difference in a height H between the lower end 13 of a detecting tube 11 and the lower end 14 of a detecting tube 14, both of the tubes being inserted vertically into slurry 10 in a slurry tank 2, and small air discharge holes of the same size are bored in the lower ends 13 and 14 respectively. Air pressure lead-out tubes 16 and 17 are connected to the detecting tubes 11 and 12 respectively and air pressures in the detecting tubes 11 and 12 are led thereby to a differential pressure gage 18. In the case when a differential pressure detected by the differential pressure gage 18 is larger than a set value 20 inputted to a control device 19, the opening of a control valve 7 is enlarged, and when the differential pressure detected by the differential pressure gage 18 is smaller than the set value 20, the opening of the control valve 7 is lessened. Thereby the quantity of addition liquid to be supplied to a mixer 1 is regulated and the density of the slurry entering the slurry tank 2 is thereby regulated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、搬送中のスラリの濃度
を測定し、そのスラリの濃度を所要濃度に調節できるよ
うにしたスラリ濃度調節装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slurry concentration adjusting device capable of measuring the concentration of slurry during transportation and adjusting the concentration of the slurry to a required concentration.

【0002】[0002]

【従来の技術】スラリを搬送する場合、例えば石炭を粗
粉化あるいは微粉化してスラリにしたものをボイラに燃
料として供給する場合に、スラリ濃度が低すぎる(薄
い)と固形物が沈殿して搬送できなくなり、反対にスラ
リ濃度が高すぎる(濃い)と粘性が高くて搬送できなく
なる。また搬送先のボイラに於いても燃料として適する
スラリ濃度の範囲がある。
2. Description of the Related Art When a slurry is conveyed, for example, when coal is pulverized or pulverized into a slurry and the slurry is supplied to a boiler as a fuel, if the slurry concentration is too low (thin), solid matter precipitates. If the slurry concentration is too high (dark), it becomes too viscous to be transported. Further, there is a range of slurry concentration suitable as a fuel even in the boiler to which it is transported.

【0003】このようにスラリは、固形物の種類、使用
目的によって、所望の濃度が要求される。
As described above, the slurry is required to have a desired concentration depending on the type of solid material and the purpose of use.

【0004】このため従来は、搬送中のスラリをサンプ
ル的に適宜採取してその濃度を測定し、添加液の量を調
節してスラリ濃度が所望範囲になるようにしていた。
For this reason, conventionally, the slurry being conveyed was appropriately sampled, its concentration was measured, and the amount of the additive liquid was adjusted to bring the slurry concentration into a desired range.

【0005】[0005]

【発明が解決しようとする課題】従来のようにスラリを
サンプル的に適宜採取して濃度を測定し、その濃度によ
り添加液の量を調節する方法では、測定が面倒で時間を
要するために搬送中のスラリの濃度変化に適切に対応す
ることができない欠点があった。
In the conventional method in which the slurry is appropriately sampled and the concentration is measured and the amount of the added liquid is adjusted depending on the concentration, the measurement is troublesome and time-consuming. There was a drawback that it could not respond appropriately to changes in the concentration of the slurry inside.

【0006】本発明はこのような従来の欠点を除去し、
搬送中のスラリの濃度変化を連続的に測定し、測定値に
応じて自動的に添加液の量を調節し、スラリ濃度が所望
範囲になるようにしたスラリ濃度調節装置を提供するこ
とを目的とするものである。
The present invention eliminates such conventional drawbacks,
An object of the present invention is to provide a slurry concentration adjusting device that continuously measures the concentration change of slurry during transportation and automatically adjusts the amount of the added liquid according to the measured value so that the slurry concentration falls within a desired range. It is what

【0007】[0007]

【課題を解決するための手段】本発明のスラリ濃度調節
装置は、スラリ搬送路中に接続されて設けられた混合器
及びスラリタンクと、前記混合器に制御バルブを介して
添加液を供給する添加液供給管と、下端に空気吐出孔を
有し該下端の高さを異ならせて前記スラリタンクに挿入
された2本の検出管と、該2本の検出管の上端にそれぞ
れ一定圧力の空気を供給する給気源と、前記2本の検出
管内の空気圧力の差圧を検出する差圧計と、該差圧計の
検出差圧が設定値より大きい場合には前記制御バルブの
開度を大きくし該差圧計の検出差圧が設定値より小さい
場合には前記制御バルブの開度を小さくする制御装置と
を備えたことを特徴とするものである。
SUMMARY OF THE INVENTION A slurry concentration adjusting device of the present invention supplies a liquid mixture to a mixer and a slurry tank connected to a slurry conveying path, and a control valve to the mixer. The additive liquid supply pipe, two detection pipes which have air discharge holes at the lower ends and are inserted into the slurry tank with different heights at the lower ends, and a constant pressure at the upper ends of the two detection pipes, respectively. An air supply source that supplies air, a differential pressure gauge that detects a differential pressure between air pressures in the two detection pipes, and if the differential pressure detected by the differential pressure gauge is larger than a set value, the opening degree of the control valve is changed. And a control device for increasing the opening of the control valve when the differential pressure detected by the differential pressure gauge is smaller than a set value.

【0008】[0008]

【作用】搬送中のスラリがスラリタンクに入ると、2本
の検出管の下端の高さの差に対する圧力差が差圧計で検
出され、この圧力差により制御装置でスラリの比重が計
測され濃度が求められる。その計測値に応じて制御バル
ブの開度が制御され、混合器に供給される添加液の量が
調節されて、スラリ濃度は所望範囲に保持される。
When the slurry being conveyed enters the slurry tank, the pressure difference with respect to the height difference between the lower ends of the two detection tubes is detected by the differential pressure gauge, and the specific gravity of the slurry is measured by the controller by the pressure difference, and the concentration is measured. Is required. The opening of the control valve is controlled according to the measured value, the amount of the additive liquid supplied to the mixer is adjusted, and the slurry concentration is maintained in a desired range.

【0009】[0009]

【実施例】以下、本発明の実施例を図を参照して説明す
る。
Embodiments of the present invention will now be described with reference to the drawings.

【0010】図1は本発明の一実施例の系統図であっ
て、スラリの搬送経路中には、混合器1、スラリタンク
2、スラリポンプ3が順次接続されて設けられており、
スラリ供給管4から混合器1に供給されたスラリは、混
合器1からスラリタンク2に入れられた後、スラリポン
プ3によりスラリ送出管5に送出され、目的の場所に搬
送されるようになっている。
FIG. 1 is a system diagram of an embodiment of the present invention, in which a mixer 1, a slurry tank 2 and a slurry pump 3 are sequentially connected and provided in a slurry conveying path.
The slurry supplied from the slurry supply pipe 4 to the mixer 1 is put into the slurry tank 2 from the mixer 1 and then sent to the slurry delivery pipe 5 by the slurry pump 3 to be conveyed to the intended place. ing.

【0011】混合器1には、添加液供給管6から制御バ
ルブ7を介して水等の添加液が供給されるようになって
いて、混合器1ではスラリ供給管4から供給されたスラ
リと添加液供給管6から供給された添加液とが混合され
た後、スラリタンク2に送られるようになっている。
To the mixer 1, an additive liquid such as water is supplied from an additive liquid supply pipe 6 through a control valve 7. In the mixer 1, the slurry supplied from the slurry supply pipe 4 The additive liquid supplied from the additive liquid supply pipe 6 is mixed and then sent to the slurry tank 2.

【0012】スラリタンク2内にはモータ8で回転され
る撹拌羽根9が設けてあって、スラリタンク2内のスラ
リ10を撹拌してむらのないスラリ濃度にするようにな
っている。
A stirring blade 9 rotated by a motor 8 is provided in the slurry tank 2 so as to stir the slurry 10 in the slurry tank 2 to obtain a uniform slurry concentration.

【0013】スラリタンク2のスラリ10には、2本の
検出管11,12が鉛直に挿入されている。2本の検出
管11,12は同一寸法の内径になっているが、検出管
11の下端13はスラリタンク2内のスラリ10に浅く
挿入されており、検出管12の下端14はスラリタンク
2内のスラリ10に深く挿入されていて、検出管11の
下端13と検出管12の下端14との間には、高さHの
差が与えられている。そして検出管11の下端13及び
検出管12の下端14には、同一大きさの図示しない小
さな空気吐出孔がそれぞれ穿設されている。
In the slurry 10 of the slurry tank 2, two detection tubes 11 and 12 are vertically inserted. The two detection tubes 11 and 12 have the same inner diameter, but the lower end 13 of the detection tube 11 is shallowly inserted into the slurry 10 in the slurry tank 2, and the lower end 14 of the detection tube 12 is the slurry tank 2. It is deeply inserted into the slurry 10 inside, and a difference in height H is provided between the lower end 13 of the detection pipe 11 and the lower end 14 of the detection pipe 12. The lower end 13 of the detection tube 11 and the lower end 14 of the detection tube 12 are provided with small air discharge holes (not shown) of the same size.

【0014】2本の検出管11,12の上端は、一定圧
力の空気を供給する給気弁等の給気源15に接続されて
いて、一定圧力の空気が検出管11,12の上端にそれ
ぞれ供給されるようになっている。また検出管11,1
2にはそれぞれ空気圧導出管16,17が接続されてい
て、検出管11,12内の空気圧力を差圧計18に導く
ようになっている。
The upper ends of the two detection tubes 11 and 12 are connected to an air supply source 15 such as an air supply valve for supplying air of constant pressure, and the air of constant pressure is applied to the upper ends of the detection tubes 11 and 12. Each is supplied. In addition, the detection tubes 11, 1
Air pressure lead-out pipes 16 and 17 are connected to 2 respectively, and the air pressure in the detection pipes 11 and 12 is guided to a differential pressure gauge 18.

【0015】差圧計18は、空気圧導出管16によって
導かれた検出管11内の空気圧力と空気圧導出管17に
よって導かれた検出管12内の空気圧力とから2本の検
出管11,12内の空気圧力の差圧を検出し、その検出
した差圧を、コンピュータで構成された制御装置19に
入力するようになっている。
The differential pressure gauge 18 has two detection tubes 11 and 12 based on the air pressure in the detection tube 11 guided by the air pressure derivation tube 16 and the air pressure in the detection tube 12 guided by the air pressure derivation tube 17. The differential pressure of the air pressure is detected, and the detected differential pressure is input to the control device 19 composed of a computer.

【0016】制御装置19は、添加液供給管6の途中に
設けられている制御バルブ7の開度を制御するようにな
っていて、後述するように、差圧計18の検出した差圧
が制御装置19に入力されている設定値20より大きい
場合には制御バルブ7の開度を大きくし、差圧計18の
検出した差圧が設定値20より小さい場合には制御バル
ブ7の開度を小さくする制御機能を有している。
The control device 19 controls the opening of a control valve 7 provided in the middle of the additive liquid supply pipe 6, and controls the differential pressure detected by a differential pressure gauge 18 as described later. When the set value 20 input to the device 19 is larger than the set value 20, the opening degree of the control valve 7 is increased, and when the differential pressure detected by the differential pressure gauge 18 is smaller than the set value 20, the open degree of the control valve 7 is decreased. It has a control function to operate.

【0017】次に、図1の装置の作用を説明する。Next, the operation of the apparatus shown in FIG. 1 will be described.

【0018】ボイラに燃料として供給しようとする粗粉
化あるいは微粉化した石炭等のスラリは、スラリ供給管
4から混合器1に供給され、混合器1において添加液供
給管6から制御バルブ7を介して供給される水等の添加
液と混合された後、スラリタンク2に一時的に溜められ
て撹拌羽根9により、むらのないスラリ濃度になるよう
に撹拌される。
Slurry such as coarsely or finely pulverized coal which is to be supplied to the boiler as fuel is supplied from the slurry supply pipe 4 to the mixer 1, and in the mixer 1, the additive liquid supply pipe 6 to the control valve 7 is supplied. After being mixed with an additive liquid such as water supplied through the tank, it is temporarily stored in the slurry tank 2 and stirred by the stirring blade 9 so as to obtain a uniform slurry concentration.

【0019】給気源15からは、2本の検出管11,1
2の上端に一定圧力の空気が供給され、検出管11,1
2に供給された空気はそれぞれ検出管11,12の内部
を通って、下端13,14に穿設されている同一大きさ
の図示しない小さな空気吐出孔からスラリタンク2内の
スラリ10中に吐出する。
From the air supply source 15, two detection tubes 11, 1 are provided.
Air of a constant pressure is supplied to the upper end of 2, and the detection tubes 11, 1
The air supplied to 2 passes through the inside of the detection tubes 11 and 12, respectively, and is discharged into the slurry 10 in the slurry tank 2 from a small air discharge hole (not shown) of the same size which is formed in the lower ends 13 and 14. To do.

【0020】この場合、スラリ10内の浅い位置にある
検出管11の下端13に作用するスラリ10の外圧は小
さいが、スラリ10内の深い位置にある検出管12の下
端14に作用するスラリ10の外圧は大きい圧力になっ
ている。このため、2本の検出管11,12の上端には
同一である一定圧力の空気が供給されていても、下端1
3に小さい外圧が作用している検出管11の下端13か
らは空気が吐出しやすいため、検出管11内の空気圧は
前記一定圧力からかなり低下した低い圧力となり、下端
14に6大きい外圧が作用している検出管12の下端1
4からは空気が吐出しにくいため、検出管12内の空気
圧は前記一定圧力からやや低下した程度の高い圧力が保
たれることになる。この検出管11,12内の空気圧力
の差圧は差圧計18によって検出され、制御装置19に
入力される。
In this case, the external pressure of the slurry 10 acting on the lower end 13 of the detection pipe 11 at the shallow position in the slurry 10 is small, but the slurry 10 acting on the lower end 14 of the detection pipe 12 at the deep position in the slurry 10 is small. The external pressure is high. Therefore, even if the same constant pressure air is supplied to the upper ends of the two detection tubes 11 and 12, the lower end 1
Since air is easily discharged from the lower end 13 of the detection tube 11 where a small external pressure acts on 3, the air pressure inside the detection tube 11 becomes a low pressure considerably lower than the constant pressure, and 6 large external pressure acts on the lower end 14. Lower end 1 of detecting tube 12
Since air is difficult to be discharged from No. 4, the air pressure in the detection tube 12 is maintained at a high pressure that is slightly lower than the constant pressure. The differential pressure of the air pressure in the detection pipes 11 and 12 is detected by the differential pressure gauge 18 and input to the control device 19.

【0021】この検出管11,12内の空気圧力の差圧
ΔPと、検出管11,12の下端13,14間の差の高
さHとから、スラリタンク2内のスラリ10の比重γ
は、
From the differential pressure ΔP of the air pressure in the detection tubes 11 and 12 and the height H of the difference between the lower ends 13 and 14 of the detection tubes 11 and 12, the specific gravity γ of the slurry 10 in the slurry tank 2 is obtained.
Is

【数1】γ=ΔP/H によって算出することができる。It can be calculated by γ = ΔP / H.

【0022】またスラリ10の濃度とスラリ10の比重
γとは、図2のグラフに示すように一定の関係を有して
いて、スラリ10の比重γが大きい場合はスラリ10の
濃度が濃く、スラリ10の比重γが小さい場合はスラリ
10の濃度が薄いことになる。
The concentration of the slurry 10 and the specific gravity γ of the slurry 10 have a constant relationship as shown in the graph of FIG. 2. When the specific gravity γ of the slurry 10 is large, the concentration of the slurry 10 is high. When the specific gravity γ of the slurry 10 is small, the concentration of the slurry 10 is low.

【0023】制御装置19には、図2のグラフに示すよ
うなスラリ濃度とスラリの比重との関係、及びスラリ濃
度の所望範囲が設定値20として予め入力してあり、制
御装置19は、差圧計18の検出した2本の検出管1
1,12内の差圧ΔPからスラリタンク2内のスラリ1
0の濃度を算出する。
The relationship between the slurry concentration and the specific gravity of the slurry as shown in the graph of FIG. 2 and the desired range of the slurry concentration are input as the set value 20 to the control device 19 in advance. Two detection tubes 1 detected by the pressure gauge 18
Slurry 1 in slurry tank 2 from differential pressure ΔP in 1, 12
A concentration of 0 is calculated.

【0024】そして検出管11,12内の空気圧力の差
圧ΔPが一定範囲を超えている場合には、スラリ10の
濃度が設定値20(所望範囲)よりも濃すぎる状態であ
ると判断して制御バルブ7の開度を大きくし、混合器1
に供給される添加液の量を多くして、スラリタンク2に
入るスラリ10の濃度が薄くなるようにする。
When the differential pressure ΔP of the air pressures in the detection pipes 11 and 12 exceeds a certain range, it is judged that the concentration of the slurry 10 is too thicker than the set value 20 (desired range). The opening of the control valve 7 to increase the mixer 1
The amount of the additive liquid supplied to is increased so that the concentration of the slurry 10 entering the slurry tank 2 becomes thin.

【0025】これとは反対に検出管11,12内の空気
圧力の差圧ΔPが一定範囲未満の場合には、スラリ10
の濃度が設定値20(所望範囲)よりも薄すぎる状態で
あると判断して制御バルブ7の開度を小さくし、混合器
1に供給される添加液の量を少なくして、スラリタンク
2に入るスラリ10の濃度が濃くなるようにする。
On the contrary, when the differential pressure ΔP of the air pressures in the detection tubes 11 and 12 is less than a certain range, the slurry 10 is used.
It is judged that the concentration of is too thin than the set value 20 (desired range), the opening of the control valve 7 is reduced, the amount of the additive liquid supplied to the mixer 1 is reduced, and the slurry tank 2 is reduced. The concentration of the slurry 10 that enters is thickened.

【0026】この結果、スラリタンク2内で撹拌されて
いるスラリ10の濃度は常時計測され、濃度が所望範囲
よりも濃すぎる場合には混合器1に供給される添加液の
量が多くなって、スラリタンク2に入るスラリ10の濃
度は薄くなり、濃度が所望範囲よりも薄すぎる場合には
混合器1に供給される添加液の量が少なくなって、スラ
リタンク2に入るスラリ10の濃度は濃くなり、スラリ
タンク2に入るスラリ10の濃度は所望範囲に保たれる
ように調節される。
As a result, the concentration of the slurry 10 agitated in the slurry tank 2 is constantly measured, and when the concentration is higher than the desired range, the amount of the additive liquid supplied to the mixer 1 increases. , The concentration of the slurry 10 entering the slurry tank 2 becomes thin, and when the concentration is too thin than the desired range, the amount of the additive liquid supplied to the mixer 1 becomes small and the concentration of the slurry 10 entering the slurry tank 2 becomes small. Becomes thicker and the concentration of the slurry 10 entering the slurry tank 2 is adjusted to be maintained in a desired range.

【0027】スラリタンク2内で撹拌されたスラリ10
は、スラリポンプ3によりスラリ送出管5に送出され、
目的の場所に搬送される。
The slurry 10 stirred in the slurry tank 2
Is delivered to the slurry delivery pipe 5 by the slurry pump 3,
Transported to the intended place.

【0028】[0028]

【発明の効果】本発明は、スラリタンク内のスラリ濃度
が常時計測され、計測したスラリ濃度が所望範囲よりも
濃すぎる場合には混合器に供給される添加液の量を多く
してスラリタンクに入るスラリの濃度を薄くし、スラリ
濃度が所望範囲よりも薄すぎる場合には混合器に供給さ
れる添加液の量を少なくしてスラリタンクに入るスラリ
の濃度を濃くし、スラリタンクに入るスラリの濃度を所
望範囲に保たれるように調節し、所望範囲の濃度に保た
れているスラリを連続して供給できる効果がある。
According to the present invention, the slurry concentration in the slurry tank is constantly measured, and when the measured slurry concentration is higher than the desired range, the amount of the additive liquid supplied to the mixer is increased to increase the slurry tank. The concentration of the slurry entering the slurry tank is reduced, and when the slurry concentration is too thin than the desired range, the amount of the additive liquid supplied to the mixer is reduced to increase the concentration of the slurry entering the slurry tank and then entering the slurry tank. There is an effect that the concentration of the slurry is adjusted so as to be kept in a desired range and the slurry kept in the concentration of the desired range can be continuously supplied.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の系統図である。FIG. 1 is a system diagram of an embodiment of the present invention.

【図2】スラリ濃度と比重との関係の一例を示すグラフ
である。
FIG. 2 is a graph showing an example of the relationship between slurry concentration and specific gravity.

【符号の説明】[Explanation of symbols]

1 混合器 2 スラリタンク 6 添加液供給管 7 制御バルブ 11 検出管 12 検出管 13 下端 14 下端 15 給気源 18 差圧計 19 制御装置 20 設定値 H 高さ 1 Mixer 2 Slurry tank 6 Additive liquid supply pipe 7 Control valve 11 Detection pipe 12 Detection pipe 13 Lower end 14 Lower end 15 Air supply source 18 Differential pressure gauge 19 Control device 20 Set value H Height

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 スラリ搬送路中に接続されて設けられた
混合器及びスラリタンクと、前記混合器に制御バルブを
介して添加液を供給する添加液供給管と、下端に空気吐
出孔を有し該下端の高さを異ならせて前記スラリタンク
に挿入された2本の検出管と、該2本の検出管の上端に
それぞれ一定圧力の空気を供給する給気源と、前記2本
の検出管内の空気圧力の差圧を検出する差圧計と、該差
圧計の検出差圧が設定値より大きい場合には前記制御バ
ルブの開度を大きくし該差圧計の検出差圧が設定値より
小さい場合には前記制御バルブの開度を小さくする制御
装置とを備えたことを特徴とするスラリ濃度調節装置。
1. A mixer and a slurry tank connected to a slurry conveying path, an additive liquid supply pipe for supplying an additive liquid to the mixer via a control valve, and an air discharge hole at a lower end. Then, the two detection tubes inserted into the slurry tank with different heights at the lower ends, the air supply sources for supplying air of constant pressure to the upper ends of the two detection tubes, and the two detection tubes A differential pressure gauge for detecting the differential pressure of the air pressure in the detection pipe, and when the differential pressure detected by the differential pressure gauge is larger than a set value, the opening of the control valve is increased so that the differential pressure detected by the differential pressure gauge is lower than the set value. And a controller for reducing the opening of the control valve if the opening is small.
JP2798694A 1994-02-25 1994-02-25 Slurry density regulation equipment Pending JPH07233933A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2798694A JPH07233933A (en) 1994-02-25 1994-02-25 Slurry density regulation equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2798694A JPH07233933A (en) 1994-02-25 1994-02-25 Slurry density regulation equipment

Publications (1)

Publication Number Publication Date
JPH07233933A true JPH07233933A (en) 1995-09-05

Family

ID=12236168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2798694A Pending JPH07233933A (en) 1994-02-25 1994-02-25 Slurry density regulation equipment

Country Status (1)

Country Link
JP (1) JPH07233933A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6257965B1 (en) 1998-12-24 2001-07-10 Sharp Kabushiki Kaisha Polishing liquid supply apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6257965B1 (en) 1998-12-24 2001-07-10 Sharp Kabushiki Kaisha Polishing liquid supply apparatus

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